CN204358986U - A kind of coating for selective absorption of novel weathering resistant flat plate collector - Google Patents
A kind of coating for selective absorption of novel weathering resistant flat plate collector Download PDFInfo
- Publication number
- CN204358986U CN204358986U CN201420744775.5U CN201420744775U CN204358986U CN 204358986 U CN204358986 U CN 204358986U CN 201420744775 U CN201420744775 U CN 201420744775U CN 204358986 U CN204358986 U CN 204358986U
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- Prior art keywords
- coating
- nickel
- chromium
- film
- selective absorption
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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Abstract
The utility model relates to a kind of coating for selective absorption of novel weathering resistant flat plate collector, structure is: the weatherability flat plate collector coating for selective absorption of copper substrate/cushion/nickel-chromium-oxygen composite metal film (1)/nickel-chromium-oxygen composite metal film (2)/amorphous silica nitrogen antireflective film, can effectively improve adhesion of thin film, suppressing the film do not coexisted in cold and hot process because of thermal coefficient of expansion chap and come off by adding cushion; By adding anti-reflection layer, effectively can improve resistance to corrosion and the weatherability of coating for selective absorption, improving its thermal efficiency and weather resistance simultaneously.
Description
Technical field
The utility model relates to a kind of coating for selective absorption of novel weathering resistant flat plate collector, belongs to high-efficiency solar heat utilization field.
Background technology
External flat plate collector favorable sealing property, adopts vacuum or nitrogen protection between plate core and cover plate, its absorber coatings performance degradation is slow, long service life.In order to cost-saving, reduce cost, the seal of domestic flat plate collector is all poor, selecting property absorber coatings is almost be directly exposed in air, therefore, in use there are some problems in some product put goods on the market, such as coating aging fades, and serious even occurs the situation that whole absorber coatings comes off.Its reason mainly contains two aspects: (1) metallic substrates and coating thermal expansion coefficient difference greatly, cause coating easily to come off; (2) water (AlN is slightly soluble in water) in the easy absorbed air of antireflection layer material of coating surface, oxygen, carbon dioxide be the gas such as sulfur dioxide even, causes the situation that coating is destroyed by etchant gases such as soda acids.These all will have a strong impact on thermal conversion efficiency and the service life thereof of flat plate collector.Therefore, develop new material system and new coating structure, it is high that thermal conversion efficiency is prepared in research, stable performance, the coating for selective absorption that weather resistance is good, for the long term growth of domestic flat plate collector provides technical support, being the important directions of current research, is also object of the present invention.
The compound coating of metal-dielectric is the coating formed in a kind of small metal particles embed oxide dielectric.By the kind of control oxide dielectric and metallic, regulate size, the Content and distribution situation of metallic in film system, can prepare the spectral selective absorbing coating of excellent performance, thus, this type coating obtains extensive utilization in photo-thermal field.Selective black chromium, black nickel coating from appearance till now, subjected to the practice test of two more than ten years, not only have excellent optical property, and it is heat-resisting, moisture-proof, the weather resistance such as corrosion-resistant are also very excellent.In recent years, the metal-dielectric type coating for selective absorption using the method for vacuum coating to prepare nickel chromium triangle receives the concern of people.
Cao Yunzhen, Hu Hangfang professors of Shanghai Silicate Inst., Chinese Academy of Sciences etc. are at " Reactive sputtering NiCrO
xthin film process and its optical constants [J] .Journal of inorganiic materials, 2000,15 (02): 304 ~ 308 (in Chinese) " in adopt Magnetron reactive sputtering prepare Ni-Cr selective absorption film, obtain absorptivity a=0.93, the coating for selective absorption of emissivity ε=0.063, Guangzhou Energy Resource Inst., Chinese Academy of Sciences professor Shen Hui etc. " Study on Ni-Cr System Solar Selective Thin Films Prepared by Magnetron Reactive Sputtering Process [J] .Acta. Metallurgica Sinica (English Letters) (China). 2002, 15 (02): 203 ~ 206. " method of middle magnetron sputtering has prepared the Ni-Cr system coating for selective absorption with decorative effect, absorptivity is 0.90 ~ 0.94, emissivity is 0.08 ~ 0.16, the compound coating of Ni-Cr system metal-dielectric has following characteristic: first, the price of nickel chromium own is not high, if adopt magnetron sputtering technique to realize large-scale continuous production can reach the object reduced costs further, secondly, the coating photothermal conversion efficiency that nickel chromium triangle based material is prepared is high, in addition, the weather resistance of the compound coating of Ni-Cr system metal-dielectric is good, long service life.Therefore, have selected the material system of Ni-Cr system as experiment herein, attempt preparing durable and efficient photothermal deformation coating by the method for nickel chromium triangle cosputtering in argon oxygen gas mixture atmosphere, inventing film structure in a kind of plate solar collector absorbing film (publication No.: CN 103148621 A) is: the film structure of substrate/metallic reflector/matter layer/metal absorption layer/matter layer/air make absorbing film visual field absorb and near-infrared reflection prerequisite under there is higher absorptivity, and there is lower emissivity, by the design of wider infrared external reflection, plate solar collector emissivity is declined to a great extent, can effectively improve the heat absorption degree of depth.But still there is the problem of serious weatherability difference in current domestic flat plate collector coating.
Summary of the invention
For the problem of current flat plate collector absorber coatings weatherability difference, this patent proposes a kind of coating for selective absorption of novel weathering resistant flat plate collector, and employing structure is: the weatherability flat plate collector coating for selective absorption of substrate/cushion/absorbed layer (1)/absorbed layer (2)/antireflective film.Wherein:
Substrate layer is specially: adopt high infrared reflection red copper as substrate, thickness is 0.2 ~ 0.5mm, and Main Function is reflection absorption ftir spectroscopy, reduces the thermal emissivity of whole coating.
Cushion is specially: the metallic film good with substrate and absorbed layer lattice, matched coefficients of thermal expansion, and possesses good heat conductivility, the metal mixed film such as copper, nickel, chromium good with the adhesive force of substrate and absorbed layer.
Absorbed layer is specially: nickel-chromium-oxygen composite metal film, and in wherein nickel-chromium-oxygen composition metal laminated film (1), tenor is middle than nickel-chromium-oxygen composition metal laminated film (2) high.
Antireflective film is specially: good with the matched coefficients of thermal expansion of absorbed layer, at the amorphous silica nitrogen (a-SiO that the transmitance of visible region is large
xn
y) antireflective film, possess good acid and alkali-resistance, salt spray resistance characteristic etc.
the utility model is implemented according to the following steps
A) utilize three target magnetic control sputtering coating systems, the base vacuum of sputtering system is evacuated to 6.0 × 10
-4~ 4.0 × 10
-4pa;
B) utilize polishing copper sheet for substrate, and through the cleaning of copper sheet cleaning fluid, after utilizing acetone, absolute ethyl alcohol, deionized water difference ultrasonic cleaning 10 ~ 15min, use N again
2dry up;
C) be sputter gas and purity with the Ar that purity is 99.999% be the O of 99.999%
2for reacting gas, flow is 30 ~ 80sccm, adopt purity be 99.999% Cu, Ni and Cr target be target, operating air pressure is 1.0 ~ 1.5pa, first on substrate Slag coating one deck Cu, Ni and Cr hybrid metal film as cushion, wherein each tenor can be regulated by respective sputtering power ratio, then opens Ni, Cr sputtering target, belongs to O together
2cosputtering prepares absorbed layer 1 and absorbed layer 2 on the buffer layer;
D) purity is adopted to be the Si of 99.999%
3n
4-and SiO
2ceramic target is target, and cosputtering method is Slag coating a-SiO on absorbed layer 2
xn
yanti-reflection layer, can by regulating Si
3n
4-and SiO
2sputtering power ratio regulate a-SiO
xn
ythe content of middle O and N, and then regulate the thermal coefficient of expansion, optical coefficient, refractive index etc. of antireflective film to match with absorbed layer.
the advantage that the utility model has compared with known technology and good effect
Can effectively improve adhesion of thin film by adding cushion, suppressing the film do not coexisted in cold and hot process because of thermal coefficient of expansion chap and come off; By adding anti-reflection layer, resistance to corrosion and the weatherability of coating for selective absorption effectively can be improved; All retes can continuous production, be easy to accomplish scale production, and improve its thermal efficiency and weather resistance simultaneously.
Accompanying drawing explanation
Fig. 1 is the coating for selective absorption structure chart of a kind of novel weathering resistant flat plate collector that the utility model proposes.
1, nickel-chromium-oxygen composite metal film; 2, nickel-chromium-oxygen composite metal film; 3, cushion; 4, substrate; 5, antireflective film
Fig. 2 is the preparation flow figure of the coating for selective absorption of a kind of novel weathering resistant flat plate collector that the utility model proposes.
Fig. 3 is a kind of coating for selective absorption of novel weathering resistant flat plate collector and the salt mist experiment comparison diagram of blue film that the utility model proposes.
A, Ni-Cr-oxide composite coating; B, blue membrane coat
Fig. 4 is the optical constant figure of the coating for selective absorption of a kind of novel weathering resistant flat plate collector that the utility model proposes.
Detailed description of the invention
embodiment
the present embodiment according to the following steps
Adopt JCP-450 magnetic control sputtering system, on polish copper substrate, normal temperature prepares weatherability coating for selective absorption structure, adopts high-purity N i target, Cr target, Cu target, SiO
2target, Si
3n
4target (purity is 99.999%), copper sheet substrate specifications is 3 × 3 cm
2, clean and the ultrasonic cleaning 15 ~ 20 minutes successively of acetone, absolute ethyl alcohol and deionized water through copper sheet cleaning fluid, use N
2copper sheet is dried up;
Substrate is fixed on the chip bench of magnetron sputtering chamber, and during sputtering, copper sheet is with chip bench with 60 rpm uniform rotation, and the background vacuum of sputtering system is 5 × 10
-4pa, sputter gas to be purity be 99.999% argon gas, reacting gas to be purity be 99.999% high purity oxygen gas, with pressure for 1.0 ~ 1.5pa, underlayer temperature: 350 DEG C, on substrate, Slag coating one deck Cu, Ni, Cr hybrid metal film is as cushion, wherein, Cu sputtering power is: 74 ~ 120W, Ni sputtering power: 40 ~ 70W, Cr sputtering power is: 35 ~ 50W;
Buffer film is target with Ni and the Cr target that purity is 99.999%, and regulating Ni target sputtering power to be 100W, Cr target sputtering power is 50W, the oxygen flow ratio (O passed into
2/ (O
2+ Ar)) be 11% ~ 20%, cosputtering prepares nickel-chromium-oxygen laminated film as absorbed layer 1/, the oxygen flow ratio (O passed into
2/ (O
2+ Ar)) be 20% ~ 35%, cosputtering prepares nickel-chromium-oxygen laminated film as absorbed layer 2;
Utilize Si
3n
4and SiO
2ceramic target is target, and increasing the Ar flow passed into is 22% ~ 30%, and pressure is that 0.68 ~ 0.72pa is at film surface Slag coating a-SiO
xn
yanti-reflection layer, wherein Si
3n
4and SiO
2sputtering power ratio be 2 ~ 0.5, preparing structure is Cu
(ss)/ { Cu|Ni|Cr}
(cushion)/ nickel-chromium-oxygen laminated film 1/ nickel-chromium-oxygen laminated film 2/a-SiO
xn
ythe weatherability coating for selective absorption of anti-reflection layer, its optical property good (a=0.9445, ε=0.062), can meet the requirement of solar energy collector in high efficiency coating for selective absorption, draws to have good weatherability through smog experiment simultaneously.
Claims (1)
1. the coating for selective absorption of a novel weathering resistant flat plate collector, its feature comprises: adopt the high infrared reflection red copper of 0.2 ~ 0.5mm as substrate, on substrate, cosputtering makes copper-nickel-chromium hybrid metal film as cushion, set gradually nickel-chromium-oxygen composite metal film (1) and nickel-chromium-oxygen composite metal film (2) on the buffer layer, above-mentioned composite metal film is as absorbed layer, tenor in wherein nickel-chromium-oxygen composite metal film (1) needs than high in nickel-chromium-oxygen composite metal film (2), nickel-chromium-oxygen composite metal film (2) arranges amorphous nitrogen-oxygen-silicon film as antireflective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420744775.5U CN204358986U (en) | 2014-12-03 | 2014-12-03 | A kind of coating for selective absorption of novel weathering resistant flat plate collector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420744775.5U CN204358986U (en) | 2014-12-03 | 2014-12-03 | A kind of coating for selective absorption of novel weathering resistant flat plate collector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204358986U true CN204358986U (en) | 2015-05-27 |
Family
ID=53260452
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420744775.5U Expired - Fee Related CN204358986U (en) | 2014-12-03 | 2014-12-03 | A kind of coating for selective absorption of novel weathering resistant flat plate collector |
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|---|---|
| CN (1) | CN204358986U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110777352A (en) * | 2018-07-31 | 2020-02-11 | 通用电气公司 | Silicon bond coat with amorphous structure and method of forming the same |
-
2014
- 2014-12-03 CN CN201420744775.5U patent/CN204358986U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110777352A (en) * | 2018-07-31 | 2020-02-11 | 通用电气公司 | Silicon bond coat with amorphous structure and method of forming the same |
| CN110777352B (en) * | 2018-07-31 | 2022-02-25 | 通用电气公司 | Silicon bond coat with amorphous structure and method of forming the same |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150527 Termination date: 20151203 |
|
| EXPY | Termination of patent right or utility model |