CN204732381U - A kind of trimming machine blanking device automatically - Google Patents
A kind of trimming machine blanking device automatically Download PDFInfo
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- CN204732381U CN204732381U CN201520460945.1U CN201520460945U CN204732381U CN 204732381 U CN204732381 U CN 204732381U CN 201520460945 U CN201520460945 U CN 201520460945U CN 204732381 U CN204732381 U CN 204732381U
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- CN
- China
- Prior art keywords
- overflow launder
- blanking device
- trimming machine
- group
- machine blanking
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- 238000009966 trimming Methods 0.000 title claims abstract description 21
- 230000007246 mechanism Effects 0.000 claims abstract description 40
- 239000000463 material Substances 0.000 claims abstract description 30
- 230000003028 elevating effect Effects 0.000 claims abstract description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 17
- 239000010703 silicon Substances 0.000 claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 abstract description 3
- 238000011010 flushing procedure Methods 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 abstract description 2
- 238000003466 welding Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The utility model provides a kind of trimming machine blanking device automatically, comprise switching mechanism, elevating mechanism and overflow launder, described overflow launder is the welding of PVC material, during work, inside is full of pure water, and inlet valve is often opened under certain flow, form flushing effect, ensure that impurity does not deposit, avoid Silicon Wafers, described switching mechanism and elevating mechanism lay respectively on two adjacent lateral walls of overflow launder, described switching mechanism comprises horizontal roller group, fixed idler whell group and cylinder, and described elevating mechanism comprises hold-down support, travelling carriage and material supporting rack.Automatic trimming machine blanking device described in the utility model effectively prevent the damage to silicon chip, operating efficiency and automaticity high.
Description
Technical field
The utility model belongs to field of semiconductor manufacture, especially relates to a kind of trimming machine blanking device automatically.
Background technology
Along with the day by day universal of electronic product and renewal, the manufacturing process of semiconductor have also been obtained development at full speed, in the manufacture process of semiconductor, comprise multiple operation, as Wafer Cleaning, making herbs into wool etc., all needs silicon chip to load special basket tool after above-mentioned operation.In prior art, being all accustomed to adopting the mode of artificial inserted sheet to operate, easily there is the problems such as fragment rate is high, large to the pollution of silicon chip, efficiency is low in which.
Summary of the invention
In view of this, the utility model is intended to propose a kind of trimming machine blanking device automatically, to solve the problems such as silicon chip fragment rate is high, large to the pollution of silicon chip, efficiency is low.
For achieving the above object, the technical solution of the utility model is achieved in that
A kind of trimming machine blanking device automatically, comprises switching mechanism, elevating mechanism and overflow launder; Described overflow launder inside is full of pure water, and described switching mechanism and elevating mechanism lay respectively on two adjacent lateral walls of overflow launder; Described switching mechanism comprises horizontal roller group, fixed idler whell group and cylinder, the top of described switching mechanism is provided with a back shaft near the side of overflow launder, one end of described fixed idler whell group is fixedly connected on back shaft, the other end of described fixed idler whell group stretches into overflow launder inside with the angle of inclination of 10-60 degree, one end of described horizontal roller group is connected on back shaft, and the other end of horizontal roller group is connected with the described cylinder being located at switching mechanism side; Described elevating mechanism comprises hold-down support, travelling carriage and material supporting rack, described hold-down support to be positioned at bottom elevating mechanism and to fix with described overflow launder sidewall, described hold-down support is equipped with servomotor, there is ball-screw described hold-down support inside, described servomotor provides the power of described ball-screw-transmission, described ball-screw is provided with the travelling carriage that can slide up and down, described travelling carriage top is fixed with material supporting rack, be provided with sheet basket draw-in groove in described material supporting rack, described material supporting rack stretches into overflow launder inside and is positioned at the dead ahead of described fixed idler whell group.
Further, described horizontal roller group is four groups, and described fixed idler whell group is three groups, and one end that described fixed idler whell group connects described back shaft is embedded in the space that formed between described horizontal roller group.
Further, described horizontal roller group and fixed idler whell group are by roller and rib composition, and roller is fixed on rib side, can rotate freely.
Further, described roller adopts POM material.
Further, the angle of inclination of described basket draw-in groove is consistent with the angle of inclination of described fixed idler whell group, is convenient to silicon chip and slips in described basket draw-in groove.
Further, described basket draw-in groove has 5 inches, 6 inches and 8 inches of three kinds of dimensionss.
Further, the side inwall that described overflow launder is equipped with elevating mechanism is welded with chute, described material supporting rack is provided with the draw runner corresponding with described chute.
Further, described chute and draw runner all adopt POM material.
Further, described overflow launder adopts PVC material.
Relative to prior art, automatic trimming machine blanking device described in the utility model has following advantage:
(1) rollover stand is designed with the smooth roller of POM material as support, and have with silicon chip contact area little, smooth surface is wear-resisting, the feature of rolling landing, avoids the surface tear to silicon chip;
(2) sheet basket is partly dipped in tank, by the water surface when silicon chip slips into sheet basket groove, plays cushioning effect, avoids the damage to silicon chip;
(3) movable stand lifting adopts Serve Motor Control, and ball-screw adds guide rail transmission, accurately can control dropping distance, reduces error.
Accompanying drawing explanation
The accompanying drawing forming a part of the present utility model is used to provide further understanding of the present utility model, and schematic description and description of the present utility model, for explaining the utility model, is not formed improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the vertical view of the automatic trimming machine blanking device described in the utility model embodiment;
Fig. 2 is the structural representation of the automatic trimming machine blanking device described in the utility model embodiment.
Description of reference numerals:
1-switching mechanism, 11-horizontal roller group, 12-fixed idler whell group, 13-cylinder, 2-elevating mechanism, 14-back shaft, 21-hold-down support, 211-servomotor, 22-travelling carriage, 23-material supporting rack, 231-draw runner, 3-overflow launder.
Embodiment
It should be noted that, when not conflicting, the embodiment in the utility model and the feature in embodiment can combine mutually.
Below with reference to the accompanying drawings and describe the utility model in detail in conjunction with the embodiments.
As shown in Figure 1, automatic trimming machine blanking device comprises switching mechanism 1, elevating mechanism 2 and overflow launder 3, and described overflow launder 3 is the welding of PVC material, during work, inside is full of pure water, and inlet valve is often opened under certain flow, forms flushing effect, ensure that impurity does not deposit, avoid Silicon Wafers; Described switching mechanism 1 and elevating mechanism 2 lay respectively on two adjacent lateral walls of overflow launder 3.
As shown in Figure 2, described switching mechanism 1 comprises horizontal roller group 11, fixed idler whell group 12 and cylinder 13, the top of described switching mechanism is provided with a back shaft 14 near the side of overflow launder, one end of described fixed idler whell group 12 to be fixedly connected on back shaft 14, the other end of described fixed idler whell group 12 stretches into overflow launder 3 inside with the angle of inclination of 10-60 degree, one end of described horizontal roller group 11 is connected on back shaft 14, the other end of horizontal roller group 11 is connected with the described cylinder 13 being located at switching mechanism side, the power that horizontal roller group 11 tilts is provided, the incline direction of described horizontal roller the group 11 and angle of inclination of horizontal roller group 11 consistent with the incline direction of described fixed idler whell group 12 is slightly larger than the angle of inclination of fixed idler whell group 12, to ensure that silicon chip can slip in fixed idler whell group 12 smoothly.
Described horizontal roller group 11 is four groups, described fixed idler whell group 12 is three groups, one end that described fixed idler whell group 12 connects described back shaft 14 is embedded in the space that formed between described horizontal roller group, roller set is made up of roller and rib, and roller is fixed on rib side, can rotate freely, roller material is POM, its intensity, rigidity are high, good springiness, and anti-attrition resistance to wear is good.
Described elevating mechanism 2 comprises hold-down support 21, travelling carriage 22 and material supporting rack 23, described hold-down support 21 is positioned at bottom elevating mechanism 2, described hold-down support 21 is equipped with servomotor 211, there is ball-screw (not marking in figure) described hold-down support 21 inside, described servomotor 211 provides the power of described ball-screw-transmission, described ball-screw is provided with the travelling carriage 22 that can slide up and down, described travelling carriage 22 top is fixed with material supporting rack 23, 5 inches are provided with in described material supporting rack 23, the sheet basket draw-in groove of 6 inches and 8 inches three kinds of dimensionss, the angle of inclination of described basket draw-in groove is consistent with the angle of inclination of described fixed idler whell group, described material supporting rack stretches into overflow launder 3 inside and is positioned at the dead ahead of described fixed idler whell group, angle when silicon chip slips into is consistent with sheet basket draw-in groove angle of inclination.
The side inwall that described overflow launder 3 is equipped with elevating mechanism is welded with chute (not marking in figure), described material supporting rack 23 is provided with the draw runner 231 corresponding with described chute, thus move along chute direction when material supporting rack 23 is elevated, play guiding fixation, chute draw runner adopts POM material, its intensity, rigidity are high, good springiness, and anti-attrition resistance to wear is good.
Major function of the present utility model is that the silicon chip completed by trimming inserts in sheet basket automatically, sheet basket is positioned in the material supporting rack of elevating mechanism, lifting is realized by guide rail screw rod transmission, thus the slot in sheet basket is shifted successively, to access the silicon chip that switching mechanism slips into, realize the action of automatic inserted sheet.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.
Claims (9)
1. an automatic trimming machine blanking device, is characterized in that: comprise switching mechanism, elevating mechanism and overflow launder;
Described overflow launder inside is full of pure water, and described switching mechanism and elevating mechanism lay respectively on two adjacent lateral walls of overflow launder;
Described switching mechanism comprises horizontal roller group, fixed idler whell group and cylinder, the top of described switching mechanism is provided with a back shaft near the side of overflow launder, one end of described fixed idler whell group is fixedly connected on back shaft, the other end of described fixed idler whell group stretches into overflow launder inside with the angle of inclination of 10-60 degree, one end of described horizontal roller group is connected on back shaft, and the other end of horizontal roller group is connected with the described cylinder being located at switching mechanism side;
Described elevating mechanism comprises hold-down support, travelling carriage and material supporting rack, described hold-down support to be positioned at bottom elevating mechanism and to fix with described overflow launder sidewall, described hold-down support is equipped with servomotor, there is ball-screw described hold-down support inside, described servomotor provides the power of described ball-screw-transmission, described ball-screw is provided with the travelling carriage that can slide up and down, described travelling carriage top is fixed with material supporting rack, be provided with sheet basket draw-in groove in described material supporting rack, described material supporting rack stretches into overflow launder inside and is positioned at the dead ahead of described fixed idler whell group.
2. automatic trimming machine blanking device according to claim 1, it is characterized in that: described horizontal roller group is four groups, described fixed idler whell group is three groups, and one end that described fixed idler whell group connects described back shaft is embedded in the space that formed between described horizontal roller group.
3. automatic trimming machine blanking device according to claim 2, is characterized in that: described horizontal roller group and fixed idler whell group are by roller and rib composition, and roller is fixed on rib side, can rotate freely.
4. automatic trimming machine blanking device according to claim 3, is characterized in that: described roller adopts POM material.
5. automatic trimming machine blanking device according to claim 1, is characterized in that: the angle of inclination of described basket draw-in groove is consistent with the angle of inclination of described fixed idler whell group, is convenient to silicon chip and slips in described basket draw-in groove.
6. automatic trimming machine blanking device according to claim 1, is characterized in that: described basket draw-in groove has 5 inches, 6 inches and 8 inches of three kinds of dimensionss.
7. automatic trimming machine blanking device according to claim 1, is characterized in that: the side inwall that described overflow launder is equipped with elevating mechanism is welded with chute, described material supporting rack is provided with the draw runner corresponding with described chute.
8. automatic trimming machine blanking device according to claim 7, is characterized in that: described chute and draw runner all adopt POM material.
9. automatic trimming machine blanking device according to claim 1, is characterized in that: described overflow launder adopts PVC material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520460945.1U CN204732381U (en) | 2015-06-30 | 2015-06-30 | A kind of trimming machine blanking device automatically |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520460945.1U CN204732381U (en) | 2015-06-30 | 2015-06-30 | A kind of trimming machine blanking device automatically |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204732381U true CN204732381U (en) | 2015-10-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520460945.1U Active CN204732381U (en) | 2015-06-30 | 2015-06-30 | A kind of trimming machine blanking device automatically |
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| CN (1) | CN204732381U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106711073A (en) * | 2017-03-20 | 2017-05-24 | 常州亿晶光电科技有限公司 | Non-destructive type self-cleaning silicon chip inserting device |
| CN109411398A (en) * | 2018-11-07 | 2019-03-01 | 天津中环领先材料技术有限公司 | A kind of automatic film threading equipment of silicon wafer |
-
2015
- 2015-06-30 CN CN201520460945.1U patent/CN204732381U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106711073A (en) * | 2017-03-20 | 2017-05-24 | 常州亿晶光电科技有限公司 | Non-destructive type self-cleaning silicon chip inserting device |
| CN109411398A (en) * | 2018-11-07 | 2019-03-01 | 天津中环领先材料技术有限公司 | A kind of automatic film threading equipment of silicon wafer |
| CN109411398B (en) * | 2018-11-07 | 2023-10-31 | 天津中环领先材料技术有限公司 | Automatic inserting equipment for silicon wafers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin Patentee after: TCL Zhonghuan New Energy Technology Co.,Ltd. Address before: 300384 No. 12, Haitai East Road, Huayuan Industrial Zone (outside the ring), New Technology Industrial Park, Binhai New Area, Tianjin Patentee before: TIANJIN ZHONGHUAN SEMICONDUCTOR CO.,LTD. |
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| CP03 | Change of name, title or address |