CN204367550U - A kind of web plate, silicon chip and mask plate manufactured for solar cell - Google Patents

A kind of web plate, silicon chip and mask plate manufactured for solar cell Download PDF

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Publication number
CN204367550U
CN204367550U CN201420752238.5U CN201420752238U CN204367550U CN 204367550 U CN204367550 U CN 204367550U CN 201420752238 U CN201420752238 U CN 201420752238U CN 204367550 U CN204367550 U CN 204367550U
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CN
China
Prior art keywords
line
web plate
rabbet joint
solar cell
screen cloth
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Expired - Fee Related
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CN201420752238.5U
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Chinese (zh)
Inventor
贾云涛
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CHANGZHOU SANLI JINGTU PHOTOELECTRIC Co Ltd
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Individual
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Priority to CN201420752238.5U priority Critical patent/CN204367550U/en
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Publication of CN204367550U publication Critical patent/CN204367550U/en
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  • Photovoltaic Devices (AREA)

Abstract

The utility model discloses a kind of printing electrode with web plate, silicon chip and mask plate for solar cell manufacture, web plate comprises: screen cloth and the light sensation solidification glue-line be coated on described screen cloth; Described screen cloth is made into by the parallel of some stainless steel silk threads and warp, and described parallel is mutually vertical with described warp; Described web plate is also provided with hollow and runs through the line of rabbet joint of described light sensation solidification glue-line, and the described line of rabbet joint is between the adjacent parallel that bearing of trend is identical, or the described line of rabbet joint is between the adjacent warp that bearing of trend is identical.Web plate, silicon chip and the mask plate manufactured for solar cell of the present utility model, solve common process on printing silicon chip battery in grid line process because the existence of Delta Region that the existence of graticule infall anastomose and line of rabbet joint place light sensation solidification glue and graticule are formed causes the breakpoint or low spot that produce when printing conductive electrode grid line, the phenomenon that conductive electrode conductive capability worsens, realize the print result of conductive electrode high conductivity quality, improve the electricity conversion of solar cell and the ability of output power.

Description

A kind of web plate, silicon chip and mask plate manufactured for solar cell
Technical field
The utility model technical field of solar batteries, is specifically related to a kind of web plate, silicon chip and the mask plate that manufacture for solar cell.
Background technology
In crystal silicon solar batteries manufacturing process, need to make grid line to collect the electric current that in silicon chip, opto-electronic conversion produces at silicon chip surface.Prior art adopts following technique: first on mask plate, make grid line figure, then utilize the grid line figure of mask plate to make the hollow line of rabbet joint with grid line figure to the photoetching method of the light sensation solidification glue exposure of coating on it and development on web plate, finally adopt the mode of serigraphy silver paste is printed on silicon chip through the line of rabbet joint of web plate after to reburn the grid line of knot formation silicon chip.Fig. 1 be the web plate of prior art face structural representation, Fig. 2 is the side-looking structural representation of the web plate of prior art, as depicted in figs. 1 and 2, the web plate 1 of prior art comprises: screen cloth 11 and light sensation solidification glue-line 12, light sensation solidification glue-line 12 is coated on screen cloth 11, screen cloth 11 is made into by some stainless parallels 112 and warp 111, and parallel 112 intersects mutually with warp 111.Fig. 3 be the mask plate of prior art face structural representation, as shown in Figure 3, on mask plate 2 preparation have grid line figure 21.Make when there is the line of rabbet joint of grid line figure on web plate 1 utilizing the grid line figure of mask plate 2, first light sensation there is to solidify the one side of glue-line 12 being close on web plate 1 of mask plate 2, recycling UV light irradiates mask plate 2, grid line figure 21 due to mask plate 2 blocks UV light irradiates to light sensation solidification glue-line 12, makes not solidified because of UV light irradiates by the region that grid line figure 21 blocks.Rinse after web plate 1, the light sensation solidification glue be cured still is stayed on screen cloth 11, and the light sensation solidification glue in the region of being blocked by the grid line figure 21 of mask plate 2 is rinsed, thus defines the line of rabbet joint 13 of the hollow with grid line figure 21 shape.Fig. 4 is the side-looking structural representation with the web plate of the line of rabbet joint of prior art, and as shown in Figure 4, the line of rabbet joint 13 runs through light sensation solidification glue-line 12, and the line of rabbet joint 13 has the shape identical with grid line figure 21.Fig. 5 is the schematic side view of the screen printing silicon chip grid line of prior art, Fig. 6 is the front elevational schematic of the screen printing silicon chip grid line of prior art, as shown in Figure 5 and Figure 6, silicon chip 3 is placed in the below of web plate 1, silver slurry is placed in the position of the line of rabbet joint 13 of web plate 1, when promoting slurry with the rubber strip of certain degree of hardness along the pressure that the applying of screen cloth 11 surface is certain again, silver slurry will leak into on silicon chip 3 through screen cloth 11 and the line of rabbet joint 13, forms the conduction grid line that silver-colored pulp material is made after sintering.
For improving the photoelectric transformation efficiency of cell piece, need the width reducing grid line on silicon chip, to increase the illuminating area of silicon chip.Fig. 7 is the enlarged diagram of the line of rabbet joint of web plate in prior art, as shown in Figure 7, when wanting when the grid line that silicon chip preparation is very narrow, the width of the line of rabbet joint 13 must be needed also very narrow, and the crosspoint of a large amount of warp 111 and parallel 112 is there will be in the line of rabbet joint 13 region, the existence in crosspoint can hinder silver slurry to bite to silicon chip 3 from the line of rabbet joint 13 smoothly; The delta-shaped region that the cross-point locations simultaneously having the silver slurry of certain viscosity can be formed at the line of rabbet joint 13 place light sensation solidification glue and graticule when printing slurry is formed constantly accumulates, cause in the process of printing silver slurry, make silver slurry can effectively can leak into the area passed through in the line of rabbet joint 13 constantly to reduce, the existence of the reason of these two aspects, thus cause conductive electrode grid line on silicon chip and occur low spot or breakpoint, its result just causes grid line electric conductivity bad, and then affects the electricity conversion of crystal-silicon battery slice.
Utility model content
The utility model provides a kind of web plate, silicon chip and the mask plate that manufacture for solar cell, the delta-shaped region that the cross-point locations that the anastomose and light sensation solidification glue that are formed and graticule are formed because the steel wire of braiding silk screen crosses for solving conductive electrode grid line printing zone in prior art is formed, causes that graphic printing region line of rabbet joint aperture opening ratio is low, slurry seepage ability, silicon chip surface grid line lines sink and the problem of edge irregularity.
The web plate manufactured for solar cell of the present utility model, comprising: the light sensation solidification glue-line on described screen cloth is located in screen cloth and coating; Described screen cloth is made into by some stainless steel parallels and warp, and described parallel is mutually vertical with described warp; Described web plate also prepare be provided with hollow and run through described light sensation solidification glue-line the line of rabbet joint, the described line of rabbet joint is between the adjacent parallel that bearing of trend is identical, or the described line of rabbet joint is between the adjacent warp that bearing of trend is identical.
Further, the center line of the grid formed between the adjacent parallel that the center line of the bearing of trend of the described line of rabbet joint is identical with described bearing of trend overlaps, or the center line of the grid formed between the adjacent warp that the center line of the bearing of trend of the described line of rabbet joint is identical with described bearing of trend overlaps.
Further, the width of the described line of rabbet joint is less than the spacing between the identical adjacent parallel of described bearing of trend, or the width of the described line of rabbet joint is less than the spacing between the identical adjacent warp of described bearing of trend.
Further, described warp be 13-25um with the wire diameter of described parallel, the order number of described screen cloth is 200-400 order.
Further, the width of the described line of rabbet joint is 10-40um.
Further, the web plate for solar cell manufacture of the present utility model also comprises: screen frame; Described screen cloth tensioning is laid in described screen frame; The inside edge of described parallel and described screen frame is perpendicular or parallel, or the inside edge of described warp and described screen frame is perpendicular or parallel.
Further, described screen cloth is made by roll compacting technique.
Further, the thickness of described screen cloth is 18-25um.
The silicon chip manufactured for solar cell that the utility model provides, comprising: the conductive electrode grid line identical with the figure of the line of rabbet joint of web plate of the present utility model and position.
The mask plate manufactured for solar cell that the utility model provides, comprising: grating figure picture; The figure of described grating figure picture is identical with the figure of the line of rabbet joint of web plate of the present utility model, and described grating figure picture is made up of light screening material.
The web plate manufactured for solar cell that the utility model provides, silicon chip and mask plate, by making the line of rabbet joint on web plate parallel with warp (or parallel), line of rabbet joint region there will not be warp, the anastomose that parallel intersects to form and big and small Delta Region, the aperture opening ratio of the figure formed significantly exceedes conventional web plate production method, the aperture opening ratio of more than 30% can be improved according to measuring and calculating, the slurry transmitance of raising more than 30% can be realized, solve common process in printing process because warp and parallel intersect printing conductive electrode grid line that the existence of anastomose and the existence of described Delta Region cause time the breakpoint that produces and low spot, there is the phenomenon that conductive electrode conductive capability worsens, realize the print result of conductive electrode high conductivity quality, improve the electricity conversion of solar cell.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the utility model embodiment, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings;
Fig. 1 be the web plate of prior art face structural representation;
Fig. 2 is the side-looking structural representation of the web plate of prior art;
Fig. 3 be the mask plate of prior art face structural representation;
Fig. 4 is the side-looking structural representation with the web plate of the line of rabbet joint of prior art;
Fig. 5 is the schematic side view of the screen printing silicon chip grid line of prior art;
Fig. 6 is the front elevational schematic of the screen printing web plate grid line of prior art;
Fig. 7 is the positive TV structure enlarged diagram of the line of rabbet joint of web plate in prior art;
Fig. 8 be the web plate for solar cell manufacture of the utility model embodiment face structural representation;
Fig. 9 is the side-looking structural representation of the web plate for solar cell manufacture of the utility model embodiment.
Detailed description of the invention:
For making the object of the utility model embodiment, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the utility model embodiment, technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
Fig. 8 be the web plate for solar cell manufacture of the utility model embodiment face structural representation, Fig. 9 is the side-looking structural representation of the web plate for solar cell manufacture of the utility model embodiment, as shown in Figure 8 and Figure 9, the web plate 1 for solar cell manufacture of the utility model embodiment comprises: screen cloth 11 and painting are laid in the light sensation solidification glue-line 12 on described screen cloth 11, thickness 10-20um, light sensation solidification glue-line adopts ultraviolet cured adhesive; Described screen cloth 11 is made into by some parallels 112 and warp 111, and described parallel 112 is mutually vertical with described warp 111; Described web plate 1 also prepare be provided with hollow and run through described light sensation solidification glue-line 12 the line of rabbet joint 13, the described line of rabbet joint 13 is between the adjacent warp 111 that bearing of trend is identical.Or the described line of rabbet joint also can between the parallel 112 that bearing of trend is identical.The center line of the grid formed between the adjacent warp 111 that the center line of the bearing of trend of the described line of rabbet joint 13 is identical with described bearing of trend overlaps.Or the center line of the grid formed between the adjacent parallel 112 that the center line of the bearing of trend of the described line of rabbet joint also can be identical with described bearing of trend overlaps.The width of the described line of rabbet joint 13 is less than the spacing between the identical adjacent warp of described bearing of trend 111.Or the width of the described line of rabbet joint also can be less than the spacing between the identical adjacent parallel 112 of described bearing of trend.The material of warp and parallel can adopt stainless steel silk thread, and stainless steel silk thread should have lower elastic deformation amount and high strength, can guarantee that the pattern of subsequent forming has higher precision size degree.When carrying out graph exposure to light sensation solidification glue, the anaclasis of stainless steel silk thread and scattering phenomenon can cause line of rabbet joint edge not neat, have sawtooth, affect aperture opening ratio, cause the grid line of the silicon chip of solar cell not neat further.Therefore, the line of rabbet joint should be made away from warp 111 or parallel 112 certain distance, make in exposure process, to produce refraction and scattering phenomenon, fully can expose the pattern of mask plate, so after development, the result that the photosensitive layer of line of rabbet joint marginal portion makes than normal conditions is neat, does not have and be formed with the incomplete phenomenon of development near steel wire, uses this web plate to carry out printing grid line and can obtain neat accurately edge and the correct pattern of size.
Particularly, described warp 111 be 13-25um with the wire diameter of described parallel 112, if wire diameter is meticulous, the insufficient strength of screen cloth 11, service life can be too short; If wire diameter is excessively thick, be unfavorable for printing effect, grid line can be caused to have stria, so suitable wire diameter range of choice is at 13-25um.The order number of described screen cloth 11 is 200-350 order, and to ensure line-spacing, line-spacing is excessive, and the intensity of screen cloth is bad; Line-spacing is too small, and when mask plate and web plate contraposition, the nargin of engineering is too little, is difficult to through engineering approaches large-scale production.The width of the described line of rabbet joint 13 is 10-40um, and usually can produce the grid line on silicon chip that width is about 30-50um, such as width is the line of rabbet joint of 25um.Described screen cloth 12 is made by roll compacting technique, and the thickness of the screen cloth 11 after roll compacting is 18-25um, makes screen cloth more open and more flat.Preferably, screen cloth is the stainless steel cloth of 250 orders or 290 orders, 20um wire diameter.
As shown in Figure 8, the web plate 1 for solar cell manufacture of the present utility model also comprises: the screen frame 14 of rectangle; The tensioning of described screen cloth 11 is laid in described screen frame 14; Described parallel 112 is vertical with the one side in the inside edge of described screen frame, parallel with adjacent another side.Or, vertical with the inside edge of described screen frame of described warp 111, parallel with adjacent another side.Screen cloth 11 surrounding scribbles adhesive agent, and screen cloth 11 is tightened rear adhesive agent and be fixed on above this screen frame 14, screen frame 14 can adopt metal frame, such as chase, aluminium frame.
The utility model embodiment also provides a kind of silicon chip manufactured for solar cell, comprising: a series of grid line; The figure of described grid line is identical with the figure of the line of rabbet joint 13 of the web plate shown in Fig. 8, and position is identical.The width design of grid line is 30-50um.
The utility model embodiment also provides a kind of mask plate manufactured for solar cell web plate, comprising: grating figure picture; The figure of described grating figure picture is identical with the figure of the line of rabbet joint 13 of the web plate shown in Fig. 8, and described grating figure picture is made up of light screening material.The width design of described grating figure picture is 30um.
The utility model is through experimental verification, and some experiments show, the technical solution of the utility model advantage applies exists:
Adopt the crystal silicon battery positive electrode grid line silver paste of current trend in printing crystal silicon solar industry, can by the width control system of the positive electrode conductive gate line electrode after sintering at below 45um, and line style outward appearance is regular, straight, there is no obvious anastomose vestige, improve the low spot of conductive electrode, decrease the generation of breakpoint.Because thinner and that electric conductivity is good gate electrode line so just can be printed, while just making the light-receiving area of the crystal silicon solar batteries sheet of same same size increase, the resistance of electrode declines, adopt the web plate of the utility model technology compared with the web plate of usual technology, adopt the crystal silicon solar batteries short circuit current of the making of the utility model technology to improve 120-130mA, photoelectric transformation efficiency improves 0.2%-0.3%.
Last it is noted that above each embodiment is only in order to illustrate the technical solution of the utility model, be not intended to limit; Although be described in detail the utility model with reference to foregoing embodiments, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein some or all of technical characteristic; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the scope of each embodiment technical scheme of the utility model.

Claims (10)

1. for the web plate that solar cell manufactures, it is characterized in that, comprising: screen cloth and the light sensation solidification glue-line be coated on described screen cloth; Described screen cloth is made into by some parallels and warp, and described parallel is mutually vertical with described warp; Described web plate is also prepared has hollow and the line of rabbet joint running through described light sensation solidification glue-line; The described line of rabbet joint is between the adjacent parallel that bearing of trend is identical, or the described line of rabbet joint is between the adjacent warp that bearing of trend is identical.
2. the web plate manufactured for solar cell according to claim 1, it is characterized in that, the center line of the grid formed between the adjacent parallel that the center line of the bearing of trend of the described line of rabbet joint is identical with described bearing of trend overlaps, or the center line of the grid formed between the adjacent warp that the center line of the bearing of trend of the described line of rabbet joint is identical with described bearing of trend overlaps.
3. the web plate manufactured for solar cell according to claim 2, it is characterized in that, the width of the described line of rabbet joint is less than the spacing between the identical adjacent parallel of described bearing of trend, or the width of the described line of rabbet joint is less than the spacing between the identical adjacent warp of described bearing of trend.
4. according to claim 1 for solar cell manufacture web plate, it is characterized in that, described warp be 13um to 25um with the wire diameter of described parallel, the order number of described screen cloth is 200 to 400 orders.
5. the web plate manufactured for solar cell according to claim 1, it is characterized in that, the width of the described line of rabbet joint is 10um to 40um.
6. the web plate manufactured for solar cell according to claim 1, is characterized in that, also comprise: screen frame; Described screen cloth tensioning is laid in described screen frame; The inside edge of described parallel and described screen frame is perpendicular or parallel, or the inside edge of described warp and described screen frame is perpendicular or parallel.
7. the web plate manufactured for solar cell according to claim 1-6 any one, it is characterized in that, described screen cloth is made by roll compacting technique.
8. the web plate manufactured for solar cell according to claim 7, it is characterized in that, the thickness of described screen cloth is 18um to 25um.
9. for the silicon chip that solar cell manufactures, it is characterized in that, comprising: a series of grid lines identical with the figure of the line of rabbet joint of the web plate described in claim 1-8 any one and position.
10. manufacture a mask plate for web plate for solar cell, it is characterized in that, comprising: grating figure picture; The figure of described grating figure picture is identical with the figure of the line of rabbet joint of the web plate described in claim 1-8 any one, and described grating figure picture is made up of light screening material.
CN201420752238.5U 2014-12-03 2014-12-03 A kind of web plate, silicon chip and mask plate manufactured for solar cell Expired - Fee Related CN204367550U (en)

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105109188A (en) * 2015-09-07 2015-12-02 贾云涛 Screen plate for silk-screen printing, photoetching method and application of screen plate
CN105172345A (en) * 2015-09-10 2015-12-23 苏州蓝昇精密制版科技有限公司 Solar cell printing screen plate and platemaking method thereof
CN106274039A (en) * 2016-08-16 2017-01-04 昆山良品丝印器材有限公司 Crystalline silicon printing half tone and mask-making technology thereof
CN106476417A (en) * 2015-08-25 2017-03-08 贾云涛 A kind of silk screen for serigraphy and preparation method thereof
CN106952973A (en) * 2017-03-29 2017-07-14 江苏福克斯新能源科技有限公司 A kind of electrode of solar battery forming method
CN107068803A (en) * 2017-03-29 2017-08-18 江苏福克斯新能源科技有限公司 A kind of method for manufacturing solar cell
CN107081958A (en) * 2017-06-12 2017-08-22 通威太阳能(合肥)有限公司 Cost-reducing and efficiency-improving positive electrode screen printing plate and using method thereof
CN107415440A (en) * 2016-05-23 2017-12-01 仓和股份有限公司 Printing screen plate applied to solar cell and preparation method thereof
CN107757069A (en) * 2016-08-19 2018-03-06 仓和股份有限公司 Manufacturing method of screen with composite net
CN108162573A (en) * 2017-12-21 2018-06-15 中建材浚鑫科技有限公司 A kind of solar cell printing is with without net netting version
CN108274886A (en) * 2017-01-05 2018-07-13 常州三立精图光电有限公司 Without net netting version wire casing structure and its graphic printing technique and cell piece obtained
CN108297533A (en) * 2017-01-12 2018-07-20 仓和股份有限公司 The screen structure and preparation method thereof of finger-like formula electrode for wire mark solar cell
CN108312697A (en) * 2018-02-02 2018-07-24 徐州鑫宇光伏科技有限公司 Without net netting version
CN108569021A (en) * 2017-03-09 2018-09-25 赵友之 Halftone
CN108608724A (en) * 2016-12-09 2018-10-02 常州三立精图光电有限公司 It is a kind of without net knot version design method
WO2019240275A1 (en) * 2018-06-15 2019-12-19 ミタニマイクロニクス株式会社 Method for manufacturing screen mask, and exposure device
CN111572169A (en) * 2020-05-22 2020-08-25 常州亚龙电子科技有限公司 Screen printing plate without net knots and manufacturing method thereof

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106476417A (en) * 2015-08-25 2017-03-08 贾云涛 A kind of silk screen for serigraphy and preparation method thereof
CN106476417B (en) * 2015-08-25 2019-08-23 贾云涛 A method of production is used for the silk screen of silk-screen printing
CN105109188A (en) * 2015-09-07 2015-12-02 贾云涛 Screen plate for silk-screen printing, photoetching method and application of screen plate
CN105172345A (en) * 2015-09-10 2015-12-23 苏州蓝昇精密制版科技有限公司 Solar cell printing screen plate and platemaking method thereof
CN107415440A (en) * 2016-05-23 2017-12-01 仓和股份有限公司 Printing screen plate applied to solar cell and preparation method thereof
CN106274039A (en) * 2016-08-16 2017-01-04 昆山良品丝印器材有限公司 Crystalline silicon printing half tone and mask-making technology thereof
CN107757069A (en) * 2016-08-19 2018-03-06 仓和股份有限公司 Manufacturing method of screen with composite net
CN108608724A (en) * 2016-12-09 2018-10-02 常州三立精图光电有限公司 It is a kind of without net knot version design method
CN108274886A (en) * 2017-01-05 2018-07-13 常州三立精图光电有限公司 Without net netting version wire casing structure and its graphic printing technique and cell piece obtained
CN108297533B (en) * 2017-01-12 2019-08-06 仓和股份有限公司 The screen structure and preparation method thereof of finger-like formula electrode for wire mark solar battery
CN108297533A (en) * 2017-01-12 2018-07-20 仓和股份有限公司 The screen structure and preparation method thereof of finger-like formula electrode for wire mark solar cell
CN108569021A (en) * 2017-03-09 2018-09-25 赵友之 Halftone
CN106952973A (en) * 2017-03-29 2017-07-14 江苏福克斯新能源科技有限公司 A kind of electrode of solar battery forming method
CN107068803A (en) * 2017-03-29 2017-08-18 江苏福克斯新能源科技有限公司 A kind of method for manufacturing solar cell
CN107081958A (en) * 2017-06-12 2017-08-22 通威太阳能(合肥)有限公司 Cost-reducing and efficiency-improving positive electrode screen printing plate and using method thereof
CN108162573A (en) * 2017-12-21 2018-06-15 中建材浚鑫科技有限公司 A kind of solar cell printing is with without net netting version
CN108312697A (en) * 2018-02-02 2018-07-24 徐州鑫宇光伏科技有限公司 Without net netting version
WO2019240275A1 (en) * 2018-06-15 2019-12-19 ミタニマイクロニクス株式会社 Method for manufacturing screen mask, and exposure device
JP2019217641A (en) * 2018-06-15 2019-12-26 ミタニマイクロニクス株式会社 Method for producing screen mask and exposure device
CN111770839A (en) * 2018-06-15 2020-10-13 米塔尼梅克罗尼株式会社 Method for manufacturing screen mask and exposure apparatus
JP7111348B2 (en) 2018-06-15 2022-08-02 ミタニマイクロニクス株式会社 Screen mask manufacturing method
CN111572169A (en) * 2020-05-22 2020-08-25 常州亚龙电子科技有限公司 Screen printing plate without net knots and manufacturing method thereof
CN111572169B (en) * 2020-05-22 2022-04-12 常州亚龙电子科技有限公司 Screen printing plate without net knots and manufacturing method thereof

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Assignee: Changzhou Sanli JingTu Photoelectric Co., Ltd.

Assignor: Jia Yuntao

Contract record no.: 2016320000188

Denomination of utility model: Solar cell manufacturing screen, silicon wafer and mask

Granted publication date: 20150603

License type: Exclusive License

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