CN204632741U - A kind of control device of fixture vertical process position - Google Patents
A kind of control device of fixture vertical process position Download PDFInfo
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- CN204632741U CN204632741U CN201420872727.4U CN201420872727U CN204632741U CN 204632741 U CN204632741 U CN 204632741U CN 201420872727 U CN201420872727 U CN 201420872727U CN 204632741 U CN204632741 U CN 204632741U
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- fixture
- photoelectric sensor
- control device
- programmable computer
- computer controller
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Abstract
The utility model relates to silicon wafer cleaning process technical field, particularly relates to a kind of control device of fixture vertical process position.It comprises programmable computer controller and the fixture that is arranged in processing chamber and photoelectric sensor, described photoelectric sensor is corresponding with described fixture to be arranged, for responding to the upright position of described fixture and outputing signal, described programmable computer controller is connected with described photoelectric sensor, for receiving the signal that described photoelectric sensor exports, described programmable computer controller connects and controls described fixture.Respond to the corresponding height position of fixture by photoelectric sensor and output signal, by Programmable Logic Controller to signal transacting, and FEEDBACK CONTROL fixture, thus realize the vertical process position of the online fixture of adjustment in real time, to meet different technological requirements, improve productive rate and quality, this apparatus structure is simple, safe and reliable, be easy to operation.
Description
Technical field
The utility model relates to silicon wafer cleaning process technical field, particularly relates to a kind of control device of fixture vertical process position.
Background technology
In silicon wafer cleaning process, the wafer clamping device of cleaning equipment is the core component of processing chamber, and the different step of cleaning needs to locate different technique height, coordinates the motion of rotating mechanism and liquid spray arm, completes the cleaning action of silicon chip.When wafer clamping device high speed rotating, local eddy currents is formed at silicon chip surface edge and process cavity inner surface, easily cause the Second Aggregation of liquor residue splash and molecule, increase the deposition probability of molecule at silicon chip surface, and have performance in various degree at different process height, affect Wafer Cleaning quality.Under normal circumstances, produced on-site needs high efficiency and high-quality equipment, requirement can be tested at short notice and show that rational process station is to meet different process requirements, this just requires that fixture needs high-precision control, because the technique height of fixture and rotary speed control directly to affect cleaning performance, silicon chip edge air motion can be improved in on-line tuning vertical process position, according to SEMI standard, when air flow vector and vertical direction angle are less than 14 °, error is in 20%, laminar flow can be kept at silicon chip surface, simultaneously, the residual liquor of silicon chip surface also can by rotating to total reflux in pipeline.
At present, the fixture that most manufacturers designs adopts simple mechanical means mostly for the location of technique height, the height and position of technique can not adjust according to actual cleaning performance, cleaning performance is not good, and location revision parameter needs halt device to safeguard, cannot online feedback be realized, servo control performance and on-line maintenance ability poor, constrain equipment performance and maintenance efficiency.
Therefore, for above deficiency, the utility model provides a kind of control device of fixture vertical process position.
Utility model content
(1) technical problem that will solve
The purpose of this utility model is to provide a kind of control device of fixture vertical process position, to solve the problem that existing equipment can not realize the vertical process position of the online fixture of adjustment feedback in real time, and solves complicated operation, ineffective problem.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of control device of fixture vertical process position, it comprises programmable computer controller and the fixture that is arranged in processing chamber and photoelectric sensor, described photoelectric sensor is corresponding with described fixture to be arranged, for responding to the upright position of described fixture and outputing signal, described programmable computer controller is connected with described photoelectric sensor, for receiving the signal that described photoelectric sensor exports, described programmable computer controller is connected with described fixture, for controlling described fixture.
Wherein, described fixture comprises lift servo motor, lifting guide pillar and clamping disk, and described lift servo motor is located on described lifting guide pillar, and described lifting guide pillar connects described clamping disk, and described programmable computer controller connects described servomotor.
Wherein, described lift servo motor is connected with described lifting guide pillar by leading screw, for rotational motion is converted into linear movement.
Wherein, the corresponding described lift servo motor of described photoelectric sensor is vertically arranged, for responding to the upright position of described lift servo motor.
Wherein, described upright position comprises access position, rinse and dry position and process station, described photoelectric sensor and described access position, rinses and dries position and process station is corresponding arranges.
Wherein, described photoelectric sensor adopts U-shaped micro photo electric transducer PM-L24P.
Wherein, described programmable computer controller comprises position signalling receiver module, signal record and computing module, communication module, signal output module and display module.
Wherein, described programmable computer controller adopts Bei Jialai programmable computer controller.
Wherein, described Bei Jialai programmable computer controller is provided with position threshold values and alert program.
(3) beneficial effect
Technique scheme tool of the present utility model has the following advantages: the utility model is provided with programmable computer controller and in processing chamber, is provided with fixture and photoelectric sensor, by the different vertical process station on photoelectric sensor induction fixture, and signal is outputted to programmable computer controller carry out process feedback, Programmable Logic Controller connects fixture and photoelectric sensor respectively, achieve the vertical process position of on line real-time monitoring and adjustment fixture, and do not need power-off service or restart facility to adjust vertical process position, the defect that the process station that compensate for traditional fixture cannot be located in real time, this apparatus structure is simple, safe and reliable, is easy to operation, improves the operating efficiency of equipment, in addition, this device, by Reasonable Orientation technique upright position, can reduce the pollution that molecule causes silicon chip, improve product quality.
Accompanying drawing explanation
Fig. 1 is the control device schematic diagram of the utility model embodiment fixture vertical process position.
In figure, 1: clamping disk; 2: lifting guide pillar; 3: photoelectric sensor; 4: lift servo motor; 5: programmable computer controller (PCC); 6: processing chamber.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples for illustration of the utility model, but are not used for limiting scope of the present utility model, and wherein, the PCC occurred all refers to programmable computer controller.
As shown in Figure 1, the control device of the fixture vertical process position that the utility model provides, it comprises programmable computer controller 5 and the fixture be arranged in processing chamber 6 and photoelectric sensor 3, photoelectric sensor 3 is corresponding with fixture to be arranged, for responding to the upright position of fixture and outputing signal, programmable computer controller 5 is with photoelectric sensor 3 and connect, for receiving the signal that photoelectric sensor 3 exports, programmable computer controller 5 connects and controls fixture.In the present embodiment, adopt Bei Jialai (B & R) programmable computer controller (PCC) and U-shaped micro photo electric transducer PM-L24P.By the vertical process position of photoelectric sensor induction fixture, PCC receives the vertical process position signalling of photoelectric sensor, signal is processed, and feed back signal to fixture, make fixture navigate to corresponding vertical process position according to process requirements, achieve location sensitive and regulate the function of locating.
Fixture comprises lift servo motor 4, lifting guide pillar 3 and clamping disk 1, and lift servo motor 4 is connected by leading screw and drives lifting guide pillar 3, and lifting guide pillar 3 connects clamping disk 1, and programmable computer controller 5 connects lift servo motor 4.The position of fixture is reacted by the position being arranged on the lift servo motor 4 on fixture, thus location correction position parameter, make clamping disk 1 reach the position of technological requirement, ensure that Wafer Cleaning is in optimised process position.
In the present embodiment, by three U-shaped micro photo electric transducer PM-L24P detect in real time respectively fixtures silicon chip access position, rinse and dry position and process station, and the process station actual according to technological effect adjustment, as shown in Figure 1, lift servo motor 4 is connected with Bei Jialai PCC respectively with three PM-L24P photoelectric sensors 3, during use, first, select access position as starting altitude position, this position signalling responded to by corresponding photoelectric sensor, PCC signal receiving module Received signal strength, PCC logging modle record start height and position parameter; Then, PCC communication module and signal output module effect, sending instruction makes lift servo motor run down to reach to rinse when drying position and process station, in this, as corresponding reference altitude position, when lift servo motor 4 is in operation shading light electric transducer 3, trigger the signal that puts in place, PCC Received signal strength also records corresponding reference altitude location parameter, PCC computing module calculates corresponding reference altitude position and starting altitude position difference, in this, as adjustment distance; Finally, when height and position needs Optimal Maintenance, PCC, by receiving the signal of photoelectric sensor, records the real-time height and position parameter of lift servo motor, calculating and adjust the incremental difference of distance, running the corresponding process station of arrival by controlling lift servo motor by this incremental difference.The location parameter of up-to-date setting is called before each technique, all parameter informations gather to PCC terminal control unit, each parameter and signal is shown in real time by display module effect, in this device, also by PCC system amendment writing mode, on-line monitoring correspondence position parameter real-time update location parameter, the relevant position parameter that record different process requires, up-to-date write data are read in each circulation, be saved to nearest load position, like this after a collection of Wafer Cleaning completes, can be according to actual needs, direct amendment also preserves renewal location parameter, do not need to restart or hardware operation system, fixture can be met can work in optimum process position.
By setting different position signalling input nodes, at least comprise silicon chip access position, rinse and dry position and process station, the Desired Height parameter of photo-sensor feedback servomotor and real-time parameter, PCC record also computed altitude parameter, control lift servo motor again and run to the diverse location state meeting technological requirement, PCC can adjust the technique height of fixture online in real time, meet different technique requirement for height, simultaneously, the on-line control of technique height further improves the air motion of silicon chip edge, air-flow is made to keep laminar motion at silicon chip surface, reduce the Second Aggregation that cleaning fluid remains splash and molecule, improve the cleaning quality of silicon chip.
In addition, the setting of this device is reported to the police spacing, the safe operation of protection technical process, when deviation (being greater than alert locations threshold value) appears in physical location, reports to the police, stop current location change operation in the man-machine interface prompting of PCC.
In sum, the control device of the fixture vertical process position that the utility model provides, structure is simple, safe and reliable, is easy to operation, can realize on line real-time monitoring vertical process position and carry out parameters revision maintenance, increasing work efficiency and the quality of production.
The above is only preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite not departing from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection range of the present utility model.
Claims (8)
1. the control device of a fixture vertical process position, it is characterized in that, the fixture comprising programmable computer controller and be arranged in processing chamber and photoelectric sensor, described photoelectric sensor is corresponding with described fixture to be arranged, for responding to the upright position of described fixture and outputing signal, described programmable computer controller is connected with described photoelectric sensor, for receiving the signal that described photoelectric sensor exports, described programmable computer controller is connected with described fixture, for controlling described fixture.
2. the control device of fixture vertical process position according to claim 1, it is characterized in that, described fixture comprises lift servo motor, lifting guide pillar and clamping disk, described lift servo motor is located on described lifting guide pillar, described lifting guide pillar connects described clamping disk, and described programmable computer controller connects described servomotor.
3. the control device of fixture vertical process position according to claim 2, is characterized in that, described lift servo motor is connected with described lifting guide pillar by leading screw, for rotational motion is converted into linear movement.
4. the control device of fixture vertical process position according to claim 2, is characterized in that, the corresponding described lift servo motor of described photoelectric sensor is vertically arranged, for responding to the upright position of described lift servo motor.
5. the control device of fixture vertical process position according to claim 4, it is characterized in that, described upright position comprises access position, rinse and dry position and process station, described photoelectric sensor and described access position, rinses and dries position and process station is corresponding arranges.
6. the control device of fixture vertical process position according to claim 1, is characterized in that, described photoelectric sensor adopts U-shaped micro photo electric transducer PM-L24P.
7. the control device of fixture vertical process position according to claim 1, it is characterized in that, described programmable computer controller comprises position signalling receiver module, signal record and computing module, communication module, signal output module and display module.
8. the control device of fixture vertical process position according to claim 1, is characterized in that, described programmable computer controller adopts Bei Jialai programmable computer controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420872727.4U CN204632741U (en) | 2014-12-31 | 2014-12-31 | A kind of control device of fixture vertical process position |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420872727.4U CN204632741U (en) | 2014-12-31 | 2014-12-31 | A kind of control device of fixture vertical process position |
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| CN204632741U true CN204632741U (en) | 2015-09-09 |
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| CN201420872727.4U Active CN204632741U (en) | 2014-12-31 | 2014-12-31 | A kind of control device of fixture vertical process position |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108072789A (en) * | 2016-11-11 | 2018-05-25 | 弗兰克公司 | Contactless Electric Power Measurement System |
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2014
- 2014-12-31 CN CN201420872727.4U patent/CN204632741U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108072789A (en) * | 2016-11-11 | 2018-05-25 | 弗兰克公司 | Contactless Electric Power Measurement System |
| CN108072789B (en) * | 2016-11-11 | 2022-01-18 | 弗兰克公司 | Non-contact electrical parameter measuring system |
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