CN204481003U - For the mobile sealing device of wafer process chamber - Google Patents
For the mobile sealing device of wafer process chamber Download PDFInfo
- Publication number
- CN204481003U CN204481003U CN201520070981.7U CN201520070981U CN204481003U CN 204481003 U CN204481003 U CN 204481003U CN 201520070981 U CN201520070981 U CN 201520070981U CN 204481003 U CN204481003 U CN 204481003U
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- CN
- China
- Prior art keywords
- sliding panel
- outer sliding
- sealing device
- wafer
- mobile sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of mobile sealing device for wafer process chamber, by inside sliding panel outside, interior sliding panel is set, in the process moved up and down along with outer sliding panel at interior sliding panel, all the time the wafer being positioned at processing chamber picks and places the inner side of mouth, make wafer process process herb liquid can only be splashed on interior sliding panel, and flow back to processing chamber inside along interior sliding panel, avoid liquid flow out processing chamber and cause corrosion to the parts of outside or pollute.
Description
Technical field
The utility model relates to semiconductor integrated circuit manufacturing equipment technical field, particularly a kind of mobile sealing device for wafer process chamber.
Background technology
Along with the development of semiconductor manufacturing equipment, also more and more higher to the manufacture process requirement of IC wafers.In the technical process of wafer; usual meeting is along with corrosive liquids such as strong acid and strong bases; if these corrosive liquids contact with metal components and parts; usually can cause serious corrosion to it, therefore, the microenvironment for wafer process chamber interior has higher requirement; in order to ensure a good inside microenvironment; need to seal the processing chamber of wafer periphery, to make the environment of wafer and surrounding completely cut off, to avoid other parts of the liquid corrosions such as soda acid.But meanwhile, carry out capturing with the process of placing to wafer at manipulator, inevitably make again processing chamber be communicated with external environment condition.For making wafer reduce the impact of external environment condition on it as much as possible in technical process, after wafer is placed, should seal timely processing chamber, to ensure the technological requirement of processing chamber.
Prior art provides a kind of sealing device of the movable type for wafer process chamber, before manipulator enters processing chamber, the slippage of mobile sealing device is to enable possition, enter in processing chamber to enable manipulator and carry out capturing to wafer and place, after manipulator exits processing chamber, this device is used to seal in time processing chamber.
Chinese utility model patent ZL 201220652756.2 provides a kind of mobile sealing device, and it comprises mobile sealing plate, drive unit, guide rail and guide rail slide block; Described guide rail is connected with guide rail slide block; Described mobile sealing plate one end is connected with guide rail slide block, and the other end is connected with drive unit.Chinese utility model patent ZL 201220653964.2 provides another kind of movable type sealed device, it comprises drive unit and carriage, described carriage comprises the slipper seal plate guide rail parallel with two, described slipper seal plate is slidably installed on described two guide rails, described drive unit is connected with described slipper seal plate, and its link position is between two guide rails.
Visible, the principle of above-mentioned two pieces patented technology is all that timely sliding closing chamber picks and places the sealing plate of mouth and seals processing chamber after manipulator completes the process picking and placeing sheet, solves processing chamber and the isolated problem of external environment condition to a certain extent.
But all there is certain problem in these two patents: the former have employed the one-sided type of drive of slipper seal plate, can make sealing plate discontinuity, easily occur stuck phenomenon in moving process.Although the latter drive unit is placed on sealing plate centre position, alleviate stuck problem to a certain extent, but this slipper seal plate is positioned at chamber in the technical process of wafer picks and places mouth place, wafer is meeting High Rotation Speed in technical process, the chemical liquid on its surface can splashes under the influence of centrifugal force, so just likely can splash on slipper seal plate, because the outside of processing chamber is located at by slipper seal plate, such drop can go out along slipper seal plate current, and then corrode or pollute the parts of exterior thereto, as manipulator traversing gear etc.The former also has such problem at patent.In addition, the carriage of the technical scheme of these two kinds of patents all adopts guide rail to lead, and adopts sliding friction between guide rail and bearing, and contact force is comparatively large, and operating efficiency is not high, and easily stuck, damage parts.
Utility model content
The utility model is in order to solve the problems of the technologies described above, and a kind of mobile sealing device for wafer process chamber is provided, to be splashed on sealing plate to avoid wafer process process herb liquid and to flow out along sealing plate, thus corrosion or pollute the parts of processing chamber outside.
The utility model provides a kind of mobile sealing device for wafer process chamber, and the wafer being located at processing chamber picks and places mouth, and it comprises:
Article two, guide rail, is located at the both sides that wafer picks and places mouth respectively;
Outer sliding panel, its both sides are connected with described two guide rails, make it move up and down along guide rail;
Interior sliding panel, fixes with described outer sliding panel and picks and places the existing opening and closing of cause for gossip to move up and down along with outer sliding panel to wafer, and it is positioned at wafer and picks and places inside mouth;
Actuator, is connected with described outer sliding panel, moves up and down to drive described outer sliding panel.
Further, between described interior sliding panel and outer sliding panel, there is gap, stretching into the lower edge supplying wafer to pick and place mouth when moving down, making described interior sliding panel remain in wafer and picking and placeing inside mouth.
Further, the upper edge of described interior sliding panel and outer sliding panel fixes.
Further, described outer sliding panel both sides are provided with the linear axes bearing member of non-close loop configuration, and described two guiding edge insert in the loop configuration of described linear axes bearing member.
Further, in the loop configuration of described linear axes bearing member, be also provided with the roller that can contact with described guiding edge, described linear axes bearing member is connected for rolling with guide rail.
Further, between the roller in the linear axes bearing member of described outer sliding panel both sides and guiding edge, there is adjustable clearance.
Further, described outer sliding panel both sides have through hole and connect described linear axes bearing member to penetrate screw, and described through hole is horizontal Long Circle, regulates the gap of described linear axes bearing member internal trolley and guide rail for described screw transverse shifting.
Further, described actuator is connected to the centre position of described outer sliding panel.
Further, described actuator is connected with contiguous block by regulating block with outer sliding panel, and described regulating block is fixed on outer sliding panel, and described contiguous block is connected with regulating block and actuator respectively.
Further, described actuator has the limit sensors detecting and move up and down stroke.
The mobile sealing device that the utility model provides, favorable sealing property, by inside sliding panel outside, interior sliding panel is set, in the process moved up and down along with outer sliding panel at interior sliding panel, all the time the wafer being positioned at processing chamber picks and places the inner side of mouth, wafer process process herb liquid can only be splashed on interior sliding panel, and flow back to processing chamber inside along interior sliding panel, avoid liquid flow out processing chamber and cause corrosion to the parts of outside or pollute.
Accompanying drawing explanation
For the purpose of this utility model, feature and advantage clearlyer can be understood, below with reference to accompanying drawing, preferred embodiment of the present utility model is described in detail, wherein:
Fig. 1 and Fig. 2 is the structural representation of the utility model mobile sealing device;
Fig. 3 is the structural representation that the utility model mobile sealing device is installed on that processing chamber wafer picks and places mouth;
Fig. 4 is the end view that the utility model mobile sealing device is installed on that processing chamber wafer picks and places mouth;
Fig. 5 is the structural representation of the utility model mobile sealing device China and foreign countries sliding panel;
Fig. 6 is the structural representation of interior sliding panel in the utility model mobile sealing device;
Fig. 7 and Fig. 8 is the structural representation of contiguous block in the utility model mobile sealing device;
Fig. 9 and Figure 10 is the structural representation of regulating block in the utility model mobile sealing device;
Figure 11 is the structural representation of the utility model mobile sealing device middle guide;
Figure 12 is the structural representation of the utility model mobile sealing device neutral line bearing part;
Figure 13 is the connection diagram of the utility model mobile sealing device neutral line bearing part and guide rail;
Figure 14 is the structural representation of actuator in the utility model mobile sealing device.
Embodiment
Please refer to Fig. 1 to Fig. 4, the mobile sealing device for wafer process chamber in the present embodiment, its wafer being located at processing chamber 2 picks and places mouth 21, and it comprises:
Article two, guide rail 11, is located at the both sides that wafer picks and places mouth 21 respectively;
Outer sliding panel 12, its both sides are connected with two guide rails 11, make it move up and down along guide rail 11;
Interior sliding panel 13, fixes with outer sliding panel 12 and picks and places mouth 21 to move up and down along with outer sliding panel 12 to wafer and realize opening and closing, and it is positioned at wafer and picks and places inside mouth 21;
Actuator 14, is connected with outer sliding panel 12, moves up and down to drive outer sliding panel 12.
The mobile sealing device of the present embodiment, favorable sealing property, by inside sliding panel 12 outside, interior sliding panel 13 is set, in the process moved up and down along with outer sliding panel 12 at interior sliding panel 13 (being driven by actuator 14), all the time the wafer being positioned at processing chamber 2 picks and places the inner side of mouth 21, make wafer process process herb liquid can only be splashed on interior sliding panel 13, and it is inner to flow back to processing chamber 2 along interior sliding panel 13, liquid is avoided to flow out processing chamber 2 and cause corrosion to the parts of outside or pollute.
Preferably there is gap between sliding panel and outer sliding panel in the utility model, stretching into the lower edge supplying wafer to pick and place mouth when moving down, making interior sliding panel remain in wafer and picking and placeing inside mouth, as shown in Figure 4.Interior sliding panel of the present utility model can have various ways with being fixedly connected with of outer sliding panel, as long as sliding panel can move up and down along with outer sliding panel in ensureing, and is positioned at wafer all the time and picks and places inside mouth.In the present embodiment, the upper edge of interior sliding panel and outer sliding panel fixes, to form the large area gap along below, under picking and placeing mouth for wafer, edge is stretched into, as shown in Figure 5 and Figure 6, the upper edge of outer sliding panel offers the first through hole 121, and the upper edge of interior sliding panel is formed with raised line 131, raised line 131 offers second through hole 132 corresponding with the first through hole 121, screw inserts the first through hole and the second through hole with sliding panel and outer sliding panel in fixing.
Outer sliding panel in the present embodiment and interior sliding panel can adopt the dustless and nonmetallic materials of acid-alkali-corrosive-resisting to make, as PVC etc., to prevent from producing the technological effect that molecule has influence on wafer because being corroded or vibrate.
Outer sliding panel both sides in the utility model and guide rail can be multiple connected modes, as long as outer sliding panel can be made to move up and down along guide rail.The present embodiment is preferably for outer sliding panel 12 both sides are provided with the linear axes bearing member 122 of non-close loop configuration, as shown in Fig. 2 and Figure 12, guide rail 11 edge is the arc-shaped structure 111 matched with loop configuration, as shown in figure 11, guide rail 11 edge is made to insert in the loop configuration of linear axes bearing member 121, thus realize outer sliding panel moving up and down along guide rail, as shown in figure 13.
In a preferred embodiment, the roller 1221 that can contact with guiding edge is also provided with in the loop configuration of linear axes bearing member 122, as shown in figure 12, linear axes bearing member is connected for rolling with guide rail, reduce coefficient of friction and the frictional force reduced in moving process, improve the smooth degree that outer sliding panel moves up and down, effectively prevent the generation of mechanical self-latching phenomenon, and reduce actuating force and can improve drive efficiency.More preferably, between the roller in linear axes bearing member and guiding edge, there is adjustable clearance, to avoid stuck phenomenon, and improve the smooth degree of movement further.
In order to reduce because of processing factors the impact that installation accuracy causes, also in order to can roller in linear adjustment bearing part and the gap between guide rail, outer sliding panel 12 both sides have horizontal Long Circle through hole 123 to penetrate screw connecting linear bearing part 122, the gap of linear adjustment bearing part internal trolley and guide rail is come, as shown in Figure 5 for screw transverse shifting.
In order to make outer sliding panel drive uniform force in moving up and down, actuator 14 is preferably connected to the centre position of outer sliding panel 12 by the present embodiment.The connected mode of outer sliding panel and actuator can have various ways, as long as actuator can drive outer sliding panel to move up and down.The present embodiment is preferably that actuator 14 is connected with contiguous block 16 by regulating block 15 with outer sliding panel 12, as shown in Fig. 7 to Figure 10 and Fig. 1, regulating block 15 is fixed on through hole 124 place in the middle of outer sliding panel 12 by screw, as shown in Figure 5, the top bulge loop of contiguous block 16 snaps in the shrinkage pool of regulating block 15, and the bottom of contiguous block 16 is connected with actuator 14.
Actuator of the present utility model can provide the device of power for cylinder, hydraulic cylinder or motor etc., actuator in the present embodiment comprises cylinder block 141, guide rod 142, support 143 form, support 143 is for being fixed on the places such as processing chamber bottom by cylinder block 141, cylinder block 141 drive leader 142 moves up and down, the top of guide rod 142 is connected with bottom contiguous block 16, picks and places mouth carry out opening and closing to drive outer sliding panel and interior sliding panel to wafer.The actuator of the present embodiment preferably also comprises limit sensors 144, is located at the high-low limit position of guide rod 142, detects the stroke moved up and down.
Claims (10)
1., for a mobile sealing device for wafer process chamber, the wafer being located at processing chamber picks and places mouth, it is characterized in that, it comprises:
Article two, guide rail, is located at the both sides that wafer picks and places mouth respectively;
Outer sliding panel, its both sides are connected with described two guide rails, make it move up and down along guide rail;
Interior sliding panel, fixes with described outer sliding panel and picks and places the existing opening and closing of cause for gossip to move up and down along with outer sliding panel to wafer, and it is positioned at wafer and picks and places inside mouth;
Actuator, is connected with described outer sliding panel, moves up and down to drive described outer sliding panel.
2. mobile sealing device according to claim 1, is characterized in that: have gap between described interior sliding panel and outer sliding panel, stretching into, making described interior sliding panel remain in wafer and picking and placeing inside mouth with the lower edge supplying wafer to pick and place mouth when moving down.
3. mobile sealing device according to claim 2, is characterized in that: the upper edge of described interior sliding panel and outer sliding panel fixes.
4. the mobile sealing device according to any one of claims 1 to 3, is characterized in that: described outer sliding panel both sides are provided with the linear axes bearing member of non-close loop configuration, and described two guiding edge insert in the loop configuration of described linear axes bearing member.
5. mobile sealing device according to claim 4, is characterized in that: be also provided with the roller that can contact with described guiding edge in the loop configuration of described linear axes bearing member, and described linear axes bearing member is connected for rolling with guide rail.
6. mobile sealing device according to claim 5, is characterized in that: have adjustable clearance between the roller in the linear axes bearing member of described outer sliding panel both sides and guiding edge.
7. mobile sealing device according to claim 6, it is characterized in that: described outer sliding panel both sides have through hole and connect described linear axes bearing member to penetrate screw, described through hole is horizontal Long Circle, regulates the gap of described linear axes bearing member internal trolley and guide rail for described screw transverse shifting.
8. the mobile sealing device according to any one of claims 1 to 3, is characterized in that: described actuator is connected to the centre position of described outer sliding panel.
9. mobile sealing device according to claim 8, is characterized in that: described actuator is connected with contiguous block by regulating block with outer sliding panel, described regulating block is fixed on outer sliding panel, and described contiguous block is connected with regulating block and actuator respectively.
10. the mobile sealing device according to any one of claims 1 to 3, is characterized in that: described actuator has the limit sensors detecting and move up and down stroke.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520070981.7U CN204481003U (en) | 2015-02-02 | 2015-02-02 | For the mobile sealing device of wafer process chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520070981.7U CN204481003U (en) | 2015-02-02 | 2015-02-02 | For the mobile sealing device of wafer process chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204481003U true CN204481003U (en) | 2015-07-15 |
Family
ID=53636780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520070981.7U Withdrawn - After Issue CN204481003U (en) | 2015-02-02 | 2015-02-02 | For the mobile sealing device of wafer process chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204481003U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104658949A (en) * | 2015-02-02 | 2015-05-27 | 北京七星华创电子股份有限公司 | Movable type sealing device |
-
2015
- 2015-02-02 CN CN201520070981.7U patent/CN204481003U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104658949A (en) * | 2015-02-02 | 2015-05-27 | 北京七星华创电子股份有限公司 | Movable type sealing device |
| CN104658949B (en) * | 2015-02-02 | 2017-10-17 | 北京七星华创电子股份有限公司 | Mobile sealing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150715 Effective date of abandoning: 20171017 |