CN203992695U - Optical-fiber laser mask micro-electrochemical machining complex machining device - Google Patents
Optical-fiber laser mask micro-electrochemical machining complex machining device Download PDFInfo
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- CN203992695U CN203992695U CN201420446877.9U CN201420446877U CN203992695U CN 203992695 U CN203992695 U CN 203992695U CN 201420446877 U CN201420446877 U CN 201420446877U CN 203992695 U CN203992695 U CN 203992695U
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Abstract
The utility model relates to a kind of optical-fiber laser mask micro-electrochemical machining complex machining device, and it is mainly by formations such as lathe vertical shaft, Z axis Feed table, electrolyte case, electrolytic bath, XY axle Feed table, tool-electrode, industrial computer, the pulse power, optical fiber lasers.Z axis Feed table is arranged on lathe vertical shaft, laser scanning head is arranged on Z axis Feed table, tool-electrode is arranged on the fixture of Z axis Feed table lower end, on XY axle Feed table, electrolytic bath is housed, electrolyte case is connected with conduit, and optical fiber laser one end is connected with interface, the other end is connected with industrial computer, pulse power one end is connected with tool-electrode, and the other end is connected with electrolytic bath, and industrial computer is connected with Z axis Feed table, XY axle Feed table.This its apparatus structure is simple, low cost of manufacture, machining accuracy is high, overcome in the processing of super burst pulse micro-electrochemical machining nanosecond even the picosecond pulse power be difficult to the problem that realizes and control.
Description
Technical field: the utility model relates to a kind of optical-fiber laser mask micro-electrochemical machining complex machining device.
Background technology: at present; existing metal mask is to utilize photoetching method to generate protection mask; lithographic equipment is expensive; complex process; be difficult for to promote, in addition, also have and adopt super burst pulse power supply directly to carry out micro-electrochemical machining processing micro structure without mask; but exist working (machining) efficiency low, the problem that even the super burst pulse power supply of picosecond was difficult to realization and controlled nanosecond.
Summary of the invention: the purpose of this utility model is to overcome above-mentioned shortcoming; a kind of optical-fiber laser mask micro-electrochemical machining complex machining device is provided; it has mainly solved existing metal mask is to utilize photoetching method to generate protection mask; lithographic equipment is expensive; complex process and adopt super burst pulse power supply directly to carry out micro-electrochemical machining processing micro structure without mask to exist working (machining) efficiency low, nanosecond even the super burst pulse power supply of picosecond be difficult to the problems such as realization and control.The purpose of this utility model is achieved in that optical-fiber laser mask micro-electrochemical machining complex machining device consists of: lathe vertical shaft, Z axis Feed table, laser scanning head, galvanometer, conduit, electrolyte case, nozzle, electrolytic bath, XY axle Feed table, tool-electrode, power lead, industrial computer, the pulse power, data wire, optical fiber laser, optical fiber cable, interface.Z axis Feed table is arranged on lathe vertical shaft, laser scanning head is arranged on Z axis Feed table, galvanometer is housed on laser scanning head and is provided with interface, tool-electrode is arranged on the fixture of Z axis Feed table lower end, on XY axle Feed table, electrolytic bath is housed, electrolyte case is connected with conduit, the front end of conduit is provided with nozzle, nozzle is placed on electrolytic bath, optical fiber laser is connected with interface by optical fiber cable one end, the other end is connected with industrial computer by data wire, the pulse power is connected with tool-electrode by power lead one end, the other end is connected with electrolytic bath, industrial computer is by data wire and Z axis Feed table, XY axle Feed table is connected.This device is to utilize optical-fiber laser high-quality light source; at materials such as stainless steels, carry out phase transformation; melting or coating generate metamorphic layer; play mask protection effect; in conjunction with high frequency pulse power supply; can through the region of laser surface modification, not carry out micro-electrochemical machining Compound Machining micro-structural at stainless steel surfaces; its apparatus structure is simple; low cost of manufacture; machining accuracy is high; simple process, overcome in the processing of super burst pulse micro-electrochemical machining nanosecond even the picosecond pulse power be difficult to the problem that realizes and control, improved working (machining) efficiency.
Accompanying drawing explanation:
Accompanying drawing 1 is the structural representation of the utility model optical-fiber laser mask micro-electrochemical machining complex machining device.
1-lathe vertical shaft, 2-Z axis Feed table, 3-laser scanning head
4-galvanometer, 5-conduit, 6-electrolyte case, 7-nozzle, 8-electrolytic bath
9-XY axle Feed table, 10-tool-electrode, 11-power lead
12-industrial computer, 13-pulse power, 14-data wire, 15-optical fiber laser
16-optical fiber cable, 17-interface
The specific embodiment: describe most preferred embodiment of the present utility model in detail below in conjunction with accompanying drawing, optical-fiber laser mask micro-electrochemical machining complex machining device consists of: lathe vertical shaft 1, Z axis Feed table 2, laser scanning head 3, galvanometer 4, conduit 5, electrolyte case 6, nozzle 7, electrolytic bath 8, XY axle Feed table 9, tool-electrode 10, power lead 11, industrial computer 12, the pulse power 13, data wire 14, optical fiber laser 15, optical fiber cable 16, interface 17.Z axis Feed table 2 is arranged on lathe vertical shaft 1, laser scanning head 3 is arranged on Z axis Feed table 2, galvanometer 4 is housed on laser scanning head 3 and is provided with interface 17, be used for controlling laser beam scan path, tool-electrode 10 is arranged on the fixture of Z axis Feed table 2 lower ends, X, electrolytic bath 8 is housed on Y-axis Feed table 9, electrolyte case 6 is connected with conduit 5, the front end of conduit 5 is provided with nozzle 7, nozzle 7 is placed on electrolytic bath 8, optical fiber laser 15 is connected with interface 17 by optical fiber cable 16 one end, the other end is connected with industrial computer 12 by data wire 14, the pulse power 13 is connected with tool-electrode 10 by power lead 11 one end, the other end is connected with electrolytic bath 8, industrial computer 12 is by data wire 14 and Z axis Feed table 2, XY axle Feed table 9 is connected.
During work, optical fiber laser 15 sends laser, utilize the galvanometer 4 of laser scanning head 3 to control laser beam scan path, on surface of the work, generate the surperficial mask designing, by the pulse power 13 and tool-electrode 10, workpiece in electrolytic bath 8 is connected, by XY axle Feed table 9, Z axis Feed table 2 comes the position of workpiece in control tool electrode 10 and electrolytic bath 8, at workpiece, through in the region of laser surface modification, do not carry out Electrolyzed Processing, can generate the two-dimensional structure micro-structural processing with certain pattern, repeat above-mentioned steps, can realize the processing of three-dimensional structure.
Claims (1)
1. an optical-fiber laser mask micro-electrochemical machining complex machining device, it is by lathe vertical shaft (1), Z axis Feed table (2), laser scanning head (3), galvanometer (4), conduit (5), electrolyte case (6), nozzle (7), electrolytic bath (8), XY axle Feed table (9), tool-electrode (10), power lead (11), industrial computer (12), the pulse power (13), data wire (14), optical fiber laser (15), optical fiber cable (16), interface (17) forms, it is characterized in that: Z axis Feed table (2) is arranged on lathe vertical shaft (1), laser scanning head (3) is arranged on Z axis Feed table (2), galvanometer (4) is housed on laser scanning head (3) and is provided with interface (17), tool-electrode (10) is arranged on the fixture of Z axis Feed table (2) lower end, electrolytic bath (8) is housed on XY axle Feed table (9), electrolyte case (6) is connected with conduit (5), the front end of conduit (5) is provided with nozzle (7), nozzle (7) is placed on electrolytic bath (8), optical fiber laser (15) is connected with interface (17) by optical fiber cable (16) one end, the other end is connected with industrial computer (12) by data wire (14), the pulse power (13) is connected with tool-electrode (10) by power lead (11) one end, the other end is connected with electrolytic bath (8), industrial computer (12) is by data wire (14) and Z axis Feed table (2), XY axle Feed table (9) is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420446877.9U CN203992695U (en) | 2014-08-10 | 2014-08-10 | Optical-fiber laser mask micro-electrochemical machining complex machining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420446877.9U CN203992695U (en) | 2014-08-10 | 2014-08-10 | Optical-fiber laser mask micro-electrochemical machining complex machining device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203992695U true CN203992695U (en) | 2014-12-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420446877.9U Expired - Fee Related CN203992695U (en) | 2014-08-10 | 2014-08-10 | Optical-fiber laser mask micro-electrochemical machining complex machining device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104942388A (en) * | 2015-06-17 | 2015-09-30 | 江苏大学 | Device and method for machining materials by combining electrochemical discharging and laser |
| RU2618594C1 (en) * | 2016-03-22 | 2017-05-04 | Федеральное государственное унитарное предприятие "Государственный космический научно-производственный центр имени М.В. Хруничева" (ФГУП "ГКНПЦ им. М.В. Хруничева") | Method for producing artificial roughness detail surface by combined treatment method |
| CN110385520A (en) * | 2018-04-15 | 2019-10-29 | 佳木斯大学 | The micro- 304 stainless steel surface hydrophobicity micro-electrochemical machining complex machining process of texture of laser |
| CN112872597A (en) * | 2021-01-21 | 2021-06-01 | 北京理工大学 | Method for preparing super-hydrophobic surface by combining femtosecond laser direct writing and electroplating method |
-
2014
- 2014-08-10 CN CN201420446877.9U patent/CN203992695U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104942388A (en) * | 2015-06-17 | 2015-09-30 | 江苏大学 | Device and method for machining materials by combining electrochemical discharging and laser |
| RU2618594C1 (en) * | 2016-03-22 | 2017-05-04 | Федеральное государственное унитарное предприятие "Государственный космический научно-производственный центр имени М.В. Хруничева" (ФГУП "ГКНПЦ им. М.В. Хруничева") | Method for producing artificial roughness detail surface by combined treatment method |
| CN110385520A (en) * | 2018-04-15 | 2019-10-29 | 佳木斯大学 | The micro- 304 stainless steel surface hydrophobicity micro-electrochemical machining complex machining process of texture of laser |
| CN112872597A (en) * | 2021-01-21 | 2021-06-01 | 北京理工大学 | Method for preparing super-hydrophobic surface by combining femtosecond laser direct writing and electroplating method |
| CN112872597B (en) * | 2021-01-21 | 2022-03-22 | 北京理工大学 | Method for preparing super-hydrophobic surface by combining femtosecond laser direct writing and electroplating method |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141210 Termination date: 20150810 |
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| EXPY | Termination of patent right or utility model |