The product of a kind of coated basal plate and gained
Technical field
The utility model relates to a kind of display device technical field, particularly relates to the product of a kind of coated basal plate and gained.
Background technology
Aisenberg and Chabot of Germany in 1971 adopts carbon ion beam to prepare the amorphous carbon film with diamond feature first, because prepared film has the performance similar to diamond, Aisenberg was referred to as diamond-like diamond (DLC) film it first in 1973.Diamond-like diamond film has the character about the same with diamond, as high rigidity, wear-resistant, high surface finish, high resistivity, excellent field emission performance, high transmission rate and chemical inertness etc., its product is widely used in the every field such as machinery, electronics, microelectromechanical systems (MEMS), optics and biomedicine.The depositing temperature of diamond-like diamond film is low, surface smoothing, has the cost performance higher than diamond film, and can replace Buddha's warrior attendant diamond film in field quite widely, so be the focus of research since the eighties always.The low-friction coefficient of diamond-like diamond (DLC) and high-wearing feature make diamond-like diamond film be applied in fields such as cutting element, magnetic storage, joint prosthesises.Water white diamond-like diamond film can while the optical property ensureing optical module; improve its wearability and corrosion stability significantly; be applied to now the diaphragm of optical lens, the diaphragm of optical disc protective film, watch dial, lens (glass, resin) diaphragm and windshield diaphragm etc.Another optical property is its infrared anti-reflection protection feature, and namely it not only has infrared anti-reflection effect, has again the function of protecting group bottom material, can be used as the anti-reflection of infrared region and diaphragm.Prior art is directly plated to diamond-film-like on substrate, there is plated film not firm, or the poor optical properties of overall rete, the problem that visible spectrum 380 ~ 700nm transmitance is low.
Utility model content
It is not high to there is adhesion of coating film difference, case hardness in the rete for prior art, the problem that visible spectrum 380 ~ 700nm transmitance is low, and the utility model provides a kind of strong adhesion, and adhesion strength is high, high hydrophobic antifouling, anti-fingerprint, antibacterial coated basal plate.
For solving the problems of the technologies described above, the technical scheme that the utility model provides is: a kind of coated basal plate, and comprise substrate, to fit transition rete over the substrate surface and protective film successively, described substrate is glass substrate or optical plastic substrate; Described transition rete is one or more layers SiOx, TiO of being alternately coated with
2, Nb
2o
5and/or Ta
2o
5layer, wherein X is the integer of 0 ~ 2, and described protective film is diamond-like carbon film layer.
Further: in above-mentioned coated basal plate, the one of described optical plastic substrate preferably in polymetylmethacrylate substrate, POLYCARBONATE SHEET PC LENS substrate and polyethylene terephtalate substrate.Described transition rete is 1 ~ 8 layer; The thickness of described transition rete is 1 ~ 1000 nanometer.The described preferred thickness of transition rete is 5 ~ 500 nanometers.Described diamond-like carbon film layer is 5 ~ 500 nanometers.Hardness 8 ~ the 30GPa of described optics diamond-like carbon film layer.Described transition rete and the thickness of optics diamond-like carbon film layer are specific 1/4 wave optical thickness integral multiple or non-regular optical thickness, to form optically functional film system.
The utility model additionally provides a kind of Mobile phone screen, and it comprises above-mentioned coated basal plate.
The utility model additionally provides a kind of computer screen, and it comprises above-mentioned coated basal plate.
The utility model additionally provides a kind of television screen, and it comprises above-mentioned coated basal plate.
DLC is called for short DLC, and it is containing sp in amorphous carbon
3the metastable structure of key, in a diamond, carbon atom is with sp
3bond is closed, and in graphite, carbon atom is with sp
2bonding, in DLC, has sp
3, sp
2two kinds of bonding schemes, thus the stuctures and properties of diamond-film-like is between diamond and graphite.At present, the preparation method of diamond-like carbon film layer is a lot, as ion beam depositing (IBD), sputtering sedimentation, radio frequency CVD (RFCVD), the magnetic filtering cathode arc deposition physical vapour deposition (PVD) such as (FCVA), pulsed laser deposition and the chemical vapour deposition (CVD) such as direct current CVD (DCCW), electron beam evaporation CVD, microwave CVD (ECRCVD).The performance of DLC and DLC SP
3key SP
2closely related with the content of key.By preparing the process conditions of DLC film, SP in film can be controlled
3key and SP
2the content of key.Diamond-like diamond film layer (DLC) can be prepared by deposition techniques such as plasma auxiliary chemical vapor deposition (PACVD), plasma enhanced chemical vapor deposition (PECVD), pulse Vacuum arc plasma depositions.In these methods, it is low that plasma enhanced chemical vapor deposition (PECVD) method has depositing temperature, good around plating property, various features such as the film even compact of preparation and become the most frequently used method.
Compared with prior art, coated basal plate of the present utility model, comprise substrate, to fit transition rete over the substrate surface and protective film successively, described substrate is glass substrate or optical plastic substrate; Described transition rete is one or more layers SiOx, TiO of being alternately coated with
2and Ta
2o
5,nb
2o
5layer, wherein X is the integer of 0 ~ 2, and described protective film is diamond-like carbon film layer.Transition rete of the present utility model is one or more layers SiOx, TiO of being alternately coated with
2, Nb
2o
5and/or Ta
2o
5layer, the chemical property of these materials is very stable, with diamond rete together, by adjustment film optical thickness, can make and have antireflection film system again, and the functional film layer of highly reflecting films system; In addition, the one of optical plastic substrate preferably in polymetylmethacrylate substrate, POLYCARBONATE SHEET PC LENS substrate and polyethylene terephtalate substrate, the weight density of these optical plastics only has just glass 50%, also significantly reduces the weight of whole substrate like this.The hardness of substrate diamond-like carbon film layer of the present utility model is greater than, and after they use the aspects such as Mobile phone screen, computer screen and television screen, the large raising of optical property, the hardness of screen, intensity, corrosion-resistant, scratch resistant performance also improves greatly.
Accompanying drawing explanation
Accompanying drawing 1 is the structure diagram of the utility model embodiment one substrate;
Accompanying drawing 2 is board structure sketches of the utility model embodiment two;
Accompanying drawing 3 is board structure sketches of the utility model embodiment three;
Wherein 1 substrate, 2 transition retes, 3 protective film.
Specific embodiments
The utility model is further illustrated with reference to accompanying drawing 1-3 and the utility model embodiment.
Embodiment one: a kind of coated basal plate, comprise substrate 1, to fit transition rete 2 over the substrate surface and protective film 3 successively, described substrate is glass substrate or optical plastic substrate; Described transition rete is one deck SiOx or TiO
2or Nb
2o
5or Ta
2o
5layer, wherein X is the integer of 0 ~ 2, and described protective film is diamond-like carbon film layer.The one of described optical plastic substrate preferably in polymetylmethacrylate substrate, POLYCARBONATE SHEET PC LENS substrate and polyethylene terephtalate substrate.The hardness of described optics diamond-like carbon film layer is Vickers hardness 8 ~ 30GPa.
Embodiment two: be that described transition rete is the multilayer SiOx, the Ta that are alternately coated with the difference of embodiment one
2o
5,nb
2o
5layer, forms optically functional film system.
Embodiment three: be that described transition rete is the multilayer SiOx, the TiO that are alternately coated with the difference of embodiment one
2ta
2o
5and Nb
2o
5layer, forms optically functional film system.
Embodiment four: on the basis of embodiment three or four, the described total number of plies of transition rete is no more than 8 layers.
Embodiment five: a kind of handset touch panel, this hand-written touch and display screen comprise the substrate of embodiment one to three.This screen hardness and high, corrosion-resistant, the scratch resistant performance of intensity good.
Embodiment six: a kind of computer contact screen, usually containing the substrate of tempering glass material, the substrate of described safety glass material is the substrate of present embodiment one to three.This screen hardness and high, corrosion-resistant, the mar-proof performance of intensity good.
Embodiment seven: a kind of LCD TV, comprises television display screen of the present utility model, and described television display screen comprises the coated basal plate of embodiment one to three.This screen hardness and high, corrosion-resistant, the mar-proof performance of intensity good.
The above is preferred embodiment of the present utility model, is not departing from the utility model design situation, is carrying out any apparent distortion and replacement, all belongs to the utility model protection domain.