CN105319245A - Flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and manufacturing method thereof - Google Patents
Flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and manufacturing method thereof Download PDFInfo
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- CN105319245A CN105319245A CN201510348925.XA CN201510348925A CN105319245A CN 105319245 A CN105319245 A CN 105319245A CN 201510348925 A CN201510348925 A CN 201510348925A CN 105319245 A CN105319245 A CN 105319245A
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Abstract
The invention provides a flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and a manufacturing method thereof. The structure of the flexible organic film capacitive sensor is shown in the figure 1. The sensor comprises a substrate (1), a lower electrode (2), a humidity sensitive layer (3), a gas sensitive layer (4), two dielectric layers (501 and 502) and two upper electrodes (601 and 602). In the sensor, the substrate is made of PET, the lower electrode is made of ITO, the humidity sensitive layer is made of polyimide or polymethyl methacrylate, the gas sensitive layer is made of propyl group-trimethoxy silane or 3-diethyl aminopropyl-trimethoxy silane, the dielectric layers are made of insulated organic materials and located on the two sides of the gas sensitive layer with the middle exposed outside, and the two upper electrodes are made of metal gold and located on the two dielectric layers respectively.
Description
[technical field]
The invention belongs to organic electronic sensor field, particularly a kind of can the flexible organic film capacitive transducer simultaneously responding to humidity and gas and preparation method thereof.
[background technology]
Humidity sensor and gas sensor range of application are very extensive, and the humidity sensor of present relative maturity adopts the method for resistance detection mostly, but the precision of this sensor is not high, and is easily subject to the impact of other condition.In recent years, there is a lot of capacitive sensor to be suggested, but mostly have employed rigid material, can not well cover when needs measure out-of-flatness or curved surface.And flexible organic film capacitive transducer is as film morphology, the feature that its area is changeable makes its humidity that can not only detect precision positions or gas concentration, making in large-area situation, can also attach and detect on a large scale with body surface, and being not limited to plane.The flexible sensor adopting organic material to make is the trend of future development, Multifunction Sensor be integrated in a device especially complex condition detect an important direction, the development of the present invention to flexible thin film sensor is significant.
[summary of the invention]
The object of this invention is to provide a kind of can the flexible organic film capacitive transducer simultaneously responding to humidity and gas and preparation method thereof.
A kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas provided by the invention, its structure as shown in Figure 1, comprises substrate (1), bottom electrode (2), humidity-sensitive layer (3), gas sensitization layer (4), two dielectric layers (501,502) and two top electrodes (601,602); In this sensor, the material forming substrate is PET; The material forming bottom electrode is ITO; The material forming humidity-sensitive layer is polyimide or polymethylmethacrylate; The material forming gas sensitization layer is propyl-trimethoxysilane or 3-diethylaminopropyl-trimethoxy silane; Form the material of dielectric layer for insulation organism, lay respectively at the both sides of gas sensitization layer, center section is exposed to outside; The material forming two top electrodes is metallic gold, lays respectively on two dielectric layers.
The method of the above-mentioned flexible organic film humidity sensor of preparation provided by the invention, comprises the steps:
1) on substrate, bottom electrode is prepared;
2) in described step 1) prepare humidity-sensitive layer on the bottom electrode that obtains;
3) in described step 2) substrate with humidity-sensitive layer that obtains prepares gas sensitization layer;
4) in described step 3) preparation two dielectric layers on the gas sensitization layer that obtains;
5) prepare source electrode and drain electrode, obtain described flexible organic film humidity sensor;
The step 1 of above-mentioned preparation method) in, backing material can be bought by commercial sources and obtain, and first substrate is used respectively each ultrasonic cleaning of acetone, ethanol, deionized water 15 minutes before making bottom electrode; The method preparing bottom electrode is magnetron sputtering, and the operating air pressure of magnetron sputtering is 2.5 Pascals, and sputtering power is 140 watts, and sedimentation time is 20 minutes;
Step 2) in, the method preparing humidity-sensitive layer is spin coating, and spin speed is 6000 revs/min, and spin-coating time is 45 seconds;
Step 3) in, the method preparing gas sensitization layer is spin coating, and spin speed is 4500 revs/min, and spin-coating time is 30 seconds;
Step 4) in, the method for preparation two dielectric layers is vacuum thermal evaporation, and vacuum tightness is 8 × 10
-3below Pascal, evaporation rate is 0.1 dust/second;
Step 5) in, the method for preparation two top electrodes is electron beam evaporation, and the air pressure of electron beam evaporation is 6 × 10
-3pascal, evaporation rate is 0.25 dust/second.
Technical Analysis of the present invention:
The humidity-sensitive material that this humidity-sensitive layer simultaneously can responding to the flexible organic film capacitive transducer of humidity and gas is chosen, under humidity change, causes capacitance to change; This capacitive transducer gas sensitization layer reveals responsive characteristic to silicon dioxide gas meter, and interacting with it after gas sensitization layer absorbs silicon dioxide causes electric capacity to change; Sensor construction adopts the form of organic film, and owing to being film-form sensor, its shape can make large-area planar shape, can attach and body surface, and not have area constraints; This device sensitivity is high, is requiring that point of fixity Humidity Detection or wide area detect all attainable feature and be better than existing sensor.
[accompanying drawing explanation]
Fig. 1 is a kind of structural representation simultaneously can responding to the flexible organic film capacitive transducer of humidity and gas provided by the invention.
In figure, (101,102) are two top electrodes, (201,202) be two dielectric layers, 3 are gas sensitization layer, 4 be humidity-sensitive layer, 5 be bottom electrode, 6 for substrate.
[embodiment]
Below in conjunction with instantiation, the invention will be further described.
In the present invention, electric capacity measures electric capacity respectively under difficult environmental conditions:
1) be exposed to not containing in the air of sulphuric dioxide, relative humidity 3%;
2) be exposed in the air containing sulphuric dioxide, relative humidity 54%
3) be exposed to not containing in the air of sulphuric dioxide, relative humidity 3%;
4) be exposed to not containing in the air of sulphuric dioxide, relative humidity 54%;
Under above-mentioned varying environment condition, measure capacitance variations, test surfaces, humidity and sulphuric dioxide all can impact the electric capacity of sensor.
Embodiment 1
The present embodiment prepares flexible organic film capacitive transducer according to following step:
1) substrate layer used is PET, adopts magnetron sputtering method to make bottom electrode, sputtering ITO film on PEt substrate; That adopted is ITO ceramic target material In
2o
3: SnO
2=90: 10wt.%, purity is 99%, first PET is used acetone respectively before sputtering, ethanol, deionized water, ultrasonic cleaning 15 minutes, the method preparing bottom electrode is magnetron sputtering, the operating air pressure of magnetron sputtering is 2.5 Pascals, and sputtering power is 140 watts, and sedimentation time is 20 minutes.
2) adopt the method for spin coating to prepare humidity-sensitive layer on the bottom electrode, be dissolved in by polymethylmethacrylate (solution concentration is 50 mg/ml) in methyl phenyl ethers anisole, spin speed is 6000 revs/min, and spin-coating time is 45 seconds.
3) in step 2) the exhausted humidity-sensitive layer that obtains prepares gas sensitization layer by spin coating, selection material is propyl-trimethoxysilane, and spin speed is 4500 revs/min, and spin-coating time is 30 seconds.
4) prepare two dielectric layers by the method for vacuum thermal evaporation, block with mask plate, vacuum tightness is 8 × 10
-3below Pascal, evaporation rate is 0.1 dust/second;
5) prepare two electrodes by the method for electron beam evaporation, block with mask plate, the air pressure of electron beam evaporation is 6 × 10
-3pascal, evaporation rate is 0.25 dust/second.
Embodiment 2
According to preparation method identical with embodiment 1, only by step 2) in methyl methacrylate change polyimide into, with the identical preparation condition of above-described embodiment under obtain flexible organic film capacitive transducer, the pattern of this sensor and device performance identical with embodiment 1.
Embodiment 3
According to preparation method identical with embodiment 1, only by step 3) in propyl-trimethoxysilane change 3-diethylaminopropyl-trimethoxy silane into, with the identical preparation condition of above-described embodiment under obtain flexible organic film capacitive transducer, the pattern of this sensor and device performance identical with embodiment 1.
Claims (9)
1. can respond to the flexible organic film capacitive transducer of humidity and gas for one kind simultaneously, it is characterized in that, comprise substrate (1), bottom electrode (2), humidity-sensitive layer (3), gas sensitization layer (4), two dielectric layers (501,502) and two top electrodes (601,602); Wherein:
Bottom electrode is covered in substrate, and humidity-sensitive layer is covered on bottom electrode, and gas sensitization layer is covered on humidity-sensitive material layer;
Two dielectric layers lay respectively at the both sides of gas sensitization layer, and center section is exposed to outside; Two top electrodes lay respectively on two dielectric layers.
2. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, it is characterized in that, the width of bottom electrode is less than the width of substrate, and is greater than humidity-sensitive layer.
3. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming humidity-sensitive layer is polyimide or polymethylmethacrylate.
4. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming gas sensitization layer is N, N mono-ethyl one or three aminopropyl methoxysilane or base one trimethoxy silane.
5. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming substrate is PET.
6. a kind of flexible organic film capacitive transducer simultaneously can responding to humidity and gas according to claim 1, is characterized in that, the material forming bottom electrode is ITO.
7. making can respond to a method for the flexible organic film capacitive transducer of humidity and gas simultaneously, it is characterized in that, comprises the steps:
1) on substrate, bottom electrode is prepared;
2) in described step 1) prepare humidity-sensitive layer on the bottom electrode that obtains;
3) in described step 2) substrate with humidity-sensitive layer that obtains prepares gas sensitization layer;
4) in described step 3) preparation two dielectric layers on the gas sensitization layer that obtains;
5) prepare source electrode and drain electrode, obtain described flexible organic film humidity sensor.
8. method according to claim 7, is characterized in that, described step 1) in, the method preparing bottom electrode is magnetron sputtering;
Described step 2) in, the method preparing humidity-sensitive layer is spin coating;
Described step 3) in, the method preparing gas sensitization layer is spin coating;
Described step 4) in, the method for preparation two dielectric layers is vacuum thermal evaporation;
Described step 5) in, the method for preparation two top electrodes is electron beam evaporation.
9. method according to claim 8, is characterized in that:
Described step 1) in, the operating air pressure of magnetron sputtering is 2.5 Pascals, and sputtering power is 140 watts, and sedimentation time is 20 minutes;
Step 2 is told by institute) in, spin speed is 6000 revs/min, and spin-coating time is 45 seconds;
Step 3 is told by institute) in, spin speed is 4500 revs/min, and spin-coating time is 30 seconds;
Described step 4) in, vacuum tightness is 8 × 10
-3below Pascal, evaporation rate is 0.1 dust/second;
Step 5 is told by institute) in, the air pressure of electron beam evaporation is 6 × 10
-3pascal, evaporation rate is 0.25 dust/second.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106124576A (en) * | 2016-06-28 | 2016-11-16 | 上海申矽凌微电子科技有限公司 | Integrated humidity sensor and multiple-unit gas sensor and manufacture method thereof |
| CN108700540A (en) * | 2016-02-18 | 2018-10-23 | ams有限公司 | Sensor device for generating measuring signal and method |
| CN109959682A (en) * | 2017-12-26 | 2019-07-02 | 意法半导体有限公司 | Adaptive testing method and design for low-power MOX sensor |
| CN111801572A (en) * | 2018-03-14 | 2020-10-20 | 希奥检测有限公司 | Monolithic sensor device, method for producing and method for measuring |
| CN112229878A (en) * | 2020-01-07 | 2021-01-15 | 南通大学 | Humidity sensor chip with three-electrode structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108700540B (en) * | 2016-02-18 | 2021-04-16 | ams有限公司 | Sensor device and method for generating a measurement signal |
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| CN112229878A (en) * | 2020-01-07 | 2021-01-15 | 南通大学 | Humidity sensor chip with three-electrode structure |
| CN112229878B (en) * | 2020-01-07 | 2021-08-10 | 南通大学 | Humidity sensor chip with three-electrode structure |
| CN113588727A (en) * | 2020-01-07 | 2021-11-02 | 南通大学 | Humidity sensor chip without storage module |
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Application publication date: 20160210 |