CN204230214U - A kind of roll-over table - Google Patents
A kind of roll-over table Download PDFInfo
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- CN204230214U CN204230214U CN201420768712.3U CN201420768712U CN204230214U CN 204230214 U CN204230214 U CN 204230214U CN 201420768712 U CN201420768712 U CN 201420768712U CN 204230214 U CN204230214 U CN 204230214U
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- silicon chip
- roll
- pick
- arm
- over table
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Abstract
The utility model relates to the manufacture field of silicon chip, discloses a kind of roll-over table.This roll-over table comprises: the microscope carrier of carrying silicon chip, and microscope carrier is provided with the multiple through holes corresponding with each silicon chip, and is equipped with the thimble for jack-up silicon chip in each through hole; Drive the drive unit that thimble is flexible; Turning device, comprising: pick-up arm, drives the rotating driving device that pick-up arm rotates around its axis; Wherein, pick-up arm is provided with at least one suction port corresponding with each silicon chip, each suction port is connected with vacuum pump.In technique scheme, by adopting turning device, silicon chip is overturn, make silicon chip when heating, without the need to taking out in stove, directly can overturn, thus improve the efficiency of silicon chip heating, simultaneously, avoid time waste that artificial upset silicon chip causes and the appearance owing to manually overturning the situations such as the silicon chip easily caused is damaged, improve the rate of finished products after silicon chip heating.
Description
Technical field
The utility model relates to the manufacture field of silicon chip, refers more particularly to a kind of roll-over table.
Background technology
Add man-hour at silicon chip in prior art, silicon chip needs to lie in (journey row column distribution) on substrate and sends into processing in stove, needs therebetween to process sending in stove after the silicon chip turn-over on substrate again.General employing is manually by the silicon chip turn-over on substrate, and efficiency is low, frangible, easily pollute.
Utility model content
The utility model provides a kind of roll-over table, in order to improve the efficiency of silicon chip processing, avoids silicon chip to add the damage in man-hour, improves rate of finished products.
The utility model provides a kind of roll-over table, and this roll-over table comprises:
The microscope carrier of carrying silicon chip, and microscope carrier is provided with the multiple through holes corresponding with each silicon chip, and in each through hole, be equipped with the thimble for jack-up silicon chip;
Drive the drive unit that described thimble is flexible;
Turning device, comprising: pick-up arm, drives the rotating driving device that described pick-up arm rotates around its axis; Wherein, described pick-up arm is provided with at least one suction port corresponding with each silicon chip, each suction port is connected with vacuum pump.
In above-mentioned concrete technical scheme, by adopting turning device, silicon chip is overturn, make silicon chip when heating, without the need to taking out in stove, directly can overturn, thus improve the efficiency of silicon chip heating, simultaneously, avoid time waste that artificial upset silicon chip causes and the appearance owing to manually overturning the situations such as the silicon chip easily caused is damaged, improve the rate of finished products after silicon chip heating.
Preferably, also comprise the first cylinder driving described turning device to slide, the orientation of the described silicon chip that described turning device adsorbs along it is slided; Described rotating driving device is fixed on the expansion link of described first cylinder.Slided by the first air cylinder driven pick-up arm, improve operating efficiency.
Preferably, described rotating driving device is rotary cylinder, and described pick-up arm is coaxially fixedly connected with the connecting rod of described rotary cylinder.Rotary air cylinder structure is simple, and the convenient pick-up arm that drives rotates.
Preferably, at least one corresponding with each silicon chip suction port is connected with described vacuum pump by vacuum hose.Ensure that suction port can be communicated with vacuum pump when overturning with pick-up arm.
Preferably, described each vacuum hose is provided with switching control pilot.What control suction port and vacuum pump by switching control pilot is communicated with situation.
Preferably, described suction port is fixed on described pick-up arm by snap ring.What ensure that suction port can be stable is fixed on pick-up arm.
Preferably, described multiple thimble is fixed on the supporting bracket be positioned at below described microscope carrier, and described drive unit drives described supporting bracket to stretch.Ensure that multiple thimble can synchronization telescope.
Preferably, described drive unit is the second cylinder, and described supporting bracket is fixedly connected with the piston rod of described second cylinder.Stretching by air cylinder driven thimble, makes Drive Structure simple, with low cost.
Accompanying drawing explanation
The structural representation of the roll-over table that Fig. 1 provides for the utility model embodiment.
Reference numeral:
10-microscope carrier 11-through hole 12-thimble
13-supporting bracket 20-drive unit 30-silicon chip
40-turning device 41-pick-up arm 42-rotating driving device
43-first cylinder 44-suction port
Embodiment
Below in conjunction with accompanying drawing, specific embodiment of the utility model is described in detail.Should be understood that, embodiment described herein, only for instruction and explanation of the utility model, is not limited to the utility model.
As shown in Figure 1, Fig. 1 shows the structural representation of a kind of roll-over table that the utility model embodiment provides.
The utility model embodiment provides a kind of roll-over table, and this roll-over table comprises:
The microscope carrier 10 of carrying silicon chip 30, and microscope carrier 10 is provided with the multiple through holes 11 corresponding with each silicon chip 30, and in each through hole 11, be equipped with the thimble 12 for jack-up silicon chip 30;
Drive the drive unit 20 that thimble 12 is flexible;
Turning device 40, comprising: pick-up arm 41, drives the rotating driving device 42 that pick-up arm 41 rotates around its axis; Wherein, pick-up arm 41 is provided with at least one suction port 44 corresponding with each silicon chip 30, each suction port 44 is connected with vacuum pump.
In above-mentioned specific embodiment, by adopting turning device 40, multiple silicon chip 30 is overturn simultaneously, make silicon chip 30 when heating, without the need to taking out in stove, direct upset can be realized, thus improve the efficiency of silicon chip 30 heating, simultaneously, avoid time waste that artificial upset silicon chip 30 causes and the appearance owing to manually overturning the situations such as silicon chip 30 breakage that easily causes, improve silicon chip 30 heat after rate of finished products.
Concrete, above-mentioned microscope carrier 10 can adopt microscope carrier of the prior art to process the through hole coordinated with thimble 12 further and make, thus reduces the cost of this equipment.Microscope carrier 10 carries multiple silicon chip 30 heat, wherein multiple silicon chip 30 adopts array to arrange, or becomes single arrangement.After heating completes, when silicon chip 30 needs to turn over, by being located in thimble 12 on microscope carrier 10 by silicon chip 30 jack-up, the pick-up arm 41 of turning device 40 is positioned at the top of row's silicon chip 30, and make suction port 44 corresponding with silicon chip 30 position, to guarantee to have adsorbed silicon chip, vacuum pump starts air-breathing afterwards, and silicon chip 30 is held by suction port 44.After silicon chip 30 sucks by suction port 44, initial position got back to by thimble 12, and rotating driving device 42 starts to drive pick-up arm 41 to rotate, and rotates 180 ° around the axis of pick-up arm 41, thus drives silicon chip 30 to overturn.After completing upset, thimble 12 stretches out, and supports the silicon chip 30 of its correspondence, and vacuum pump starts to blow, and silicon chip 30 and suction port 44 are disengaged, and silicon chip 30 drops on thimble 12.Withdraw turning device 40 afterwards, initial position got back to by thimble 12, and silicon chip 30 falls back on microscope carrier 10 and proceeds heating, completes the process of whole silicon chip 30 upset.Can be found out by foregoing description, coordinating to achieve and in stove, multiple silicon chip 30 is overturn by turning device 40 and thimble 12, and, when adopting above-mentioned overturn structure, can overturn multiple silicon chip 30 simultaneously, improve operating efficiency.
Rotating driving device 42 is wherein rotary cylinder, and pick-up arm 41 is coaxially fixedly connected with the connecting rod of rotary cylinder.Thus the connecting rod making rotary cylinder when rotated, can drive pick-up arm 41 coaxial rotation, and this rotary air cylinder structure is simple, is convenient to drive.In addition, suction port 44 on pick-up arm 41 is fixed on pick-up arm 41 by snap ring, what make that suction port 44 can be stable is fixed on pick-up arm 41, and when pick-up arm 41 rotates, suction port 44 synchronous axial system can be driven, in order to ensure suction port 44 when rotated, it can ensure to be communicated with vacuum pump, preferably, suction port 44 is connected by vacuum hose with vacuum pump, as one preferably scheme, at least one suction port 44 corresponding with each silicon chip 30 is connected by vacuum hose with vacuum pump, thus ensure that the multiple suction port 44 drawing same silicon chip 30 are when air-breathing and air blowing, can synchronously carry out, simultaneously, this structure is adopted to decrease the quantity of vacuum hose, be convenient to arrange.Further, each vacuum hose is provided with switching control pilot.Thus the using state of suction port 44 can be controlled, when not needing to use this suction port 44, by switching control pilot, suction port 44 can be closed, avoiding waste.
Multiple thimbles 12 are wherein fixed on the supporting bracket 13 be positioned at below microscope carrier 10, and drive unit 20 drives supporting bracket 13 to stretch.Thus can ensure that multiple thimble 12 can synchronization telescope, ensure that the uniformity of silicon chip 30 when overturning.Drive unit 20 is wherein the second cylinder, and supporting bracket 13 is fixedly connected with the piston rod of the second cylinder.Ensure that thimble 12 can complete silicon chip 30 jack-up and the process put down by the piston rod of cylinder flexible.
In addition, as the preferred technical scheme of one, this roll-over table also comprises the first cylinder 43 driving turning device 40 to slide, and the orientation of the silicon chip 30 that turning device 40 adsorbs along it is slided; Rotating driving device 42 is fixed on the expansion link of the first cylinder 43.By adopting the first cylinder 43 to drive turning device 40 to slide, turning device 40 is conveniently removed after completing silicon chip 30 upset.
Continue with reference to figure 1, a kind of preferred embodiment of the roll-over table provided below in conjunction with accompanying drawing 1 pair of the present embodiment is described in detail.
When overturning, multiple silicon chips 30 are positioned on microscope carrier 10, and the thimble 12 be positioned at below microscope carrier 10 passes microscope carrier 10 by silicon chip 30 jack-up.
The piston rod being placed in the first cylinder 43 of microscope carrier 10 side is in advance fixed with rotating driving device 42, and this rotating driving device 42 is rotary cylinder, and rotary cylinder is coaxially connected with turning arm.When thimble 12 is by silicon chip 30 jack-up, the first cylinder 43 drives pick-up arm 41 to start to move to microscope carrier 10 direction, and pick-up arm 41 is delivered to microscope carrier 10 and by between the silicon chip 30 of jack-up.
Thimble 12 falls, and the suction port 44 simultaneously on pick-up arm 41 starts air-breathing, is fixed by the silicon chip 30 fallen.
Rotary cylinder drives pick-up arm 41 and silicon chip 30 to start to do spinning movement, after rotating 180 degree, stops.
Thimble 12 rises again, and suction port 44 starts to blow, and silicon chip 30 falls within thimble 12.First cylinder 43 drives pick-up arm 41 to return to initial condition simultaneously.
Thimble 12 falls, and silicon chip 30 falls within substrate.
Can be found out by foregoing description, further be improve the mechanization degree of whole equipment by the first cylinder 43, facilitate the turn-over work of silicon chip 30 when heating, meanwhile, reducing the accidental damage of silicon chip 30 when turn-over, improve rate of finished products.
Obviously, those skilled in the art can carry out various change and modification to the utility model and not depart from spirit and scope of the present utility model.Like this, if these amendments of the present utility model and modification belong within the scope of the utility model claim and equivalent technologies thereof, then the utility model is also intended to comprise these change and modification.
Claims (8)
1. a roll-over table, is characterized in that, comprising:
The microscope carrier of carrying silicon chip, and microscope carrier is provided with the multiple through holes corresponding with each silicon chip, and in each through hole, be equipped with the thimble for jack-up silicon chip;
Drive the drive unit that described thimble is flexible;
Turning device, comprising: pick-up arm, drives the rotating driving device that described pick-up arm rotates around its axis; Wherein, described pick-up arm is provided with at least one suction port corresponding with each silicon chip, each suction port is connected with vacuum pump.
2. roll-over table as claimed in claim 1, is characterized in that, also comprises the first cylinder driving described turning device to slide, and the orientation of the described silicon chip that described turning device adsorbs along it is slided; Described rotating driving device is fixed on the expansion link of described first cylinder.
3. roll-over table as claimed in claim 1, it is characterized in that, described rotating driving device is rotary cylinder, and described pick-up arm is coaxially fixedly connected with the connecting rod of described rotary cylinder.
4. roll-over table as claimed in claim 1, it is characterized in that, at least one suction port corresponding with each silicon chip is connected with described vacuum pump by vacuum hose.
5. roll-over table as claimed in claim 4, is characterized in that, described each vacuum hose is provided with switching control pilot.
6. the roll-over table as described in any one of Claims 1 to 5, is characterized in that, described suction port is fixed on described pick-up arm by snap ring.
7. roll-over table as claimed in claim 1, it is characterized in that, described multiple thimble is fixed on the supporting bracket be positioned at below described microscope carrier, and described drive unit drives described supporting bracket to stretch.
8. roll-over table as claimed in claim 6, it is characterized in that, described drive unit is the second cylinder, and described supporting bracket is fixedly connected with the piston rod of described second cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420768712.3U CN204230214U (en) | 2014-12-08 | 2014-12-08 | A kind of roll-over table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420768712.3U CN204230214U (en) | 2014-12-08 | 2014-12-08 | A kind of roll-over table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204230214U true CN204230214U (en) | 2015-03-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420768712.3U Active CN204230214U (en) | 2014-12-08 | 2014-12-08 | A kind of roll-over table |
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| CN (1) | CN204230214U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105374902A (en) * | 2015-11-19 | 2016-03-02 | 新奥光伏能源有限公司 | Vacuum turnover device and turnover method |
| CN107946220A (en) * | 2017-12-22 | 2018-04-20 | 君泰创新（北京）科技有限公司 | Cell piece slice turning device |
-
2014
- 2014-12-08 CN CN201420768712.3U patent/CN204230214U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105374902A (en) * | 2015-11-19 | 2016-03-02 | 新奥光伏能源有限公司 | Vacuum turnover device and turnover method |
| CN105374902B (en) * | 2015-11-19 | 2017-05-10 | 新奥光伏能源有限公司 | Vacuum turnover device and turnover method |
| CN107946220A (en) * | 2017-12-22 | 2018-04-20 | 君泰创新（北京）科技有限公司 | Cell piece slice turning device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200415 Address after: Langfang City, Hebei province Guangyang road 065001 North Zone Patentee after: ENN SCIENCE & TECHNOLOGY DEVELOPMENT Co.,Ltd. Address before: The 065001 Hebei economic and Technological Development Zone of Langfang Huaxiang No. 106 Patentee before: ENN SOLAR ENERGY Co.,Ltd. |
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| TR01 | Transfer of patent right |