CN204848658U - Vacuum cavity cooling device - Google Patents
Vacuum cavity cooling device Download PDFInfo
- Publication number
- CN204848658U CN204848658U CN201520431982.XU CN201520431982U CN204848658U CN 204848658 U CN204848658 U CN 204848658U CN 201520431982 U CN201520431982 U CN 201520431982U CN 204848658 U CN204848658 U CN 204848658U
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- base
- baffle plate
- plate
- water
- cooled tube
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Abstract
The utility model discloses a vacuum cavity cooling device, it is including being used for carrying out refrigerated condenser tube and support frame to the baffle, the support frame including place on the vacuum cavity bottom surface the base with set up the end plate at the base both ends, be provided with the hole for hoist that is used for hoisting cooling device on the end plate, fixed mounting are in the both sides of base respectively for two baffles, and clearance between two dogs forms concentrates the passageway of sputtering target to the glass, fixed mounting has the connecting plate that is the U font with the baffle contact on the base in the baffle outside, in the cavity that condenser tube fixed mounting formed between connecting plate and baffle, the below of base sets up and is used for preventing that the target from sputtering the protection device on the driving roller.
Description
Technical field
The utility model belongs to refrigerating unit, is specifically related to a kind of vacuum chamber refrigerating unit.
Background technology
In coated glass production unit, because the sputtering of target can produce very high temperature, so need to install refrigerating unit in plated film chamber, make by cooling to reach required temperature in plated film chamber.In traditional vacuum chamber chamber, refrigerating unit is by blocking the baffle plate of most of sputtering target material and the circulating cooling pipe for cooling baffle plate.After using for some time, the a large amount of targets to baffle plate and circulating cooling pipe sputter are needed to clean, because these two parts are directly fixed in vacuum chamber, need during cleaning first parts to be split out from vacuum chamber, make dismounting and assemble very cumbersome, and spended time is long, labour productivity has been fallen at the end.
Utility model content
For above-mentioned deficiency of the prior art, the utility model provides a kind of vacuum chamber refrigerating unit can being convenient to clean.
In order to reach foregoing invention object, the technical solution adopted in the utility model is:
There is provided a kind of vacuum chamber refrigerating unit, it comprises water-cooled tube for cooling baffle plate and bracing frame, and bracing frame comprises the base be placed on vacuum chamber bottom surface and the end plate being arranged on base two ends; End plate is provided with the erection opening for lifting refrigerating unit; Two pieces of baffle plates are fixedly mounted on the both sides of base respectively, and the gap between two pieces of blocks forms the passage of concentrated sputtering target material on glass;
Base outside baffle plate is installed with and contacts with baffle plate and web plate in U-shaped; Water-cooled tube is fixedly mounted in the cavity that formed between web plate and baffle plate; The below of base is arranged for preventing target as sputter to the protector on live roll.
The beneficial effects of the utility model are: the protector of water-cooled tube, baffle plate and protection live roll is fixedly mounted on same bracing frame by this refrigerating unit, become a black box, when need to remove to sputter on baffle plate and target on protector time, directly can take out cleaning by being fixed on parts to be cleaned on bracing frame together with bracing frame by erection opening; In order to avoid affecting production schedule while cleaning, can directly another clean bracing frame be arranged in vacuum chamber, like this, save disassembly and assembly time, improve labour productivity.
Accompanying drawing explanation
Fig. 1 is the structural representation of a vacuum chamber refrigerating unit embodiment.
Fig. 2 is the sectional view along Fig. 1 center line A-A direction.
Wherein, 1, bracing frame; 11, end plate; 111, erection opening; 12, base; 13, web plate; 14, red copper guipure; 15, supporting beam; 2, water-cooled tube; 3, glass; 4, rotary target material; 5, live roll; 6, baffle plate; 7, dividing plate.
Embodiment
Below embodiment of the present utility model is described; so that those skilled in the art understand the utility model; but should be clear; the utility model is not limited to the scope of embodiment; to those skilled in the art; as long as various change to limit and in the spirit and scope of the present utility model determined, these changes are apparent in appended claim, the utility model creation that all utilize the utility model to conceive is all at the row of protection.
The structural representation of a vacuum chamber refrigerating unit embodiment is shown with reference to figure 1, Fig. 1; As shown in Figure 1, this vacuum chamber refrigerating unit comprises water-cooled tube 2 for cooling baffle plate 6 and bracing frame 1, and bracing frame 1 comprises the base 12 be placed on vacuum chamber bottom surface and the end plate 11 being arranged on base 12 two ends; End plate 11 is provided with the erection opening 111 for lifting refrigerating unit.
Wherein, water in water-cooled tube 2 is recirculated cooling water, when carrying out water-cooled tube 2 and installing, for the ease of the layout of water-cooled tube 2 on bracing frame 1, reduce complicacy when water-cooled tube 2 is installed, the water-in of water-cooled tube 2 and water outlet are arranged on the same side of bracing frame 1.
The sectional view along Fig. 1 center line A-A direction is shown with reference to figure 2, Fig. 2.As shown in Figure 2, two pieces of baffle plates 6 are fixedly mounted on the both sides of base 12 respectively, and the gap between two pieces of blocks 6 forms concentrated sputtering target material to the passage on glass 3.After such setting, being positioned at the target that the rotary target material 4 directly over baffle plate 6 sputters out can carry out sub-fraction, a fraction of spraying to the glass 3 by this passage, ensure that the homogeneity of plated film on glass 3.
When designing, in order to most of target can be blocked, to guarantee that only having middle portion target to be concentrated is splashed on glass 3, arranges L-shaped by baffle plate 6 further at every turn.Baffle plate 6 L-shaped like this further ensures the quality of coated glass.
When carrying out plated film to glass 3, because most of target sputters on L-shaped baffle plate 6, and the temperature of the target sputtered is very high, in order to reduce the impact of high temperature on baffle plate 6 work-ing life, the base 12 outside baffle plate 6 being installed with and contacting with baffle plate 6 and web plate 13 in U-shaped; Water-cooled tube 2 is fixedly mounted in the cavity that formed between web plate 13 and baffle plate 6, and is close on water-cooled tube 2.
In coating process; part target can be splashed to the live roll 5 for transmission glass 3, in order to ensure the normal operation of live roll 5, arranges for preventing target as sputter to the protector on live roll 5 in the below of base 12; when also namely working, target is direct splashing on protector.
After refrigerating unit uses for some time; baffle plate 6 and protector can deposit a large amount of targets; in order to ensure the quality of coated glass; need regularly to clean the target on baffle plate 6 and protector; be positioned on the bracing frame 1 of vacuum chamber because baffle plate 6 and protector are fixedly mounted on, can directly by the erection opening 111 arranged, bracing frame 1 lifted out in vacuum chamber during cleaning like this.
After such setting, if when worrying cleaning refrigerating unit, affect production and carry out, can directly another clean bracing frame 1 be arranged in vacuum chamber while cleaning, like this, save disassembly and assembly time, improve labour productivity.
As shown in Figure 2, in an embodiment of the present utility model, protector comprise be positioned at live roll 5 both sides and with the supporting beam 15 that base 12 is fixed together, supporting beam 15 is installed with for preventing target as sputter to the dividing plate 7 on live roll 5; Water-cooled tube 2 is installed in the cavity formed between dividing plate 7 and supporting beam 15.
Refer again to Fig. 2, between the water-cooled tube 2 contacted with dividing plate 7 and dividing plate 7, be lined with the red copper guipure 14 eliminating gap between the two; The red copper guipure 14 eliminating gap is between the two lined with between the water-cooled tube 2 contacted with baffle plate 6 and baffle plate 6.The introducing of the red copper guipure 14 at water-cooled tube 2 place, can guarantee that the heat on baffle plate 6 and dividing plate 7 passes to water-cooled tube 2 rapidly, to reach the effect of better cooling.
Although describe in detail embodiment of the present utility model by reference to the accompanying drawings, should not be construed as the restriction of the protection domain to this patent.In the scope described by claims, the various amendment that those skilled in the art can make without creative work and distortion still belong to the protection domain of this patent.
Claims (3)
1. vacuum chamber refrigerating unit, comprising the water-cooled tube for cooling baffle plate, it is characterized in that: also comprise bracing frame, and support frame as described above comprises the base be placed on vacuum chamber bottom surface and the end plate being arranged on described base two ends; Described end plate is provided with the erection opening for lifting refrigerating unit; Two pieces of baffle plates are fixedly mounted on the both sides of base respectively, and the gap between two pieces of blocks forms the passage of concentrated sputtering target material on glass;
Base outside described baffle plate is installed with and contacts with described baffle plate and web plate in U-shaped; Described water-cooled tube is fixedly mounted in the cavity that formed between described web plate and described baffle plate; The below of described base is arranged for preventing target as sputter to the protector on live roll.
2. vacuum chamber refrigerating unit according to claim 1, it is characterized in that: described protector comprise be positioned at live roll both sides and with the supporting beam that described base is fixed together, described supporting beam is installed with for preventing target as sputter to the dividing plate on live roll; In the cavity formed between described dividing plate and supporting beam, water-cooled tube is installed.
3. vacuum chamber refrigerating unit according to claim 2, is characterized in that: and between the water-cooled tube of described baffle contacts and dividing plate, be lined with the red copper guipure eliminating gap between the two; The red copper guipure eliminating gap is between the two lined with between the water-cooled tube contacted with described baffle plate and baffle plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520431982.XU CN204848658U (en) | 2015-06-23 | 2015-06-23 | Vacuum cavity cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520431982.XU CN204848658U (en) | 2015-06-23 | 2015-06-23 | Vacuum cavity cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204848658U true CN204848658U (en) | 2015-12-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520431982.XU Active CN204848658U (en) | 2015-06-23 | 2015-06-23 | Vacuum cavity cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204848658U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105714255A (en) * | 2016-04-27 | 2016-06-29 | 芜湖真空科技有限公司 | Glass sputtering mechanism easy to cool |
-
2015
- 2015-06-23 CN CN201520431982.XU patent/CN204848658U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105714255A (en) * | 2016-04-27 | 2016-06-29 | 芜湖真空科技有限公司 | Glass sputtering mechanism easy to cool |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |