CN204330613U - A kind of wafer cut checkout equipment - Google Patents
A kind of wafer cut checkout equipment Download PDFInfo
- Publication number
- CN204330613U CN204330613U CN201420799832.XU CN201420799832U CN204330613U CN 204330613 U CN204330613 U CN 204330613U CN 201420799832 U CN201420799832 U CN 201420799832U CN 204330613 U CN204330613 U CN 204330613U
- Authority
- CN
- China
- Prior art keywords
- camera bellows
- light source
- checkout equipment
- control device
- wafer
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model provides a kind of wafer cut checkout equipment, comprise the camera bellows for carrying wafer, place of described camera bellows bottom centre is provided with plummer, the symmetrical light source entrance in described camera bellows top and light source outlet, described light source porch is provided with infrared transmitting device, described light source exit is provided with infrared receiver, and described infrared receiver is connected with CPU control device, and described CPU control device is connected with data presentation device.Structure is simple, easy to operate, utilizes infrared transmitting device to launch infrared ray, is irradiated to incision and reflexes to infrared receiver, by the infrared signal after CPU control device process reflection, shows the result of CPU control device on the display apparatus.If reflection wave is even, then illustrate that otch is intact, if fluctuation appears in reflection wave, then says otch defectiveness.
Description
Technical field
The utility model relates to a kind of checkout equipment, especially relates to a kind of wafer cut checkout equipment.
Background technology
In integrated circuit (IC) wafer manufacture process, because Product Precision high size is little, environmental factor, technique not step, technological parameter and human factor all likely cause defect or harmful effect to product.In order to objects such as the monitoring of Product Process and the yields of guarantee product, in technological process, be provided with numerous website carry out defects detection.The steps such as the optical detection after the optical detection such as after development, etching, electron-microscope scanning, probe test, reliability testing and wafer final test.
But in these tests due to considering process efficiency or examine repair, Scanning Detction not to wafer notch part, often in the last step of technological process, adopt optical microscope to carry out last Manual Visual Inspection to wafer in prior art, comprise in this course and visual inspection is carried out to the cut out portion of wafer.Like this, the opportunity of disfigurement discovery is more late on the one hand, cannot in technological process, defect be detected in time and remedy, and on the other hand owing to adopting Manual Visual Inspection, inevitably the errors such as omission occurs, affects the yield of product.
Utility model content
The utility model, in order to solve the above-mentioned defect and deficiency that exist in prior art, provides a kind of wafer cut checkout equipment, and for detecting the otch of wafer cutting, structure is simple, easy to operate.
For solving the problems of the technologies described above, the utility model provides a kind of wafer cut checkout equipment, comprise the camera bellows for carrying wafer, place of described camera bellows bottom centre is provided with plummer, the symmetrical light source entrance in described camera bellows top and light source outlet, described light source porch is provided with infrared transmitting device, and described light source exit is provided with infrared receiver, described infrared receiver is connected with CPU control device, and described CPU control device is connected with data presentation device.
Wherein, described CPU control device comprises the signal amplification unit of the signal amplification process received by infrared receiver, the filter unit filtering clutter and data processing unit.
The wall of described camera bellows is made up of lucifuge glass.
Described camera bellows comprises the chamber door for described camera bellows being opened cut out, and described chamber door is horizontally slipped by the chute bottom described camera bellows, and described camera bellows bottom right side is provided with chute, and described camera bellows right side wall to be placed on chute and along slide.
The angle of described light source entrance and the outlet of described light source is acute angle.
Described plummer is provided with diaphragm, and diaphragm is provided with wafer.
The Advantageous Effects that the utility model reaches:
Compared with prior art, the utility model structure is simple, easy to operate, infrared transmitting device is utilized to launch infrared ray, be irradiated to incision and reflex to infrared receiver, by the infrared signal after CPU control device process reflection, show the result of CPU control device on the display apparatus.If reflection wave is even, then illustrate that otch is intact, if fluctuation appears in reflection wave, then says otch defectiveness.
Accompanying drawing explanation
Fig. 1 the utility model structural representation.
Wherein: 1 camera bellows; 2 infrared transmitting devices; 3 infrared receivers; 4CPU control device; 5 display device; 6 wafers; 7 diaphragms; 8 plummers.
Embodiment
In order to the technique effect that auditor can better understand technical characteristic of the present utility model, technology contents and reach, now accompanying drawing of the present utility model is described in detail in conjunction with the embodiments.But shown accompanying drawing, just in order to better illustrate the technical solution of the utility model; be not actual proportions of the present utility model and best configuration; so, auditor please not arrange and configuration with regard to the ratio of accompanying drawing, limit claims of the present utility model.
Below in conjunction with drawings and Examples, the utility model patent is further illustrated.
As shown in Figure 1, the utility model discloses a kind of wafer cut checkout equipment, comprise the camera bellows 1 for carrying wafer, place of described camera bellows 1 bottom centre is provided with plummer 8, the symmetrical light source entrance in described camera bellows 1 top and light source outlet, described light source porch is provided with infrared transmitting device 2, and described light source exit is provided with infrared receiver 3, described infrared receiver 3 is connected with CPU control device 4, and described CPU control device 4 is connected with data presentation device 5.Structure is simple, easy to operate, utilizes infrared transmitting device to launch infrared ray, is irradiated to incision and reflexes to infrared receiver, by the infrared signal after CPU control device process reflection, shows the result of CPU control device on the display apparatus.If reflection wave is even, then illustrate that otch is intact, if fluctuation appears in reflection wave, then says otch defectiveness.
Described CPU control device 4 comprises the signal received by infrared receiver and amplifies the signal amplification unit of process, the filter unit filtering clutter and data processing unit.
The problem of available light interference is often there is in wafer testing process, therefore in order to avoid the interference of light in environment, the wall of described camera bellows 1 is made up of lucifuge glass, in the course of the work, only have infrared ray Ray Of Light in camera bellows, substantially increase accuracy of the present utility model.
Described camera bellows 1 comprises the chamber door for described camera bellows being opened cut out, and described chamber door is horizontally slipped by the chute bottom described camera bellows, and described camera bellows bottom right side is provided with chute, and described camera bellows right side wall to be placed on chute and along slide.During use, can conveniently camera bellows chamber door be opened, and wafer 6 of conveniently taking.
The angle of described light source entrance and the outlet of described light source is acute angle, and so, ultrared incident angle and reflection angle are acute angle, and the reflection wave shown after treatment is with clear.
Below disclose the utility model with preferred embodiment, so itself and be not used to limit the utility model, allly take equivalent replacement or technical scheme that the scheme of equivalent transformation obtains, all drop in protection domain of the present utility model.
Claims (6)
1. a wafer cut checkout equipment, it is characterized in that: comprise the camera bellows for carrying wafer, place of described camera bellows bottom centre is provided with plummer, the symmetrical light source entrance in described camera bellows top and light source outlet, described light source porch is provided with infrared transmitting device, described light source exit is provided with infrared receiver, and described infrared receiver is connected with CPU control device, and described CPU control device is connected with data presentation device.
2. wafer cut checkout equipment according to claim 1, is characterized in that: described CPU control device comprises the signal received by infrared receiver and amplifies the signal amplification unit of process, the filter unit filtering clutter and data processing unit.
3. wafer cut checkout equipment according to claim 1, is characterized in that: the wall of described camera bellows is made up of lucifuge glass.
4. wafer cut checkout equipment according to claim 3, it is characterized in that: described camera bellows comprises the chamber door for described camera bellows being opened cut out, described chamber door is horizontally slipped by the chute bottom described camera bellows, described camera bellows bottom right side is provided with chute, and described camera bellows right side wall to be placed on chute and along slide.
5. wafer cut checkout equipment according to claim 1, is characterized in that: the angle of described light source entrance and the outlet of described light source is acute angle.
6. the wafer cut checkout equipment according to claim 1-5 any one, is characterized in that: described plummer is provided with diaphragm, and diaphragm is provided with wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420799832.XU CN204330613U (en) | 2014-12-16 | 2014-12-16 | A kind of wafer cut checkout equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420799832.XU CN204330613U (en) | 2014-12-16 | 2014-12-16 | A kind of wafer cut checkout equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204330613U true CN204330613U (en) | 2015-05-13 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420799832.XU Expired - Fee Related CN204330613U (en) | 2014-12-16 | 2014-12-16 | A kind of wafer cut checkout equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204330613U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568962A (en) * | 2014-12-16 | 2015-04-29 | 苏州凯锝微电子有限公司 | Wafer cutting kerf detection equipment |
-
2014
- 2014-12-16 CN CN201420799832.XU patent/CN204330613U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568962A (en) * | 2014-12-16 | 2015-04-29 | 苏州凯锝微电子有限公司 | Wafer cutting kerf detection equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150513 Termination date: 20151216 |
|
| EXPY | Termination of patent right or utility model |