CN204530020U - A kind of crucible supporting frame for high temperature induction heater - Google Patents
A kind of crucible supporting frame for high temperature induction heater Download PDFInfo
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- CN204530020U CN204530020U CN201520005581.8U CN201520005581U CN204530020U CN 204530020 U CN204530020 U CN 204530020U CN 201520005581 U CN201520005581 U CN 201520005581U CN 204530020 U CN204530020 U CN 204530020U
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- pallet
- support bar
- crucible
- supporting frame
- slot
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- General Induction Heating (AREA)
Abstract
The utility model discloses a kind of crucible supporting frame for high temperature induction heater, comprise: pallet and support bar, pallet is quartzy material, its upper side is provided with boss structure, downside is provided with cross slot, and supporting bar top is provided with the plug of " cross bar " type matched with slot, bottom is connected on hoisting appliance; The plug of support bar is plugged in the slot of pallet.Crucible is arranged on boss structure, and lagging material is mounted and fixed on the pallet around boss structure, effective fixing crucible and lagging material; Because quartz material fusing point is 1750 DEG C, high temperature resistant and pallet can be avoided to respond to the impact of heating on crystal growth temperature-field for insulating material, there is utilization to realize warm field control and control; Supporting bar top is " cross bar " structure, and the bottom of pallet is cross inserting slot construction, and because the material thermal expansion factor of support bar and pallet is different, both guarantees not close connects; Simple and practical and with low cost.
Description
Technical field
The utility model belongs to crystal growth and high-temperature heat treatment field, particularly a kind of for the crucible support apparatus in high temperature induction heater.
Background technology
Aluminum nitride crystal is third generation semiconductor material with wide forbidden band, is the ideal material preparing ultraviolet photoelectron device, high frequency and high power device.Its theoretical fusing point is 2800 DEG C, understands pressure 20MPa, is therefore difficult to adopt melt vertical pulling method or temperature gradient solidification technology to carry out crystal growth.High-temperature physics Vapor Transport is the main stream approach of current growing AIN crystal.The gedanken experiment condition of AlN crystal growth is: growth temperature range is at 1900 to 2200 DEG C, and nitrogen pressure is 90KPa, and in crucible, the thermograde of seed crystal and raw material is 10K/cm.For realizing above-mentioned growth conditions, growth apparatus adopts Medium Frequency Induction Heating Furnace usually, uses plumbago crucible and TaC crucible to be heating element.The principle of induction heating is: when alternating current by a certain frequency in ruhmkorff coil, the alternating flux of same frequency will be produced, alternating flux produces induced potential in heating body weight, thus produce induced current (eddy current), powerful eddy current flows in heating member, because the electricresistance effect of heating member can produce a large amount of joule heating, realize heating.
In crystal growing process, in coil, the material of heating member and shape will directly affect heating efficiency and temperature distribution.As shown in Figure 1, heating member crucible 1 and lagging material 2 are placed on the crucible supporting frame 3 that same lifting device is connected structure in induction heater, and in order to realize the warm field needed, crucible 1 can be elevated in coil 4.Because crucible supporting frame 3 is generally metal or graphite material, induced current heating can be produced in heat-processed, and be coupled with crucible 1 thermal field together with heating member, thus the heterogeneity phantom that impact is overall, be unfavorable for carrying out temperature control and adjustment.This shows, in ruhmkorff coil the material of heating member and shape extremely important when crystal growth.
Utility model content
For prior art Problems existing, the purpose of this utility model is to provide a kind of crucible holder for high temperature induction heater.
For achieving the above object, a kind of crucible supporting frame for high temperature induction heater of the utility model, comprise: pallet and support bar, described pallet is placed in the furnace chamber of induction heater, pallet is quartzy material, its upper side is provided with boss structure, downside is provided with cross slot, and described supporting bar top is provided with the plug of " cross bar " type matched with described slot, bottom is stretched out described induction heater furnace chamber and is connected on hoisting appliance; The described plug of support bar is plugged in the slot of pallet.
Further, described pallet is disk, and described boss structure is the round platform coaxial with described disk, and the diameter of described round platform is less than the diameter of disk.
Further, described support bar and described pallet are coaxially arranged, and support bar is made up of heating resisting metal or graphite material.
Further, described support bar bottom is provided with connecting joint, and described connecting joint is provided with screw thread, and described connecting joint is arranged on described hoisting appliance by screw thread.
Crucible is arranged on boss structure, and lagging material is mounted and fixed on the pallet around boss structure, effective fixing crucible and lagging material; Because quartz material fusing point is 1750 DEG C, high temperature resistant and pallet can be avoided to respond to the impact of heating on crystal growth temperature-field for insulating material, there is utilization to realize warm field control and control; Supporting bar top is " cross bar " structure, and the bottom of pallet is cross inserting slot construction, and because the material thermal expansion factor of support bar and pallet is different, both guarantees not close connects, and ensures with one heart; It is simple and practical and with low cost.
Accompanying drawing explanation
Fig. 1 is the structural representation in existing induction heater;
Fig. 2 is the structural representation of crucible supporting frame in the utility model;
Fig. 3 is the end view of pallet in crucible supporting frame;
Fig. 4 is the structural representation of support bar in crucible supporting frame;
Fig. 5 is the vertical view of Fig. 4.
Embodiment
Below, with reference to accompanying drawing, the utility model is more fully illustrated, shown in the drawings of exemplary embodiment of the present utility model.But the utility model can be presented as multiple multi-form, and should not be construed as the exemplary embodiment being confined to describe here.But, these embodiments are provided, thus make the utility model comprehensively with complete, and scope of the present utility model is fully conveyed to those of ordinary skill in the art.
For ease of illustrating, here can use such as " on ", the space relative terms such as D score " left side " " right side ", for illustration of the element of shown in figure or the feature relation relative to another element or feature.It should be understood that except the orientation shown in figure, spatial terminology is intended to comprise device different azimuth in use or operation.Such as, if the device in figure is squeezed, be stated as the element being positioned at other elements or feature D score will be positioned at other elements or feature " on ".Therefore, exemplary term D score can comprise upper and lower both orientation.Device can otherwise be located (90-degree rotation or be positioned at other orientation), and space used here illustrates relatively can correspondingly explain.
As Fig. 2, Fig. 3, Fig. 4 with Figure 5 shows that the specific embodiment of the utility model for the crucible supporting frame of high temperature induction heater, as can be seen from the figure crucible holder comprises: pallet 5 and support bar 7, pallet 5 is placed in the furnace chamber of induction heater, pallet 5 is quartzy material, collar plate shape is arranged to by pallet 5, the upper side of pallet 5 is provided with boss structure 6, and boss structure 6 is the round platform coaxial with disk, and the diameter of boss structure 6 is less than the diameter of pallet 5.The downside of pallet 5 is provided with cross slot 9, and support bar 7 is setting up and down, and the top of support bar 7 is provided with the plug 10 of " cross bar " type, and the structure of plug 10 and the structure of slot 9 match, and plug 10 is plugged in slot 9.The bottom of support bar 7 is provided with connecting joint 8, and connecting joint 8 is provided with screw thread, and the bottom of support bar 7 is stretched out induction heater furnace chamber and is arranged on hoisting appliance by screw thread by connecting joint 8.Support bar 7 and pallet 5 are coaxially arranged, and support bar 7 is made up of heating resisting metal or graphite material.
During use, be arranged on by crucible on the table top of boss structure 6, lagging material is mounted and fixed on the table top of the pallet 5 around boss structure 6, effective fixing crucible and lagging material; Because quartz material fusing point is 1750 DEG C, high temperature resistant and pallet 5 can be avoided to respond to the impact of heating on crystal growth temperature-field for insulating material; Support bar 7 top is " cross bar " structure, and the bottom of pallet 5 is cross inserting slot construction, and because the material thermal expansion factor of support bar 7 and pallet 5 is different, both guarantees not close connects, and ensures with one heart; It is simple and practical and with low cost.
Claims (4)
1. the crucible supporting frame for high temperature induction heater, it is characterized in that, this crucible supporting frame comprises: pallet and support bar, described pallet is placed in the furnace chamber of induction heater, pallet is quartzy material, its upper side is provided with boss structure, downside is provided with cross slot, and described supporting bar top is provided with the plug of " cross bar " type matched with described slot, bottom is stretched out described induction heater furnace chamber and is connected on hoisting appliance; The described plug of support bar is plugged in the slot of pallet.
2. crucible supporting frame as claimed in claim 1, it is characterized in that, described pallet is disk, and described boss structure is the round platform coaxial with described disk, and the diameter of described round platform is less than the diameter of disk.
3. crucible supporting frame as claimed in claim 1, it is characterized in that, described support bar and described pallet are coaxially arranged, and support bar is made up of heating resisting metal or graphite material.
4. crucible supporting frame as claimed in claim 1, it is characterized in that, described support bar bottom is provided with connecting joint, and described connecting joint is provided with screw thread, and described connecting joint is arranged on described hoisting appliance by screw thread.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520005581.8U CN204530020U (en) | 2015-01-06 | 2015-01-06 | A kind of crucible supporting frame for high temperature induction heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520005581.8U CN204530020U (en) | 2015-01-06 | 2015-01-06 | A kind of crucible supporting frame for high temperature induction heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204530020U true CN204530020U (en) | 2015-08-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520005581.8U Active CN204530020U (en) | 2015-01-06 | 2015-01-06 | A kind of crucible supporting frame for high temperature induction heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204530020U (en) |
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2015
- 2015-01-06 CN CN201520005581.8U patent/CN204530020U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A crucible support frame for high temperature induction heating stove Effective date of registration: 20151117 Granted publication date: 20150805 Pledgee: Medium range Leasing Co. Ltd. Pledgor: Beijing Huajin Chuangwei Electronics Co., Ltd. Registration number: 2015990001011 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20180814 Granted publication date: 20150805 |
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| PP01 | Preservation of patent right | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20200810 Granted publication date: 20150805 |
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| PD01 | Discharge of preservation of patent |