CN204332932U - Substrate supporting device - Google Patents
Substrate supporting device Download PDFInfo
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- CN204332932U CN204332932U CN201420870345.8U CN201420870345U CN204332932U CN 204332932 U CN204332932 U CN 204332932U CN 201420870345 U CN201420870345 U CN 201420870345U CN 204332932 U CN204332932 U CN 204332932U
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- thimble
- substrate
- supporting assembly
- supporting device
- face
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Abstract
The application discloses a kind of substrate supporting device, and it comprises a platform unit, multiple thimble and at least one supporting assembly.Thimble is arranged at platform unit, and each thimble has end face, and these thimbles protrude out movably on platform unit.Supporting assembly has bottom surface, and bottom surface is crimped on the end face of the described thimble of part.
Description
Technical field
The utility model relates to a kind of supportive device, particularly a kind of substrate supporting device.
Background technology
In semiconductor technology or substrate processing technology, often need to use substrate supporting device to support glass substrate, required technique can be carried out to make glass substrate, known substrate supporting device utilizes multiple thimble arranged of separating glass substrate upwards to be propped up, but produce bending (bending) because glass substrate can be subject to the impact of gravity, its degree of crook can affect by the density of setting of these thimbles or separation distance, if reduce the buckling phenomenon of glass substrate, and increase the density of thimble or shorten separation distance, mutual interference or other impact of equipment room will be caused, and cannot process operation be carried out.
Therefore, how can reach under the situation not increasing thimble quantity and to reduce the bending object of glass substrate, provide suitable support effect tackle the amount of bow of thinning substrate, and then lifting process quality and product yield, reality is one of current important topic.
Utility model content
Because above-mentioned problem, the purpose of this utility model is to provide a kind of substrate supporting device, it has the structural design of innovation and high efficiencyly can be applied to these thinning substrates and provide suitable support effect to reduce the amount of bow of substrate, and then lifting process quality and product yield.
For reaching above-mentioned purpose, a kind of substrate supporting device of the present utility model comprises a platform unit, multiple thimble and at least one supporting assembly.Thimble is arranged at platform unit, and each thimble has end face, and these thimbles protrude out movably on platform unit.Supporting assembly has bottom surface, and bottom surface is crimped on the end face of the described thimble of part.
In an embodiment, each thimble position corresponding, bottom surface is provided with groove, and the end face of thimble is spacing in groove.
In an embodiment, the end face not arranging at least one of them and the supporting assembly of the thimble end face of supporting assembly is contour.
In an embodiment, when the quantity of supporting assembly is greater than 1, these supporting assembly subtends are arranged.
In an embodiment, supporting assembly is strip or sheet.
In an embodiment, supporting assembly is linear, L ring shape.
In an embodiment, the material of supporting assembly comprises polymeric material or metal material.
From the above, a kind of substrate supporting device of the present utility model arranges at least one supporting assembly further, and the bottom surface of supporting assembly is crimped on the end face of at least part of thimble.Because supporting assembly provides extra supporting strength and area, make substrate supporting device high efficiencyly can be applied to thinning substrate and sufficient support effect can be provided to reduce the amount of bow of substrate, and then lifting process quality and product yield.
Accompanying drawing explanation
Fig. 1 and Fig. 2 is the schematic diagram of a kind of substrate supporting device different conditions of the utility model embodiment.
Fig. 3 is the schematic diagram of the part thimble of the utility model embodiment.
Fig. 4 be the utility model embodiment part thimble on the schematic diagram of supporting assembly is set.
Fig. 5 is the schematic diagram of the substrate supporting device of another embodiment of the utility model.
Fig. 6 is the schematic diagram of the substrate supporting device of another embodiment of the utility model.
Embodiment
Hereinafter with reference to relevant drawings, a kind of substrate supporting device according to the utility model preferred embodiment is described, wherein identical assembly is illustrated with identical Reference numeral.
Fig. 1 and Fig. 2 is the schematic diagram of the different conditions of a kind of substrate supporting device 1 of the utility model embodiment, the state that the thimble that wherein Fig. 1 shows substrate supporting device 1 rises, and the state that the thimble that Fig. 2 shows substrate supporting device 1 declines.The thimble of the present embodiment can be connected to driver module (figure does not show) to carry out upper and lower movement, due to driver module not technical characteristic of the present utility model and be conventionally known to one of skill in the art, therefore does not repeat them here.The substrate supporting device 1 of the present embodiment can be applicable to support substrate, and substrate is such as glass substrate, and such as can be applied to semiconductor technology or other substrate processing technology, does not limit at this.
Please refer to shown in Fig. 1 and Fig. 2, substrate supporting device 1 comprises a platform unit 11, multiple thimble 12 and at least one supporting assembly 13.Be not particularly limited shape and the structure of platform unit 11 at this, it can adjust according to required function.
Thimble 12 is arranged at platform unit 11, and each thimble 12 has end face T, and these thimbles 12 protrude out movably on platform unit 11.Namely Fig. 1 shows thimble 12 and to move up the state protruded out on platform unit 11, and Fig. 2 namely show thimble 12 move to platform unit 11 under state.The utility model do not limit thimble 12 quantity, Pareto diagram, protrude out height, shape etc., it can adjust according to demand.
Supporting assembly 13 has bottom surface B, and bottom surface B is crimped on the end face T of part thimble 12.The utility model does not limit the quantity of supporting assembly 13, explains for 2 supporting assemblies 13 at this, and when the quantity of supporting assembly 13 is greater than 1, these supporting assemblies 13 can subtend be arranged.Supporting assembly 13 can be such as strip or sheet, at this for strip.In addition, supporting assembly 13 can be linear (linear), L ring shape, at this for linear.Due to when substrate (figure does not show) is placed on thimble 12, substrate is along the holding power suffered by the D1 of direction less (being less than the quantity of the thimble in other direction because of the quantity along the thimble 12 of direction D1), therefore provide extra holding power can reduce substrate by supporting assembly 13 and be subject to the deformation quantity that gravity causes, and then lifting process quality and product yield.
The material of supporting assembly 13 can comprise polymeric material or metal material.A kind of example of polymeric material is PAEK (Polyaryletherketone), and it is a kind of semicrystalline engineering plastics with the functional group of ketone and phenol.
Fig. 3 is the schematic diagram (visual angle according to direction D1) of the part thimble 12 of the utility model embodiment, and wherein part thimble 12 is provided with supporting assembly 13, and another part thimble 12 is not provided with supporting assembly 13.Please refer to shown in Fig. 3, when thimble 12 convexedly stretches in the state on platform unit 11, the end face 131 not arranging the end face T of the thimble 12 of supporting assembly 13 and supporting assembly 13 is contour, so to keep being horizontally disposed with of the substrate on thimble.
In addition, supporting assembly 13 of the present utility model can have multiple change aspect, below illustrates.
Fig. 4 be the utility model embodiment part thimble 12 on the schematic diagram of supporting assembly 13a is set, be such as the visual angle of the direction D2 along Fig. 1.Please refer to shown in Fig. 4, bottom surface B each thimble 12 position corresponding of supporting assembly 13a is provided with groove D, and the end face T of thimble 12 is spacing in groove D.The bond strength of supporting assembly 13a and thimble 12 and the stability of supporting assembly 13a can be promoted thus further.In other embodiments, supporting assembly 13a and thimble 12 link by alternate manner, such as, bind.
Fig. 5 is the schematic diagram of the substrate supporting device 1b of another embodiment of the utility model, and substrate supporting device 1b and previous embodiment main difference are, the supporting assembly 13b of substrate supporting device 1b is L shape, and two supporting assembly 13b are end settings to end.
Fig. 6 is the schematic diagram of the substrate supporting device 1c of another embodiment of the utility model, and substrate supporting device 1c and previous embodiment main difference are, the supporting assembly 13c of substrate supporting device 1c is for annular and quantity is 1.
In sum, a kind of substrate supporting device of the present utility model arranges at least one supporting assembly further, and the bottom surface of supporting assembly is crimped on the end face of at least part of thimble.Because supporting assembly provides extra supporting strength and area, make substrate supporting device high efficiencyly can be applied to thinning substrate and sufficient support effect can be provided to reduce the amount of bow of substrate, and then lifting process quality and product yield.
The foregoing is only illustrative, but not be restricted.Anyly do not depart from spirit of the present utility model and scope, and to its equivalent modifications of carrying out or change, all should be contained in accompanying claim.
Claims (6)
1. a substrate supporting device, comprises:
A platform unit;
Multiple thimble, is arranged at platform unit, and each thimble has end face, and described thimble protrudes out movably on this platform unit; And
At least one supporting assembly, it has bottom surface, and this bottom surface is crimped on the end face of the described thimble of part.
2. substrate supporting device according to claim 1, wherein, each thimble position corresponding, this bottom surface is provided with groove, and the end face of this thimble is spacing in this groove.
3. substrate supporting device according to claim 1, wherein, the end face not arranging at least one of them and this supporting assembly of the described thimble end face of this supporting assembly is contour.
4. substrate supporting device according to claim 1, wherein, when the quantity of this supporting assembly is greater than 1, described supporting assembly subtend is arranged.
5. substrate supporting device according to claim 1, wherein, this supporting assembly is strip or sheet.
6. substrate supporting device according to claim 1, wherein, this supporting assembly is linear, L ring shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420870345.8U CN204332932U (en) | 2014-12-31 | 2014-12-31 | Substrate supporting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420870345.8U CN204332932U (en) | 2014-12-31 | 2014-12-31 | Substrate supporting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204332932U true CN204332932U (en) | 2015-05-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420870345.8U Active CN204332932U (en) | 2014-12-31 | 2014-12-31 | Substrate supporting device |
Country Status (1)
| Country | Link |
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| CN (1) | CN204332932U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109786293A (en) * | 2018-12-27 | 2019-05-21 | 北京北方华创微电子装备有限公司 | Thimble height adjustment device and reaction chamber |
-
2014
- 2014-12-31 CN CN201420870345.8U patent/CN204332932U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109786293A (en) * | 2018-12-27 | 2019-05-21 | 北京北方华创微电子装备有限公司 | Thimble height adjustment device and reaction chamber |
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