CN203932033U - A kind of micro device of aiming at for precision mask plate - Google Patents
A kind of micro device of aiming at for precision mask plate Download PDFInfo
- Publication number
- CN203932033U CN203932033U CN201420371749.2U CN201420371749U CN203932033U CN 203932033 U CN203932033 U CN 203932033U CN 201420371749 U CN201420371749 U CN 201420371749U CN 203932033 U CN203932033 U CN 203932033U
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- Prior art keywords
- slide rail
- chassis
- slide block
- height adjustment
- aiming
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201420371749.2U CN203932033U (en) | 2014-07-07 | 2014-07-07 | A kind of micro device of aiming at for precision mask plate |
Applications Claiming Priority (1)
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CN201420371749.2U CN203932033U (en) | 2014-07-07 | 2014-07-07 | A kind of micro device of aiming at for precision mask plate |
Publications (1)
Publication Number | Publication Date |
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CN203932033U true CN203932033U (en) | 2014-11-05 |
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Family Applications (1)
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CN201420371749.2U Active CN203932033U (en) | 2014-07-07 | 2014-07-07 | A kind of micro device of aiming at for precision mask plate |
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CN (1) | CN203932033U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109065493A (en) * | 2018-09-10 | 2018-12-21 | 复旦大学 | A kind of device for assisting hard vias masks version and sample to be precisely aligned |
CN109188858A (en) * | 2018-09-10 | 2019-01-11 | 复旦大学 | A kind of high-accuracy silicon substrate vias masks version fission graphic structure |
-
2014
- 2014-07-07 CN CN201420371749.2U patent/CN203932033U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109065493A (en) * | 2018-09-10 | 2018-12-21 | 复旦大学 | A kind of device for assisting hard vias masks version and sample to be precisely aligned |
CN109188858A (en) * | 2018-09-10 | 2019-01-11 | 复旦大学 | A kind of high-accuracy silicon substrate vias masks version fission graphic structure |
CN109065493B (en) * | 2018-09-10 | 2023-09-05 | 复旦大学 | Device for assisting hard through hole mask plate and sample to accurately align |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190710 Address after: 310000 Room 101, Block A, No. 60, Jianghong South Road, Changhe Street, Binjiang District, Hangzhou City, Zhejiang Province Patentee after: Hangzhou Vacuum Technology Co., Ltd. Address before: 226300 Xishou Yinhe Bridge, Jinsha Town, Tongzhou District, Nantong City, Jiangsu Province Patentee before: Nantong Wei Bei Quantum Science and Technology Co., Ltd |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200226 Address after: 310000 room 103, block a, building 2, No. 60, Jianghong South Road, Changhe street, Binjiang District, Hangzhou City, Zhejiang Province Patentee after: Hangzhou ruilaibo Technology Co., Ltd Address before: 310000 Room 101, Block A, No. 60, Jianghong South Road, Changhe Street, Binjiang District, Hangzhou City, Zhejiang Province Patentee before: Hangzhou Vacuum Technology Co., Ltd. |
|
TR01 | Transfer of patent right |