CN204385324U - A kind of networking sapphire crystallization furnace - Google Patents

A kind of networking sapphire crystallization furnace Download PDF

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Publication number
CN204385324U
CN204385324U CN201420809844.6U CN201420809844U CN204385324U CN 204385324 U CN204385324 U CN 204385324U CN 201420809844 U CN201420809844 U CN 201420809844U CN 204385324 U CN204385324 U CN 204385324U
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China
Prior art keywords
communication module
networking
measuring
crystal
crystallization furnace
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420809844.6U
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Chinese (zh)
Inventor
刘瑜
杜慧江
邢明
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Hangzhou Jingyi Intelligent Science and Technology Co Ltd
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Hangzhou Jingyi Intelligent Science and Technology Co Ltd
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Priority to CN201420809844.6U priority Critical patent/CN204385324U/en
Application granted granted Critical
Publication of CN204385324U publication Critical patent/CN204385324U/en
Expired - Fee Related legal-status Critical Current
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Abstract

The utility model discloses a kind of networking sapphire crystallization furnace, the power-supply system providing power is set, carry out central controlled controller, the seed crystal rotational system that seed rod rotates can be driven, the seed crystal lifting system that described seed rod moves up and down can be driven, for measuring the weighing system of crystal weight, for measuring the temp measuring system of temperature of cooling water, for realizing the vacuum system of long brilliant vacuum environment, for realizing the heating system of hot environment, the network communication module be connected with remote server communication is set, described network communication module is set to ethernet communication module, also wifi communication module can be set to, and mobile communication module, power line communication module, described controller is set to industrial computer, or PLC.

Description

A kind of networking sapphire crystallization furnace
Technical field
The present invention relates to sapphire crystal (alumina single crystal) growing technology field, especially a kind of networking sapphire crystallization furnace.
Background technology
It is very wide that optics due to sapphire crystal penetrates band, all has good light transmission from near-ultraviolet light (190nm) to middle infrared (Mid-IR), is therefore used in a large number on optical element, infrared facility, high intensity laser beam lens materials and mask material.Current super brightness is white/and the quality of blue-ray LED depends on the material quality of epitaxy of gallium nitride (GaN), and the sapphire substrate surface working quality of epitaxy of gallium nitride quality then with used is closely bound up, sapphire (monocrystalline Al 2o 3) lattice constant mismatch rate between the race's deposit film of C face III-V and II-VI is little, meet resistant to elevated temperatures requirement in GaN epitaxy technique simultaneously, make sapphire wafer become the critical material making white/indigo plant/green light LED.
The technology of at present the most ripe growing large-size low-stress zero defect sapphire crystal still or kyropoulos.But kyropoulos is produced sapphire and is not also realized automatization completely, also needs to rely on veteran seeding slip-stick artist to operate in seeding process.This mode of operation is unfavorable for carrying out large-scale industrial production.Therefore we propose the kyropoulos sapphire mode of production of networking, and the brilliant equipment of the length that this theory designs can remote observation growth state of crystal, analyze long brilliant data, even remote control, reduce on-the-spot working strength.
Summary of the invention
(1) technical problem that will solve
In view of this, main purpose of the present invention is to provide a kind of networking sapphire crystallization furnace, sends brilliant for length data to remote server, realizes remote observation growth state of crystal, analyzes long brilliant data, even remote control, reduces on-the-spot working strength.
(2) technical scheme
For achieving the above object, the invention provides a kind of networking sapphire crystallization furnace, the power-supply system providing power is set, carry out central controlled controller, the seed crystal rotational system that seed rod rotates can be driven, the seed crystal lifting system that described seed rod moves up and down can be driven, for measuring the weighing system of crystal weight, for measuring the temp measuring system of temperature of cooling water, for realizing the vacuum system of long brilliant vacuum environment, for realizing the heating system of hot environment, the network communication module be connected with remote server communication is set, described network communication module is set to ethernet communication module, also wifi communication module can be set to, and mobile communication module, power line communication module.
Described controller is set to industrial computer, also can be set to PLC.
(3) beneficial effect
As can be seen from technique scheme, the present invention has following beneficial effect:
1, networking sapphire crystallization furnace provided by the invention, can realize remote observation growth state of crystal, analyzes long brilliant data, even remote control, reduces on-the-spot working strength.
Accompanying drawing explanation
Fig. 1 is the control block diagram of networking sapphire crystallization furnace;
Fig. 2 is the system chart of networking sapphire crystallization furnace.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
A kind of networking sapphire crystallization furnace, arranges the power-supply system 2 providing power, carries out central controlled controller 1.The high-power ac power of input is converted to the voltage of supply that system needs by described power-supply system 2, powers and manufacture hot environment for electrical appliance part.Described controller 1 is set to industrial computer, also can be set to PLC.
Also comprise the seed crystal rotational system 4 that seed rod 10 can be driven to rotate, described seed crystal rotational system 4 drives described seed rod 10 to rotate, to ensure the homogeneity of crystal growth; Can drive the seed crystal lifting system 5 that described seed rod 10 moves up and down, described seed crystal lifting system 5 is upwards pulling crystal according to the stage of crystal growth, with the needs of satisfied growth; For measuring the weighing system 6 of crystal weight, described weighing system 6 can measure the crystal weight of described seed rod 10 end, to judge the growth phase of crystal; For measuring the temp measuring system 7 of temperature of cooling water, may be used for the temperature conditions judging thermal field; For realizing the vacuum system 8 of long brilliant vacuum environment, vacuum environment can ensure that not having gas in crystal growing process enters in crystalline material, prevents bubble and impurity; For realizing the heating system 9 of hot environment, comprising thermal insulation layer, heating member and crucible, realizing the hot environment of 2100 DEG C, by Al 2o 3melting sources, and maintain the hot environment required for long crystalline substance.
Arrange the network communication module 3 be connected with remote server communication, described network communication module 3 is set to ethernet communication module, also can be set to wifi communication module, and mobile communication module, power line communication module.Described network communication module 3 by long brilliant related data, sends remote server to, such as crystal weight in real time, lift height, temperature of cooling water etc., can realize remote observation growth state of crystal, analyze long brilliant data, even remote control, reduce on-the-spot working strength.

Claims (3)

1. a networking sapphire crystallization furnace, comprise the power-supply system that power is provided, carry out central controlled controller, the seed crystal rotational system that seed rod rotates can be driven, the seed crystal lifting system that described seed rod moves up and down can be driven, for measuring the weighing system of crystal weight, for measuring the temp measuring system of temperature of cooling water, for realizing the vacuum system of long brilliant vacuum environment, for realizing the heating system of hot environment, it is characterized in that: also comprise the network communication module be connected with remote server communication.
2. a kind of networking sapphire crystallization furnace according to claim 1, is characterized in that: described controller is set to industrial computer.
3. a kind of networking sapphire crystallization furnace according to claim 1, is characterized in that: described controller is set to PLC.
CN201420809844.6U 2014-12-20 2014-12-20 A kind of networking sapphire crystallization furnace Expired - Fee Related CN204385324U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420809844.6U CN204385324U (en) 2014-12-20 2014-12-20 A kind of networking sapphire crystallization furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420809844.6U CN204385324U (en) 2014-12-20 2014-12-20 A kind of networking sapphire crystallization furnace

Publications (1)

Publication Number Publication Date
CN204385324U true CN204385324U (en) 2015-06-10

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Family Applications (1)

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CN (1) CN204385324U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104988577A (en) * 2015-07-14 2015-10-21 福建汇晶光电科技有限公司 Sapphire automatic control system and control method
CN106400107A (en) * 2016-11-28 2017-02-15 中国电子科技集团公司第二十六研究所 Crystal growth remote control system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104988577A (en) * 2015-07-14 2015-10-21 福建汇晶光电科技有限公司 Sapphire automatic control system and control method
CN106400107A (en) * 2016-11-28 2017-02-15 中国电子科技集团公司第二十六研究所 Crystal growth remote control system

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150610

Termination date: 20151220

EXPY Termination of patent right or utility model