CN204325472U - A kind of vacuum tank for target spraying - Google Patents
A kind of vacuum tank for target spraying Download PDFInfo
- Publication number
- CN204325472U CN204325472U CN201420816656.6U CN201420816656U CN204325472U CN 204325472 U CN204325472 U CN 204325472U CN 201420816656 U CN201420816656 U CN 201420816656U CN 204325472 U CN204325472 U CN 204325472U
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- target
- tank body
- safety valve
- tank
- vacuum tank
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Abstract
The utility model discloses a kind of vacuum tank for target spraying, described vacuum tank comprises tank body and multiple safety valve, described tank body two ends have target import and export respectively, and described target import and export position all coordinates with hermatic door, thus form sealed shell of tank; And described multiple safety valve is arranged on target import and export upper end respectively, thus form the operator guards to low-pressure state spraying in tank body.The vacuum tank that the utility model sprays at target arranges safety valve, thus guarantees the safety of producing; Can ensure that target is only subscribed in low pressure vacuum environment on the other hand to spray, thus guarantee target quality, solve the risk of the excessive existence of tank body internal gas pressure simultaneously, increase work efficiency.
Description
Technical field
The utility model relates to a kind of vacuum tank for target spraying, divides belong to target spraying technology field by International Patent Classification (IPC) (IPC).
Background technology
Target is the material being used as negative electrode in sputter-deposition technology.This cathode material is redeposited at anode surface with the form of molecule, atom or ion disengaging negative electrode under positively charged positively charged ion clashes into.Popular is interpreted as the target material that target is the particle bombardment of high speed lotus energy, in high energy laser weapon, when the laser of different capacity density, different output waveform, different wave length interacts from different targets, can produce and different kill and wound damage effect.And target in the fabrication process, it must carry out plasma spraying on the basis of tubular metal base material, and carrying out plasma spraying environment is one of important factor determining target quality and quality.
And the spraying of existing target preferably adopts and sprays under vacuum low-pressure environment; so just need the vacuum tank of the accommodating target of energy and spray equipment; and existing vacuum tank is not all provided with safety guard; the security in the course of processing is made to reduce; simultaneously when vacuum tank internal gas pressure is excessive; tank body door is backed down, and produces and stops, there is production risk simultaneously.
Thus, the present inventor considers to improve existing target spraying vacuum tank structure, and this case produces thus.
Utility model content
For the deficiencies in the prior art, the utility model provides a kind of vacuum tank for target spraying, and the import and export of the vacuum tank that device spray at target arrange safety valve, thus the risk of the excessive existence of solution tank body internal gas pressure, increase work efficiency.
For achieving the above object, the utility model is achieved through the following technical solutions:
For a vacuum tank for target spraying, described vacuum tank comprises tank body and multiple safety valve, and described tank body two ends have target import and export respectively, and described target import and export position all coordinates with hermatic door, thus forms sealed shell of tank; And described multiple safety valve is arranged on target import and export upper end respectively, thus form the operator guards to low-pressure state spraying in tank body.
Further, the quantity of described safety valve is two, and each safety valve is low pressure control safety valve and can by the pressure-controlling in vacuum tank at-0.03 mp to-0.04mp.
Further, described each safety valve is one kilogram, and the control valve of nominal diameter 200mm.
Further, described tank body is Chinese patent Authorization Notice No. is vacuum spraying jar structure disclosed in CN203373415U.
Compared with prior art, advantage of the present utility model:
The vacuum tank that the utility model sprays at target arranges safety valve, thus guarantees the safety of producing; Can ensure that target is only subscribed in low pressure vacuum environment on the other hand to spray, thus guarantee target quality, solve the risk of the excessive existence of tank body internal gas pressure simultaneously, increase work efficiency.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation in an embodiment.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
Embodiment: refer to shown in Fig. 1, for a vacuum tank for target spraying, described vacuum tank comprises tank body 1 and two safety valve 2, and described tank body 1 two ends have target import and export respectively, and described target import and export position all coordinates with hermatic door, thus form sealed shell of tank; And described two safety valve 2 are arranged on target import and export upper end respectively, thus form the operator guards to low-pressure state spraying in tank body.
Refer to shown in Fig. 1, aforementioned each safety valve 2 is low pressure control safety valve and can by the pressure-controlling in vacuum tank at-0.03 mp to-0.04mp, and described each safety valve is one kilogram, and the control valve of nominal diameter 200mm.
Refer to shown in Fig. 1, aforementioned tank body 1 is inner in the two-layer equation tank body of vacuum state and the end cover at tank body two ends, this two-layer equation tank body comprises internal layer tank body and outer tank body, outside described outer tank body parcel and internal layer tank body, and water-cooled cavity is formed between internal layer tank body and outer tank body, described water-cooled cavity inside is provided with tank body water-cooling structure.
Aforementioned water-cooling structure is many recirculated water cooling pipes being arranged in water-cooled cavity, and described recirculated water cooling pipe is coated on internal layer tank body, and coordinates with internal layer tank body and form high-efficiency water cooling structure.
Aforementioned two-layer equation tank body arranges multiple viewing window, described multiple viewing window is that yi word pattern is arranged on tank body, each viewing window is provided with dust-proof or dust blowing cleaning device, the quantity of foregoing observations window is 7, each viewing window diameter is not less than 100mm, each viewing window width between centers floor level is 1400mm, the diameter being positioned at the viewing window of middle position in described 7 viewing windows is 300mm, and this viewing window is flange viewing window, described flange viewing window is the viewing window being provided with ring flange.
Aforementioned two-layer equation tank body is provided with bleeding point and venting port, and described venting port quantity is 3, and each bleeding point all configures blind flange.Described two-layer equation tank body is circular tank.
Aforementioned seal end cap is provided with end cap viewing window, this end cap viewing window is flange viewing window, and described end cover is the tank body end cap being configured with self-locking device.(for tank body illustrate Chinese patent Authorization Notice No. be in the Figure of description of CN203373415U to some extent embody).
Above, be only the embodiment utilizing this origination techniques content, the modification that any those skilled in the art use this creation to do, change, all belong to the scope of the claims that this creation is advocated, and be not limited to those disclosed embodiments.
Claims (3)
1. the vacuum tank for target spraying, it is characterized in that: described vacuum tank comprises tank body and multiple safety valve, described tank body two ends have target import and export respectively, and described target import and export position all coordinates with hermatic door, thus form sealed shell of tank; And described multiple safety valve is arranged on target import and export upper end respectively, thus form the operator guards to low-pressure state spraying in tank body.
2. a kind of vacuum tank for target spraying according to claim 1, it is characterized in that: the quantity of described safety valve is two, and each safety valve is low pressure control safety valve and can by the pressure-controlling in vacuum tank at-0.03 Mpa to-0.04Mpa.
3. a kind of vacuum tank for target spraying according to claim 2, is characterized in that: described each safety valve is one kilogram, and the control valve of nominal diameter 200mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420816656.6U CN204325472U (en) | 2014-12-22 | 2014-12-22 | A kind of vacuum tank for target spraying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420816656.6U CN204325472U (en) | 2014-12-22 | 2014-12-22 | A kind of vacuum tank for target spraying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204325472U true CN204325472U (en) | 2015-05-13 |
Family
ID=53161849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420816656.6U Expired - Fee Related CN204325472U (en) | 2014-12-22 | 2014-12-22 | A kind of vacuum tank for target spraying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204325472U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106315254A (en) * | 2016-10-18 | 2017-01-11 | 宝鸡正微金属科技有限公司 | Metal powder vacuum storage and transfer device |
| CN109353713A (en) * | 2018-12-07 | 2019-02-19 | 南通虹波机械有限公司 | A kind of mining pumping plant end vacuum tank and preparation method thereof |
-
2014
- 2014-12-22 CN CN201420816656.6U patent/CN204325472U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106315254A (en) * | 2016-10-18 | 2017-01-11 | 宝鸡正微金属科技有限公司 | Metal powder vacuum storage and transfer device |
| CN106315254B (en) * | 2016-10-18 | 2018-09-07 | 宁夏先科新材料科技有限公司 | metal powder vacuum storage transfer device |
| CN109353713A (en) * | 2018-12-07 | 2019-02-19 | 南通虹波机械有限公司 | A kind of mining pumping plant end vacuum tank and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150513 Termination date: 20161222 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |