CN108745010A - A kind of severe toxicity electronics gaseous mixture configuration technique - Google Patents
A kind of severe toxicity electronics gaseous mixture configuration technique Download PDFInfo
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- CN108745010A CN108745010A CN201810634486.2A CN201810634486A CN108745010A CN 108745010 A CN108745010 A CN 108745010A CN 201810634486 A CN201810634486 A CN 201810634486A CN 108745010 A CN108745010 A CN 108745010A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
- B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
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Abstract
The present invention proposes a kind of hypertoxic electronics gaseous mixture configuration technique, and the configuration technique includes the prewired calculating of component successively, the displacement of preparation preceding pipeline, component gas quantitatively controls severe toxicity, Balance Air unidirectionally quantitatively controls；Configuration technique further includes tail gas exhaust processing, gas filling bottle component ratio has checked；When the gaseous mixture for carrying out configuration technique fills, first fill the few component of gas content, after fill component more than gas content；The present invention helps to promote the quality of hypertoxic electronics gaseous mixture.
Description
Technical field
The present invention relates to gas mixing configuration technology field, especially a kind of hypertoxic electronics gaseous mixture configuration technique.
Background technology
It is almost each from the encapsulation for growing device to the end of chip in microelectronics, opto-electronic device production process
Step, each link be unable to do without electronics gaseous mixture, therefore, electronics gaseous mixture be commonly referred to as semi-conducting material " grain " and
" source ".The usually used electronics gaseous mixture overwhelming majority is hypertoxic, flammable.The quality of one performance of semiconductor device,
It is heavily dependent on electronics mixed gas quality used.The preparing process of electronics gaseous mixture often improves a class, all can
Semiconductor devices qualitative leap is greatly pushed, just because of this, many developed countries and international well-known Gas Plant commercial city are positive
Research and develop the preparation with independent intellectual property right and production technology.And the research and production of China's electronic gas are started late, electronics
Gaseous mixture is mostly inflammable, explosive, severe poisonous chemicals, belongs to control scope in the world, and import is relatively cumbersome, the haul-cycle time compared with
It is long, it need to fundamentally solve the problems, such as the source of electronics gaseous mixture.
Invention content
The present invention proposes a kind of hypertoxic electronics gaseous mixture configuration technique, contributes to the quality for promoting hypertoxic electronics gaseous mixture.
The present invention uses following technical scheme.
A kind of severe toxicity electronics gaseous mixture configuration technique, the configuration technique, which includes that component is prewired successively, to be calculated, prepares front tube
Road displacement, component gas quantitatively controls severe toxicity, Balance Air unidirectionally quantitatively controls；Configuration technique further includes tail gas exhaust processing, has filled
Gas cylinder component ratio checks；When carry out configuration technique gaseous mixture fill when, first fill the few component of gas content, after fill gas
Component more than body content；
The prewired calculating of component, method are that it is pre- to calculate each component by equation of gas state PV=ZnRT according to production requirement
With quality, in calculating process, each component quality accurately control with gram or gram or less unit；
The preparation preceding pipeline displacement, method are will to weigh and record numerical value after with gas cylinder access air distribution system, then beat
Open the gas in vacuum valve extraction pipeline, using Balance Air or high-purity helium to pipeline carry out cleaning displacement three times or three times with
On, and pipeline is made to keep vacuum degree 10pa or less；
The severe toxicity component gas quantitatively controls, and method is that the quality of component gas A to be prepared is calculated according to the equation of gas state
After pressure, purity more than or equal to 99.9% component gas A pressure improve to pressure value after be filled with target gas through intake valve again
Bottle, be charged to that electronic scale show be filled with numerical value it is consistent with calculated value after, then closing raw material components air valve and target successively
Gas cylinder valve；Subsequent exhausting pipeline residual air be used in combination high-purity helium or Balance Air to carry out 5 times or more displacement and evacuation to air distribution system
Operation, to after the completion of air distribution system displacement plus after high-purity helium a to atmospheric pressure, taking out the target gas for being incorporated component gas A
Bottle, and the numerical value of record is weighed to calculate the quality of component gas A in gas cylinder by weight scale；
The Balance Air unidirectionally quantitatively controls, method be calculated according to the actual mass of component gas A in target gas cylinder it is total
Then mole calculates required Balance Air quality and partial pressure, the Balance Air pressure purity greatly equal to 99.999% is promoted to greatly
It is filled with target gas cylinder after the pressure of component gas in gas cylinder, then through Balance Air breather check valve door knob Balance Air, until electronic scale
After showing that numerical value is consistent with Balance Air calculated value, then Balance Air breather check valve door and target gas cylinder valve are closed successively；
Subsequent exhausting pipeline residual air is used in combination nitrogen displacement to evacuate 5 times or more air distribution system, and after the completion of displacement plus nitrogen is to an air
Pressure takes out the target gas cylinder for being filled with Balance Air, and weighs the numerical value of record by weight scale to calculate gas cylinder inner equilibrium makings
Amount.
The tail gas exhaust processing, method are, unified to import in tail gas absorber the pump drainage gas in configuration technique
It is focused on, which is material filling type spray column, and absorbing liquid is potassium permanganate or hydrogen peroxide and absorbing liquid is dense
Degree is not less than 20%.
The component ratio of gas filling bottle checks, the qualitative data of the component gas and Balance Air that are filled with according to method,
Formula, which is calculated, using molar concentration calculates each component content：
The molar concentration calculates formula
；
Mi is the quality for being filled with i components in bottle, unit g in formula;
Mj is the quality for being filled with j components in bottle, unit g;
Mi is the molal weight for being filled with i components in bottle, unit mol;
Mj is the molal weight for being filled with j components in bottle, unit mol;
When the error of the practical compound concentration that the checking computations of gas filling bottle component ratio are calculated and prewired concentration is when within 1%, can sentence
Fixed gas filling bottle is the certified products that gaseous mixture configures prepared by technique.
The component is prewired to be calculated, prepares preceding pipeline displacement, component gas quantitatively controls severe toxicity, Balance Air unidirectionally quantitatively controls
It carries out in negative pressure chamber, is communicated with tail gas absorber equipped with exhaust equipment in negative pressure chamber.
The present invention quantitatively controls hypertoxic component gas, the unidirectional quantitative system of Balance Air sets the stringent strategy that fills, and
And with gas to carrying out cleaning displacement to pipeline before filling every time, so as to the component proportion standard being effectively ensured in filling gas cylinder
Really.
Description of the drawings
The present invention is described in more detail with reference to the accompanying drawings and detailed description：
Attached drawing 1 is equipment schematic diagram used in technique of the present invention；
In figure：1- negative pressure chamber；2- weight scales；3- target gas cylinders；4- tail gas absorbers；5- exhaust equipments；6- balances gas cylinder group；
7- raw material groups.
Specific implementation mode
As shown in Figure 1, a kind of severe toxicity electronics gaseous mixture configuration technique, the configuration technique includes the prewired meter of component successively
It calculates, prepare preceding pipeline displacement, component gas quantitatively controls severe toxicity, Balance Air unidirectionally quantitatively controls；Configuration technique further includes that tail gas is taken out
Row's processing, gas filling bottle component ratio has checked；When the gaseous mixture for carrying out configuration technique fills, the few group of gas content is first filled
Point, after fill component more than gas content；
The prewired calculating of component, method are that it is pre- to calculate each component by equation of gas state PV=ZnRT according to production requirement
With quality, in calculating process, each component quality accurately control with gram or gram or less unit；
The preparation preceding pipeline displacement, method are will to weigh and record numerical value after with gas cylinder access air distribution system, then beat
Open the gas in vacuum valve extraction pipeline, using Balance Air or high-purity helium to pipeline carry out cleaning displacement three times or three times with
On, and pipeline is made to keep vacuum degree 10pa or less；
The severe toxicity component gas quantitatively controls, and method is that the quality of component gas A to be prepared is calculated according to the equation of gas state
After pressure, purity more than or equal to 99.9% component gas A pressure improve to pressure value after be filled with target gas through intake valve again
Bottle, be charged to that electronic scale show be filled with numerical value it is consistent with calculated value after, then 7 gas-separating valve door of closing raw material group and target successively
3 valve of gas cylinder；Subsequent exhausting pipeline residual air be used in combination high-purity helium or Balance Air to carry out 5 times or more displacement and pumping to air distribution system
Idle job, to after the completion of air distribution system displacement plus after high-purity helium a to atmospheric pressure, taking out the target gas for being incorporated component gas A
Bottle, and the numerical value of record is weighed to calculate the quality of component gas A in gas cylinder by weight scale 2；
The Balance Air unidirectionally quantitatively controls, method be calculated according to the actual mass of component gas A in target gas cylinder it is total
Then mole calculates required Balance Air quality and partial pressure, the Balance Air pressure purity greatly equal to 99.999% is promoted to greatly
It is filled with target gas cylinder after the pressure of component gas in gas cylinder, then through Balance Air breather check valve door knob Balance Air, until electronic scale
After showing that numerical value is consistent with Balance Air calculated value, then Balance Air breather check valve door and target gas cylinder valve are closed successively；
Subsequent exhausting pipeline residual air is used in combination nitrogen displacement to evacuate 5 times or more air distribution system, and after the completion of displacement plus nitrogen is to an air
Pressure takes out the target gas cylinder for being filled with Balance Air, and weighs the numerical value of record by weight scale to calculate gas cylinder inner equilibrium makings
Amount.
The tail gas exhaust processing, method are, unified to import tail gas absorber 4 the pump drainage gas in configuration technique
In focused on, which is material filling type spray column, and absorbing liquid is potassium permanganate or hydrogen peroxide and absorbing liquid
Concentration is not less than 20%.
The component ratio of gas filling bottle checks, the qualitative data of the component gas and Balance Air that are filled with according to method,
Formula, which is calculated, using molar concentration calculates each component content：
The molar concentration calculates formula
；
Mi is the quality for being filled with i components in bottle, unit g in formula;
Mj is the quality for being filled with j components in bottle, unit g;
Mi is the molal weight for being filled with i components in bottle, unit mol;
Mj is the molal weight for being filled with j components in bottle, unit mol;
When the error of the practical compound concentration that the checking computations of gas filling bottle component ratio are calculated and prewired concentration is when within 1%, can sentence
Fixed gas filling bottle is the certified products that gaseous mixture configures prepared by technique.
The component is prewired to be calculated, prepares preceding pipeline displacement, component gas quantitatively controls severe toxicity, Balance Air unidirectionally quantitatively controls
It carries out in negative pressure chamber 1, is communicated with tail gas absorber equipped with exhaust equipment 5 in negative pressure chamber.
Claims (5)
1. a kind of severe toxicity electronics gaseous mixture configuration technique, it is characterised in that：The configuration technique successively include component it is prewired calculate,
The displacement of preparation preceding pipeline, component gas quantitatively controls severe toxicity, Balance Air unidirectionally quantitatively controls；Configuration technique further includes at tail gas exhaust
Reason, gas filling bottle component ratio check；When the gaseous mixture for carrying out configuration technique fills, the few component of gas content is first filled,
The component more than gas content is filled afterwards；
The prewired calculating of component, method are that it is pre- to calculate each component by equation of gas state PV=ZnRT according to production requirement
With quality, in calculating process, each component quality accurately control with gram or gram or less unit；
The preparation preceding pipeline displacement, method are will to weigh and record numerical value after with gas cylinder access air distribution system, then beat
Open the gas in vacuum valve extraction pipeline, using Balance Air or high-purity helium to pipeline carry out cleaning displacement three times or three times with
On, and pipeline is made to keep vacuum degree 10pa or less；
The severe toxicity component gas quantitatively controls, and method is that the quality of component gas A to be prepared is calculated according to the equation of gas state
After pressure, purity more than or equal to 99.9% component gas A pressure improve to pressure value after be filled with target gas through intake valve again
Bottle, be charged to that electronic scale show be filled with numerical value it is consistent with calculated value after, then closing raw material components air valve and target successively
Gas cylinder valve；Subsequent exhausting pipeline residual air be used in combination high-purity helium or Balance Air to carry out 5 times or more displacement and evacuation to air distribution system
Operation, to after the completion of air distribution system displacement plus after high-purity helium a to atmospheric pressure, taking out the target gas for being incorporated component gas A
Bottle, and the numerical value of record is weighed to calculate the quality of component gas A in gas cylinder by weight scale；
The Balance Air unidirectionally quantitatively controls, method be calculated according to the actual mass of component gas A in target gas cylinder it is total
Then mole calculates required Balance Air quality and partial pressure, the Balance Air pressure purity greatly equal to 99.999% is promoted to greatly
It is filled with target gas cylinder after the pressure of component gas in gas cylinder, then through Balance Air breather check valve door knob Balance Air, until electronic scale
After showing that numerical value is consistent with Balance Air calculated value, then Balance Air breather check valve door and target gas cylinder valve are closed successively；
Subsequent exhausting pipeline residual air is used in combination nitrogen displacement to evacuate 5 times or more air distribution system, and after the completion of displacement plus nitrogen is to an air
Pressure takes out the target gas cylinder for being filled with Balance Air, and weighs the numerical value of record by weight scale to calculate gas cylinder inner equilibrium makings
Amount.
2. a kind of hypertoxic electronics gaseous mixture configuration technique according to claim 1, it is characterised in that：At the tail gas exhaust
Reason, method are, the pump drainage gas in configuration technique, unified import in tail gas absorber is focused on, which inhales
Receipts tower is material filling type spray column, and absorbing liquid is potassium permanganate or hydrogen peroxide and absorbing liquid concentration is not less than 20%.
3. a kind of hypertoxic electronics gaseous mixture configuration technique according to claim 1, it is characterised in that：The gas filling bottle group
Divide ratio checking computations, the qualitative data of the component gas and Balance Air that are filled with according to method that molar concentration is used to calculate formula meter
Calculate each component content：
The molar concentration calculates formula
；
Mi is the quality for being filled with i components in bottle, unit g in formula;
Mj is the quality for being filled with j components in bottle, unit g;
Mi is the molal weight for being filled with i components in bottle, unit mol;
Mj is the molal weight for being filled with j components in bottle, unit mol.
4. a kind of hypertoxic electronics gaseous mixture configuration technique according to claim 3, it is characterised in that：When gas filling bottle component
The error for the practical compound concentration and prewired concentration that ratio checking computations are calculated can determine that gas filling bottle is gaseous mixture when within 1%
Configure certified products prepared by technique.
5. a kind of hypertoxic electronics gaseous mixture configuration technique according to claim 2, it is characterised in that：The prewired meter of component
It calculates, prepare preceding pipeline displacement, component gas quantitatively controls severe toxicity, Balance Air is unidirectionally quantitatively controlled and carried out in negative pressure chamber, negative pressure
Interior is communicated equipped with exhaust equipment with tail gas absorber.
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| CN201810634486.2A CN108745010A (en) | 2018-06-20 | 2018-06-20 | A kind of severe toxicity electronics gaseous mixture configuration technique |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111185106A (en) * | 2020-01-24 | 2020-05-22 | 杭州制氧机集团股份有限公司 | Device and method for mixing high-precision low-uncertainty binary standard gas |
| CN117387001A (en) * | 2023-12-13 | 2024-01-12 | 抚顺抚运安仪救生装备有限公司 | Gas filling and distribution control system and control method for deep diving breathing apparatus gas cylinder |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203043861U (en) * | 2013-01-20 | 2013-07-10 | 廊坊黎明气体有限公司 | Standard gas distribution device |
| WO2013154014A1 (en) * | 2012-04-13 | 2013-10-17 | 岩谷産業株式会社 | Supply method and supply device for mixed gas |
| CN203635082U (en) * | 2013-12-31 | 2014-06-11 | 上海神开气体技术有限公司 | Standard mixed gas preparation device |
| CN104959049A (en) * | 2015-06-11 | 2015-10-07 | 中国船舶重工集团公司第七一八研究所 | Ultra-pure mixed gas preparation system and method |
| CN204768546U (en) * | 2015-06-25 | 2015-11-18 | 中国船舶重工集团公司第七一八研究所 | Automatic distributing device of electron level mist |
| CN106378019A (en) * | 2016-10-20 | 2017-02-08 | 福建久策气体集团有限公司 | Preparation device of toxic electronic mixed gas and preparation method thereof |
| CN108031314A (en) * | 2017-12-11 | 2018-05-15 | 苏州金宏气体股份有限公司 | A kind of mixed gas preparation method |
-
2018
- 2018-06-20 CN CN201810634486.2A patent/CN108745010A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013154014A1 (en) * | 2012-04-13 | 2013-10-17 | 岩谷産業株式会社 | Supply method and supply device for mixed gas |
| CN203043861U (en) * | 2013-01-20 | 2013-07-10 | 廊坊黎明气体有限公司 | Standard gas distribution device |
| CN203635082U (en) * | 2013-12-31 | 2014-06-11 | 上海神开气体技术有限公司 | Standard mixed gas preparation device |
| CN104959049A (en) * | 2015-06-11 | 2015-10-07 | 中国船舶重工集团公司第七一八研究所 | Ultra-pure mixed gas preparation system and method |
| CN204768546U (en) * | 2015-06-25 | 2015-11-18 | 中国船舶重工集团公司第七一八研究所 | Automatic distributing device of electron level mist |
| CN106378019A (en) * | 2016-10-20 | 2017-02-08 | 福建久策气体集团有限公司 | Preparation device of toxic electronic mixed gas and preparation method thereof |
| CN108031314A (en) * | 2017-12-11 | 2018-05-15 | 苏州金宏气体股份有限公司 | A kind of mixed gas preparation method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111185106A (en) * | 2020-01-24 | 2020-05-22 | 杭州制氧机集团股份有限公司 | Device and method for mixing high-precision low-uncertainty binary standard gas |
| CN117387001A (en) * | 2023-12-13 | 2024-01-12 | 抚顺抚运安仪救生装备有限公司 | Gas filling and distribution control system and control method for deep diving breathing apparatus gas cylinder |
| CN117387001B (en) * | 2023-12-13 | 2024-03-08 | 抚顺抚运安仪救生装备有限公司 | Gas filling and distribution control system and control method for deep diving breathing apparatus gas cylinder |
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Application publication date: 20181106 |