CN204115876U - A kind of dynamic phasing measurement mechanism - Google Patents
A kind of dynamic phasing measurement mechanism Download PDFInfo
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- CN204115876U CN204115876U CN201420629683.2U CN201420629683U CN204115876U CN 204115876 U CN204115876 U CN 204115876U CN 201420629683 U CN201420629683 U CN 201420629683U CN 204115876 U CN204115876 U CN 204115876U
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Abstract
The utility model discloses a kind of dynamic phasing measurement mechanism, comprise weak coherent light source, broadband, spectroanalysis instrument, fiber coupler, optoisolator, optical fiber polarization controller, reference arm optical fiber, signal arm optical fiber, first fibre-optical probe, second fibre-optical probe, first, second fibre-optical probe includes optical fiber collimator, condenser lens and broadband metallic-membrane plating reflector, the first port of fiber coupler is connect after weak coherent light source, broadband is connected with optoisolator, spectroanalysis instrument connects the second port of fiber coupler, reference arm optical fiber one end connects the 3rd port of fiber coupler, the optical fiber collimator of another termination first fibre-optical probe, condenser lens is located between optical fiber collimator and broadband metallic-membrane plating reflector, 4th port of signal arm optical fiber one termination fiber coupler, the optical fiber collimator of another termination second fibre-optical probe, reference arm optical fiber and signal arm optical fiber are all equipped with optical fiber polarization controller.The utility model reduces complexity and the cost of dynamic phasing measurement mechanism.
Description
Technical field
The utility model relates to the technical field of optical measurement, refers in particular to a kind of dynamic phasing measurement mechanism.
Background technology
In recent years, along with the fast development of optics, electronics, computer technology, Signal acquiring and processing technology and digital image processing techniques, phase shift interference measuring technique has been widely used in the various fields such as optical detection, speckle analysis, digital hologram, measuring three-dimensional morphology as the high-precision optical signalling detection means of one.Phase shift interference measurement is the principle of interference based on light, by modulating introducing different phase-shift phases between reference signal and detectable signal in measuring process, and gather the multi-frame interferometry figure of testee under different phase-shift phase, the phase information of testee just can be obtained by certain algorithm computing.
In phase shift interference is measured, the method for conventional introducing phase shift modulated has: 1, time domain phase shift modulated method: by using piezoelectric type phase-shifter electrostrictive properties to produce phase shift, modulation accuracy is high, but speed is slower; 2, heterodyne modulation method: make the two-beam of interference produce certain difference on the frequency by using acousto-optic frequency shifters thus produce phase shift, modulation accuracy is comparatively large by frequency shifter stability influence, and light path is more complicated; 3, laser frequency modulation method: using semiconductor laser as measurement light source, changes laser output wavelength by the Injection Current or environment temperature controlling semiconductor laser and realizes phase shift, be difficult to determine phase-shift phase in measuring process; 4, phase-mask method: the phase mask that can produce different phase-shift phase is fixed in the CCD camera of collection interferogram, collects the interferogram that each region has different phase-shift phase in single exposure.
In existing phase shift modulated method, the slower interferometry of phase shift modulated speed, is only applicable to the phase measurement of stationary body usually, can not be used for the measurement of the time dependent dynamic phasing object of phase place.Phase-mask method once can record the interferogram that several have different phase-shift phase, can be applied to the measurement of dynamic phasing object, but the manufacturing cost of phase mask is higher, and the lateral resolution of the image obtained also can reduce.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art and shortcoming, provides a kind of weak coherent light source, broadband that uses as the dynamic phasing measurement mechanism of measurement light source, have rational in infrastructure reliable, antijamming capability strong, measuring accuracy high.
For achieving the above object, technical scheme provided by the utility model is: a kind of dynamic phasing measurement mechanism, include weak coherent light source, broadband, spectroanalysis instrument, fiber coupler, optoisolator, optical fiber polarization controller, reference arm optical fiber, signal arm optical fiber, first fibre-optical probe, second fibre-optical probe, wherein, described first fibre-optical probe and the second fibre-optical probe have included optical fiber collimator, condenser lens and broadband metallic-membrane plating reflector, after weak coherent light source, described broadband is connected with optoisolator by Fiber connection to the first port of fiber coupler, described spectroanalysis instrument by Fiber connection to the second port of fiber coupler, one end of described reference arm optical fiber is connected to the 3rd port of fiber coupler, its other end connects the optical fiber collimator of the first fibre-optical probe, described condenser lens is located between optical fiber collimator and broadband metallic-membrane plating reflector, and described broadband metallic-membrane plating reflector is positioned on the focal plane of condenser lens, one end of described signal arm optical fiber is connected to the 4th port of fiber coupler, and its other end connects the optical fiber collimator of the second fibre-optical probe, described reference arm optical fiber and signal arm optical fiber are all provided with optical fiber polarization controller, rotate the polarization state that described optical fiber polarization controller can change light beam.
Weak coherent light source, described broadband, its centre wavelength is λ
c, start wavelength is λ
0, spectral bandwidth is Δ λ; Described fiber coupler adopts Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
Described spectroanalysis instrument sample frequency reaches hundred more than kHz, and its spectral response range covers the whole service band in weak coherent light source, broadband.
The light beam exported by weak coherent light source, broadband is divided into two bundles after fiber coupler, wherein light beam is reflected back fiber coupler through metallic-membrane plating reflector after transmitting in reference arm optical fiber, another light beam returns fiber coupler through signal arm optical fiber, the equivalent optical path that two-beam experiences.
Compared with prior art, tool has the following advantages and beneficial effect the utility model:
1, in the utility model, phase shift speed depends on the sample rate of spectroanalysis instrument, far above the modulating speed of phase-shifter conventional at present, the measurement to dynamic phasing object can be realized, be applicable to the phase measurement of live body transparent organism tissue and the monitoring to automobile combustion chamber gasoline combustion situation;
2, the utility model uses weak coherent light source, broadband as measurement light source, and utilize broadband spectral to realize phase shift, without the need to extra phase-shifter, reduce complexity and the cost of dynamic phasing measurement mechanism, phase shift modulated can be completed in very short time, be applicable to the interferometry to dynamic phasing object.
Accompanying drawing explanation
Fig. 1 is the light path schematic diagram of dynamic phasing measurement mechanism described in the utility model when measuring transmission-type phase object.
Fig. 2 is the light path schematic diagram of dynamic phasing measurement mechanism described in the utility model when measuring reflective phase object.
Fig. 3 is the interference signal figure a bit in t on dynamic phasing object.
Fig. 4 is interference signal figure after treatment.
Fig. 5 is the time domain phase place variation diagram that phase shift algorithm is extracted.
Fig. 6 is preset phase information and the comparison diagram recording phase information.
Embodiment
Below in conjunction with specific embodiment, the utility model is described in further detail.
Dynamic phasing measurement mechanism described in the present embodiment, include weak coherent light source, broadband 1, spectroanalysis instrument 2, fiber coupler 3, optoisolator 4, optical fiber polarization controller 5, reference arm optical fiber 6, signal arm optical fiber 7, first fibre-optical probe, the second fibre-optical probe, wherein, described first fibre-optical probe and the second fibre-optical probe have included optical fiber collimator 8, condenser lens 9 and broadband metallic-membrane plating reflector 10, after weak coherent light source, described broadband 1 is connected with optoisolator 4 by Fiber connection to the first port of fiber coupler 3, the A port namely in Fig. 1 and Fig. 2; Described spectroanalysis instrument 2 by Fiber connection to the second port of fiber coupler 3, the C port namely in Fig. 1 and Fig. 2; One end of described reference arm optical fiber 6 is connected to the 3rd port of fiber coupler 3, namely the B port in Fig. 1 and Fig. 2, its other end connects the optical fiber collimator 8 of the first fibre-optical probe, described condenser lens 9 is located between optical fiber collimator 8 and broadband metallic-membrane plating reflector 10, and described broadband metallic-membrane plating reflector 10 is positioned on the focal plane of condenser lens 9; One end of described signal arm optical fiber 7 is connected to the 4th port of fiber coupler 3, the D port namely in Fig. 1 and Fig. 2, and its other end connects the optical fiber collimator 8 of the second fibre-optical probe; Described reference arm optical fiber 6 and signal arm optical fiber 7 are all provided with optical fiber polarization controller 5, rotate the polarization state that described optical fiber polarization controller 5 can change light beam, thus obtain the better interference fringe of contrast.When measure transmission-type phase object 11 time, testee between described optical fiber collimator 8 and condenser lens 9, as shown in Figure 1; When measuring reflective phase object 12, testee is positioned on the focal plane of condenser lens 9, as shown in Figure 2.In measuring process, the light beam exported by weak coherent light source, broadband 1 is divided into two bundles after fiber coupler 3, wherein light beam is reflected back fiber coupler 3 through metallic-membrane plating reflector after transmitting in reference arm optical fiber 6, another light beam returns fiber coupler 3 through signal arm optical fiber 7, the equivalent optical path that two-beam experiences.
In addition, weak coherent light source, described broadband 1 is near-infrared light source, and its centre wavelength is λ
c, start wavelength is λ
0, spectral bandwidth is Δ λ; Described spectroanalysis instrument 2 sample frequency can reach more than 100KHz, and its spectral response range covers the whole service band in weak coherent light source, broadband 1; Described fiber coupler 3 adopts Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
The dynamic phasing measuring method that below can realize for the above-mentioned dynamic phasing measurement mechanism of the present embodiment, its concrete condition is as follows:
First, open weak coherent light source, described broadband and spectroanalysis instrument, and place tested phase object, adjust the distance between the optical fiber collimator of described reference arm optical fiber and signal arm optical fiber and condenser lens, make the optical path difference of two-arm equal, and making interference signal present the interference fringe in 3 ~ 5 cycles, adjustment optical fiber polarization controller, makes the contrast of interference fringe reach maximum; Then stop the light signal of described signal arm optical fiber, make described spectroanalysis instrument only detect reference arm light optical fiber signaling, i.e. the spectrum in broadband weak coherent light source, record and preserve this signal; Measure afterwards and preserve the interference signal between signal arm optical fiber and reference arm optical fiber, the interference signal that spectroanalysis instrument gathers dynamic phasing object is controlled by computing machine, data recorded successively and preserve in a computer, a width interference signal wherein as shown in Figure 3; Phase place due to object is dynamic change, and the interference signal therefore collected also is dynamic change in time, and by carrying out interference signal processing the phase place change information that can obtain dynamic phasing object, its treatment scheme is as follows:
1) interference signal collected by spectroanalysis instrument carries out zero-frequency, amplitude normalization process, and is uniformly distributed by wavelength space by signal data and is transformed into wave number space and is uniformly distributed, and carries out interpolation resampling at equal intervals by frequency;
2) Fourier transform is carried out to the data after resampling, remove DC component, then carry out inverse Fourier transform, obtain the interference signal after processing;
3) from the starting point of the interference signal after process, choose phase-shift phase successively to be spaced apart
four some I
1, I
2, I
3, I
4, utilize four-step phase-shifting algorithm:
calculate the wrapped phase φ being detected this moment some
1;
4) at the Data duplication in all moment, previous step 1 is carried out to sensing point) to step 3) operation, obtain the wrapped phase φ of all moment sensing points
1, finally the phase place change φ that Phase-un-wrapping operation can obtain sensing point is carried out to it.
For verifying the accuracy of the above-mentioned measuring method of this device, We conducted simulation, preset the phase information of tested dynamic phasing object, obtain measurement result by the above-mentioned measuring method of this device, contrast with preset value, verify feasibility and the accuracy of the above-mentioned measuring method of this device.On dynamic phasing object, some interference signal in t as shown in Figure 3; Interference signal after treatment as shown in Figure 4; The time domain phase place change of this point utilizing phase shift algorithm to extract as shown in Figure 5, wherein solid line represents default phase information, dotted line represents the phase information utilizing the above-mentioned measuring method of this device to record, difference between the two as shown in Figure 6, the maximal value of the absolute value of measuring error is 0.044rad, reach the measuring accuracy of 1/100 wavelength, thus demonstrate feasibility and the accuracy of the method.
In sum, after the above scheme of employing, the utility model adopts weak coherent light source, broadband as measurement light source, due to the phase differential difference to some extent of each wavelength light in weak coherent light source, broadband, therefore pass through spectroanalysis instrument fast and can collect periodically variable interference signal, this interference signal can be equivalent to and use wavelength to be λ
0monochromatic source as measurement light source, the interference fringe produced after phase shift modulated, by adopting phase shift algorithm just can extract the phase information of testee to interference signal.This device utilizes broadband weak coherent light to be derived from body to produce phase shift, and do not need extra phase-shifter, phase shift modulated speed depends on the sample frequency of fast spectral analysis instrument.At present, fast spectral analysis instrument can reach the sample rate of hundred more than kHz, which ensure that phase shift modulated can complete instantaneously, thus realizes the interferometry to dynamic phasing object, is worthy to be popularized.
The examples of implementation of the above are only the preferred embodiment of the utility model, not limit practical range of the present utility model with this, therefore the change that all shapes according to the utility model, principle are done, all should be encompassed in protection domain of the present utility model.
Claims (3)
1. a dynamic phasing measurement mechanism, it is characterized in that: include weak coherent light source, broadband (1), spectroanalysis instrument (2), fiber coupler (3), optoisolator (4), optical fiber polarization controller (5), reference arm optical fiber (6), signal arm optical fiber (7), first fibre-optical probe, second fibre-optical probe, wherein, described first fibre-optical probe and the second fibre-optical probe have included optical fiber collimator (8), condenser lens (9) and broadband metallic-membrane plating reflector (10), after weak coherent light source, described broadband (1) is connected with optoisolator (4) by Fiber connection to the first port of fiber coupler (3), described spectroanalysis instrument (2) by Fiber connection to the second port of fiber coupler (3), one end of described reference arm optical fiber (6) is connected to the 3rd port of fiber coupler (3), its other end connects the optical fiber collimator (8) of the first fibre-optical probe, described condenser lens (9) is located between optical fiber collimator (8) and broadband metallic-membrane plating reflector (10), and described broadband metallic-membrane plating reflector (10) is positioned on the focal plane of condenser lens (9), one end of described signal arm optical fiber (7) is connected to the 4th port of fiber coupler (3), and its other end connects the optical fiber collimator (8) of the second fibre-optical probe, described reference arm optical fiber (6) and signal arm optical fiber (7) are all provided with optical fiber polarization controller (5), rotate the polarization state that described optical fiber polarization controller (5) can change light beam.
2. a kind of dynamic phasing measurement mechanism according to claim 1, it is characterized in that: weak coherent light source, described broadband (1) is near-infrared light source, its centre wavelength is λ
c, start wavelength is λ
0, spectral bandwidth is Δ λ; Described fiber coupler (3) adopts Michelson structure, can center transmission wavelength be λ
c, bandwidth is the broadband light of Δ λ.
3. a kind of dynamic phasing measurement mechanism according to claim 1, it is characterized in that: described spectroanalysis instrument (2) sample frequency reaches hundred more than kHz, its spectral response range covers the whole service band in weak coherent light source, broadband (1).
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| CN110998429A (en) * | 2017-05-17 | 2020-04-10 | 菲尼萨瑞典有限责任公司 | Optical device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110998429A (en) * | 2017-05-17 | 2020-04-10 | 菲尼萨瑞典有限责任公司 | Optical device |
| CN110998429B (en) * | 2017-05-17 | 2023-12-22 | 菲尼萨瑞典有限责任公司 | Optical device |
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| TR01 | Transfer of patent right |
Effective date of registration: 20180427 Address after: 430206 G5 building, A8 area, 999 tech Road, East Lake Development Zone, Wuhan, Hubei. Patentee after: Wuhan Rulight New Technology Co., Ltd. Address before: 510000 Guangdong science and Technology Development Zone, Guangzhou, Guangzhou, new science and Technology Development Zone, 182, No. ninth, 902, unit G3, Co-patentee before: Wuhan Rulight New Technology Co., Ltd. Patentee before: GUANGZHOU FEITUO YOUSHI PHOTOELECTRIC TECHNOLOGY CO., LTD. |
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