CN204429223U - High-precision standard gas distribution equipment - Google Patents

High-precision standard gas distribution equipment Download PDF

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Publication number
CN204429223U
CN204429223U CN201420795759.9U CN201420795759U CN204429223U CN 204429223 U CN204429223 U CN 204429223U CN 201420795759 U CN201420795759 U CN 201420795759U CN 204429223 U CN204429223 U CN 204429223U
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gas cylinder
finished product
gas
pipeline
product gas
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CN201420795759.9U
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孙书校
孙成军
于洪涛
郑建瓴
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DALIAN GUANGMING SPECIAL GAS PRODUCTS Co Ltd
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DALIAN GUANGMING SPECIAL GAS PRODUCTS Co Ltd
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Abstract

The utility model discloses a kind of High-precision standard gas distribution equipment, it is characterized in that: described air distributing device comprises multiple raw material gas cylinder (1) be connected by pipeline with finished product gas cylinder (2), and all raw material gas cylinders (1) are all parallel with one another, the pipeline of each raw material gas cylinder (1) is provided with mass flow controller (3) and electrically-controlled valve (4), the air inlet pipeline of finished product gas cylinder (2) is provided with Pressure gauge (5), finished product gas cylinder (2) is also connected with vavuum pump (6) by pipeline, described finished product gas cylinder (2) is placed on electronic balance (7), finished product gas cylinder (2) and electronic balance (7) are then arranged in insulating box (8), temperature sensor (9) is also provided with in insulating box (8), mass flow controller (3) is connected by the control circuit of signal processing circuit with magnetic valve (4) with electronic balance (7).This is that a kind of structure is simple, can change back and forth, and can ensure the device for distributing standard gas of gas products high accuracy, high-quality between Devince By Dynamic Gas Ration Method and static volumetric method.

Description

High-precision standard gas distribution equipment
Technical field
The utility model relates to a kind of air distributing device, particularly a kind of High-precision standard gas distribution equipment.
Background technology
At present, calibrating gas, as a kind of standard reference material, is widely used in petrochemical industry, medical treatment, electric power, semiconductor, intermetallic composite coating and field of scientific study.Along with the continuous expansion of demand, the production and supply amount of domestic standard gas is also in cumulative year after year.Meanwhile adjoint is requirements at the higher level to calibrating gas quality and precision.The compound method of normal mixture body can be divided into static volumetric method and Devince By Dynamic Gas Ration Method from aerodynamic point.Static volumetric method refers to and a certain amount of gaseous state or steam-like unstrpped gas is added in the container of a constant volume, then is filled with diluent gas, and mixing is obtained.Wherein, gravimetric method is the main method of the preparation standard mist of generally acknowledging in the world at present, when using the method to carry out gas preparation, do not need the pressure to gas, viscosity, the parameters such as temperature correct, not by the impact of gas function of state P, V, T, directly can be traceable to the measurement of fundamental quantity quality, the concentration value accuracy of the normal mixture body therefore made is high and accurately and reliably.
But some gas chemistry is active, adsorption phenomena may be there is even chemical reaction occurs in long-time contact with gas cylinder wall, this will cause the inaccuracy of preparation gas component concentrations, thus, for Standard Gases large usage quantity or pass into the longer experimental work of component gas time, static volumetric method can not meet the demands again, and dynamic method need be adopted to carry out the preparation of gas.And dynamic method also also exists some intrinsic problems and is difficult to solve, in the error of its balance weights, environment temperature, humidity, bottle and the control of manifold pressure and manual operation time the error that produces all can impact the quality of product.
Summary of the invention
The utility model is the above-mentioned deficiency in order to solve existing for prior art, proposes a kind of structure simple, can change back and forth, and can ensure the device for distributing standard gas of gas products high accuracy, high-quality between Devince By Dynamic Gas Ration Method and static volumetric method.
Technical solution of the present utility model is: a kind of High-precision standard gas distribution equipment, it is characterized in that: described air distributing device comprises multiple raw material gas cylinder 1 be connected by pipeline with finished product gas cylinder 2, and all raw material gas cylinders 1 are all parallel with one another, the pipeline of each raw material gas cylinder 1 is provided with mass flow controller 3 and electrically-controlled valve 4, the air inlet pipeline of finished product gas cylinder 2 is provided with Pressure gauge 5, finished product gas cylinder 2 is also connected with vavuum pump 6 by pipeline, described finished product gas cylinder 2 is placed on electronic balance 7, finished product gas cylinder 2 and electronic balance 7 are then arranged in insulating box 8, temperature sensor 9 is also provided with in insulating box 8, mass flow controller 3 is connected by the control circuit of signal processing circuit with magnetic valve 4 with electronic balance 7.
Described Pressure gauge 5 is can alarm electric contact manometer.
Compared with the existing technology, tool has the following advantages the utility model:
The High-precision standard gas distribution equipment of this kind of version, its structure is simple, designs ingenious, rationally distributed.It is for all deficiencies existing for traditional air distributing device, designs a kind of special structure composition.Its component air inflow takes the two-way automatic control of inlet end and outlet side, after the air inflow of inlet end reaches the setting value of mass flow controller, is transferred to the unlatching of electrically-controlled valve controller by-pass valve control by signal processing circuit; The content of each component gas in finished product gas cylinder can be determined to be filled into according to the difference of the reading of electronic balance display in outlet side, and by the unlatching of electrically-controlled valve controller by-pass valve control, realize the two-way automatic control that component is filled with, to ensure the accuracy of each component gas air inflow in calibrating gas process for preparation; The Devince By Dynamic Gas Ration Method that this air distributing device can be applicable to according to the physics of required preparation gas component and chemical characteristic unrestricted choice or static volumetric method complete gas preparation.Therefore can say that it has possessed multiple advantage, be particularly suitable for applying in the art, its market prospects are very wide.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment.
Fig. 2 is the circuit block diagram of the utility model embodiment.
Detailed description of the invention
Below in conjunction with accompanying drawing, detailed description of the invention of the present utility model is described.As shown in Figure 1 and Figure 2: a kind of High-precision standard gas distribution equipment, it comprises multiple raw material gas cylinder 1 be connected with finished product gas cylinder 2 by pipeline, and all raw material gas cylinders 1 are all parallel with one another, the pipeline of each raw material gas cylinder 1 is provided with mass flow controller 3 and electrically-controlled valve 4, the air inlet pipeline of finished product gas cylinder 2 is provided with Pressure gauge 5, and this Pressure gauge 5 is selected can alarm electric contact manometer; Finished product gas cylinder 2 is also connected with vavuum pump 6 by pipeline, and described finished product gas cylinder 2 is placed on electronic balance 7, and finished product gas cylinder 2 and electronic balance 7 are all arranged in insulating box 8, in insulating box 8, be also provided with temperature sensor 9, mass flow controller 3 is connected by the control circuit of signal processing circuit with magnetic valve 4 with electronic balance 7.
Before carrying out distribution work, according to real composition kind and the content requirement of gas, calculate charge pressure, and can alarm electric contact manometer to Pressure gauge 5(according to this force value) carry out design of pressure, thus realize the real-time monitoring of charge pressure, once there is abnormal automatic alarm immediately, avoid the carelessness that may occur during manual monitoring.
Being positioned over by finished product gas cylinder 2 is provided with in the insulating box 8 of temperature sensor 9, according to the actual conditions of preparation gas, insulating box 8 is set to optimal temperature, ensures the absolute stability of gas, thus realizes the preparation of more high-precision calibrating gas.
Before calibrating gas preparation, first calculate each component according to the saturated vapor pressure of each component gas and densimeter need to add to the quality of finished product gas cylinder 2 and pressure and set " preset value ", intake active according to the gas component of institute's configuration standard gas and the time that passes into determine air distributing method afterwards.
The static weight method preparation of calibrating gas: first, utilize vavuum pump 6 pairs of finished product gas cylinders 2 to vacuumize process, after being disposed, according to addition and the admission pressure of each component, mass flow controller 3, electronic balance 7 and Pressure gauge 5 are preset.Meanwhile, according to the physics and chemistry character of configured gas, select the temperature that optimum carries out gas preparation, the insulating box 8 at finished product gas cylinder 2 place is set to optimal temperature.Open the mass flow controller 3 on the pipeline of component gas A place and electrically-controlled valve 4 afterwards, utilize mass flow controller 3 from inlet end monitoring component gas air inflow, simultaneously, electronic balance 7 is monitored from component gas output in real time to the component tolerance collected, two ends all by signal processing circuit by the gaseous mass signal transmission collected to electrically-controlled valve controller, when shown by inlet end and component gas output be filled with quality reach preset value simultaneously time, electrically-controlled valve 4 closes automatically, block air inlet pipe, complete component and be filled with.
Afterwards according to the kind of institute's configuration standard gas, according to said method, be filled with each component gas successively, to complete the static weight method preparation of calibrating gas.
The dynamic method preparation of calibrating gas: when required preparation gas component chemical property is active or the distribution time is longer, then select dynamic method to carry out the preparation of calibrating gas.First electronic balance 7 is closed, unidirectional control is adopted to the air inflow of each component gas, before configuration, equally process is vacuumized, after being disposed to finished product gas cylinder 2, according to addition and the admission pressure of each component, mass flow controller 3 and Pressure gauge 5 are preset.Meanwhile, according to the physics and chemistry character of configured gas, select the temperature that optimum carries out gas preparation, the insulating box 8 at finished product gas cylinder 2 place is set to optimal temperature.Open the mass flow controller 3 on each component gas branch road and electrically-controlled valve 4 afterwards simultaneously, start component gas and fill.Mass flow controller 3 is according to the component gas intake calculated in advance, monitor in real time each being filled with of component gas, when constituent content reaches preset value, electrically-controlled valve controller then controls electrically-controlled valve 4 and automatically closes, to complete being filled with of each component gas, realize the automatic configuration of dynamic method.

Claims (2)

1. a High-precision standard gas distribution equipment, it is characterized in that: described air distributing device comprises multiple raw material gas cylinder (1) be connected by pipeline with finished product gas cylinder (2), and all raw material gas cylinders (1) are all parallel with one another, the pipeline of each raw material gas cylinder (1) is provided with mass flow controller (3) and electrically-controlled valve (4), the air inlet pipeline of finished product gas cylinder (2) is provided with Pressure gauge (5), finished product gas cylinder (2) is also connected with vavuum pump (6) by pipeline, described finished product gas cylinder (2) is placed on electronic balance (7), finished product gas cylinder (2) and electronic balance (7) are then arranged in insulating box (8), temperature sensor (9) is also provided with in insulating box (8), mass flow controller (3) is connected by the control circuit of signal processing circuit with magnetic valve (4) with electronic balance (7).
2. High-precision standard gas distribution equipment according to claim 1, is characterized in that: described Pressure gauge (5) is can alarm electric contact manometer.
CN201420795759.9U 2014-12-17 2014-12-17 High-precision standard gas distribution equipment Active CN204429223U (en)

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372285A (en) * 2015-10-22 2016-03-02 西安交通大学 Experimental facility for measuring flow-across object surface heat exchange characteristics of low-density gas
CN105388257A (en) * 2015-12-04 2016-03-09 重庆市荣冠科技有限公司 Gas distributing device for production
CN105617898A (en) * 2015-12-29 2016-06-01 厦门大学 CO2 mixed gas preparing device
CN105822897A (en) * 2016-05-13 2016-08-03 国家电网公司 Method and device for dynamic gas mixing and filling under pressure within wide range
CN107597016A (en) * 2017-09-22 2018-01-19 杭州杭氧股份有限公司 A kind of High-precision standard gas-dynamic mixing system and distributing precision control method
CN107694359A (en) * 2017-10-25 2018-02-16 中国原子能科学研究院 A kind of preparation facilities and preparation method of hydrogen deuterium Standard Gases
CN107789999A (en) * 2016-08-30 2018-03-13 中国石油天然气股份有限公司 Device and method for preparing multi-bottle mixed standard gas
CN108031314A (en) * 2017-12-11 2018-05-15 苏州金宏气体股份有限公司 A kind of mixed gas preparation method
CN108176324A (en) * 2017-12-29 2018-06-19 和立气体(上海)有限公司 A kind of automated gas divider of hydrogen and phosphine
CN111649227A (en) * 2020-06-16 2020-09-11 大连三木气体有限公司 Steel cylinder charging system and method for mixed gas
CN112098473A (en) * 2020-08-18 2020-12-18 国网河北省电力有限公司电力科学研究院 Preparation method and evaluation method of sphere-like tungsten trioxide sensitive material and sulfur dioxide gas sensor
CN114137164A (en) * 2021-12-06 2022-03-04 安徽庆宇光电科技有限公司 Jet pipe structure and motor vehicle tail gas remote sensing monitoring facilities

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372285B (en) * 2015-10-22 2018-03-13 西安交通大学 The experimental provision of body surface heat transfer characteristic is plunderred outside a kind of measurement low density gas
CN105372285A (en) * 2015-10-22 2016-03-02 西安交通大学 Experimental facility for measuring flow-across object surface heat exchange characteristics of low-density gas
CN105388257A (en) * 2015-12-04 2016-03-09 重庆市荣冠科技有限公司 Gas distributing device for production
CN105617898A (en) * 2015-12-29 2016-06-01 厦门大学 CO2 mixed gas preparing device
CN105617898B (en) * 2015-12-29 2019-01-22 厦门大学 A kind of carbon dioxide gas mixture preparation facilities
CN105822897A (en) * 2016-05-13 2016-08-03 国家电网公司 Method and device for dynamic gas mixing and filling under pressure within wide range
CN107789999A (en) * 2016-08-30 2018-03-13 中国石油天然气股份有限公司 Device and method for preparing multi-bottle mixed standard gas
CN107597016B (en) * 2017-09-22 2020-03-31 衢州杭氧特种气体有限公司 High-precision standard gas dynamic mixing system and proportioning precision control method
CN107597016A (en) * 2017-09-22 2018-01-19 杭州杭氧股份有限公司 A kind of High-precision standard gas-dynamic mixing system and distributing precision control method
CN107694359A (en) * 2017-10-25 2018-02-16 中国原子能科学研究院 A kind of preparation facilities and preparation method of hydrogen deuterium Standard Gases
CN107694359B (en) * 2017-10-25 2024-07-23 中国原子能科学研究院 Preparation device and preparation method of hydrogen deuterium standard gas
CN108031314A (en) * 2017-12-11 2018-05-15 苏州金宏气体股份有限公司 A kind of mixed gas preparation method
CN108176324A (en) * 2017-12-29 2018-06-19 和立气体(上海)有限公司 A kind of automated gas divider of hydrogen and phosphine
CN111649227A (en) * 2020-06-16 2020-09-11 大连三木气体有限公司 Steel cylinder charging system and method for mixed gas
CN112098473A (en) * 2020-08-18 2020-12-18 国网河北省电力有限公司电力科学研究院 Preparation method and evaluation method of sphere-like tungsten trioxide sensitive material and sulfur dioxide gas sensor
CN114137164A (en) * 2021-12-06 2022-03-04 安徽庆宇光电科技有限公司 Jet pipe structure and motor vehicle tail gas remote sensing monitoring facilities
CN114137164B (en) * 2021-12-06 2023-12-19 安徽庆宇光电科技有限公司 Air jet pipe structure and motor vehicle tail gas remote sensing monitoring equipment

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