CN204559881U - 一种mems麦克风的封装结构 - Google Patents
一种mems麦克风的封装结构 Download PDFInfo
- Publication number
- CN204559881U CN204559881U CN201520288361.0U CN201520288361U CN204559881U CN 204559881 U CN204559881 U CN 204559881U CN 201520288361 U CN201520288361 U CN 201520288361U CN 204559881 U CN204559881 U CN 204559881U
- Authority
- CN
- China
- Prior art keywords
- absorbing layer
- packaging
- base plate
- encapsulating structure
- package casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004806 packaging method and process Methods 0.000 claims abstract description 27
- 238000009738 saturating Methods 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 6
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Soundproofing, Sound Blocking, And Sound Damping (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201520288361.0U CN204559881U (zh) | 2015-05-06 | 2015-05-06 | 一种mems麦克风的封装结构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201520288361.0U CN204559881U (zh) | 2015-05-06 | 2015-05-06 | 一种mems麦克风的封装结构 |
Publications (1)
Publication Number | Publication Date |
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CN204559881U true CN204559881U (zh) | 2015-08-12 |
Family
ID=53834949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201520288361.0U Expired - Fee Related CN204559881U (zh) | 2015-05-06 | 2015-05-06 | 一种mems麦克风的封装结构 |
Country Status (1)
Country | Link |
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CN (1) | CN204559881U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104822117A (zh) * | 2015-05-06 | 2015-08-05 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构 |
-
2015
- 2015-05-06 CN CN201520288361.0U patent/CN204559881U/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104822117A (zh) * | 2015-05-06 | 2015-08-05 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构 |
WO2016176994A1 (zh) * | 2015-05-06 | 2016-11-10 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构 |
CN104822117B (zh) * | 2015-05-06 | 2018-08-03 | 歌尔股份有限公司 | 一种mems麦克风的封装结构 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200610 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150812 |
|
CF01 | Termination of patent right due to non-payment of annual fee |