CN201999987U - Cooling blocking board device - Google Patents
Cooling blocking board device Download PDFInfo
- Publication number
- CN201999987U CN201999987U CN2011200235600U CN201120023560U CN201999987U CN 201999987 U CN201999987 U CN 201999987U CN 2011200235600 U CN2011200235600 U CN 2011200235600U CN 201120023560 U CN201120023560 U CN 201120023560U CN 201999987 U CN201999987 U CN 201999987U
- Authority
- CN
- China
- Prior art keywords
- water pipe
- refrigerated baffle
- water
- outer circulation
- internal recycle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model relates to a cooling system device of spattering of plating films, in particular to a cooling blocking board device, which comprises a frame, a connection board, a support piece, a plurality of rows of water pipes, a water pressing board of a cooling blocking board, a support frame and a KF flange, wherein the plurality of rows of water pipes are arranged in a U shape, thereby greatly increasing cooling effect and plating quality, prolonging service life of each component and reducing times of changing and repairing parts.
Description
Technical field
The utility model relates to a kind of plated film sputter cooling system device, refers more particularly to a kind of refrigerated baffle device.
Background technology
In present vacuum coating film equipment,, its Working environment is required very harsh as the magnetron sputtering membrane process that is widely adopted now.Cooling system but is the important factor that influences Working environment, and the refrigerated baffle device is a most important device in the cooling system.
The refrigerated baffle of using with regard to present domestic vacuum plating cathode sputtering; it is lengthy and jumbled that component are various, water-cooled tube is arranged; component directly are connected with vacuum chamber, exist cooling performance poor, can not effectively protect other equipment; not quick detachable; cause very big inconvenience for simultaneously maintenance of the equipment, maintenance,, need in vacuum chamber, safeguard in case certain component is damaged; can directly have influence on other component, even the Working environment of casing.
The utility model content
The purpose of this utility model be for overcome in the prior art water-cooled tube arrange lengthy and jumbled, shortcoming such as component are various, and a kind of novel refrigerated baffle device that provides.
To achieve the above object, the technical solution adopted in the utility model provides a kind of novel refrigerated baffle device, it comprises framework, web plate, strut member, many water shoots, refrigerated baffle head pressing plate, carriage, KF flange, wherein, described many water shoots are divided into internal recycle water pipe and outer circulation water pipe, and described internal recycle water pipe and outer circulation water pipe all adopt U type structure to arrange.
According to described refrigerated baffle device, wherein, described web plate is divided into left and right connecting plates, and described left web plate is arranged on the framework left side, and right web plate is arranged on framework the right.
According to described refrigerated baffle device, wherein, described strut member is a support.
According to described refrigerated baffle device, wherein, described refrigerated baffle head pressing plate is circumscribed with vacuum chamber.
According to described refrigerated baffle device, wherein, described many water shoots comprise water-in, water outlet, internal recycle water pipe, outer circulation water pipe, wherein water-in and the conducting of internal recycle water pipe, water outlet and the conducting of outer circulation water pipe.
According to described refrigerated baffle device, wherein, described internal recycle water pipe is the U type, and the outer circulation water pipe is the U type, and described U type structure is arranged to internal recycle water pipe and outer circulation water pipe join end to end, and is in conducting state.
According to described refrigerated baffle device, wherein, described KF flange passes refrigerated baffle head pressing plate and links to each other with many water shoots intake-outlet.
The utility model adopts unique general frame structure, and it is an integral body that each component are organically combined, and convenient disassembly and assembly can directly hang out casing to refrigerating unit integral body and safeguard outward.Simultaneously more important heat distribution characteristics in the cavity during according to sputter, the big area of the having arranged cooling water channel recycle system has greatly improved cooling performance and coating quality, has strengthened the work-ing life of each accessory, has reduced the repair and replacement number of times of each component.Increased the over-all properties of whole filming equipment.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present utility model;
Fig. 2 is the structural representation of the many water shoots of the utility model.
The 1-framework; 2-left side web plate; The 3-supporting leg; The many water shoots of 4-; 5-refrigerated baffle head pressing plate; The 6-carriage; The right web plate of 7-; The 8-KF flange; 10-internal recycle water pipe; The 12-water-in; The 13-water outlet; 14-outer circulation water pipe.
Embodiment
What the present invention protected is a kind of novel refrigerated baffle device, so long as those skilled in the art understand the embodiment of the invention, without performing creative labour, only is the replacement of equivalent technology, all belongs to protection scope of the present invention.
As shown in Figure 1 and Figure 2, the framework 1 of refrigerated baffle device is provided with supporting leg 3, be respectively arranged with left and right connecting plates (2 on the both sides of framework 1,7), be provided with many water shoots 4, be provided with carriage 6 in the front and back end of framework 1 in the upper end of framework 1, it is to 4 stabilizations of many water shoots, intake-outlet (12,13) upper end at many water shoots is provided with refrigerated baffle head pressing plate 5 and KF flange 8, and described KF flange 8 passes
Refrigerated baffle head pressing plate 5 connects with Inlet and outlet water port (12,13).Described refrigerated baffle head pressing plate 5 also is connected with vacuum chamber (not showing in the drawings).
Described internal recycle water pipe is the U type, and the outer circulation water pipe is the U type, and described U type structure is arranged to internal recycle water pipe and outer circulation water pipe join end to end, and is in conducting state.
As shown in Figure 2, be provided with intake-outlet (12 in many water shoots 4,13) water-in 12 is logical with internal recycle water pipe 10 roads, water outlet 13 and 14 conductings of outer circulation water pipe, internal recycle water pipe 10 and outer circulation water pipe 14 also are in conducting state each other, when water coolant enters into internal recycle water pipe 10 through water-in 12, the outer circulation passage 14 of flowing through again, flow out from water outlet 13, another embodiment, water-in 10 also can link to each other with outer circulation passage 14, and water outlet 13 links to each other with inner cycle channel 10, and internal recycle water pipe 10 and outer circulation water pipe 14 are in conducting state each other.
Claims (7)
1. novel refrigerated baffle device, it comprises framework, web plate, strut member, many water shoots, refrigerated baffle head pressing plate, carriage, KF flange, it is characterized in that, described many water shoots are divided into internal recycle water pipe and outer circulation water pipe, and described internal recycle water pipe and outer circulation water pipe all adopt U type structure to arrange.
2. refrigerated baffle device according to claim 1 is characterized in that described web plate is divided into left and right connecting plates, and described left web plate is arranged on the framework left side, and right web plate is arranged on framework the right.
3. refrigerated baffle device according to claim 1 is characterized in that, described strut member is a support.
4. refrigerated baffle device according to claim 1 is characterized in that, described refrigerated baffle head pressing plate is circumscribed with vacuum chamber.
5. refrigerated baffle device according to claim 1 is characterized in that, described many water shoots comprise water-in, water outlet, internal recycle water pipe, outer circulation water pipe, wherein water-in and the conducting of internal recycle water pipe, water outlet and the conducting of outer circulation water pipe.
6. refrigerated baffle device according to claim 1 or 5 is characterized in that described internal recycle water pipe is the U type, and the outer circulation water pipe is the U type, and described U type structure is arranged to internal recycle water pipe and outer circulation water pipe join end to end, and is in conducting state.
7. refrigerated baffle device according to claim 1 is characterized in that, described KF flange passes refrigerated baffle head pressing plate and links to each other with many water shoots intake-outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200235600U CN201999987U (en) | 2011-01-25 | 2011-01-25 | Cooling blocking board device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200235600U CN201999987U (en) | 2011-01-25 | 2011-01-25 | Cooling blocking board device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201999987U true CN201999987U (en) | 2011-10-05 |
Family
ID=44702732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200235600U Expired - Lifetime CN201999987U (en) | 2011-01-25 | 2011-01-25 | Cooling blocking board device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201999987U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560427A (en) * | 2012-02-17 | 2012-07-11 | 南京航空航天大学 | Cooling baffle device in vacuum coating equipment |
| CN105862011A (en) * | 2016-06-14 | 2016-08-17 | 武汉工程大学 | Special baffle device for chemical vapor deposition equipment |
-
2011
- 2011-01-25 CN CN2011200235600U patent/CN201999987U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560427A (en) * | 2012-02-17 | 2012-07-11 | 南京航空航天大学 | Cooling baffle device in vacuum coating equipment |
| CN105862011A (en) * | 2016-06-14 | 2016-08-17 | 武汉工程大学 | Special baffle device for chemical vapor deposition equipment |
| CN105862011B (en) * | 2016-06-14 | 2018-08-24 | 武汉工程大学 | A kind of chemical vapor depsotition equipment special baffle device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201999987U (en) | Cooling blocking board device | |
| CN202403573U (en) | Special cooling heat exchanger capable of effectively suppressing contamination of converted mash and fermented mash | |
| CN200944551Y (en) | Circulating water-cooled motor | |
| CN204361212U (en) | Lithium battery coldplate | |
| CN201340195Y (en) | Dismountable pipe-type water-cooled furnace cover for submerged arc furnace | |
| CN209288510U (en) | A kind of resistance spot weld circulating cooling system | |
| CN216716359U (en) | Steel-aluminum composite radiator convenient to clean and maintain | |
| CN203824337U (en) | Circulating water pump system for intermediate frequency heating furnace | |
| CN204361214U (en) | For the water conservancy diversion grid of coldplate | |
| CN103313570A (en) | Dustproof electric cabinet | |
| CN212619594U (en) | Water pan device for refrigerator | |
| CN216347974U (en) | Wall-hanging plate cooler convenient to dismouting equipment | |
| CN210560556U (en) | Detachable copper water tank device | |
| CN212692539U (en) | Beryllium copper alloy smelting cooling device | |
| CN205231908U (en) | Single basin formula water cooled machine seat | |
| CN212320425U (en) | Cylindrical split type copper water tank | |
| CN219117576U (en) | Electrolytic tetramethyl ammonium hydroxide anode cooler | |
| CN204198779U (en) | Converter boiler water-cooling sliding chute | |
| CN205253673U (en) | Economizer system for bottle cleaning machine | |
| CN205945351U (en) | Water -cooled machine casing | |
| CN220728995U (en) | Anti-coking protection device of shell and tube heat exchanger | |
| CN219903239U (en) | Cooling waterway mechanism of injection mold | |
| CN203931732U (en) | The water cooling reactor of parallel-connection structure | |
| CN203964140U (en) | A kind of radiator | |
| CN210039868U (en) | Transformer cooling system of submerged arc furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20161230 Address after: 243001 Ma'anshan economic and Technological Development Zone, Anhui Jin Shan Road, No. 1188, building No. 13, No. 201 Patentee after: A saddle hill Functional Membrane Technology Research Institute Co. Ltd. Address before: Tang Road, Songjiang District town Shihudang 201617 Shanghai City No. 277 Patentee before: Shanghai Zichuang Coating Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111005 |