CN204044254U - Semiconductor transducer output noise pick-up unit - Google Patents
Semiconductor transducer output noise pick-up unit Download PDFInfo
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- CN204044254U CN204044254U CN201420517544.0U CN201420517544U CN204044254U CN 204044254 U CN204044254 U CN 204044254U CN 201420517544 U CN201420517544 U CN 201420517544U CN 204044254 U CN204044254 U CN 204044254U
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- noise
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- output noise
- semiconductor transducer
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Abstract
Disclose a kind of semiconductor transducer output noise pick-up unit, described device comprises: detect interface, for connecting sensor to be detected, to the measured value to be detected that the described sensor measurement to be detected of processor transmission obtains; Reference sensor, for exporting reference measurement values according to external physical amount; Processor, is connected with described detection interface and reference sensor respectively, calculates the first noise, calculate the second noise according at least two reference measurement values according at least two measured values to be detected, and the difference calculating the first noise and the second noise is as output noise.Thus, the output noise because production technology causes can be obtained.Thus, can avoid because other factors measure the negative effect formed to output noise.
Description
Technical field
The utility model relates to technical field of measurement and test, is specifically related to semiconductor transducer output noise pick-up unit.
Background technology
MEMS (micro electro mechanical system) (MEMS) is the system of a kind of Digital and analog mixing, and under ideal conditions, due to semiconducter process itself, the semiconductor transducer based on MEMS (micro electro mechanical system) inevitably has output noise.Can be known the quality degree of process by the output noise detecting semiconductor transducer, therefore, it is the Alternative routes carrying out quality control in production test that the output noise for semiconductor transducer detects.
But the output noise of semiconductor transducer is not only determined by the measure of precision of its processing, detect the output noise caused due to production technology and have difficulties.
Utility model content
In view of this, provide a kind of semiconductor transducer output noise pick-up unit and method, the output noise caused due to production technology can be accurately measured, avoid because other factors measure the negative effect formed to output noise.
First aspect, provides a kind of semiconductor transducer output noise pick-up unit, comprising:
Detect interface, for connecting sensor to be detected, to the measured value to be detected that the described sensor measurement to be detected of processor transmission obtains;
Reference sensor, identical with described sensor type to be detected, for exporting reference measurement values according to external physical amount;
Processor, be connected with described detection interface and described reference sensor respectively, calculate the first noise according at least two measured values to be detected, calculate the second noise according at least two reference measurement values, and the difference calculating the first noise and the second noise is as output noise.
Preferably, the precision of described reference sensor is greater than or equal to the precision of described sensor to be detected.
Preferably, described first noise for described in the variance of at least two measured values to be detected, described second noise for described in the variance of at least two reference measurement values.
Preferably, described output noise pick-up unit also comprises:
Low noise power supply, is connected respectively to described detection interface, described reference sensor and described processor, for providing the supply voltage of low noise to described sensor to be detected, described reference sensor and described processor.
Preferably, described low noise power supply comprises:
Voltage input interface, for input supply voltage;
Export adjustable linear voltage regulator, be connected with described voltage input interface, for described supply voltage is converted to adjustable voltage;
First linear voltage regulator, is connected with the adjustable linear voltage regulator of described output, outputs to described detection interface and described reference sensor for described adjustable voltage being converted to the first supply voltage;
Second linear voltage regulator, is connected with described voltage input interface, outputs to described processor for described supply voltage is converted to the second supply voltage.
Preferably, described sensor to be detected and described reference sensor are MEMS sensor.
Second aspect, provides a kind of semiconductor transducer output noise detection method, comprising:
At least two measured values to be detected and the reference sensor that obtain sensor measurement to be detected acquisition respectively measure at least two reference measurement values obtained, described measured value to be detected and described reference measurement values are for putting on sensor to be detected and reference sensor measurement acquisition simultaneously by external physical amount, described reference sensor is identical with described sensor type to be detected;
Calculate the first noise according to described at least two measured values to be detected, calculate the second noise according to described at least two reference measurement values;
Calculate the output noise of difference as described sensor to be detected of described first noise and described second noise.
Preferably, the precision of described reference sensor is greater than or equal to the precision of described sensor to be detected.
Preferably, described first noise for described in the variance of at least two measured values to be detected, described second noise for described in the variance of at least two reference measurement values.
Preferably, described method also comprises:
Low noise supply voltage is utilized to power to described sensor to be detected and described reference sensor.
By arranging reference sensor, the noise because environmental factor and system factor cause is obtained by the output noise of witness mark sensor, from the noise measuring the sensor to be detected obtained, deduct the output noise of reference sensor, the output noise because production technology causes can be obtained.Thus, can avoid because other factors measure the negative effect formed to output noise.
Accompanying drawing explanation
By referring to the description of accompanying drawing to the utility model embodiment, above-mentioned and other objects of the present utility model, feature and advantage will be more clear, in the accompanying drawings:
Fig. 1 is the schematic diagram of the semiconductor transducer output noise pick-up unit of the utility model embodiment;
Fig. 2 is the schematic diagram of the low noise power supply of the utility model embodiment;
Fig. 3 is the process flow diagram of the semiconductor transducer output noise detection method of the utility model embodiment.
Embodiment
Hereinafter with reference to accompanying drawing, various embodiment of the present utility model is described in more detail.In various figures, identical element adopts same or similar Reference numeral to represent.For the sake of clarity, the various piece in accompanying drawing is not drawn in proportion.
Fig. 1 is the schematic diagram of the semiconductor transducer output noise pick-up unit of the utility model embodiment.As shown in Figure 1, semiconductor transducer output detecting apparatus 1 comprises detection interface 11, reference sensor 12 and processor 13.
Detecting interface 11 for connecting sensor 2 to be detected, transmitting sensor 2 to be detected to processor 13 and measuring the measured value to be detected obtained.
In the present embodiment, detect the measured value exported after sensor 2 to be detected being connected to semiconductor transducer output detecting apparatus 1 and be called measured value to be detected, the basis that measured value to be detected will detect as output noise.
Reference sensor 12 is for exporting reference measurement values according to external physical amount.
In the present embodiment, reference sensor 12 is sensors identical with sensor 2 type to be detected, and both can to identical external physical amount, and such as speed, acceleration, magnetic force etc. are measured.That is, reference sensor 12 and sensor to be measured 2 can be various types of sensors such as speed pickup, acceleration transducer, magnetometric sensor.
Meanwhile, from technological angle, reference sensor 12 and sensor to be detected 2 can be MEMS sensor.
The effect of reference sensor 12 is himself to have lower output noise (also namely, the noise caused by production technology), thus, can measure comparatively accurately the noise caused by external environment condition.Also namely, more accurate in order to make reference sensor 12 obtain for environmental noise measurement, it has the precision greater than or equal to sensor 2 to be detected.
Processor 13 is connected with detection interface 11 and reference sensor 12 respectively, calculates the first noise, calculate the second noise according at least two reference measurement values according at least two measured values to be detected, and the difference calculating the first noise and the second noise is as output noise.
Preferably, processor 13 can pass through I
2c bus interface is connected with detection interface 11 and reference sensor 12.
In the test process of reality, cause by testing separately a Noise Parameters part that sensor 2 to be detected obtains due to himself production technology reason, some causes due to external environment condition.Specifically, the output noise of the sensor to be detected 2 obtained in independent test process is inevitable relevant with the supply voltage noise of sensor, simultaneously also can be relevant with the noise of test platform.Such as, in testing, acceleration transducer and gyrostatic output noise relevant to the vibration noise of test platform, the output noise of magnetometer is then relevant to the magnetic fluctuation noise residing for test platform.
When the noise that external environment condition is brought is larger, whole test result can be made to lose efficacy.
The semiconductor transducer output noise pick-up unit of the present embodiment is measured the noise that external environment condition causes by arranging a reference sensor with low output noise (high precision), the first noise is calculated based on the measured value multiple to be detected of sensor 2 to be tested by processor 13, multiple reference measurement values based on reference sensor 12 calculate the second noise, wherein, the major part of the second noise is the noise that external environment condition causes, and the output noise that a part of production run for sensor of the first noise or production technology cause, the noise that a part causes for external environment condition, thus, the difference calculating the first noise and the second noise can obtain the actual output noise (noise caused by production run or production technology) of sensor 2 to be detected, it can react the quality of sensor to be detected preferably.
In a preferred embodiment, described first noise is the variance of at least two measured values to be detected, and described second noise is the variance of at least two reference measurement values.When utilizing variance to calculate, each measured value is for take multiple measurements acquisition for a same external physical quantity.Variance be the difference of each data and average square and average, represent with alphabetical D.Variance can be used for measuring the departure degree between its mathematical expectation of random sum (i.e. average).
Certainly, one of ordinary skill in the art will readily recognize that the detected value quantity of acquisition is more, calculate the variance yields of acquisition more close to actual noise value.
Simultaneously, because reference sensor 12 preferably has higher precision, itself and sensor to be detected detect outside physical quantity in testing simultaneously, and both neighbourhood noises are identical, therefore can measure the noise that external environment condition causes preferably, obtain more accurate actual output noise.
In order to reduce error further, the noise that low noise power supply 14 reduces because supply voltage causes can also be utilized.Low noise power supply 14 is connected respectively to and detects interface 11, reference sensor 12 and processor 13, provides low noise supply voltage for treating detecting sensor 2, reference sensor 12 and processor 13.In the present embodiment, low noise supply voltage refers to the supply voltage that voltage fluctuation is little, voltage glitch noise is little.
Particularly, as shown in Figure 2, low noise power supply comprise voltage input interface 14a, export adjustable linear voltage regulator 14b, the first linear voltage regulator 14c and the second linear voltage regulator 14d.
Wherein, voltage input interface 14a is used for input supply voltage v
in, it is preferably 5v DC voltage.
Export adjustable linear voltage regulator 14b to be connected with voltage input interface 14a, for by supply voltage v
inbe converted to adjustable voltage, it can according to actual conditions adjusting size.Preferably, usually by supply voltage v
inbe converted to 4v DC voltage.
First linear voltage regulator 14c is connected with the output terminal exporting adjustable linear voltage regulator 14b, outputs to detection interface 11 and reference sensor 12 for adjustable voltage being converted to the first supply voltage v1.Sensor 2 to be detected, after being connected to detection interface 11, namely obtaining the first supply voltage by detection interface 11 and carries out work.Because the first supply voltage v1 obtains via the conversion of two-stage linear voltage regulator, supply voltage noise is minimized.Meanwhile, because the first supply voltage v1 exports as sensor 2 to be detected and reference sensor 12 are powered simultaneously, even if there is noise, embody in second noise that also can obtain in the reference measurement values based on reference sensor 12, and then remove from the first noise.
Second linear voltage regulator 14d is connected with voltage input interface 14a, outputs to processor 13 for supply voltage being converted to the second supply voltage v2.
Preferably, the first supply voltage v1 and the second supply voltage v2 can be all 3.3V usually.
The present embodiment is by arranging reference sensor, the noise because environmental factor and system factor cause is obtained by the output noise of witness mark sensor, from the noise measuring the sensor to be detected obtained, deduct the output noise of reference sensor, the output noise because production technology causes can be obtained.Thus, can avoid because other factors measure the negative effect formed to output noise.
Fig. 3 is the process flow diagram of the semiconductor transducer output noise detection method of the utility model embodiment.As shown in Figure 3, described method comprises:
Step 310, at least two measured values to be detected obtaining sensor measurement to be detected acquisition respectively and reference sensor measure at least two reference measurement values obtained.
Wherein, measured value to be detected and reference measurement values are for putting on sensor to be detected and reference sensor measurement acquisition simultaneously by external physical amount.
In the present embodiment, reference sensor is the sensor identical with sensor type to be detected, and both can to identical external physical amount, and such as speed, acceleration, magnetic force etc. are measured.That is, reference sensor and sensor to be measured can be various types of sensors such as speed pickup, acceleration transducer, magnetometric sensor.
Meanwhile, from technological angle, reference sensor and sensor to be detected can be MEMS sensor.
The effect of reference sensor is himself to have lower output noise (also namely, the noise caused by production technology), thus, can measure comparatively accurately the noise caused by external environment condition.Also namely, in order to make more accurate for environmental noise measurement of reference sensor, it has the precision greater than or equal to sensor to be detected.
Step 320, calculate the first noise according to described at least two measured values to be detected, calculate the second noise according to described at least two reference measurement values.
Step 330, calculate the output noise of difference as described sensor to be detected of described first noise and described second noise.
In the test process of reality, cause by testing separately a Noise Parameters part that sensor to be detected obtains due to himself production technology reason, some causes due to external environment condition.Specifically, the output noise of the sensor to be detected obtained in independent test process is inevitable relevant with the supply voltage noise of sensor, simultaneously also can be relevant with the noise of test platform.Such as, in testing, acceleration transducer and gyrostatic output noise relevant to the vibration noise of test platform, and the output noise of magnetometer can be relevant to the magnetic fluctuation noise residing for test platform.
The present embodiment is measured the noise that external environment condition causes by arranging a reference sensor with low output noise, the first noise is calculated based on the measured value multiple to be detected of sensor to be tested by processor, multiple reference measurement values based on reference sensor calculate the second noise, wherein, the major part of the second noise is the noise that external environment condition causes, and the output noise that a part of production run for sensor of the first noise or production technology cause, the noise that a part causes for external environment condition, thus, the difference calculating the first noise and the second noise can obtain the actual output noise of sensor to be detected (noise caused by production run or production technology), it can react the quality of sensor to be detected preferably.
In a preferred embodiment, described first noise is the variance of at least two measured values to be detected, and described second noise is the variance of at least two reference measurement values.When utilizing variance to calculate, each measured value is for take multiple measurements acquisition for a same external physical quantity.Variance be the difference of each data and average square and average, represent with alphabetical D.Variance can be used for measuring the departure degree between its mathematical expectation of random sum (i.e. average).
Certainly, one of ordinary skill in the art will readily recognize that the detected value quantity of acquisition is more, calculate the variance yields of acquisition more close to actual noise value.
Because supply voltage noise also may form impact for the output noise of sensor to be detected, therefore, low noise supply voltage can also be utilized further to power to described sensor to be detected and described reference sensor.
The present embodiment is by arranging reference sensor, the noise because environmental factor and system factor cause is obtained by the output noise of witness mark sensor, from the noise measuring the sensor to be detected obtained, deduct the output noise of reference sensor, the output noise because production technology causes can be obtained.Thus, can avoid because other factors measure the negative effect formed to output noise.
According to embodiment of the present utility model as described above, these embodiments do not have all details of detailed descriptionthe, do not limit the specific embodiment that this utility model is only described yet.Obviously, according to above description, can make many modifications and variations.This instructions is chosen and is specifically described these embodiments, is to explain principle of the present utility model and practical application better, thus makes art technician that the utility model and the amendment on the utility model basis can be utilized well to use.The scope that protection domain of the present utility model should define with the utility model claim is as the criterion.
Claims (6)
1. a semiconductor transducer output noise pick-up unit, is characterized in that, comprising:
Detect interface, for connecting sensor to be detected, to the measured value to be detected that the described sensor measurement to be detected of processor transmission obtains;
Reference sensor, identical with sensor type to be detected, for exporting reference measurement values according to external physical amount;
Processor, be connected with described detection interface and described reference sensor respectively, calculate the first noise according at least two measured values to be detected, calculate the second noise according at least two reference measurement values, and the difference calculating the first noise and the second noise is as output noise.
2. semiconductor transducer output noise pick-up unit according to claim 1, is characterized in that, the precision of described reference sensor is greater than or equal to the precision of described sensor to be detected.
3. semiconductor transducer output noise pick-up unit according to claim 1, is characterized in that, described first noise for described in the variance of at least two measured values to be detected, described second noise for described in the variance of at least two reference measurement values.
4. semiconductor transducer output noise pick-up unit according to claim 1, is characterized in that, described output noise pick-up unit also comprises:
Low noise power supply, is connected respectively to described detection interface, described reference sensor and described processor, for providing the supply voltage of low noise to described sensor to be detected, described reference sensor and described processor.
5. semiconductor transducer output noise pick-up unit according to claim 4, it is characterized in that, described low noise power supply comprises:
Voltage input interface, for input supply voltage;
Export adjustable linear voltage regulator, be connected with described voltage input interface, for described supply voltage is converted to adjustable voltage;
First linear voltage regulator, is connected with the adjustable linear voltage regulator of described output, outputs to described detection interface and described reference sensor for described adjustable voltage being converted to the first supply voltage;
Second linear voltage regulator, is connected with described voltage input interface, outputs to described processor for described supply voltage is converted to the second supply voltage.
6. semiconductor transducer output noise pick-up unit according to claim 1, is characterized in that, described sensor to be detected and described reference sensor are MEMS sensor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420517544.0U CN204044254U (en) | 2014-09-10 | 2014-09-10 | Semiconductor transducer output noise pick-up unit |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420517544.0U CN204044254U (en) | 2014-09-10 | 2014-09-10 | Semiconductor transducer output noise pick-up unit |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104181404A (en) * | 2014-09-10 | 2014-12-03 | 杭州士兰微电子股份有限公司 | Semiconductor sensor output noise detection device and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104181404A (en) * | 2014-09-10 | 2014-12-03 | 杭州士兰微电子股份有限公司 | Semiconductor sensor output noise detection device and method |
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