CN203894283U - Probe card and probe device having the above probe card - Google Patents
Probe card and probe device having the above probe card Download PDFInfo
- Publication number
- CN203894283U CN203894283U CN201420220571.1U CN201420220571U CN203894283U CN 203894283 U CN203894283 U CN 203894283U CN 201420220571 U CN201420220571 U CN 201420220571U CN 203894283 U CN203894283 U CN 203894283U
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- CN
- China
- Prior art keywords
- probe
- pilot hole
- back side
- size
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000000523 sample Substances 0.000 title claims abstract description 101
- 238000012360 testing method Methods 0.000 abstract description 18
- 238000010586 diagram Methods 0.000 description 6
- 238000011900 installation process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
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- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The utility model provides a probe card. The probe card has a front side and a back side opposed to the front side and is provided with at least one locating hole, and sizes and shapes of the locating holes are not unique along the direction from the front side to the back side. According to the probe card and the probe device, the problem that the front side and the back side of a conventional probe card are easy to place in an inverted manner is solved, quality and safety problems such as contact and mechanical collision of a testing system are avoided, the operating time for re-assembling the probe card is reduced, and the working efficiency is raised.
Description
Technical field
The utility model relates to technical field of semiconductors, relates in particular to for the probe for IC parameter testing and the probe unit that contains above-mentioned probe.
Background technology
The application surface of probe unit is very widely at semiconductor applications.Probe unit generally includes: probe pallet and be arranged on the pallet on described probe pallet.In test process, probe is the important medium of connecting test equipment and measurand (chip, test structure).So the quality of the own quality of probe and correctly whether installing, has determined the height of precision and the correctness of test result.
The structure of conventional probe please refer to shown in Fig. 1, the plan structure schematic diagram of the probe that Fig. 1 is prior art.In probe 10, be formed with probe 11, the first pilot hole 13 and the second pilot hole 12, described the first pilot hole 13 and the second pilot hole 12 for positioning element (such as register pin, not shown) coordinate, probe is arranged in probe pallet (not shown), and prevents that probe from moving in test process.Described the first pilot hole 13 and the second pilot hole 12 have different shapes, and object is that mode probe 10 is reversed left to right in installation process.
Prior art defect is, front and the reverse side of existing probe are easily squeezed, there is probe inverted situation is installed, cannot detect by testing apparatus and probe pallet, this may cause whole test macro to occur the problem of the quality such as contact, mechanical collision and secure context, thereby test cannot be carried out smoothly or even the result of damaging appears in probe and testing apparatus, and reinstall probe and also can increase the running time, reduce work efficiency.
Utility model content
The problem that the utility model solves is to provide a kind of probe and probe unit thereof, existing probe front and the easy inverted problem of reverse side are solved, prevent that quality and the safety problems such as contact, mechanical collision from appearring in test macro, reduce the running time of reinstalling probe, improved work efficiency.
For addressing the above problem, the utility model provides a kind of probe, and the back side that has front and arrange with vis-a-vis, at least has a pilot hole in described probe, and described pilot hole is not unique along the size in the direction of described front to the back side and/or shape.
Alternatively, in described probe, have two pilot holes at least, the shape of described at least two pilot holes and/or size difference.
Alternatively, on along front to back side direction, size gradual change increase or the gradual change of at least part of described pilot hole reduce.
Alternatively, along positive, to the direction of the back side, the aperture of described pilot hole increases gradually.
Alternatively, along positive, to the direction of the back side, size gradual change increase or the gradual change of described pilot hole reduce.
Alternatively, being shaped as of described pilot hole: taper shape, truncated cone-shaped, cylindrical, rectangular parallelepiped, square or combination wherein.
Correspondingly, the utility model also provides a kind of probe unit, comprises described probe, and positioning element, probe pallet, and described positioning element matches with described pilot hole, so that described locator card is positioned on probe pallet
Compared with prior art, the utlity model has following advantage:
Utilize the utility model that a kind of probe and probe unit thereof are provided, described pilot hole is not unique along the size in the direction of described front to the back side and/or shape, can distinguish the front and back of probe, guarantee in installation process, the pro and con of probe can not be inverted, prevent that quality and the safety problems such as contact, mechanical collision from appearring in test macro, reduced the running time of reinstalling probe, improved work efficiency;
Further optimally, have two pilot holes in described probe at least, the shape of described at least two pilot holes and/or size difference, further prevent card left and right directions setup error.
Brief description of the drawings
Fig. 1 is the plan structure schematic diagram of the probe of prior art;
Fig. 2 is the cross-sectional view of the probe shown in Fig. 1 along AA direction;
Fig. 3 is the plan structure schematic diagram of the probe of an embodiment of the utility model;
Fig. 4 is the cross-sectional view of the probe shown in Fig. 3 along AA direction;
Fig. 5 is the plan structure schematic diagram of the probe of the another embodiment of the utility model;
Fig. 6 is the cross-sectional view of the probe shown in 5 along AA direction.
Embodiment
The defect of prior art is, front and the reverse side of existing probe are easily squeezed, there is probe inverted situation is installed, cannot detect by testing apparatus and probe pallet, this may cause whole test macro to occur the problem of the quality such as contact, mechanical collision and secure context, thereby test cannot be carried out smoothly or even the result of damaging appears in probe and testing apparatus, and reinstall probe and also can increase the running time, reduce work efficiency.
For addressing the above problem, the utility model provides a kind of probe, and the back side that has front and arrange with vis-a-vis, at least has a pilot hole in described probe, and described pilot hole is not unique along the size in the direction of described front to the back side and/or shape.
Below in conjunction with embodiment, the technical solution of the utility model is described in detail.
For the technical solution of the utility model is better described, please refer to Fig. 3 is the plan structure schematic diagram of the probe of an embodiment of the utility model.In probe 100, there are probe 110, the first pilot holes 130 and the second pilot hole 120.The positive size (referring to the solid line part of the first pilot hole 130 in Fig. 3) different from back side size (referring to the dotted portions of the first pilot hole 130 in Fig. 3) of described the first pilot hole 130, and the positive size of the second pilot hole 120 (referring to the solid line part of the second pilot hole 120 in Fig. 3) and back side size (referring to the dotted portion of the second pilot hole 120 in Fig. 3) difference, can prevent like this front and the back side setup error of probe 100.
As an embodiment, described the first pilot hole 130 is different from the shape of the second pilot hole 120, so that probe 100 left and right directions setup errors.
Incorporated by reference to Fig. 4, Fig. 4 is the cross-sectional view of the probe shown in Fig. 3 along AA direction.As an embodiment, described the first pilot hole 130 and described the second pilot hole 120 are along positive 101 to the equal gradual change increase of the back side 102 size, and such object is also for the ease of register pin is installed.
In the present embodiment, described the first pilot hole 130 is trapezoidal shape.Described the second pilot hole 120 be shaped as truncated cone-shaped.Described the first pilot hole 130 and the second pilot hole 120 are not unique to the size of the back side 102 directions in front 101, and object is in order to distinguish when mounted front 101 and the back side 102, to prevent the front and back of probe 100 to obscure wrongly installed.In other embodiment, the shape of described pilot hole can also be other shapes, such as described location can be taper shape, truncated cone-shaped, cylindrical, rectangular parallelepiped, square or combination wherein.Or the size of an only part for pilot hole is along front to back side direction size gradual change, and the shape of pilot hole is also not limited to described in the present embodiment.
Above-mentioned the first pilot hole 130 and the second pilot hole 120 need corresponding positioning element (such as register pin) that this probe 100 is positioned on probe pallet, form probe unit.Due to pilot hole along front the size/shape to back side direction not unique, the front of probe and the back side can be made a distinction, so prevent probe be inverted.
Please refer to Fig. 5, Fig. 5 is the plan structure schematic diagram of the probe of the another embodiment of the utility model.The parts identical with Fig. 3 adopt identical label to mark, the structure of Fig. 5 and Fig. 3 is basic identical, difference is, the first pilot hole 130 is different with the relative position of the second pilot hole 120 in probe 100, and the first pilot hole 130 is different with the section shape of the second pilot hole 120.Specifically please refer to Fig. 6, Fig. 6 is the cross-sectional view of the probe shown in 5 along AA direction.The first pilot hole 130 is made up of the hole of the different rectangular shape of two sizes, positive 101 to 102 directions of the back side, the size and dimension that forms two holes of the first pilot hole 130 remains unchanged, and the second pilot hole 120 is made up of the hole of the different truncated cone-shaped of two size and dimensions, positive 101, to 102 directions of the back side, the aperture in the hole of two truncated cone-shaped increases gradually.In the present embodiment, described the first pilot hole 130 is less than the size at the back side 102 in positive 101 sizes, and described the second pilot hole 120 is less than the size at the back side 102 in positive 101 size.Certainly, in other embodiments, the aperture that meets at least one pilot hole from direction first pilot hole at front to the back side or the second pilot hole increase gradually or the prerequisite that reduces gradually under, the aperture of the first pilot hole and the second pilot hole and shape can also have more distortion, as long as positive size and/or the shape of a pilot hole in the first pilot hole or the second pilot hole different from back side size and/or shape, the front of probe and back panel can be separated, all can realize the purpose of this utility model, not do one by one and repeat at this.
For above-mentioned probe is fixed on probe pallet, need corresponding described the first pilot hole 130 and the second pilot hole 120 that positioning element (being register pin) is set probe is fixed on probe pallet.
To sum up, utilize the utility model that a kind of probe and probe unit thereof are provided, described pilot hole is not unique along the size in the direction of described front to the back side and/or shape, can distinguish the front and back of probe, guarantee in installation process, the pro and con of probe can not be inverted, and has prevented that quality and the safety problems such as contact, mechanical collision from appearring in test macro, reduce the running time of reinstalling probe, improved work efficiency.
Therefore, above-mentioned preferred embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model Spirit Essence change or modify, within all should being encompassed in protection domain of the present utility model.
Claims (7)
1. a probe, the back side that has front and arrange with vis-a-vis, is characterized in that in described probe, at least having a pilot hole, described pilot hole is not unique along the size in the direction of described front to the back side and/or shape.
2. probe as claimed in claim 1, is characterized in that, has two pilot holes in described probe at least, the shape of described at least two pilot holes and/or size difference.
3. probe as claimed in claim 1, is characterized in that, reduces along positive size gradual change increase or gradual change at least part of described pilot hole in the direction of the back side.
4. probe as claimed in claim 1, is characterized in that, along positive, to the direction of the back side, size gradual change increase or the gradual change of described pilot hole reduce.
5. probe as claimed in claim 4, is characterized in that, along positive, to the direction of the back side, the aperture of described pilot hole increases gradually.
6. probe as claimed in claim 1, is characterized in that, being shaped as of described pilot hole: taper shape, truncated cone-shaped, cylindrical, rectangular parallelepiped or square.
7. probe unit, is characterized in that, comprises probe as described in arbitrary claim in claim 1-6, and positioning element, probe pallet, and described positioning element matches with described pilot hole, so that described locator card is positioned on probe pallet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420220571.1U CN203894283U (en) | 2014-04-30 | 2014-04-30 | Probe card and probe device having the above probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420220571.1U CN203894283U (en) | 2014-04-30 | 2014-04-30 | Probe card and probe device having the above probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203894283U true CN203894283U (en) | 2014-10-22 |
Family
ID=51720666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420220571.1U Expired - Lifetime CN203894283U (en) | 2014-04-30 | 2014-04-30 | Probe card and probe device having the above probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203894283U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114355144A (en) * | 2022-01-05 | 2022-04-15 | 忱芯电子(苏州)有限公司 | Signal loop connecting device and system of silicon carbide double-pulse automatic testing equipment and manufacturing method |
-
2014
- 2014-04-30 CN CN201420220571.1U patent/CN203894283U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114355144A (en) * | 2022-01-05 | 2022-04-15 | 忱芯电子(苏州)有限公司 | Signal loop connecting device and system of silicon carbide double-pulse automatic testing equipment and manufacturing method |
| CN114355144B (en) * | 2022-01-05 | 2024-02-09 | 忱芯电子(苏州)有限公司 | Signal loop connecting device, system and manufacturing method of silicon carbide double-pulse automatic test equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141022 |