CN204752841U - Novel system target device - Google Patents

Abstract

The utility model discloses a novel system target device, it includes a soaking dish, the flat equally spaced heating pore of having preset of soaking dish water -logging, an at least heating pipe, each the heating pipe correspondence install in in the heating pore, a bronze medal backplate, the copper backplate set up in the upper surface of soaking dish. The utility model discloses a novel system target device, it has improved the defect among the prior art, and the nation that can be used to ITO silicon target, niobium target and other all metallic targets of ITO coating film trade decides, the heating is fast, the heating is even, and the temperature rise is steady, the fixed quality of nation in can effectual improvements target manufacturing process, the quality of improvement target, and because indium easily oxidation in the air uses this device can shorten the fixed process of whole system target nation to the cost has been practiced thrift in the effectual consumption that has reduced rare precious metal indium in the target manufacturing process.

Description

A kind of novel target assembly processed

Technical field

The utility model relates to a kind of making of ITO electropane industry ITO target, particularly a kind of novel target assembly processed.

Background technology

In existing ITO electropane target making processes, generally involve the heating of target.Therefore, whether being heated of target is evenly the key having influence on target quality.Existing target assembly processed all adopts following structure to there is following drawback: heater block is separated completely with equal thermal part, and heating efficiency is low.The heat of heating tube is conducted by Soaking disk, easily causes heating uneven, non-uniform temperature.

Utility model content

The purpose of this utility model is: provide a kind of novel target assembly processed, heating tube and Soaking disk are made an entirety for improvement of at least one defect in prior art by it, direct heating Soaking disk after heating tube energising, improve heating efficiency, make homogeneous heating, bulk temperature is consistent.

The technical scheme achieved the above object is: a kind of novel target assembly processed, it comprises

One Soaking disk, what in described Soaking disk, level was equidistant is preset with heating duct;

At least one heating tube, heating tube correspondence described in each is installed in described heating duct;

One bronze medal backboard, described copper backboard is arranged at the upper surface of described Soaking disk.

Distance between two adjacent described heating tubes is 10cm ~ 50cm.

Distance between two adjacent described heating tubes is 40cm.

The advantage of technique scheme is: novel target assembly processed of the present utility model, it improve defect of the prior art, the nation that can be used for the ITO silicon target of ITO plated film industry, niobium target and other all metallic targets is fixed, heating is fast, homogeneous heating, temperature rise is steady, can effectively improve the quality that in target making processes, nation is fixed, improves the quality of target; And due to indium be easy in atmosphere oxidation, use this device can shorten the fixed process of whole Zhi Ba nation, thus effectively decrease the consumption of rare noble metal indium in target making processes, saved cost.

Accompanying drawing explanation

Below in conjunction with drawings and Examples, the utility model will be further described.

Fig. 1 is the structural representation of the target assembly processed of the utility model embodiment.

Wherein: 1 Soaking disk 1; 2 heating tubes; 3 bronze medal backboards.

Embodiment

Embodiment: as shown in Figure 1, a kind of novel target assembly processed, it comprises a Soaking disk 1, at least one heating tube 2, bronze medal backboard 3.

What in Soaking disk 1, level was equidistant is preset with heating duct; Each heating tube 2 correspondence is installed in heating duct; Copper backboard 3 is arranged at the upper surface of Soaking disk 1.

Distance between adjacent two described heating tubes 2 is 10cm ~ 50cm.40cm is preferably in the present embodiment.Heating tube 2 is fixed in the hole of soaking plate, and runs through whole soaking plate, and heating efficiency promotes greatly.Just a heating tube 2 is installed every 40mm, ensure that whole soaking plate homogeneous heating.

In concrete implementation process, Soaking disk 1(is preferably copper) in the middle of preset the hole of 21 every 40mm and run through whole Soaking disk 1, by in heating tube 2 fixed via, after electrified regulation, because heating tube 2 is fixed in Soaking disk 1, just to Soaking disk 1 direct heating, improve heating efficiency.

Wherein, the specification of Soaking disk 1 is 300mm*200mm*50mm, opens the hole of a row 7 21, and run through whole copper coin in the middle of the Soaking disk 1 of thickness 50mm every 40mm.

Being the heating tube 2 of 20 every hole internal fixtion diameter, carrying out insulation, preventing electric leakage.

Connect corresponding electrical installation, energising just can be heated soaking copper coin.

It should be pointed out that for the utility model through absolutely proving, also can have the embodiment of multiple conversion and remodeling, be not limited to the specific embodiment of above-mentioned embodiment.Above-described embodiment as just explanation of the present utility model, instead of to restriction of the present utility model.In a word, protection domain of the present utility model should comprise those apparent conversion or alternative and remodeling to those skilled in the art.

Claims (3)

1. a novel target assembly processed, is characterized in that: it comprises

One Soaking disk, what in described Soaking disk, level was equidistant is preset with heating duct;

At least one heating tube, heating tube correspondence described in each is installed in described heating duct;

One bronze medal backboard, described copper backboard is arranged at the upper surface of described Soaking disk.

2. novel target assembly processed according to claim 1, is characterized in that: the distance between two adjacent described heating tubes is 10cm ~ 50cm.

3. novel target assembly processed according to claim 2, is characterized in that: the distance between two adjacent described heating tubes is 40cm.