CN204224699U - A kind of vacuum coating film equipment and data line support - Google Patents
A kind of vacuum coating film equipment and data line support Download PDFInfo
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- CN204224699U CN204224699U CN201420313016.3U CN201420313016U CN204224699U CN 204224699 U CN204224699 U CN 204224699U CN 201420313016 U CN201420313016 U CN 201420313016U CN 204224699 U CN204224699 U CN 204224699U
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- data line
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Abstract
The utility model discloses a kind of vacuum coating film equipment and data line support, wherein, this vacuum coating film equipment comprises vapor deposition chamber and is arranged at the support of vapour deposition indoor, support comprises multiple first Support joint, first Support joint and the first data cable connector are adaptive and can patch fixing each other, and then it is indoor data line to be arranged at described vapour deposition.By the design supporting with data line structure, thus batch vacuum plated film can be carried out to data line, improve efficiency and the coating effects of data line vacuum nano plated film, and can also the shank of protected data line in coating process.
Description
Technical field
The utility model relates to a kind of vacuum coating film equipment and data line support.
Background technology
After macromolecular material being cracked into nano molecular, in vacuum environment, even gapless is attached to product surface and forms nano protective film, is referred to as vacuum vapor deposition nano-coating.The nano-coating of this technique and traditional plated film or oil spout, spraying paint has following characteristic: 1, waterproof and dampproof impunctate, good airproof performance; 2, high, the anti-electrostatic of plated film acid and alkali-resistance, insulation level produces; 3, coated surface is smooth-going, and antifouling foul adheres to, and frictional force is little, easily cleans; 4, appearance luster, can adjust according to demand, from high transparency to other color.5, coating film thickness all can from 0.1 micron to more than 50 microns; 6, adhesion of coating film is good, and without interior internal stress, crafters, plated film conforms temperature ± 200 DEG C, does not come off wrinkle resistant.
During nano-coating, raw material, entering into the pyrolyzer of high temperature about 650 DEG C in usable material chamber after the vaporization of 150 DEG C forms gaseous state, resolves into nanoscale molecular.Enter into the coating chamber of normal temperature, form film with vapour deposition waterproof under vacuum conditions, uniform fold product surface pin hole and gap.It and sputtering of metals and spray paint difference are, as long as contact with air can by vacuum vapor deposition nano-coating for product surface, uniform fold, forms the film of free of pinholes, dense uniform, high transparency.
During due to nano-coating, need the product surface of plated film all will contact with air, therefore, how filming equipment is improved to adapt to variant production plated film and be one and have technical problem to be solved.
Utility model content
The utility model provides a kind of vacuum coating film equipment and data line support, can carry out batch vacuum nano-coating to data line, improves efficiency and the coating effects of data line vacuum nano plated film.
For solving the problems of the technologies described above, a kind of technical scheme that the utility model provides is: provide a kind of vacuum coating film equipment, for carrying out vacuum plating to data line, described data line one end is provided with the first data cable connector, described vacuum coating film equipment comprises vapor deposition chamber and is arranged at the support of described vapour deposition indoor, described support comprises multiple first Support joint, described first Support joint can be adaptive and patch fixing each other with described first data cable connector, and then it is indoor described data line to be arranged at described vapour deposition.
Wherein, described support comprises stent strut and multiple first support bar further, described multiple first support bar is arranged on described stent strut and along the radial direction radiated entends of described stent strut, described first Support joint is arranged at intervals on described first support bar.
Wherein, described first support bar is arranged at intervals with multiple first draw-in groove, described first Support joint is fixed in described first draw-in groove.
Wherein, the other end of described data line is provided with the second data cable connector, described support comprises multiple second Support joint and multiple second support bar further, described multiple second support bar to be arranged at intervals on described stent strut relative to described first support bar and along the radial direction radiated entends of described stent strut along the axial direction due of described stent strut, described second Support joint is arranged at intervals on described second support bar, described second Support joint and described second data cable connector adaptive and can patch fixing each other, and then described data line is arranged between described first support bar and described second support bar.
Wherein, described second support bar is arranged at intervals with multiple second draw-in groove, described second Support joint is fixed in described second draw-in groove.
Wherein, described first Support joint and described second Support joint are symmetrical arranged, with the axial direction due making the described data line be arranged between described first support bar and described second support bar be parallel to described stent strut.
Wherein, at least one in described first support bar and described second support bar is adjustable along the position of the axial direction due of described stent strut, so make described first support bar and described second support bar adjustable along the spacing of the axial direction due of described stent strut.
Wherein, described support comprises the first main support ring and the second main support ring further, described first main support ring and described second main the support ring respectively and nested setting of described stent strut and axial direction due interval along described stent strut are fixed on described stent strut, described first support bar comprises multiple first main support rod, described multiple first main support rod to be arranged on described first main support ring and to the outside radiated entends of described first main support ring, described second support bar comprises multiple second main support rod, described multiple second main support rod to be arranged on described second main support ring and to the outside radiated entends of described second main support ring.
Wherein, described support comprises the first auxiliary support ring further, second auxiliary support ring, multiple first auxiliary support bar and multiple second auxiliary support bar, described first auxiliary support ring to be arranged on described first main support rod and along the radial direction of described stent strut and the described first nested setting in main support ring interval, described multiple first auxiliary support bar to be arranged on described first auxiliary support ring and to the outside radiated entends of described first auxiliary support ring, described second auxiliary support ring to be arranged on described second main support rod and along the radial direction of described stent strut and the described second nested setting in main support ring interval, described multiple second auxiliary support bar to be arranged on described second auxiliary support ring and to the outside radiated entends of described second auxiliary support ring.
Wherein, described vacuum coating film equipment comprises the entrance that is arranged at described vapor deposition chamber sidewall further and is arranged at the indoor cooling distributing damper faced with described entrance of described vapour deposition, described entrance is for introducing macromolecular material cracked gas, and it is indoor that described macromolecular material cracked gas is spread in described vapour deposition after described cooling distributing damper cooling.
Wherein, described vacuum coating film equipment comprises exhaust post further, described exhaust post is hollow form and on the sidewall of described exhaust post, is provided with multiple first ventilating pit, described stent strut is hollow form and the sidewall of described stent strut is provided with multiple second ventilating pit, described exhaust post inserts described stent strut from one end of described stent strut, described stent strut is nested to be arranged at outside described exhaust post and can to rotate around described exhaust post, described macromolecular material cracked gas evenly spreads through described first ventilating pit and described second ventilating pit and is deposited on described data line.
Wherein, the described first ventilating pit bar hole that to be length direction arranged along the axial direction due of described exhaust post.
Wherein, described first ventilating pit be disposed adjacent along the axial direction due of described exhaust post offsets one from another along the axial direction due of described exhaust post.
Wherein, described second ventilating pit is circular port, and between described second main support rod being arranged between described first main support rod that the axial direction due along described stent strut is disposed adjacent and being disposed adjacent along the axial direction due of described stent strut.
Wherein, described support comprises the top cover that sealing is arranged at the other end of described stent strut further.
Wherein, described vacuum coating film equipment comprises further and is arranged at described vapour deposition outside and the cooling tower be connected with described exhaust post, residual gas after vapour deposition enters described exhaust post through described second ventilating pit and described first ventilating pit, imports in described cooling tower further by described exhaust post.
Wherein, described vacuum coating film equipment comprises magnetic rotation assembly further, described magnetic rotation assembly comprises the first rotary magnet being arranged at described vapour deposition outside and the second rotary magnet being arranged at described vapour deposition indoor, described first rotary magnet and described second rotary magnet magnetic couplings, rotation drive motor drives described first rotary magnet to rotate, and drive described second rotary magnet to rotate, and then drive described stent strut can rotate around described exhaust post.
Wherein, described exhaust post runs through described vapor deposition chamber and arranges, and described first rotary magnet and described second rotary magnet rotate bearing respectively on described exhaust post and can to rotate around described exhaust post.
Wherein, described exhaust post run through be arranged at described vapor deposition chamber diapire on and vertically extend, described stent strut along described vertical direction nested to outside described exhaust post and bearing on described second rotary magnet.
Wherein, the top of described vapor deposition chamber is provided with opening, described support is positioned in described vapor deposition chamber or from described vapor deposition chamber by described opening and takes out.
For solving the problems of the technologies described above, another technical scheme that the utility model provides is: provide a kind of data line support for vacuum coating film equipment, described data line support comprises multiple Support joint, the data cable connector of described Support joint and described data line is adaptive and can patch fixing each other, and then the vapour deposition described data line being arranged at described vacuum coating film equipment is indoor.
The beneficial effects of the utility model are: be different from prior art; a kind of vacuum coating film equipment and data line support are provided; by the design supporting with data line structure; thus batch vacuum plated film can be carried out to data line; improve efficiency and the coating effects of data line vacuum nano plated film, and can also protected data wire terminal part in coating process.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of vacuum coating film equipment that the utility model embodiment provides;
Fig. 2 is the structural representation of the exhaust post of a kind of vacuum coating film equipment that the utility model embodiment provides;
Fig. 3 is the structural representation of the stent strut of a kind of vacuum coating film equipment that the utility model embodiment provides;
Fig. 4 is the structural representation of the another kind of vacuum coating film equipment that the utility model embodiment provides;
Fig. 5 is the schema of the vacuum coating method of a kind of data line that the utility model embodiment provides.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in detail.
Refer to Fig. 1, Fig. 1 is the structural representation of a kind of vacuum coating film equipment that the utility model embodiment provides, as shown in the figure, the vacuum coating film equipment of the present embodiment is used for carrying out vacuum plating to data line, wherein data line one end is provided with the first data cable connector, vacuum coating film equipment comprises vapor deposition chamber 1 and is arranged at the support 2 of vapour deposition indoor, support 2 comprises multiple first Support joint 21, first Support joint 21 can be adaptive and patch fixing each other with the first data cable connector, and then be arranged in vapor deposition chamber 2 by data line.
On the basis of the embodiment of the present invention one, the present invention proposes a kind of embodiment of supporting structure further, wherein, support 2 also comprises stent strut 22 and multiple first support bar 23 further, multiple first support bar 23 is arranged on stent strut 22 and along the radial direction of stent strut and radially extends, and the first Support joint 21 is arranged at intervals on the first support bar 23.This embodiment is only the good embodiment example of one of supporting structure; do not form the restriction to the utility model protection domain; every the present embodiment is done according to technical spirit of the present utility model any amendment, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
First support bar 23 is arranged at intervals with multiple first draw-in groove 24, first Support joint 21 to be fixed in the first draw-in groove 24.
Wherein, the other end of data line is also provided with the second data cable connector, support 2 comprises multiple second Support joint 25 and multiple second support bar 26 further, multiple second support bar 26 to be arranged at intervals on stent strut 22 relative to the first support bar 23 and radial direction along stent strut 22 radially extends along the axial direction due of stent strut 22, second Support joint 25 is arranged at intervals on the second support bar 26, second Support joint 25 and the second data cable connector are adaptive and can patch fixing each other, and then data line is arranged between the first support bar 23 and the second support bar 26.
Second support bar 26 is arranged at intervals with multiple second draw-in groove 27, second Support joint 25 to be fixed in the second draw-in groove 27.
First Support joint 21 and the second Support joint 25 are symmetrical arranged, with the axial direction due making the data line be arranged between the first support bar 23 and the second support bar 26 be parallel to stent strut 22.
Preferably, at least one in the first support bar 23 and the second support bar 26 is adjustable along the position of the axial direction due of stent strut 22, so make the first support bar 23 and the second support bar 26 adjustable along the spacing of the axial direction due of stent strut 22.
Wherein, support 2 comprises the first main support ring 28 and the second main support ring 29 further, first main support ring 28 and the second main support ring 29 respectively and nested setting of stent strut 22 and axial direction due interval along stent strut are fixed on stent strut 22, first support bar 23 comprises multiple first main support rod 231, multiple first main support rod 231 is arranged on the first main support ring 28 and outside to the first main support ring 28 radially extends, second support bar 26 comprises multiple second main support rod 261, multiple second main support rod 261 is arranged on the second main support ring 29 and outside to the second main support ring 29 radially extends.
Wherein, support 2 comprises the first auxiliary support ring 30 further, second auxiliary support ring 31, multiple first auxiliary support bar 232 and multiple second auxiliary support bar 261, first auxiliary support ring 30 to be arranged on the first main support rod 231 and along the radial direction of stent strut 22 and the first nested setting in main support ring 28 interval, multiple first auxiliary support bar 232 is arranged on the first auxiliary support ring 30 and outside to the first auxiliary support ring 30 radially extends, second auxiliary support ring 31 to be arranged on the second main support rod 261 and along the radial direction of stent strut 22 and the second nested setting in main support ring 29 interval, multiple second auxiliary support bar 261 is arranged on the second auxiliary support ring 31 and outside to the second auxiliary support ring 31 radially extends.
By the main support ring of first on support 2 28 and the auxiliary support ring 31 of the second main support ring 29, first auxiliary support ring 30, second, support bar as much as possible can be set, thus Support joint as much as possible is set.
Wherein, the vacuum coating film equipment of the present embodiment comprises the entrance 37 that is arranged at vapor deposition chamber 1 sidewall further and is arranged at the indoor cooling distributing damper 38 faced with entrance 37 of vapour deposition, macromolecular material gas through cracking is introduced through entrance 37, and is spread in vapor deposition chamber 1 after cooling distributing damper 38 cools.Cooling distributing damper 38 can avoid high-temperature macromolecule material gas directly to encounter on product to be coated, and the macromolecular material nano gas after cracking is cooled to room temperature after running into cooling distributing damper 38 and spreads to surrounding.
Wherein, the vacuum coating film equipment of the present embodiment comprises exhaust post 32 further, exhaust post 32 is hollow form and is provided with multiple first ventilating pit (scheming not shown) on the sidewall of exhaust post 32, stent strut 22 is hollow form and the sidewall of stent strut 22 is provided with multiple second ventilating pit 221, exhaust post 32 inserts stent strut 22 from one end of stent strut 22, stent strut 22 is nested to be arranged at outside exhaust post 32 and can to rotate around exhaust post 32, and macromolecular material cracked gas evenly spreads through the first ventilating pit and the second ventilating pit 221 and is deposited on data line.
Please consult Fig. 2 further, Fig. 2 is the structural representation of the exhaust post of a kind of vacuum coating film equipment that the utility model embodiment provides, as shown in the figure, multiple first ventilating pits 321 be vented on post 32 sidewall are the bar hole of length direction along the axial direction due setting of exhaust post.Further, the first ventilating pit 321 be disposed adjacent along the axial direction due of exhaust post 32 offsets one from another along the axial direction due being vented post 32.To arrange the first ventilating pit 321 as much as possible.
Refer to Fig. 1 and combine and consult Fig. 3, Fig. 3 is the structural representation of the stent strut of a kind of vacuum coating film equipment that the utility model embodiment provides, multiple second ventilating pits 221 that stent strut 22 sidewall is arranged are circular port, and between the second main support rod 261 being arranged between the first main support rod 231 that the axial direction due along stent strut 22 is disposed adjacent and being disposed adjacent along the axial direction due of stent strut 22.Can extract out from exhaust post 32 through the first ventilating pit 321 and the second ventilating pit 221 equably to make the residual gas in vapor deposition chamber 1 after vacuum moulding machine.
Please continue to refer to Fig. 1, preferably, support 2 comprises the top cover 33 that sealing is arranged at the other end of stent strut 22 further, can conveniently extract support 2 by top cover 33.
Wherein, the vacuum coating film equipment of the present embodiment also comprises the cooling tower 39 being arranged at and being connected outside vapor deposition chamber 1 and with exhaust post 32 further, residual gas after vapour deposition enters exhaust post 32 through the second ventilating pit 221 and the first ventilating pit 321, imports in cooling tower 39 further by exhaust post 32.To avoid residual gas to external diffusion, also be equiped with sensor in cooling tower 39 simultaneously, the content of macromolecular material cracked gas in residual gas can be detected by sensor, and regulate entrance 37 according to the content of macromolecular material cracked gas in residual gas, to reduce or to increase the amount of the polymer cracked gas introducing vapor deposition chamber 1.
Wherein, the vacuum coating film equipment of the present embodiment comprises magnetic rotation assembly further, magnetic rotation assembly comprises the first rotary magnet 34 be arranged at outside vapor deposition chamber 1 and the second rotary magnet be arranged at inside vapor deposition chamber 1, first rotary magnet 34 and the second rotary magnet 35 magnetic couplings mutually, rotation drive motor (not shown) drives the first rotary magnet 34 to rotate, first rotary magnet 34 drives the second rotary magnet 35 to rotate, and then drives stent strut 22 can rotate around exhaust post 32.
Preferably, exhaust post 32 runs through vapor deposition chamber 1 and arranges, and the first rotary magnet 34 and the second rotary magnet rotate bearing respectively on exhaust post 32 and can to rotate around exhaust post 32.
More preferably, exhaust post 32 run through be arranged at vapor deposition chamber diapire on and vertically extend, stent strut 22 vertically nested to exhaust post 32 outside and bearing on the second rotary magnet 35.
Wherein, further, the top of vapor deposition chamber 1 is provided with opening 36, support 2 can be positioned in vapor deposition chamber 2 or from vapor deposition chamber 2 by opening 36 and take out.
Refer to Fig. 4, Fig. 4 is the another kind of vacuum coating film equipment that the utility model embodiment provides, as shown in the figure, the vacuum coating film equipment of the present embodiment comprises raw material storage tank 3, pyrolyzer 4, vapor deposition chamber 1 and is arranged at the support 2 of vapour deposition indoor, cooling distributing damper 38, vacuum pump 5, rotation drive motor 6 and cooling tower 39.
Wherein, raw material storage tank 3 is used for raw material for storing, namely for the macromolecular material of vacuum plating, the such as cracked gas of at least one material of Parylene N (polyphenylene ethyl), Parylene C (poly) and Parylene D (polydichloro-p-xylene) is most preferably wherein polyphenylene ethyl cracked gas.And utilize one-level process furnace in it (scheming not shown) that heating raw materials is formed gaseous state macromolecular material after 150 degree, import in pyrolyzer.
Pyrolyzer 4 is connected with raw material storage tank 3, receive the macromolecular material being heated into gaseous state through one-level, and carry out being cracked into macromolecular material nano gas after secondary is heated to 650 degree, by the entrance 37 of vapor deposition chamber 1 sidewall, macromolecular material nano gas is imported in vapor deposition chamber 1.
After macromolecular material nano gas enters from entrance 37, through cooling distributing damper cooling 38, to avoid the gas of 650 degree directly to encounter on product to be coated, the macromolecular material nano gas after cracking spreads to surrounding after running into cooling distributing damper 38.
The support 2 that vacuum coating film equipment comprises exhaust post 32, rotary components 7, vapor deposition chamber 1 further and is arranged in vapor deposition chamber 1, the concrete composition of these component parts and function refer to the detailed description of above-described embodiment, and the present embodiment does not mark explanation one by one.
The vacuum coating film equipment of the present embodiment also comprises cooling tower 39, cooling tower 39 to be arranged at outside vapor deposition chamber 1 and to be connected with exhaust post 32, first ventilating pit of second ventilating pit of the residual gas after vapour deposition on the stent strut of support and exhaust post 32 enters exhaust post, imports in cooling tower 39 further by exhaust post 32.Through cooling tower 39 the macromolecular material gas quick solidification in residual gas, prevent it to external diffusion.
The vacuum coating film equipment of the present embodiment comprises vacuum pump 5 further, and vacuum pump 5 is connected with above-mentioned cooling tower 39, to be vacuumized by exhaust post 32 pairs of vapor deposition chambers, makes vapor deposition chamber 1 form negative pressure of vacuum, is convenient to realize vapour deposition efficiently.
Further, the vacuum coating film equipment of the present embodiment also comprises rotation drive motor 6, is connected with the first rotary magnet by Timing Belt, rotates for driving the first rotary magnet, drive the second rotary magnet, and then drive the stent strut 32 of vapour deposition indoor to rotate.
It should be noted that, macromolecular material in the embodiment of the present invention can be at least one material of Parylene N (polyphenylene ethyl), Parylene C (poly) and Parylene D (polydichloro-p-xylene), is most preferably wherein polyphenylene ethyl.
Another embodiment of the utility model provides a kind of data line support for vacuum coating film equipment, wherein, data line support comprises multiple Support joint, the data cable connector of Support joint and data line is adaptive and can patch fixing each other, and then vapour deposition data line being arranged at vacuum coating film equipment is indoor.Wherein, the concrete formation of data line support and structure refer to the associated description of the support of the vacuum coating film equipment provided in above-described embodiment, do not repeat them here.
Further, on the basis of the vacuum coating film equipment provided above, the utility model embodiment also provides a kind of vacuum coating method of data line, and this vacuum coating method carries out vacuum plating by using above-mentioned vacuum coating film equipment to data line.Refer to Fig. 5, Fig. 5 is the schema of the vacuum coating method of a kind of data line that the utility model embodiment provides, and the method for the present embodiment data line vacuum plating comprises:
S101: the Support joint of the data cable connector of data line and support is patched fixing each other;
Particularly, first data cable connector of data line and the first Support joint of support are patched fixing, second data cable connector of data line and the second Support joint of support patch fixing, and at least one of the first support bar of adjusting pole and the second support bar is along the position of the axial direction due of stent strut, the data line be arranged between the first support bar and the second support bar is made to be parallel to the axial direction due of stent strut.
S102: stentplacement is indoor in the vapour deposition of vacuum coating film equipment, is arranged at vapour deposition indoor to make data line;
Open the opening on the vapor deposition chamber of vacuum coating film equipment, by indoor in the vapour deposition of vacuum coating film equipment for the stentplacement setting data line, be arranged at vapour deposition indoor to make data line.
S103: macromolecular material cracked gas is introduced vapor deposition chamber and is deposited on data line, and residual gas is extracted out from exhaust post.
From vapor deposition chamber side wall entrance, macromolecular material cracked gas is introduced vapor deposition chamber, rotation drive motor (not shown) drives the first rotary magnet of vacuum coating film equipment to rotate, and drive the second rotary magnet to rotate, and then drive stent strut can rotate around exhaust post.Macromolecular material cracked gas is spread in vapour deposition indoor after the cooling of cooling distributing damper, is uniformly distributed and is deposited on data line after swinging strut rotates in vapour deposition indoor.Evenly extract residual gas out further by the second ventilating pit on exhaust the first ventilating pit of post and the stent strut of support, and residual gas is discharged from center residual gas vent pipe.The content of polymer cracked gas in Real-Time Monitoring residual gas after cooling tower cooling, the pipeline tapping size of adjustment 650 degree pyrolyzer in time, makes it to realize the maximization of polymer sedimentation effect.Vacuum pump constantly makes it to allow the cracking nanometer organic polymer of 650 degree of pyrolyzer constantly spread to gaseous phase deposition stove from vapor deposition chamber extracting vacuum (extracting the residual gas after vapour deposition).
Wherein, macromolecular material cracked gas in the utility model embodiment can the cracked gas of at least one material of Parylene N (polyphenylene ethyl), Parylene C (poly) and Parylene D (polydichloro-p-xylene), is most preferably wherein polyphenylene ethyl cracked gas.
The vacuum coating film equipment that above the utility model embodiment provides, data line support and film coating method; by the design supporting with data line structure; thus batch vacuum plated film can be carried out to data line; improve efficiency and the coating effects of data line vacuum nano plated film, and can also the shank of protected data line in coating process.
The foregoing is only embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every utilize the utility model specification sheets and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (20)
1. a vacuum coating film equipment, for carrying out vacuum plating to data line, described data line one end is provided with the first data cable connector, it is characterized in that, described vacuum coating film equipment comprises vapor deposition chamber and is arranged at the support of described vapour deposition indoor, described support comprises multiple first Support joint, and described first Support joint can be adaptive and patch fixing each other with described first data cable connector, and then it is indoor described data line to be arranged at described vapour deposition.
2. vacuum coating film equipment according to claim 1, it is characterized in that, described support comprises stent strut and multiple first support bar further, described multiple first support bar is arranged on described stent strut and along the radial direction radiated entends of described stent strut, described first Support joint is arranged at intervals on described first support bar.
3. vacuum coating film equipment according to claim 2, is characterized in that, described first support bar is arranged at intervals with multiple first draw-in groove, and described first Support joint is fixed in described first draw-in groove.
4. vacuum coating film equipment according to claim 2, it is characterized in that, the other end of described data line is provided with the second data cable connector, described support comprises multiple second Support joint and multiple second support bar further, described multiple second support bar to be arranged at intervals on described stent strut relative to described first support bar and along the radial direction radiated entends of described stent strut along the axial direction due of described stent strut, described second Support joint is arranged at intervals on described second support bar, described second Support joint and described second data cable connector adaptive and can patch fixing each other, and then described data line is arranged between described first support bar and described second support bar.
5. vacuum coating film equipment according to claim 4, is characterized in that, described second support bar is arranged at intervals with multiple second draw-in groove, and described second Support joint is fixed in described second draw-in groove.
6. vacuum coating film equipment according to claim 4, it is characterized in that, described first Support joint and described second Support joint are symmetrical arranged, with the axial direction due making the described data line be arranged between described first support bar and described second support bar be parallel to described stent strut.
7. vacuum coating film equipment according to claim 4, it is characterized in that, at least one in described first support bar and described second support bar is adjustable along the position of the axial direction due of described stent strut, so make described first support bar and described second support bar adjustable along the spacing of the axial direction due of described stent strut.
8. vacuum coating film equipment according to claim 4, it is characterized in that, described support comprises the first main support ring and the second main support ring further, described first main support ring and described second main the support ring respectively and nested setting of described stent strut and axial direction due interval along described stent strut are fixed on described stent strut, described first support bar comprises multiple first main support rod, described multiple first main support rod to be arranged on described first main support ring and to the outside radiated entends of described first main support ring, described second support bar comprises multiple second main support rod, described multiple second main support rod to be arranged on described second main support ring and to the outside radiated entends of described second main support ring.
9. vacuum coating film equipment according to claim 8, it is characterized in that, described support comprises the first auxiliary support ring further, second auxiliary support ring, multiple first auxiliary support bar and multiple second auxiliary support bar, described first auxiliary support ring to be arranged on described first main support rod and along the radial direction of described stent strut and the described first nested setting in main support ring interval, described multiple first auxiliary support bar to be arranged on described first auxiliary support ring and to the outside radiated entends of described first auxiliary support ring, described second auxiliary support ring to be arranged on described second main support rod and along the radial direction of described stent strut and the described second nested setting in main support ring interval, described multiple second auxiliary support bar to be arranged on described second auxiliary support ring and to the outside radiated entends of described second auxiliary support ring.
10. the vacuum coating film equipment according to any one of claim 1-8, it is characterized in that, described vacuum coating film equipment comprises the entrance that is arranged at described vapor deposition chamber sidewall further and is arranged at the indoor cooling distributing damper faced with described entrance of described vapour deposition, described entrance is for introducing macromolecular material cracked gas, and it is indoor that described macromolecular material cracked gas is spread in described vapour deposition after described cooling distributing damper cooling.
11. vacuum coating film equipments according to claim 10, it is characterized in that, described vacuum coating film equipment comprises exhaust post further, described exhaust post is hollow form and on the sidewall of described exhaust post, is provided with multiple first ventilating pit, described stent strut is hollow form and the sidewall of described stent strut is provided with multiple second ventilating pit, described exhaust post inserts described stent strut from one end of described stent strut, described stent strut is nested to be arranged at outside described exhaust post and can to rotate around described exhaust post, described macromolecular material cracked gas evenly spreads through described first ventilating pit and described second ventilating pit and is deposited on described data line.
12. vacuum coating film equipments according to claim 11, is characterized in that, the described first ventilating pit bar hole that to be length direction arranged along the axial direction due of described exhaust post.
13. vacuum coating film equipments according to claim 12, is characterized in that, described first ventilating pit that the axial direction due along described exhaust post is disposed adjacent offsets one from another along the axial direction due of described exhaust post.
14. vacuum coating film equipments according to claim 11, is characterized in that, described support comprises the top cover that sealing is arranged at the other end of described stent strut further.
15. vacuum coating film equipments according to claim 11, it is characterized in that, described vacuum coating film equipment comprises further and is arranged at described vapour deposition outside and the cooling tower be connected with described exhaust post, residual gas after vapour deposition enters described exhaust post through described second ventilating pit and described first ventilating pit, imports in described cooling tower further by described exhaust post.
16. vacuum coating film equipments according to claim 11, it is characterized in that, described vacuum coating film equipment comprises magnetic rotation assembly further, described magnetic rotation assembly comprises the first rotary magnet being arranged at described vapour deposition outside and the second rotary magnet being arranged at described vapour deposition indoor, described first rotary magnet and described second rotary magnet magnetic couplings, rotation drive motor drives described first rotary magnet to rotate, and drive described second rotary magnet to rotate, and then drive described stent strut can rotate around described exhaust post.
17. vacuum coating film equipments according to claim 16, it is characterized in that, described exhaust post runs through described vapor deposition chamber and arranges, and described first rotary magnet and described second rotary magnet rotate bearing respectively on described exhaust post and can to rotate around described exhaust post.
18. vacuum coating film equipments according to claim 16, it is characterized in that, described exhaust post run through be arranged at described vapor deposition chamber diapire on and vertically extend, described stent strut along described vertical direction nested to outside described exhaust post and bearing on described second rotary magnet.
19. vacuum coating film equipments according to claim 18, is characterized in that, the top of described vapor deposition chamber is provided with opening, and described support is positioned in described vapor deposition chamber or from described vapor deposition chamber by described opening and takes out.
20. 1 kinds of data line supports for vacuum coating film equipment, it is characterized in that, described data line support comprises multiple Support joint, the data cable connector of described Support joint and described data line is adaptive and can patch fixing each other, and then the vapour deposition described data line being arranged at described vacuum coating film equipment is indoor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420313016.3U CN204224699U (en) | 2014-06-12 | 2014-06-12 | A kind of vacuum coating film equipment and data line support |
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| CN201420313016.3U CN204224699U (en) | 2014-06-12 | 2014-06-12 | A kind of vacuum coating film equipment and data line support |
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| CN204224699U true CN204224699U (en) | 2015-03-25 |
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| CN201420313016.3U Expired - Fee Related CN204224699U (en) | 2014-06-12 | 2014-06-12 | A kind of vacuum coating film equipment and data line support |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113652653A (en) * | 2021-07-22 | 2021-11-16 | 深圳源国光子通信有限公司 | Method for coating cavity surface of semiconductor laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113652653A (en) * | 2021-07-22 | 2021-11-16 | 深圳源国光子通信有限公司 | Method for coating cavity surface of semiconductor laser |
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