CN204469482U - 一种用于mocvd机台的除尘装置 - Google Patents
一种用于mocvd机台的除尘装置 Download PDFInfo
- Publication number
- CN204469482U CN204469482U CN201520081766.7U CN201520081766U CN204469482U CN 204469482 U CN204469482 U CN 204469482U CN 201520081766 U CN201520081766 U CN 201520081766U CN 204469482 U CN204469482 U CN 204469482U
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- CN
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- Prior art keywords
- dust
- gas
- dust arrester
- exhaust apparatus
- mocvd
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- 239000000428 dust Substances 0.000 title claims abstract description 85
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 title claims abstract description 31
- 239000007789 gas Substances 0.000 claims abstract description 49
- 238000010926 purge Methods 0.000 claims abstract description 18
- 238000011084 recovery Methods 0.000 claims abstract description 18
- 239000002245 particle Substances 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims description 18
- 238000007599 discharging Methods 0.000 claims description 7
- 239000002912 waste gas Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000007787 solid Substances 0.000 claims description 3
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims description 2
- 238000010408 sweeping Methods 0.000 claims description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 22
- 229910021529 ammonia Inorganic materials 0.000 abstract description 11
- 238000001914 filtration Methods 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 238000004064 recycling Methods 0.000 abstract description 2
- 239000002699 waste material Substances 0.000 abstract 1
- 239000002737 fuel gas Substances 0.000 description 6
- 239000008187 granular material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 238000010079 rubber tapping Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520081766.7U CN204469482U (zh) | 2015-02-05 | 2015-02-05 | 一种用于mocvd机台的除尘装置 |
Applications Claiming Priority (1)
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CN201520081766.7U CN204469482U (zh) | 2015-02-05 | 2015-02-05 | 一种用于mocvd机台的除尘装置 |
Publications (1)
Publication Number | Publication Date |
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CN204469482U true CN204469482U (zh) | 2015-07-15 |
Family
ID=53625218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201520081766.7U Active CN204469482U (zh) | 2015-02-05 | 2015-02-05 | 一种用于mocvd机台的除尘装置 |
Country Status (1)
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CN (1) | CN204469482U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105736103A (zh) * | 2016-05-04 | 2016-07-06 | 淮安信息职业技术学院 | 发动机尾气净化装置 |
CN109572033A (zh) * | 2018-11-28 | 2019-04-05 | 杜亮 | 增压机压制制动片灰尘回收再利用装置 |
-
2015
- 2015-02-05 CN CN201520081766.7U patent/CN204469482U/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105736103A (zh) * | 2016-05-04 | 2016-07-06 | 淮安信息职业技术学院 | 发动机尾气净化装置 |
CN105736103B (zh) * | 2016-05-04 | 2018-04-13 | 淮安信息职业技术学院 | 发动机尾气净化装置 |
CN109572033A (zh) * | 2018-11-28 | 2019-04-05 | 杜亮 | 增压机压制制动片灰尘回收再利用装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160928 Address after: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee after: Anhui three Gas Co. Ltd. Address before: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee before: Anhui San'an Optoelectronics Co., Ltd. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20180704 Address after: 241000 8 Tung Liang Road, Wuhu economic and Technological Development Zone, Anhui Patentee after: Anhui San'an Optoelectronics Co., Ltd. Address before: 241000 8 Tung Liang Road, Wuhu economic and Technological Development Zone, Anhui Patentee before: Anhui three Gas Co. Ltd. |
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TR01 | Transfer of patent right |