CN204768546U - Automatic distributing device of electron level mist - Google Patents
Automatic distributing device of electron level mist Download PDFInfo
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- CN204768546U CN204768546U CN201520442175.8U CN201520442175U CN204768546U CN 204768546 U CN204768546 U CN 204768546U CN 201520442175 U CN201520442175 U CN 201520442175U CN 204768546 U CN204768546 U CN 204768546U
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Abstract
The utility model discloses an automatic distributing device of electron level mist, the device distribution accuracy nature is high, and stability is good, the impurity content low, and the resource of just can using manpower sparingly greatly improves work efficiency. Specifically include: raw materials gas cylinder, control by temperature change unit, vacuum unit, product gas cylinder, electronic balance and the control unit. Wherein the product gas cylinder is placed on electronic balance, and the output of saying through pipeline and the gas supply pipe who is provided with solenoid valve and check valve links to each other, the raw materials gas cylinder links to each other with the input that gas supply pipe said through the pipeline that sets gradually diaphragm valve and solenoid valve. Solenoid valve in the device and electronic balance's outlet terminal link to each other with the control unit respectively, through the whole distribution process of the control unit control.
Description
Technical field
The utility model relates to a kind of mist air distributing device, belongs to the field of gas distribution of mist.
Background technology
Traditional gaseous mixture air distributing device is manual operation mostly, and operating personnel must calculate and set each component raw material gaseous mass in advance, and then fill respectively, exists a lot of not enough in gas purity, distribution error, air distribution efficiency etc.At present, the research for conventional mist is more.Patent CN201324604Y discloses a kind of standard automatic distributing device for mixed gas, there are electronic balance and air inlet pipe, the output of electronic balance is connected with electrically-controlled valve controller by signal processing circuit, the content being filled into each component in finished product gas cylinder can be determined according to the difference of the reading of electronic balance display, and by the unlatching of electric control valve controller by-pass valve control, realize automatically being filled with component gas.But said apparatus is mainly for the preparation of normal mixture body, but owing to interfering with each other between unstrpped gas, environmental gas, easily cause weighing error, and introduce foreign gas, reduce the degree of accuracy and the repeatability of distribution.
Along with semiconductor devices and integrated circuit production development, electron level mist demand is got more and more, requires also more and more higher, require that the gas degree of accuracy is high, good stability, impurity content are low.Its limitation is there is in said apparatus for the preparation of high pure electronic mist.
Summary of the invention
In view of this, the utility model provides a kind of electron level mist automated gas divider, and this device distribution accuracy is high, and good stability, impurity content are low, and greatly can save human resources, increase work efficiency.
Described electron level mist automated gas divider comprises: raw material gas cylinder, temperature conditioning unit, vacuum unit, product gas cylinder, electronic balance and control unit; Described raw material gas cylinder comprises component gas cylinder and dilution gas cylinder, and described temperature conditioning unit comprises heater and controls the magnetic valve of described heater folding; Described vacuum unit comprises vacuum extractor and controls the magnetic valve of described vacuum extractor folding.
Its annexation is: described component gas cylinder is connected with the input of gas transmission pipeline with the pipeline of magnetic valve A by being disposed with diaphragm valve, and the gas outlet of described dilution gas cylinder is connected with the input of gas transmission pipeline with the pipeline of magnetic valve B by being disposed with diaphragm valve; Described gas transmission pipeline arranges temperature conditioning unit and vacuum unit respectively; Described product gas cylinder is placed on electronic balance, and product gas cylinder is connected with the output of gas transmission pipeline with the pipeline of check valve by being provided with magnetic valve C; The outlet terminal of described electronic balance is connected with control unit; Above-mentioned all magnetic valves are all connected with described control unit.
As a kind of preferred embodiment of the present utility model, described heater is heating tape or heater strip.
As a kind of preferred embodiment of the present utility model, described vacuum means is set to dry molecular pump group.
Beneficial effect is:
(1) this device distribution precision is high, and institute's gas distribution impurity content is low, is provided with temperature conditioning unit and vacuum unit in a device, is vacuumized by vacuum unit before distribution to gas transmission pipeline, can eliminate the impact of foreign gas; Temperature conditioning unit heats gas transmission pipeline before distribution, thus under vacuum, can eliminate the impact of moisture; Enable this device reach electron level mist distribution requirement thus, thus make hyperpure gas.
(2) owing to using solenoid control in distribution process, if solenoid control is not normal, then unstrpped gas can be caused to pollute, reduce gaseous mixture value accuracy.Especially for toxic gas, then likely cause Leakage Gas, there is potential safety hazard.Therefore check valve is set between product gas cylinder and magnetic valve C, valve leak dusty gas can be avoided.
(3) vacuum unit adopts molecular pump group, at short notice gas transmission pipeline can be evacuated to high vacuum state.
Accompanying drawing explanation
Fig. 1 is the schematic block diagram of this automated gas divider.
Wherein: 1-electronic balance, 2-check valve, 3-magnetic valve C, 4-magnetic valve B, 5-magnetic valve A, 6-diaphragm valve, 7-gas transmission pipeline
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is described in further detail.
The present embodiment provides a kind of electron level mist automated gas divider, and the structure of this air distributing device as shown in Figure 1, comprising: raw material gas cylinder, temperature conditioning unit, vacuum unit, magnetic valve, check valve 2, product gas cylinder, electronic balance 1 and control unit.Wherein raw material gas cylinder comprises component gas cylinder and dilution gas cylinder, in the present embodiment, temperature conditioning unit adopts efficient heating tape or heater strip, vacuum unit adopts dry molecular pump group, and electronic balance 1 adopts high Accuracy Electronic Balance, and namely sensibility reciprocal is less than or equal to the electronic balance of 10mg.
Its annexation is: the gas outlet of described component gas cylinder is connected with the input of gas transmission pipeline 7 with the pipeline A of magnetic valve A5 by being disposed with diaphragm valve 6, and the gas outlet of described dilution gas cylinder is connected with the input of gas transmission pipeline 7 with the pipeline B of magnetic valve B4 by being disposed with diaphragm valve 6; Described magnetic valve A5 is connected with control unit respectively with magnetic valve B4.Described gas transmission pipeline 7 is respectively arranged with temperature conditioning unit and vacuum unit, opens open and be connected with control unit respectively with the magnetic valve of closing with the magnetic valve of closing and for controlling vacuum unit for controlling temperature conditioning unit.
Described control temperature conditioning unit is used for heating gas transmission pipeline 7 before distribution, under vacuum, eliminates the impact of moisture; Vacuum unit is used in the short time, gas transmission pipeline 7 being evacuated to high vacuum state before distribution, thus eliminates the impact of foreign gas, makes this device reach electron level mist distribution requirement.Described product gas cylinder is placed on high Accuracy Electronic Balance 1, and the air inlet of product gas cylinder is connected with the output of gas transmission pipeline 7 with the pipeline C of check valve 2 by being provided with magnetic valve C3.The outlet terminal of described high Accuracy Electronic Balance 1 is connected with control unit, and control unit reads and the weighing value of recording balance automatically, the folding of Controlling solenoid valve A5, magnetic valve B4 and magnetic valve C3.
The general operation flow process of this automated gas divider is:
(1) according to the unstripped gas kind of wanted mixed gas compounding, component gas cylinder and dilution gas cylinder are accessed gas transmission pipeline 7 respectively.The kind of the required mist of control unit foundation setting and concentration, product gas cylinder volume, distribution pressure, flow, the component gas filled needed for calculating and the quality of diluent gas.
(2) control unit opens the magnetic valve for controlling temperature conditioning unit, and heater strip heats gas transmission pipeline 7, makes the thermostatic of gas transmission pipeline 7 at 60-70 DEG C.
(3) when the temperature constant of gas transmission pipeline 7 is after 60-70 DEG C, control unit opens the magnetic valve for controlling vacuum unit, and dry molecular pump vacuumizes gas transmission pipeline 7, when the vacuum of gas transmission pipeline 7 reaches 1 × 10
-3during below Pa, control unit closes temperature conditioning unit and vacuum unit automatically.
(4), after temperature conditioning unit and vacuum unit are closed, control unit opens magnetic valve A5 and magnetic valve C3, fills component gas by gas transmission pipeline 7 in product gas cylinder.When the uniform quality of the component gas filled needed for calculating in the filling weight and step (1) of component gas, control unit shut electromagnetic valve A5, and record is filled with the quality of the component gas in product gas cylinder, completes filling of component gas thus.
(5), after component gas fills, control unit repeats above-mentioned steps (2) and (3) and again heats gas transmission pipeline 7 and vacuumize.
(6), after heating vacuumizes end again, control unit opens magnetic valve B4, fills diluent gas by gas transmission pipeline 7 in product gas cylinder.When the uniform quality of the diluent gas filled needed for calculating in the filling weight and step (1) of diluent gas, control unit shut electromagnetic valve A5 and magnetic valve C3, and record is filled with the quality of the diluent gas in product gas cylinder, completes filling of diluent gas thus.
(7) control unit is according to the filling weight of the component gas that records and diluent gas in step (4) and step (6), calculating mixture strength.
In the present embodiment, gas transmission pipeline 7 adopts the 316L stainless steel pipeline of inside and outside polishing, and valve and accessory thereof also adopt 316L polishing, ensure that the purity requirements of air distributing device.Meanwhile, vacuum unit uses dry molecular pump group, can prepare the oily explosive mists of chance such as comprising oxygen.
This air distributing device can also prepare Diversity gas.
In sum, these are only preferred embodiment of the present utility model, be not intended to limit protection domain of the present utility model.All within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (3)
1. an electron level mist automated gas divider, is characterized in that, comprising: raw material gas cylinder, temperature conditioning unit, vacuum unit, product gas cylinder, electronic balance and control unit; Described raw material gas cylinder comprises component gas cylinder and dilution gas cylinder, and described temperature conditioning unit comprises heater and controls the magnetic valve of described heater folding; Described vacuum unit comprises vacuum extractor and controls the magnetic valve of described vacuum extractor folding;
Its annexation is: described component gas cylinder is connected with the input of gas transmission pipeline with the pipeline of magnetic valve A by being disposed with diaphragm valve, and the gas outlet of described dilution gas cylinder is connected with the input of gas transmission pipeline with the pipeline of magnetic valve B by being disposed with diaphragm valve; Described gas transmission pipeline arranges temperature conditioning unit and vacuum unit respectively; Described product gas cylinder is placed on electronic balance, and product gas cylinder is connected with the output of gas transmission pipeline with the pipeline of check valve by being provided with magnetic valve C; The outlet terminal of described electronic balance is connected with control unit; Above-mentioned all magnetic valves are all connected with described control unit.
2. electron level mist automated gas divider as claimed in claim 1, it is characterized in that, described heater is heating tape or heater strip.
3. electron level mist automated gas divider as claimed in claim 1, it is characterized in that, described vacuum means is set to dry molecular pump group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520442175.8U CN204768546U (en) | 2015-06-25 | 2015-06-25 | Automatic distributing device of electron level mist |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520442175.8U CN204768546U (en) | 2015-06-25 | 2015-06-25 | Automatic distributing device of electron level mist |
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| CN204768546U true CN204768546U (en) | 2015-11-18 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105805544A (en) * | 2016-05-13 | 2016-07-27 | 国家电网公司 | Standard gas preparation and device used for verification of SF6 analyzing instrument |
| CN106378019A (en) * | 2016-10-20 | 2017-02-08 | 福建久策气体集团有限公司 | Preparation device of toxic electronic mixed gas and preparation method thereof |
| CN108745010A (en) * | 2018-06-20 | 2018-11-06 | 福建久策气体集团有限公司 | A kind of severe toxicity electronics gaseous mixture configuration technique |
| CN112180033A (en) * | 2019-07-04 | 2021-01-05 | 西安西电开关电气有限公司 | Gas mixing device and gas mixing method |
-
2015
- 2015-06-25 CN CN201520442175.8U patent/CN204768546U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105805544A (en) * | 2016-05-13 | 2016-07-27 | 国家电网公司 | Standard gas preparation and device used for verification of SF6 analyzing instrument |
| CN106378019A (en) * | 2016-10-20 | 2017-02-08 | 福建久策气体集团有限公司 | Preparation device of toxic electronic mixed gas and preparation method thereof |
| CN108745010A (en) * | 2018-06-20 | 2018-11-06 | 福建久策气体集团有限公司 | A kind of severe toxicity electronics gaseous mixture configuration technique |
| CN112180033A (en) * | 2019-07-04 | 2021-01-05 | 西安西电开关电气有限公司 | Gas mixing device and gas mixing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190617 Address after: 057550 No. 1 Weiwu Road, Chemical Industry Agglomeration Area, Feixiang County, Handan City, Hebei Province Patentee after: CSIC (Handan) Perry Special Gas Co. Ltd Address before: 056027 17 Exhibition Road, Handan, Hebei Patentee before: No.718 Inst., China Shipping Heavy Industry Group Co. |
|
| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 057550 No. five Weir Road, chemical industry gathering area, Feixiang District, Handan, Hebei, 1 Patentee after: China shipbuilding (Handan) Perry Special Gas Co.,Ltd. Address before: No.1 Weiwu Road, chemical industry gathering area, Feixiang County, Handan City, Hebei Province Patentee before: PERIC SPECIAL GASES Co.,Ltd. |
|
| CP03 | Change of name, title or address |