CN204666553U - A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas - Google Patents
A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas Download PDFInfo
- Publication number
- CN204666553U CN204666553U CN201520433351.1U CN201520433351U CN204666553U CN 204666553 U CN204666553 U CN 204666553U CN 201520433351 U CN201520433351 U CN 201520433351U CN 204666553 U CN204666553 U CN 204666553U
- Authority
- CN
- China
- Prior art keywords
- humidity
- gas
- organic film
- layer
- flexible organic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas that the utility model provides, its structure as shown in Figure 1, comprises substrate (1), bottom electrode (2), humidity-sensitive layer (3), gas sensitization layer (4), two dielectric layers (501,502) and two top electrodes (601,602); In this sensor, the material forming substrate is PET; The material forming bottom electrode is ITO; The material forming humidity-sensitive layer is polyimide or polymethylmethacrylate; The material forming gas sensitization layer is propyl-trimethoxysilane or 3-diethylaminopropyl-trimethoxy silane; Form the material of dielectric layer for insulation organism, lay respectively at the both sides of gas sensitization layer, center section is exposed to outside; The material forming two top electrodes is metallic gold, lays respectively on two dielectric layers.
Description
[technical field]
The utility model belongs to organic electronic sensor field, particularly a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas.
[background technology]
Humidity sensor and gas sensor range of application are very extensive, and the humidity sensor of present relative maturity adopts the method for resistance detection mostly, but the precision of this sensor is not high, and is easily subject to the impact of other condition.In recent years, there is a lot of capacitive sensor to be suggested, but mostly have employed rigid material, can not well cover when needs measure out-of-flatness or curved surface.And flexible organic film capacitive transducer is as film morphology, the feature that its area is changeable makes its humidity that can not only detect precision positions or gas concentration, making in large-area situation, can also attach and detect on a large scale with body surface, and being not limited to plane.The flexible sensor adopting organic material to make is the trend of future development, Multifunction Sensor be integrated in a device especially complex condition detect an important direction, the development of the utility model to flexible thin film sensor is significant.
[summary of the invention]
The purpose of this utility model is to provide a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas.
A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas that the utility model provides, its structure as shown in Figure 1, comprises substrate (1), bottom electrode (2), humidity-sensitive layer (3), gas sensitization layer (4), two dielectric layers (501,502) and two top electrodes (601,602); In this sensor, the material forming substrate is PET; The material forming bottom electrode is ITO; The material forming humidity-sensitive layer is polyimide or polymethylmethacrylate; The material forming gas sensitization layer is propyl-trimethoxysilane or 3-diethylaminopropyl-trimethoxy silane; Form the material of dielectric layer for insulation organism, lay respectively at the both sides of gas sensitization layer, center section is exposed to outside; The material forming two top electrodes is metallic gold, lays respectively on two dielectric layers.
The method of the above-mentioned flexible organic film humidity sensor of the preparation that the utility model provides, comprises the steps:
1) on substrate, bottom electrode is prepared;
2) in described step 1) prepare humidity-sensitive layer on the bottom electrode that obtains;
3) in described step 2) substrate with humidity-sensitive layer that obtains prepares gas sensitization layer;
4) in described step 3) preparation two dielectric layers on the gas sensitization layer that obtains;
5) prepare source electrode and drain electrode, obtain described flexible organic film humidity sensor;
The step 1 of above-mentioned preparation method) in, backing material can be bought by commercial sources and obtain, and first will before making bottom electrode
The step 1 of above-mentioned preparation method) in, backing material can be bought by commercial sources and obtain, and first substrate is used respectively each ultrasonic cleaning of acetone, ethanol, deionized water 15 minutes before making bottom electrode; The method preparing bottom electrode is magnetron sputtering, and the operating air pressure of magnetron sputtering is 2.5 Pascals, and sputtering power is 140 watts, and sedimentation time is 20 minutes;
Step 2) in, the method preparing humidity-sensitive layer is spin coating, and spin speed is 6000 revs/min, and spin-coating time is 45 seconds;
Step 3) in, the method preparing gas sensitization layer is spin coating, and spin speed is 4500 revs/min, and spin-coating time is 30 seconds;
Step 4) in, the method for preparation two dielectric layers is vacuum thermal evaporation, and vacuum tightness is 8 × 10
-3below Pascal, evaporation rate is 0.1 dust/second;
Step 5) in, the method for preparation two top electrodes is electron beam evaporation, and the air pressure of electron beam evaporation is 6 × 10
-3pascal, evaporation rate is 0.25 dust/second.
Technical Analysis of the present utility model:
The humidity-sensitive material that this humidity-sensitive layer simultaneously can responding to the flexible organic film capacitive transducer of humidity and gas is chosen, under humidity change, causes capacitance to change; This capacitive transducer gas sensitization layer reveals responsive characteristic to silicon dioxide gas meter, and interacting with it after gas sensitization layer absorbs silicon dioxide causes electric capacity to change; Sensor construction adopts the form of organic film, and owing to being film-form sensor, its shape can make large-area planar shape, can attach and body surface, and not have area constraints; This device sensitivity is high, is requiring that point of fixity Humidity Detection or wide area detect all attainable feature and be better than existing sensor.
[accompanying drawing explanation]
A kind of structural representation simultaneously can responding to the flexible organic film capacitive transducer of humidity and gas that Fig. 1 provides for the utility model.
In figure, (101,102) are two top electrodes, (201,202) be two dielectric layers, 3 are gas sensitization layer, 4 be humidity-sensitive layer, 5 be bottom electrode, 6 for substrate.
[embodiment]
Below in conjunction with instantiation, the utility model is described in further detail.
In the utility model, electric capacity measures electric capacity respectively under difficult environmental conditions:
1) be exposed to not containing in the air of sulphuric dioxide, relative humidity 3%;
2) be exposed in the air containing sulphuric dioxide, relative humidity 54%
3) be exposed to not containing in the air of sulphuric dioxide, relative humidity 3%;
4) be exposed to not containing in the air of sulphuric dioxide, relative humidity 54%;
Under above-mentioned varying environment condition, measure capacitance variations, test surfaces, humidity and sulphuric dioxide all can impact the electric capacity of sensor.
Embodiment 1
The present embodiment prepares flexible organic film capacitive transducer according to following step:
1) substrate layer used is PET, adopts magnetron sputtering method to make bottom electrode, sputtering ITO film on PEt substrate; That adopted is ITO ceramic target material In
2o
3: SnO
2=90: 10wt.%, purity is 99%, first PET is used acetone respectively before sputtering, ethanol, deionized water, ultrasonic cleaning 15 minutes, the method preparing bottom electrode is magnetron sputtering, the operating air pressure of magnetron sputtering is 2.5 Pascals, and sputtering power is 140 watts, and sedimentation time is 20 minutes.
2) adopt the method for spin coating to prepare humidity-sensitive layer on the bottom electrode, be dissolved in by polymethylmethacrylate (solution concentration is 50 mg/ml) in methyl phenyl ethers anisole, spin speed is 6000 revs/min, and spin-coating time is 45 seconds.
3) in step 2) the exhausted humidity-sensitive layer that obtains prepares gas sensitization layer by spin coating, selection material is propyl-trimethoxysilane, and spin speed is 4500 revs/min, and spin-coating time is 30 seconds.
4) prepare two dielectric layers by the method for vacuum thermal evaporation, block with mask plate, vacuum tightness is 8 × 10
-3below Pascal, evaporation rate is 0.1 dust/second;
5) prepare two electrodes by the method for electron beam evaporation, block with mask plate, the air pressure of electron beam evaporation is 6 × 10
-3pascal, evaporation rate is 0.25 dust/second.
Embodiment 2
According to preparation method identical with embodiment 1, only by step 2) in methyl methacrylate change polyimide into, with the identical preparation condition of above-described embodiment under obtain flexible organic film capacitive transducer, the pattern of this sensor and device performance identical with embodiment 1.
Embodiment 3
According to preparation method identical with embodiment 1, only by step 3) in propyl-trimethoxysilane change 3-diethylaminopropyl-trimethoxy silane into, with the identical preparation condition of above-described embodiment under obtain flexible organic film capacitive transducer, the pattern of this sensor and device performance identical with embodiment 1.
Claims (6)
1. can respond to the flexible organic film capacitive transducer of humidity and gas for one kind simultaneously, it is characterized in that, comprise substrate (1), bottom electrode (2), humidity-sensitive layer (3), gas sensitization layer (4), two dielectric layers (501,502) and two top electrodes (601,602); Wherein:
Bottom electrode is covered in substrate, and humidity-sensitive layer is covered on bottom electrode, and gas sensitization layer is covered on humidity-sensitive material layer;
Two dielectric layers lay respectively at the both sides of gas sensitization layer, and center section is exposed to outside; Two top electrodes lay respectively on two dielectric layers.
2. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, it is characterized in that, the width of bottom electrode is less than the width of substrate, and is greater than humidity-sensitive layer.
3. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming humidity-sensitive layer is polyimide or polymethylmethacrylate.
4. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming gas sensitization layer is N, N mono-ethyl one or three aminopropyl methoxysilane or base one trimethoxy silane.
5. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming substrate is PET.
6. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming bottom electrode is ITO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520433351.1U CN204666553U (en) | 2015-06-16 | 2015-06-16 | A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520433351.1U CN204666553U (en) | 2015-06-16 | 2015-06-16 | A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204666553U true CN204666553U (en) | 2015-09-23 |
Family
ID=54136925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520433351.1U Expired - Fee Related CN204666553U (en) | 2015-06-16 | 2015-06-16 | A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204666553U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319245A (en) * | 2015-06-16 | 2016-02-10 | 中国计量学院 | Flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and manufacturing method thereof |
-
2015
- 2015-06-16 CN CN201520433351.1U patent/CN204666553U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319245A (en) * | 2015-06-16 | 2016-02-10 | 中国计量学院 | Flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and manufacturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Qiu et al. | Ionic skin with biomimetic dielectric layer templated from calathea zebrine leaf | |
| CN105319245A (en) | Flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and manufacturing method thereof | |
| CN106197774B (en) | Flexible piezoresistive tactile sensor array and preparation method thereof | |
| CN107966481B (en) | A kind of Material Identification sensor and preparation method thereof based on composite capacitive structure | |
| CN104838249B (en) | Biosensor apparatus and method including local desalination system | |
| He et al. | A self-powered electronic-skin for real-time perspiration analysis and application in motion state monitoring | |
| CN103199020B (en) | Based on preparation method and the detection method of the liquid grid-type graphene field effect pipe of PI | |
| CN104198545B (en) | Sonde heated type humidity sensor and preparation method thereof and a kind of humidity measuring circuit | |
| CN105758562A (en) | Flexible pressure sensor and preparation method thereof | |
| CN201653604U (en) | Pressure sensor | |
| CN104458835B (en) | A kind of humidity sensor and preparation method thereof | |
| CN108872318B (en) | Self-powered respiration sensor based on bionic nasal cavity structure and preparation method thereof | |
| WO2017193415A1 (en) | Method for preparing graphene modified composite planar ph sensor | |
| CN104569078A (en) | Flexible graphene nano wall resistance-type humidity sensor and preparation method thereof | |
| CN108917995A (en) | A kind of flexibility piezoresistance sensor | |
| CN103434999B (en) | The integrated manufacturing method of a kind of temperature, humidity, air pressure and acceleration transducer | |
| CN105510404A (en) | Rapidly-responsive humidity sensor and manufacturing method thereof | |
| CN111998965A (en) | Double-electrode type flexible sensor capable of simultaneously detecting and distinguishing temperature and pressure as well as preparation method and application thereof | |
| CN105136893A (en) | Thin film transistor biosensor and preparation method thereof | |
| CN204514847U (en) | A kind of Flexible graphene nm wall electric resistance moisture sensor | |
| CN108225620A (en) | A kind of flexible touch sensation sensor with multi-layer structure and preparation method thereof | |
| CN204666553U (en) | A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas | |
| Liu et al. | High-performance piezoresistive flexible pressure sensor based on wrinkled microstructures prepared from discarded vinyl records and ultra-thin, transparent polyaniline films for human health monitoring | |
| CN108469316A (en) | Surface grafting conducting polymer and coplanar type electrode pressure sensor and its preparation method | |
| Xie et al. | Flexible Interfacial Capacitive Pressure Sensor Based on Randomly Distributed Micro-Pits Electrode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150923 Termination date: 20160616 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |