CN203923460U - Thermal field of single crystal furnace and there is the single crystal growing furnace of this thermal field of single crystal furnace - Google Patents
Thermal field of single crystal furnace and there is the single crystal growing furnace of this thermal field of single crystal furnace Download PDFInfo
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- CN203923460U CN203923460U CN201420326967.4U CN201420326967U CN203923460U CN 203923460 U CN203923460 U CN 203923460U CN 201420326967 U CN201420326967 U CN 201420326967U CN 203923460 U CN203923460 U CN 203923460U
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- Prior art keywords
- single crystal
- heat shielding
- thermal field
- furnace
- perforate
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- 239000013078 crystal Substances 0.000 title claims abstract description 71
- 238000001816 cooling Methods 0.000 claims abstract description 62
- 230000005540 biological transmission Effects 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The disclosed thermal field of single crystal furnace of the utility model, comprises and is positioned at the heat shielding of crucible top and is independent of heat shielding, is coaxially arranged at the heat shielding cooling piece of heat shielding inner side, heat shielding cooling piece can be with respect to crucible lifting.The utility model also openly has the single crystal growing furnace of this thermal field of single crystal furnace, comprises single crystal growing furnace housing, crucible and above-mentioned thermal field of single crystal furnace, and crucible and thermal field of single crystal furnace are all placed in single crystal growing furnace housing.Thermal field of single crystal furnace of the present utility model and there is the heat shielding cooling piece in the single crystal growing furnace of this thermal field of single crystal furnace, the latent heat discharging in the time that single crystal growing can being absorbed, effectively improve single crystal growing speed, once be damaged, also be convenient to maintenance, and this heat shielding cooling piece can, with respect to crucible lifting, rise this heat shielding cooling piece when reinforced, can avoid spattering silicon, guarantee the safety and stablization of crystal pulling process.
Description
Technical field
The utility model belongs to single crystal growing furnace producing apparatus technical field, relates to a kind of thermal field of single crystal furnace and has the single crystal growing furnace of this thermal field of single crystal furnace.
Background technology
Along with the development of world economy, modernization construction constantly increases high efficient energy sources demand.Photovoltaic generation is a kind of as the main energy sources of green energy resource and human kind sustainable development, is day by day subject to the attention of countries in the world and is greatly developed.Monocrystalline silicon piece is a kind of as the base mateiral of photovoltaic generation, has the market requirement widely.The thermograde of thermal field of single crystal furnace plays vital effect for single crystal growth process, is directly connected to efficiency and the quality of growing single-crystal.Heat shielding is the application in single crystal growing furnace, can be beneficial to and form specific thermograde.Yet the bottleneck of single crystal growing speed is still difficult to break through, and easily spatter silicon on heat shielding when reinforced, stay and spatter the hidden danger that silicon falls into melt again.
Utility model content
The purpose of this utility model is to provide a kind of thermal field of single crystal furnace, lower and have a problem of crystal pulling potential safety hazard to solve existing thermal field single crystal growing speed.
The purpose of this utility model is also to provide a kind of single crystal growing furnace with this thermal field of single crystal furnace, has solved existing single crystal growing speed low and have a shortcoming of crystal pulling potential safety hazard.
The technical scheme that the utility model adopts is, thermal field of single crystal furnace comprises the heat shielding that is positioned at crucible top, also comprises the heat shielding cooling piece that is independent of heat shielding, is coaxially arranged at heat shielding inner side, and heat shielding cooling piece can be with respect to crucible lifting.
Feature of the present utility model is also,
Heat shielding cooling piece comprises a plurality of transmission rods, a plurality of transmission rods and external driver device mechanical connection.
Heat shielding cooling piece also comprises a plurality of fixation kits, and a plurality of fixation kits are fixedly connected between heat shielding cooling piece and heat shielding.
Heat shielding offers a plurality of fixed orificess corresponding with a plurality of fixation kits, each fixation kit includes clip and the staple matching, and clip has pickup groove, and is fixedly arranged on heat shielding cooling piece, staple passes pickup groove, and passes a fixed orifices of heat shielding.
Heat shielding comprises inner core and urceolus, inner core offers a plurality of the first perforates, urceolus offers and a plurality of the first perforates a plurality of second perforates of corresponding connection one by one, each fixed orifices includes first perforate and a second corresponding perforate, and each staple is all through first perforate and a second corresponding perforate.
Heat shielding also comprises the spacing ring between inner core and urceolus, spacing ring has and a plurality of the first perforates and a plurality of the second perforate a plurality of intervals perforate one to one, each interval perforate is communicated with between the first perforate and the second perforate corresponding with one, and each staple is all successively through first perforate, a corresponding interval perforate and a second corresponding perforate.
Heat shielding cooling piece also comprises a cooling cylinder and a plurality of pipe connectings that are connected with cooling cylinder, and in a plurality of pipe connectings, part pipe connecting is communicated in cooling Media Entrance, and all the other pipe connectings are communicated in cooling media outlet.
A plurality of transmission rods are fixedly connected on cooling cylinder or a plurality of pipe connecting.
A plurality of transmission rods are fixedly connected on a plurality of pipe connectings, and each transmission rod is all sheathed on outside a pipe connecting.
Another technical scheme that the utility model adopts is, single crystal growing furnace, comprises single crystal growing furnace housing, crucible and above-mentioned thermal field of single crystal furnace, and crucible and thermal field of single crystal furnace are all placed in single crystal growing furnace housing.
The beneficial effects of the utility model are: thermal field of single crystal furnace of the present utility model and the single crystal growing furnace with this thermal field of single crystal furnace have the heat shielding cooling piece that is independent of described heat shielding, is coaxially arranged at described heat shielding inner side, the latent heat discharging in the time that single crystal growing can being absorbed, effectively improve single crystal growing speed, once be damaged, be also convenient to maintenance.And this heat shielding cooling piece can rise this heat shielding cooling piece with respect to crucible lifting when reinforced, can avoid spattering silicon, guarantees the safety and stablization of crystal pulling process.
Accompanying drawing explanation
Fig. 1 is the sectional view of single crystal growing furnace of the present utility model;
Fig. 2 is the partial enlarged drawing at II place in Fig. 1;
Fig. 3 is the structural representation of the heat shielding cooling piece in single crystal growing furnace of the present utility model.
In figure, 100. single crystal growing furnace, 10. housing, 101. drop-bottom, 102. stove cylinders, 103. bell, 104. receiving space, 20. crucible assemblies, 21. crucibles, 22. pressure pin assemblies, 23. melting pots, 24. support crucibles, 30. thermal fields, 31. heat shieldings, 310. inner core, 311. urceolus, 312. spacing ring, 313. first main bodys, edge on 314. first, 315. first perforates, 316. second main bodys, edge on 317. second, 318. second perforates, 319. interval perforates, 32. heat shielding cooling pieces, 320. cooling cylinder, 321. pipe connecting, 322. transmission rod, 323. fixation kit, 324. cooling space, 325. clip, 326. staple, 327. pickup groove.
Embodiment
Below in conjunction with drawings and Examples, the utility model is elaborated.
The structure that the utility model provides a kind of single crystal growing furnace 100 as shown in Figure 1, the crucible assembly 20 and thermal field 30 that comprise housing 10 and be placed in housing 10.
Housing 10 comprises drop-bottom 101, stove cylinder 102 and the bell 103 connecting successively.Drop-bottom 101, stove cylinder 102 and bell 103 surround a receiving space 104 jointly.
Crucible assembly 20 is placed in the receiving space 104 of housing 10.Crucible assembly 20 comprises crucible 21 and pressure pin assembly 22.Crucible 21, for holding raw material with fused raw material, can comprise the melting pot 23 that directly holds raw material and the support crucible 24 that is positioned at melting pot 23 peripheries.Pressure pin assembly 22 is positioned at crucible 21 belows, support crucible 21.
Thermal field 30 is placed in the receiving space 104 of housing 10.Thermal field 30 comprises heat shielding 31 and heat shielding cooling piece 32.Heat shielding 31 is positioned at crucible 21 tops.Heat shielding cooling piece 32 is independent of heat shielding 31 and is arranged at the inner side of heat shielding 31.Heat shielding cooling piece 32 can be with respect to crucible 21 liftings.
Heat shielding 31 comprises inner core 310, urceolus 311 and spacing ring 312.Urceolus 311 is sheathed on inner core 310 outsides, and spacing ring 312 is between inner core 310 and urceolus 311.Inner core 310 comprises in the first main body 313 and first being connected along 314.The first main body 313 is greater than the diameter near crucible assembly 20 places away from the diameter at crucible assembly 20 places.On first, along 314, offer a plurality of the first perforates 315.Each first perforate 315 all runs through on first along 314 two relative surfaces, and the central axis equal angles that a plurality of the first perforates 315 are preferably with respect to heat shielding 31 distributes.In the present embodiment, the first perforate 315 is two.As shown in Figure 2, urceolus 311 has on the second main body 316 and second along 317.The second main body 316 can be identical or different with the shape of the first main body 313.On second, along 317, offer a plurality of the second perforates 318.Each second perforate 318 all on second along 317 near on first along 314 surface to offering along 314 places on first, can be through hole or blind hole.The central axis equal angles that a plurality of the second perforates 318 are preferably with respect to heat shielding 31 distributes.In the present embodiment, with the first perforate 315 accordingly, the second perforate 318 is also two.Spacing ring 312 on first along on 314 and second along between 317, have and run through its relative two surperficial a plurality of intervals perforates 319.A plurality of intervals perforate 319 is corresponding one by one with a plurality of the first perforates 315 and a plurality of the second perforate 318, when inner core 310, urceolus 311 and spacing ring 312 are assemblied in together, each first perforate 315, interval perforate 319 and the second perforate 318 are communicated with successively, jointly form a fixed orifices of heat shielding 31.A plurality of fixed orificess of heat shielding distribute with respect to the central axis equal angles of heat shielding 31.
As shown in Figure 3, heat shielding cooling piece 32 comprises a cooling cylinder 320, a plurality of pipe connecting 321, a plurality of transmission rod 322 and a plurality of fixation kit 323.
Cooling cylinder 320 is oppositely arranged with the inner core 310 of described heat shielding 31, and its diameter near crucible assembly 20 places is less than the diameter away from crucible assembly 20 places, and has annular cooling space 324.Particularly, cooling cylinder 320 correspondences are arranged at the middle and lower part of described heat shielding 31, and its shape is preferably with the shape of the middle and lower part of inner core 310 and matches.In the present embodiment, the reverse frustoconic that cooling cylinder 320 is hollow.
A plurality of pipe connectings 321 are all connected with the cooling space 324 of cooling cylinder 320, for supplying with continuously cooling media toward cooling cylinder 320 and discharging continuously cooling media.The central axis equal angles that a plurality of pipe connectings 321 are preferably with respect to heat shielding 31 distributes.In a plurality of pipe connectings 321, part pipe connecting 321 is communicated in cooling Media Entrance, and all the other pipe connectings 321 are communicated in cooling media outlet.In the present embodiment, the quantity of pipe connecting 321 is two, and one is communicated in cooling Media Entrance, and another is communicated in cooling media outlet.Each equal one end of pipe connecting 321 is connected in cooling cylinder 320 away from the end of crucible assembly 20, and the other end extends to housing 10 outsides through the bell 103 of housing 10.
A plurality of transmission rods 322 and external driver device mechanical connection.External driver device can be the common drive units such as leading screw.A plurality of transmission rods 322 are fixedly connected on cooling cylinder 320 or a plurality of pipe connecting 321.In the present embodiment, a plurality of transmission rods 322 are fixedly connected on a plurality of pipe connectings 321.Particularly, a plurality of transmission rods 322 are corresponding one by one with a plurality of pipe connectings 321, and each transmission rod 322 is all sheathed on corresponding pipe connecting 321 outsides.Certainly, it is identical with the quantity of pipe connecting 321 that the quantity of transmission rod 322 is not necessarily restricted to, and can be two, three etc., but be preferably a plurality of transmission rods 322, with respect to the central axis equal angles of heat shielding 31, distributes.
A plurality of fixation kits 323 are fixedly connected on heat shielding 31 by heat shielding cooling piece 32.A plurality of fixation kits 323 are corresponding with a plurality of fixed orificess of heat shielding 31.Each fixation kit 323 includes clip 325 and the staple 326 matching.Clip 325 has pickup groove 327, and is fixedly arranged on heat shielding cooling piece 32.Staple 326 passes pickup groove 327, and passes the fixed orifices of heat shielding 31,, through the first perforate 315, interval perforate 319 and the second perforate 318, heat shielding cooling piece 32 is fixedly connected on to heat shielding 31 successively that is.In the present embodiment, a plurality of fixation kits 323 are corresponding one by one with a plurality of pipe connectings 321, and the clip 325 of each fixation kit 323 is all fixedly arranged on a corresponding pipe connecting 321.Certainly, it is identical with the quantity of pipe connecting 321 that the quantity of fixation kit 323 is not necessarily restricted to, and can be two, three etc., but be preferably a plurality of fixation kits 323, with respect to the central axis equal angles of heat shielding 31, distributes.
The thermal field of single crystal furnace 30 of single crystal growing furnace 100 of the present utility model, there is the heat shielding cooling piece 32 that is independent of heat shielding 31, is coaxially arranged at heat shielding 31 inner sides, the latent heat discharging in the time of can absorbing single crystal growing, effectively improve single crystal growing speed, once be damaged, be also convenient to maintenance.And this heat shielding cooling piece 32 can drive heat shielding 31 with respect to crucible 21 liftings, when reinforced, rise this heat shielding cooling piece 32 and heat shielding 31, can avoid spattering silicon, guarantee the safety and stablization of crystal pulling process.
Claims (10)
1. thermal field of single crystal furnace, comprises the heat shielding that is positioned at crucible top, it is characterized in that, described thermal field of single crystal furnace also comprises the heat shielding cooling piece that is independent of described heat shielding, is coaxially arranged at described heat shielding inner side, and described heat shielding cooling piece can be with respect to crucible lifting.
2. thermal field of single crystal furnace as claimed in claim 1, is characterized in that: described heat shielding cooling piece comprises a plurality of transmission rods described a plurality of transmission rods and external driver device mechanical connection.
3. thermal field of single crystal furnace as claimed in claim 2, is characterized in that: described heat shielding cooling piece also comprises a plurality of fixation kits, and described a plurality of fixation kits are fixedly connected between described heat shielding cooling piece and described heat shielding.
4. thermal field of single crystal furnace as claimed in claim 3, it is characterized in that: described heat shielding offers a plurality of fixed orificess corresponding with described a plurality of fixation kits, described in each, fixation kit includes clip and the staple matching, described clip has pickup groove, and be fixedly arranged on heat shielding cooling piece, described staple passes described pickup groove, and passes a fixed orifices of described heat shielding.
5. thermal field of single crystal furnace as claimed in claim 4, it is characterized in that: described heat shielding comprises inner core and urceolus, described inner core offers a plurality of the first perforates, described urceolus offers and described a plurality of the first perforates a plurality of second perforates of corresponding connection one by one, described in each, fixed orifices includes first perforate and a second corresponding perforate, and described in each, staple is all through first perforate and a second corresponding perforate.
6. thermal field of single crystal furnace as claimed in claim 5, it is characterized in that: described heat shielding also comprises the spacing ring between inner core and urceolus, described spacing ring has and described a plurality of the first perforates and described a plurality of the second perforate a plurality of intervals perforate one to one, described in each, interval perforate is communicated with between the first perforate and the second perforate corresponding with one, and described in each, staple is all successively through first perforate, a corresponding interval perforate and a second corresponding perforate.
7. the thermal field of single crystal furnace as described in any one in claim 2 to 6, it is characterized in that: described heat shielding cooling piece also comprises a cooling cylinder and a plurality of pipe connectings that are connected with described cooling cylinder, in described a plurality of pipe connecting, part pipe connecting is communicated in cooling Media Entrance, and all the other pipe connectings are communicated in cooling media outlet.
8. thermal field of single crystal furnace as claimed in claim 7, is characterized in that: described a plurality of transmission rods are fixedly connected on described cooling cylinder or described a plurality of pipe connecting.
9. thermal field of single crystal furnace as claimed in claim 8, is characterized in that: described a plurality of transmission rods are fixedly connected on described a plurality of pipe connecting, and each transmission rod is all sheathed on outside a pipe connecting.
10. single crystal growing furnace, is characterized in that: comprise single crystal growing furnace housing, crucible and the thermal field of single crystal furnace as described in any one in claim 1 to 8, described crucible and described thermal field of single crystal furnace are all placed in described single crystal growing furnace housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420326967.4U CN203923460U (en) | 2014-06-18 | 2014-06-18 | Thermal field of single crystal furnace and there is the single crystal growing furnace of this thermal field of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420326967.4U CN203923460U (en) | 2014-06-18 | 2014-06-18 | Thermal field of single crystal furnace and there is the single crystal growing furnace of this thermal field of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203923460U true CN203923460U (en) | 2014-11-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420326967.4U Expired - Lifetime CN203923460U (en) | 2014-06-18 | 2014-06-18 | Thermal field of single crystal furnace and there is the single crystal growing furnace of this thermal field of single crystal furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN203923460U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104593863A (en) * | 2015-01-05 | 2015-05-06 | 英利集团有限公司 | Single-crystal furnace |
| WO2023280024A1 (en) * | 2021-07-06 | 2023-01-12 | 隆基绿能科技股份有限公司 | Heat shield outer container, heat shield, and crystal pulling thermal field |
-
2014
- 2014-06-18 CN CN201420326967.4U patent/CN203923460U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104593863A (en) * | 2015-01-05 | 2015-05-06 | 英利集团有限公司 | Single-crystal furnace |
| WO2023280024A1 (en) * | 2021-07-06 | 2023-01-12 | 隆基绿能科技股份有限公司 | Heat shield outer container, heat shield, and crystal pulling thermal field |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 710100 Changan District, Shaanxi Province, aerospace Road, No. 388, No. Patentee after: LONGI GREEN ENERGY TECHNOLOGY Co.,Ltd. Address before: 710100 Changan District, Shaanxi Province, aerospace Road, No. 388, No. Patentee before: XI'AN LONGI SILICON MATERIALS Corp. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191230 Address after: 674800 clean energy carrying Industrial Park in Shilong Ba Town, Huaping County, Lijiang, Yunnan Patentee after: Huaping Longji silicon material Co.,Ltd. Address before: 710100 No. 388, middle route, Xi'an, Shaanxi, Changan District Patentee before: LONGI GREEN ENERGY TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141105 |