CN203922736U - A kind of polycrystalline silicon reduction furnace base plate and tail gas cooling structure - Google Patents
A kind of polycrystalline silicon reduction furnace base plate and tail gas cooling structure Download PDFInfo
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- CN203922736U CN203922736U CN201420325075.2U CN201420325075U CN203922736U CN 203922736 U CN203922736 U CN 203922736U CN 201420325075 U CN201420325075 U CN 201420325075U CN 203922736 U CN203922736 U CN 203922736U
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Abstract
The utility model discloses a kind of polycrystalline silicon reduction furnace base plate and tail gas cooling structure, relate to improved Siemens polycrystalline silicon reducing furnace and silane CVD method polycrystalline silicon reduction furnace base plate and tail gas process for cooling equipment.The utility model comprises chassis of reducing furnace, be arranged on chassis of reducing furnace bottom water-cooled tube, be connected to vapor pipe, Guan He chassis, cooling water inlet, the chassis cooling water outlet pipe of chassis of reducing furnace bottom; On described vapor pipe, be provided with interlayer sleeve pipe, described water-cooled tube is communicated with the interlayer sleeve pipe of vapor pipe; The utility model is by the water coolant of the cooling temperature different with the cooling employing of tail gas in chassis, and then the cooling structure under chassis of reducing furnace is changed, the cooling structure after change, can make full use of the heat by-product water vapour in tail gas, increase benefit, do not cause the waste of heat.
Description
Technical field
The utility model relates to improved Siemens polycrystalline silicon reducing furnace and silane CVD method polycrystalline silicon reduction furnace base plate and tail gas process for cooling equipment, particularly a kind of polycrystalline silicon reduction furnace base plate and tail gas cooling structure.
Background technology
polycrystalline silicon reducing furnace is the nucleus equipment of output the finished product in production of polysilicon, is also the key link of decision systems production capacity, energy consumption.Therefore, the Design and manufacture of polycrystalline silicon reducing furnace, directly has influence on quality, output and the production cost of product.Under impact along with global economic crisis, the price continuous decrease of polysilicon, industrial profit is constantly compressed, and market competition is growing more intense.Therefore, effectively reducing polysilicon energy consumption, improve the quality of products, enhance productivity, is the major issue that current production of polysilicon enterprise need to solve.
Produce at present polysilicon and mainly adopt " improved Siemens ", conventionally the trichlorosilane of certain proportioning (SiHCl3) and hydrogen (H2) gas mixture are sprayed into from bottom air inlet, in reduction furnace, there is vapour phase reduction reaction, the silicon wicking surface of silicon (Si) Direct precipitation that reaction generates in stove, along with reaction continue carry out, the continuous growth of silicon rod finally reaches product requirement.Because the inner silicon core of reduction furnace need to maintain 1050 ℃-1100 ℃, produce, reduction furnace cylinder and chassis all need to pass into water coolant and carry out cooling.Simultaneously because the temperature of process tail gas of leaving reduction furnace is generally 700 ℃ of left and right, in order to protect offgas duct also to need to adopt to add sleeve pipe, carry out cooling.Wherein tail gas flows out from add sleeve pipe inner tube, and water coolant flows through and carries out cooling to inner tube from chuck.Common polycrystalline silicon reducing furnace is made of one chassis water coolant and tail gas water coolant at present, adopt the water at low temperature of approximately 60 ℃ of temperature together to chassis and offgas duct, to carry out cooling, adopting the major cause of water at low temperature is that chassis is due to intensity reason, cooling temperature can not be too high, otherwise there will be chassis machine row degradation, the problems such as chassis depression.Adopt the common structure that adopts 60 ℃ of water coolants of chassis and tail gas, although reduction furnace structure is comparatively simple, approach the amount of heat containing in the process tail gas of 700 ℃, do not recycle, after employing water at low temperature is cooling, waste.
State Intellectual Property Office was on October 1st, 2008, disclosing a publication number is CN201125165Y, name is called the utility model patent of " polycrystalline silicon reducing furnace that has dual-cooled system ", this utility model patent is increase subcooling coil pipe and reduction furnace chuck is isolated and is divided into two cooling systems at reduction furnace chuck internal upper part, by carrying out cooling to reduction furnace upper and lower with the water coolant of differing temps, counteracting is because the impact of thermal convection causes reduction furnace internal upper part temperature higher than the phenomenon of temperature of lower, make top and the bottom temperature equalisation in stove, be conducive to polysilicon deposits uniformly on silicon core.This utility model employing chassis is cooling and reduction furnace inner upper is cooling carries out dual-cooled to reduction furnace, but this utility model still adopts traditional tail gas method of cooling, be that polycrystalline silicon reducing furnace is made of one chassis water coolant and tail gas water coolant, although reduction furnace structure is comparatively simple, but approach the amount of heat containing in the process tail gas of 700 ℃, do not recycle, after employing water at low temperature is cooling, waste.
Utility model content
In order to solve above-mentioned deficiency of the prior art, the utility model provides a kind of polycrystalline silicon reduction furnace base plate and tail gas cooling structure, the utility model is by the water coolant of the cooling temperature different with the cooling employing of tail gas in chassis, and then the cooling structure under chassis of reducing furnace is changed, cooling structure after change, can make full use of the heat by-product water vapour in tail gas, increase benefit, not cause the waste of heat.
For solving above-mentioned the deficiencies in the prior art, the utility model is realized with following technical proposals:
Polycrystalline silicon reduction furnace base plate and a tail gas cooling structure, comprise chassis of reducing furnace, be arranged on chassis of reducing furnace bottom water-cooled tube, be connected to vapor pipe, Guan He chassis, cooling water inlet, the chassis cooling water outlet pipe of chassis of reducing furnace bottom; On described vapor pipe, be provided with interlayer sleeve pipe, described water-cooled tube is communicated with the interlayer sleeve pipe of vapor pipe; It is characterized in that: also comprise tail gas cooling water inlet and tail gas cooling water outlet pipe; Described vapor pipe bottom is provided with tail gas outlet; Described tail gas cooling water inlet is arranged on the interlayer sleeve pipe of vapor pipe bottom; On the interlayer sleeve pipe medium position of described vapor pipe, be provided with the breather valve that blocks water, cooling water inlet, described chassis pipe is arranged on the breather valve top and being communicated with the interlayer sleeve pipe of the vapor pipe of the breather valve top that blocks water of blocking water; Described tail gas cooling water outlet pipe is arranged on the breather valve below and being communicated with the interlayer sleeve pipe of the vapor pipe of the breather valve below that blocks water of blocking water.
Described chassis cooling water outlet pipe is arranged on chassis of reducing furnace below and upper end is connected on water-cooled tube.
The breather valve that blocks water that the described breather valve that blocks water is comprised of flange.
Described vapor pipe is two, is arranged on chassis of reducing furnace below.
Described vapor pipe lower end is connected with tail gas outlet pipe, on described tail gas outlet pipe, is provided with interlayer sleeve pipe, on the interlayer sleeve pipe in the tail gas exit of described tail gas outlet pipe, tail gas cooling water inlet is set.
Compared with prior art, the useful technique effect that the utility model brings shows:
1, the utility model adopts the mode of a cooling structure to be improved to chassis of reducing furnace cooling structure and two cooling structures of tail gas cooling structure on traditional chassis and tail gas, traditional cooling structure, from the cooling water inlet in tail gas exit, below, be filled with water coolant, via the sleeve pipe of vapor pipe, to chassis water-cooled tube, to chassis, carry out cooling and then discharge via cooling water outlet, because chassis of reducing furnace temperature can not be over 90 ℃, so the temperature of discharge water also be just 90 ℃ in process of production; Because the temperature of process tail gas of leaving reduction furnace is generally 700 ℃ of left and right, existing this cooling structure has slatterned the heat in process tail gas completely.
2, chassis of the present utility model water-cooling structure just carries out cooling to chassis; at place, cooling water inlet, chassis, add the water coolant of 55 ℃ ~ 65 ℃; adopt the water at low temperature of approximately 55 ℃ ~ 65 ℃ of temperature to carry out cooling to chassis; adopting the major cause of water at low temperature is that chassis is due to intensity reason; cooling temperature can not be too high; otherwise there will be chassis machine row degradation; the problems such as chassis depression; cooling rear leaving water temperature(LWT) is 90 ℃; remain on 90 ℃ of left and right by the temperature on chassis is cooling, reach effect cooling and protection chassis of reducing furnace.
3, on the interlayer sleeve pipe medium position of vapor pipe described in the utility model, be provided with the breather valve that blocks water, in order to guarantee that tail gas water coolant does not upwards circulate to enter in the water coolant of chassis, by the breather valve that blocks water, cooling structure of the present utility model is intercepted into two cooling structures, i.e. base plate cooling structure and tail gas cooling structure.Tail gas cooling structure of the present utility model does not in use have processing requirement, can to it, carry out cooling with high-temperature water, in process of cooling, absorb the heat in tail gas and be transformed into water vapour, thereby give in polysilicon tail gas process of cooling and increased by-product, increased economic benefit, simultaneously better utilised the heat in tail gas, do not cause the waste of resource.
4, the breather valve that blocks water of the present utility model adopts flange-type structure, in exhaust emissions process of cooling, need water coolant to contact the regular hour with exhaust emission pipeline, can cause exhaust emission pipeline long and inconvenient phenomenon is installed, flange arrangement of the present utility model can be divided into two ends by vapor pipe and install, simple installation, also can play bottom tail gas water coolant and can not enter into chassis, top water coolant simultaneously.Be beneficial to cooling to chassis of base plate cooling structure, be also conducive to tail gas water coolant to the cooling while by-product of the tail gas steam that anhydrates.
Accompanying drawing explanation
Fig. 1 is prior art tradition chassis of reducing furnace and tail gas cooling structure
Fig. 2 is the utility model structural representation
Reference numeral: 1, chassis of reducing furnace, 2, water-cooled tube, 3, vapor pipe, 4, cooling water inlet, chassis pipe, 5, chassis cooling water outlet pipe, 6, interlayer sleeve pipe, 7, tail gas cooling water inlet, 8, tail gas cooling water outlet pipe, 9, tail gas outlet, 10, the breather valve that blocks water, 11, tail gas outlet pipe.
Embodiment
Embodiment 1
As the utility model one preferred embodiment, with reference to Figure of description 2, the utility model comprises chassis of reducing furnace 1, be arranged on the water-cooled tube 2 of chassis of reducing furnace 1 bottom, be connected to vapor pipe 3, cooling water inlet, chassis pipe 4 and the chassis cooling water outlet pipe 5 of chassis of reducing furnace 1 bottom; On described vapor pipe 3, be provided with interlayer sleeve pipe 6, described water-cooled tube 2 is communicated with the interlayer sleeve pipe 6 of vapor pipe 3; Also comprise tail gas cooling water inlet 7 and tail gas cooling water outlet pipe 8; Described vapor pipe 3 bottoms are provided with tail gas outlet 9; Described tail gas cooling water inlet 7 is arranged on the interlayer sleeve pipe 6 of vapor pipe 3 bottoms; On interlayer sleeve pipe 6 medium positions of described vapor pipe 3, be provided with the breather valve 10 that blocks water, cooling water inlet, described chassis pipe 4 is arranged on breather valve 10 tops and being communicated with the interlayer sleeve pipe 6 of the vapor pipe 3 of breather valve 10 tops that block water of blocking water; Described tail gas cooling water outlet pipe 8 is arranged on breather valve 10 belows and being communicated with the interlayer sleeve pipe 6 of the vapor pipe 3 of breather valve 10 belows that block water of blocking water.
The utility model adopts the mode of a cooling structure to be improved to chassis of reducing furnace cooling structure and two cooling structures of tail gas cooling structure on traditional chassis and tail gas, traditional cooling structure, from the cooling water inlet in tail gas exit, below, be filled with water coolant, via the sleeve pipe of vapor pipe, to chassis water-cooled tube, to chassis, carry out cooling and then discharge via cooling water outlet, because chassis of reducing furnace temperature can not be over 90 ℃, so the temperature of discharge water also be just 90 ℃ in process of production; Because the temperature of process tail gas of leaving reduction furnace is generally 700 ℃ of left and right, existing this cooling structure has slatterned the heat in process tail gas completely.
Chassis of the present utility model water-cooling structure just carries out cooling to chassis; at place, cooling water inlet, chassis, add the water coolant of 55 ℃ ~ 65 ℃; adopt the water at low temperature of approximately 55 ℃ ~ 65 ℃ of temperature to carry out cooling to chassis; adopting the major cause of water at low temperature is that chassis is due to intensity reason; cooling temperature can not be too high; otherwise there will be chassis machine row degradation; the problems such as chassis depression; cooling rear leaving water temperature(LWT) is 90 ℃; remain on 90 ℃ of left and right by the temperature on chassis is cooling, reach effect cooling and protection chassis of reducing furnace.
On the interlayer sleeve pipe medium position of vapor pipe described in the utility model, be provided with the breather valve that blocks water, in order to guarantee that tail gas water coolant does not upwards circulate to enter in the water coolant of chassis, by the breather valve that blocks water, cooling structure of the present utility model is intercepted into two cooling structures, i.e. base plate cooling structure and tail gas cooling structure.Tail gas cooling structure of the present utility model does not in use have processing requirement, can to it, carry out cooling with high-temperature water, in process of cooling, absorb the heat in tail gas and be transformed into water vapour, thereby give in polysilicon tail gas process of cooling and increased by-product, increased economic benefit, simultaneously better utilised the heat in tail gas, do not cause the waste of resource.
Embodiment 2
As the another preferred embodiment of the utility model, with reference to Figure of description 2, the utility model comprises chassis of reducing furnace 1, be arranged on the water-cooled tube 2 of chassis of reducing furnace bottom, the vapor pipe 3 that is connected to chassis of reducing furnace 1 bottom, cooling water inlet, chassis pipe 4 and chassis cooling water outlet pipe 5; On described vapor pipe 3, be provided with interlayer sleeve pipe 6, described water-cooled tube 2 is communicated with the interlayer sleeve pipe 6 of vapor pipe 3; Also comprise tail gas cooling water inlet 7 and tail gas cooling water outlet pipe 8; Described vapor pipe 3 bottoms are provided with tail gas outlet 9; Described tail gas cooling water inlet 7 is arranged on the interlayer sleeve pipe 6 of vapor pipe 3 bottoms; On interlayer sleeve pipe 6 medium positions of described vapor pipe 3, be provided with the breather valve 10 that blocks water, cooling water inlet, described chassis pipe 4 is arranged on breather valve 10 tops and being communicated with the interlayer sleeve pipe 6 of the vapor pipe 3 of breather valve 10 tops that block water of blocking water; Described tail gas cooling water outlet pipe 8 is arranged on breather valve 10 belows and being communicated with the interlayer sleeve pipe 6 of the vapor pipe 3 of breather valve 10 belows that block water of blocking water.Described chassis cooling water outlet pipe 5 is arranged on chassis of reducing furnace 1 below and upper end is connected on water-cooled tube 2, and described chassis cooling water outlet pipe 5 is communicated with water-cooled tube 2.
The utility model adopts the mode of a cooling structure to be improved to chassis of reducing furnace cooling structure and two cooling structures of tail gas cooling structure on traditional chassis and tail gas, traditional cooling structure, from the cooling water inlet in tail gas exit, below, be filled with water coolant, via the sleeve pipe of vapor pipe, to chassis water-cooled tube, to chassis, carry out cooling and then discharge via cooling water outlet, because chassis of reducing furnace temperature can not be over 90 ℃, so the temperature of discharge water also be just 90 ℃ in process of production; Because the temperature of process tail gas of leaving reduction furnace is generally 700 ℃ of left and right, existing this cooling structure has slatterned the heat in process tail gas completely.
Chassis of the present utility model water-cooling structure just carries out cooling to chassis; at place, cooling water inlet, chassis, add the water coolant of 55 ℃ ~ 65 ℃; adopt the water at low temperature of approximately 55 ℃ ~ 65 ℃ of temperature to carry out cooling to chassis; adopting the major cause of water at low temperature is that chassis is due to intensity reason; cooling temperature can not be too high; otherwise there will be chassis machine row degradation; the problems such as chassis depression; cooling rear leaving water temperature(LWT) is 90 ℃; remain on 90 ℃ of left and right by the temperature on chassis is cooling, reach effect cooling and protection chassis of reducing furnace.
On the interlayer sleeve pipe medium position of vapor pipe described in the utility model, be provided with the breather valve that blocks water, in order to guarantee that tail gas water coolant does not upwards circulate to enter in the water coolant of chassis, by the breather valve that blocks water, cooling structure of the present utility model is intercepted into two cooling structures, i.e. base plate cooling structure and tail gas cooling structure.Tail gas cooling structure of the present utility model does not in use have processing requirement, can to it, carry out cooling with high-temperature water, in process of cooling, absorb the heat in tail gas and be transformed into water vapour, thereby give in polysilicon tail gas process of cooling and increased by-product, increased economic benefit, simultaneously better utilised the heat in tail gas, do not cause the waste of resource.
Embodiment 3
As the utility model most preferred embodiment, with reference to Figure of description 2, the utility model comprises chassis of reducing furnace 1, be arranged on the water-cooled tube 2 of chassis of reducing furnace bottom, the vapor pipe 3 that is connected to chassis of reducing furnace 1 bottom, cooling water inlet, chassis pipe 4 and chassis cooling water outlet pipe 5; On described vapor pipe 3, be provided with interlayer sleeve pipe 6, described water-cooled tube 2 is communicated with the interlayer sleeve pipe 6 of vapor pipe 3; Also comprise tail gas cooling water inlet 7 and tail gas cooling water outlet pipe 8; Described vapor pipe 3 bottoms are provided with tail gas outlet 9; Described tail gas cooling water inlet 7 is arranged on the interlayer sleeve pipe 6 of vapor pipe 3 bottoms; On interlayer sleeve pipe 6 medium positions of described vapor pipe 3, be provided with the breather valve 10 that blocks water, cooling water inlet, described chassis pipe 4 is arranged on breather valve 10 tops and being communicated with the interlayer sleeve pipe 6 of the vapor pipe 3 of breather valve 10 tops that block water of blocking water; Described tail gas cooling water outlet pipe 8 is arranged on breather valve 10 belows and being communicated with the interlayer sleeve pipe 6 of the vapor pipe 3 of breather valve 10 belows that block water of blocking water.Described chassis cooling water outlet pipe 5 is arranged on chassis of reducing furnace 1 below and upper end is connected on water-cooled tube 2, and described chassis cooling water outlet pipe 5 is communicated with water-cooled tube 2.
The utility model adopts the mode of a cooling structure to be improved to chassis of reducing furnace cooling structure and two cooling structures of tail gas cooling structure on traditional chassis and tail gas, traditional cooling structure, from the cooling water inlet in tail gas exit, below, be filled with water coolant, via the sleeve pipe of vapor pipe, to chassis water-cooled tube, to chassis, carry out cooling and then discharge via cooling water outlet, because chassis of reducing furnace temperature can not be over 90 ℃, so the temperature of discharge water also be just 90 ℃ in process of production; Because the temperature of process tail gas of leaving reduction furnace is generally 700 ℃ of left and right, existing this cooling structure has slatterned the heat in process tail gas completely.
Chassis of the present utility model water-cooling structure just carries out cooling to chassis; at place, cooling water inlet, chassis, add the water coolant of 55 ℃ ~ 65 ℃; adopt the water at low temperature of approximately 55 ℃ ~ 65 ℃ of temperature to carry out cooling to chassis; adopting the major cause of water at low temperature is that chassis is due to intensity reason; cooling temperature can not be too high; otherwise there will be chassis machine row degradation; the problems such as chassis depression; cooling rear leaving water temperature(LWT) is 90 ℃; remain on 90 ℃ of left and right by the temperature on chassis is cooling, reach effect cooling and protection chassis of reducing furnace.
On the interlayer sleeve pipe medium position of vapor pipe described in the utility model, be provided with the breather valve that blocks water, in order to guarantee that tail gas water coolant does not upwards circulate to enter in the water coolant of chassis, by the breather valve that blocks water, cooling structure of the present utility model is intercepted into two cooling structures, i.e. base plate cooling structure and tail gas cooling structure.Tail gas cooling structure of the present utility model does not in use have processing requirement, can to it, carry out cooling with high-temperature water, in process of cooling, absorb the heat in tail gas and be transformed into water vapour, thereby give in polysilicon tail gas process of cooling and increased by-product, increased economic benefit, simultaneously better utilised the heat in tail gas, do not cause the waste of resource.
The breather valve that blocks water that the described breather valve 10 that blocks water is comprised of flange; Described vapor pipe 3 is two, is arranged on chassis of reducing furnace 1 below; Described vapor pipe 3 lower ends are connected with tail gas outlet pipe 11, on described tail gas outlet pipe 11, are provided with interlayer sleeve pipe 6, and the tail gas of described tail gas outlet pipe 11 exports on the interlayer sleeve pipe 6 at 9 places tail gas cooling water inlet 7 is set.The breather valve that blocks water of the present utility model adopts flange-type structure, in exhaust emissions process of cooling, need water coolant to contact the regular hour with exhaust emission pipeline, can cause exhaust emission pipeline long and inconvenient phenomenon is installed, flange arrangement of the present utility model can be divided into two ends by vapor pipe and install, simple installation, also can play bottom tail gas water coolant and can not enter into chassis, top water coolant simultaneously.Be beneficial to cooling to chassis of base plate cooling structure, be also conducive to tail gas water coolant to the cooling while by-product of the tail gas steam that anhydrates.
Above-described embodiment is preferably embodiment of the utility model; but embodiment of the present utility model is not restricted to the described embodiments; other any do not deviate from change, the modification done under spirit of the present utility model and principle, substitutes, combination, simplify; all should be equivalent substitute mode, within being included in protection domain of the present utility model.
Claims (5)
1. polycrystalline silicon reduction furnace base plate and a tail gas cooling structure, comprise chassis of reducing furnace, be arranged on chassis of reducing furnace bottom water-cooled tube, be connected to vapor pipe, Guan He chassis, cooling water inlet, the chassis cooling water outlet pipe of chassis of reducing furnace bottom; On described vapor pipe, be provided with interlayer sleeve pipe, described water-cooled tube is communicated with the interlayer sleeve pipe of vapor pipe; It is characterized in that: also comprise tail gas cooling water inlet and tail gas cooling water outlet pipe; Described vapor pipe bottom is provided with tail gas outlet; Described tail gas cooling water inlet is arranged on the interlayer sleeve pipe of vapor pipe bottom; On the interlayer sleeve pipe medium position of described vapor pipe, be provided with the breather valve that blocks water, cooling water inlet, described chassis pipe is arranged on the breather valve top and being communicated with the interlayer sleeve pipe of the vapor pipe of the breather valve top that blocks water of blocking water; Described tail gas cooling water outlet pipe is arranged on the breather valve below and being communicated with the interlayer sleeve pipe of the vapor pipe of the breather valve below that blocks water of blocking water.
2. a kind of polycrystalline silicon reduction furnace base plate as claimed in claim 1 and tail gas cooling structure, is characterized in that: described chassis cooling water outlet pipe is arranged on chassis of reducing furnace below and upper end is connected on water-cooled tube.
3. a kind of polycrystalline silicon reduction furnace base plate as claimed in claim 1 or 2 and tail gas cooling structure, is characterized in that: described in the breather valve that blocks water that breather valve is comprised of flange that blocks water.
4. a kind of polycrystalline silicon reduction furnace base plate as claimed in claim 1 and tail gas cooling structure, is characterized in that: described vapor pipe is two, is arranged on chassis of reducing furnace below.
5. a kind of polycrystalline silicon reduction furnace base plate as claimed in claim 4 and tail gas cooling structure, it is characterized in that: described vapor pipe lower end is connected with tail gas outlet pipe, on described tail gas outlet pipe, be provided with interlayer sleeve pipe, on the interlayer sleeve pipe in the tail gas exit of described tail gas outlet pipe, tail gas cooling water inlet be set.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113375058A (en) * | 2021-06-15 | 2021-09-10 | 新疆硅基新材料创新中心有限公司 | Tail gas emission structure and reduction furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113375058A (en) * | 2021-06-15 | 2021-09-10 | 新疆硅基新材料创新中心有限公司 | Tail gas emission structure and reduction furnace |
| CN113375058B (en) * | 2021-06-15 | 2023-12-01 | 新疆硅基新材料创新中心有限公司 | Tail gas emission structure and reducing furnace |
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