CN204178199U - A kind of sync control device for reaction chamber upper cover automatic lifting - Google Patents
A kind of sync control device for reaction chamber upper cover automatic lifting Download PDFInfo
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- CN204178199U CN204178199U CN201420604181.4U CN201420604181U CN204178199U CN 204178199 U CN204178199 U CN 204178199U CN 201420604181 U CN201420604181 U CN 201420604181U CN 204178199 U CN204178199 U CN 204178199U
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- reaction chamber
- upper cover
- chamber upper
- control device
- control
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Abstract
The utility model discloses a kind of sync control device for reaction chamber upper cover automatic lifting, comprise PLC, described PLC is connected with four control modules; Each control module comprises a servoamplifier, and described servoamplifier is connected with servomotor, and described servomotor drives the screw mandrel of electric cylinder to move up and down by reductor; Four rhizoid bars of described four control modules are all fixedly connected with reaction chamber upper cover, and four rhizoid bars are identical apart from the position of described reaction chamber upper cover mid point with the four points of connection of reaction chamber upper cover.Control device of the present utility model comprises four independently control modules, can control four control module synchronization actions by PLC, is easy to control, and control accuracy is high.
Description
Technical field
The utility model relates to semiconductor manufacturing equipment reaction chamber top cover lifting system, particularly a kind of sync control device for reaction chamber upper cover automatic lifting.
Background technology
Vapour phase epitaxy method is a kind of important method of growth high-purity semiconductor material, specifically in airtight reaction chamber, pass into reacting gas, under suitable temperature, pressure condition, the surface that gas-phase chemical reaction is deposited on wafer substrate occurs, and Material growth has high requirement to environment cleanliness and impermeability.
The reaction chamber of current most of semiconductor manufacturing equipment is not openable at the end of single process, reaction chamber cleaning and maintenance work very inconvenient.But it is all to adopt manually or mechanical gear, belt mode drive multiaxis to realize open and close that the current closed chamber for similar semiconductor equipment reaction chamber closes open operation.The former can bring the problems such as contact stain, and semiconductor equipment reaction chamber upper cover special construction, be not suitable for manual operation.The latter adopts traditional mechanical method of synchronization to drive reaction chamber upper cover, due to belt and gear clearance, physical construction error, each axial translation has difference, in addition, because this method of synchronization precision is not high, each axle unbalance stress of Long-Time Service process, easily cause the deformation of push rod, bending, destroy the generation that sealing even causes accident further.Therefore, this method of synchronization is difficult to the requirement meeting modern semiconductor devices reaction chamber high-cleanness, high vacuum enhancing.
Summary of the invention
Technical problem to be solved in the utility model is, not enough for prior art, provides a kind of sync control device for reaction chamber upper cover automatic lifting, reduces manual operation and pollutes; Promote precision and the synchronism of top cover lifting displacement, thus improve the impermeability of reaction chamber, the serviceable life of prolonged mechanical parts.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of sync control device for reaction chamber upper cover automatic lifting, comprises PLC, and described PLC is connected with four control modules; Each control module comprises a servoamplifier, and described servoamplifier is connected with servomotor, and described servomotor drives the screw mandrel of electric cylinder to move up and down by reductor; Four rhizoid bars of described four control modules are all fixedly connected with reaction chamber upper cover, and four rhizoid bars are identical apart from the position of described reaction chamber upper cover mid point with the four points of connection of reaction chamber upper cover.
Described PLC is communicated with described servoamplifier by optical fiber, and it is fast that optical-fibre communications has transmission speed, can solve because of communication network latency preferably, solve each servoamplifier received pulse instruction different time and influential system synchronism problem.
The cylinder body upper and lower of described electric cylinder is separately installed with upper limit position switch and lower position switch, once limit switch is touched in screw mandrel bottom, namely starts safety precautions, ensures that upper cover is not damaged.
Compared with prior art, the beneficial effect that the utility model has is: control device of the present utility model comprises four independently control modules, can control four control module synchronization actions by PLC, is easy to control, and control accuracy is high, decreases manual operation and pollute; Improve precision and the synchronism of top cover lifting displacement, thus the impermeability of reaction chamber can be improved, the serviceable life of prolonged mechanical parts.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation;
Fig. 2 is that the utility model is for reaction chamber top cover lifting motion single axle structural representation;
Wherein:
1:PLC controller; 2: optical fiber; 3: servoamplifier; 4: motor energizing cables; 5: brake cable; 6: scrambler stube cable; 7: servomotor; 8: reductor; 9: safeguard protection stroke; 10: electric cylinder screw mandrel; 11: upper limit position switch; 12: lower position switch; 13: technique stroke.
Embodiment
As depicted in figs. 1 and 2, the utility model one embodiment comprises PLC 1, and described PLC 1 is connected with four control modules; Each control module comprises a servoamplifier 3, and described servoamplifier 3 is connected with servomotor 7, and described servomotor 7 drives the screw mandrel 10 of electric cylinder to move up and down by reductor 8; Four rhizoid bars 10 of described four control modules are all fixedly connected with reaction chamber upper cover, and four rhizoid bars 10 are identical apart from the position of described reaction chamber upper cover mid point with the four points of connection of reaction chamber upper cover; Described PLC 1 is communicated with described servoamplifier 3 by optical fiber 2.Cylinder body 7 upper and lower of described electric cylinder is separately installed with upper limit position switch 11 and lower position switch 12.
Servoamplifier regulation output electric current and voltage controls the rotating speed of servomotor, the Rotation speed and displacement information of current servo motor is issued servoamplifier with the form of pulsed quantity by the scrambler of servomotor, servomotor current state is fed back to PLC by optical fiber by servoamplifier, setting value compares with value of feedback by PLC, result is as the input of virtual spindle controller (virtual Spindle control method), after calculating, export to servoamplifier, adjust the state of each servo motor output shaft.
Servomotor drives electric cylinder screw mandrel to move up and down through reductor, and electric cylinder screw mandrel top is connected with upper cover, drives upper cover to move up and down.For support equipment and personal security, also need a safety travel, safety travel bound is controlled by limit switch, namely starts safety precautions once touch.
Claims (3)
1. for a sync control device for reaction chamber upper cover automatic lifting, comprise PLC (1), it is characterized in that, described PLC (1) is connected with four control modules; Each control module comprises a servoamplifier (3), and described servoamplifier (3) is connected with servomotor (7), and described servomotor (7) drives the screw mandrel of electric cylinder (10) to move up and down by reductor (8); Four rhizoid bars (10) of described four control modules are all fixedly connected with reaction chamber upper cover, and four rhizoid bars (10) are identical apart from the position of described reaction chamber upper cover mid point with the four points of connection of reaction chamber upper cover.
2. the sync control device for reaction chamber upper cover automatic lifting according to claim 1, is characterized in that, described PLC (1) is communicated with described servoamplifier (3) by optical fiber (2).
3. the sync control device for reaction chamber upper cover automatic lifting according to claim 1 and 2, is characterized in that, cylinder body (7) upper and lower of described electric cylinder is separately installed with upper limit position switch (11) and lower position switch (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420604181.4U CN204178199U (en) | 2014-10-20 | 2014-10-20 | A kind of sync control device for reaction chamber upper cover automatic lifting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420604181.4U CN204178199U (en) | 2014-10-20 | 2014-10-20 | A kind of sync control device for reaction chamber upper cover automatic lifting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204178199U true CN204178199U (en) | 2015-02-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420604181.4U Active CN204178199U (en) | 2014-10-20 | 2014-10-20 | A kind of sync control device for reaction chamber upper cover automatic lifting |
Country Status (1)
| Country | Link |
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| CN (1) | CN204178199U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111912066A (en) * | 2020-08-25 | 2020-11-10 | 无锡菲兰爱尔空气质量技术有限公司 | Radiant air conditioner terminal for adjusting thermal damping |
-
2014
- 2014-10-20 CN CN201420604181.4U patent/CN204178199U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111912066A (en) * | 2020-08-25 | 2020-11-10 | 无锡菲兰爱尔空气质量技术有限公司 | Radiant air conditioner terminal for adjusting thermal damping |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |