CN204313782U - A kind of for quick position axis Nano-positioners - Google Patents
A kind of for quick position axis Nano-positioners Download PDFInfo
- Publication number
- CN204313782U CN204313782U CN201420871716.4U CN201420871716U CN204313782U CN 204313782 U CN204313782 U CN 204313782U CN 201420871716 U CN201420871716 U CN 201420871716U CN 204313782 U CN204313782 U CN 204313782U
- Authority
- CN
- China
- Prior art keywords
- nano
- converter
- capacitors
- dial gauge
- positioners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
The utility model discloses a kind of for quick position axis Nano-positioners, main contents are: comprise computer system, D/A converter, voltage amplification driving circuit, piezoelectric ceramic actuator, piezoelectric ceramics, Nanopositioning Mechanism, nano-capacitors dial gauge and A/D converter, it is characterized in that, described D/A converter is connected with computer system, voltage amplification driving circuit is connected with D/A converter, piezoelectric ceramic actuator is connected with voltage amplification driving circuit, piezoelectric ceramics is connected with piezoelectric ceramic actuator, Nanopositioning Mechanism is connected with piezoelectric ceramics, nano-capacitors dial gauge is connected with Nanopositioning Mechanism, A/D converter is connected with nano-capacitors dial gauge and computer system respectively, whole system forms closed-loop system.The utility model structure is simple, effectively can eliminate the piezoelectric error of piezoelectric ceramics; There is nano level location resolving power and positioning precision, and can quick position be realized.
Description
Technical field
The utility model relates to field of locating technology, particularly relates to a kind of for quick position axis Nano-positioners.
Background technology
Conventional Nanopositioning Mechanism cannot eliminate the piezoelectric error of piezoelectric ceramics, and location resolving power and positioning precision all lower, cannot quick position be realized, so nano measurement and atomic operation engineering research cannot be applied to.
Utility model content
According to above deficiency, the utility model provides that a kind of structure is simple, positioning precision is high and locating speed is fast for quick position axis Nano-positioners.
For achieving the above object, the utility model is used for quick position axis Nano-positioners, main contents are: comprise computer system, D/A converter, voltage amplification driving circuit, piezoelectric ceramic actuator, piezoelectric ceramics, Nanopositioning Mechanism, nano-capacitors dial gauge and A/D converter, it is characterized in that, described D/A converter is connected with computer system, described voltage amplification driving circuit is connected with D/A converter, described piezoelectric ceramic actuator is connected with voltage amplification driving circuit, described piezoelectric ceramics is connected with piezoelectric ceramic actuator, described Nanopositioning Mechanism is connected with piezoelectric ceramics, described nano-capacitors dial gauge is connected with Nanopositioning Mechanism, described A/D converter is connected with nano-capacitors dial gauge and computer system respectively, whole system forms closed-loop system.
As preferably, described Nanopositioning Mechanism is that flexibility eight pole pair of elastic guide claims linkage structure to realize motion guide with flexible hinge, utilizes laminate stack formula piezoelectric ceramics as micro-displacement driver.
As preferably, described D/A converter adopts 16 bit resolutions and frequency response is the D/A converter of 800Hz.
As preferably, described nano-capacitors dial gauge adopts 0.1nm resolving power and frequency response is the nano-capacitors dial gauge of 5kHz.
As preferably, described Nanopositioning Mechanism is provided with display module.
The utility model beneficial effect is: structure is simple, effectively can eliminate the piezoelectric error of piezoelectric ceramics; There is nano level location resolving power and positioning precision, and can quick position be realized.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Description of reference numerals:
1-computer system, 2-D/A converter, 3-voltage amplification driving circuit, 4-piezoelectric ceramic actuator, 5-piezoelectric ceramics, 6-Nanopositioning Mechanism, 7-nano-capacitors dial gauge, 8-A/D converter.
Embodiment
Below in conjunction with drawings and Examples, the utility model embodiment is described:
Embodiment, see accompanying drawing 1, a kind of for quick position axis Nano-positioners, comprise computer system 1, D/A converter 2, voltage amplification driving circuit 3, piezoelectric ceramic actuator 4, piezoelectric ceramics 5, Nanopositioning Mechanism 6, nano-capacitors dial gauge 7 and A/D converter 8, it is characterized in that, described D/A converter 2 is connected with computer system 1, described voltage amplification driving circuit 3 is connected with D/A converter 2, described piezoelectric ceramic actuator 4 is connected with voltage amplification driving circuit 3, described piezoelectric ceramics 5 is connected with piezoelectric ceramic actuator 4, described Nanopositioning Mechanism 6 is connected with piezoelectric ceramics 5, described nano-capacitors dial gauge 7 is connected with Nanopositioning Mechanism 6, described A/D converter 8 is connected with nano-capacitors dial gauge 7 and computer system 1 respectively, whole system forms closed-loop system.
Described Nanopositioning Mechanism 6 is that flexibility eight pole pair of elastic guide claims linkage structure to realize motion guide with flexible hinge, utilizes laminate stack formula piezoelectric ceramics as micro-displacement driver.
Described computer system 1 sends drive control signal by the position location preset, and after D/A converter 2, voltage amplification driving circuit 3, produces high tension voltage and is added on piezoelectric ceramic actuator 4, make it drive Nanopositioning Mechanism 6, produce micrometric displacement; This micrometric displacement is detected in real time by nano-capacitors dial gauge 7, and position signalling is sent back to computer system 1 by A/D converter 8 and compare with precalculated position, exports control signal, thus realize bias free location by computer system 1 according to deviation.
By reference to the accompanying drawings the utility model preferred implementation is explained in detail above, but the utility model is not limited to above-mentioned embodiment, in the ken that those of ordinary skill in the art possess, can also make a variety of changes under the prerequisite not departing from the utility model aim.
Do not depart from design of the present utility model and scope can make many other and change and remodeling.Should be appreciated that the utility model is not limited to specific embodiment, scope of the present utility model is defined by the following claims.
Claims (5)
1. one kind for quick position axis Nano-positioners, comprise computer system (1), D/A converter (2), voltage amplification driving circuit (3), piezoelectric ceramic actuator (4), piezoelectric ceramics (5), Nanopositioning Mechanism (6), nano-capacitors dial gauge (7) and A/D converter (8), it is characterized in that, described D/A converter (2) is connected with computer system (1), described voltage amplification driving circuit (3) is connected with D/A converter (2), described piezoelectric ceramic actuator (4) is connected with voltage amplification driving circuit (3), described piezoelectric ceramics (5) is connected with piezoelectric ceramic actuator (4), described Nanopositioning Mechanism (6) is connected with piezoelectric ceramics (5), described nano-capacitors dial gauge (7) is connected with Nanopositioning Mechanism (6), described A/D converter (8) is connected with nano-capacitors dial gauge (7) and computer system (1) respectively, whole system forms closed-loop system.
2. as claimed in claim 1 for quick position axis Nano-positioners, it is characterized in that: described Nanopositioning Mechanism (6) is that flexibility eight pole pair of elastic guide claims linkage structure to realize motion guide with flexible hinge, utilizes laminate stack formula piezoelectric ceramics as micro-displacement driver.
3. as claimed in claim 1 for quick position axis Nano-positioners, it is characterized in that: described D/A converter (2) adopts 16 bit resolutions and frequency response is the D/A converter of 800Hz.
4. as claimed in claim 1 for quick position axis Nano-positioners, it is characterized in that: described nano-capacitors dial gauge (7) adopts 0.1nm resolving power and frequency response is the nano-capacitors dial gauge of 5kHz.
5. as claimed in claim 1 for quick position axis Nano-positioners, it is characterized in that: (6) are provided with display module to described Nanopositioning Mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420871716.4U CN204313782U (en) | 2014-12-30 | 2014-12-30 | A kind of for quick position axis Nano-positioners |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420871716.4U CN204313782U (en) | 2014-12-30 | 2014-12-30 | A kind of for quick position axis Nano-positioners |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204313782U true CN204313782U (en) | 2015-05-06 |
Family
ID=53136090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420871716.4U Expired - Fee Related CN204313782U (en) | 2014-12-30 | 2014-12-30 | A kind of for quick position axis Nano-positioners |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204313782U (en) |
-
2014
- 2014-12-30 CN CN201420871716.4U patent/CN204313782U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102682857B (en) | Device for changing route range of jogged positioning platform | |
| CN103318839B (en) | The grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and changing method | |
| CN203339985U (en) | Novel looper type bionic crawling piezoelectric precise driving platform | |
| EP3007351A3 (en) | Motor servo-drive for high performance motion control | |
| CN103354412B (en) | A kind of high frequency micro-displacement driving device and control method | |
| CN203940978U (en) | A kind of vibration table with mobile and fixed function | |
| CN204313782U (en) | A kind of for quick position axis Nano-positioners | |
| CN203269552U (en) | High-speed high-accuracy macro-micro platform based on piezoelectric ceramics | |
| CN202185917U (en) | Micro-gripper based on flexible hinge | |
| CN203747692U (en) | Precise adjustment control system for micro power | |
| CN202546271U (en) | Pressure-stabilizing water delivery system | |
| CN204906223U (en) | Accurate little positioning system of giant magnetostrictive driven two -degree -of -freedom | |
| CN204087810U (en) | The parallel institution that Hydrauservo System and piezoelectric ceramic actuator drive jointly | |
| CN204316374U (en) | A kind of clamp formula piezoelectric motor | |
| CN203632576U (en) | Up and down pretightening stick-slip driving cross-scale precise movement platform | |
| CN104692131A (en) | Automatic control system for industrial palletizing robot | |
| CN201364475Y (en) | Intelligent control system based on laser displacement sensor and servo controller | |
| CN201876705U (en) | Disturbance compensator for marine high-precision tracking and aiming rotary table | |
| CN203996935U (en) | A kind of registration device for bottle placer | |
| CN202815509U (en) | Precision positioning device capable of eliminating backlash error by utilizing error correction closed loop | |
| CN201512605U (en) | Novel weighing structure for crystal oven | |
| CN205871194U (en) | Portable 3D print head | |
| CN201136605Y (en) | Permanent magnet AC servo drive system for pre-loosing roller of guy barrel of cigarette packaging machine | |
| CN106217331B (en) | A kind of precision movement platform and its moving end positioning module | |
| CN202377793U (en) | Main machine traveling device of digital controlled cutting machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150506 Termination date: 20151230 |
|
| EXPY | Termination of patent right or utility model |