CN203866404U - Water cooling system for production of polycrystalline silicon ingoting - Google Patents

Water cooling system for production of polycrystalline silicon ingoting Download PDF

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Publication number
CN203866404U
CN203866404U CN201420235313.0U CN201420235313U CN203866404U CN 203866404 U CN203866404 U CN 203866404U CN 201420235313 U CN201420235313 U CN 201420235313U CN 203866404 U CN203866404 U CN 203866404U
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CN
China
Prior art keywords
water
polycrystalline silicon
silicon ingot
cooling
water pump
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Expired - Fee Related
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CN201420235313.0U
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Chinese (zh)
Inventor
黄贤强
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ZHEJIANG YIHONG OPTOELECTRONICS TECHNOLOGY Co Ltd
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ZHEJIANG YIHONG OPTOELECTRONICS TECHNOLOGY Co Ltd
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Priority to CN201420235313.0U priority Critical patent/CN203866404U/en
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Abstract

The utility model discloses a water cooling system for production of polycrystalline silicon ingoting. The water cooling system comprises an internal recycling system; the internal recycling system comprises a cooling water tank, a polycrystalline silicon ingoting furnace, a closed cooling tower and a refrigerating machine, which are connected end to end sequentially through pipelines, wherein the cooling water tank is communicated with the polycrystalline silicon ingoting furnace through two pipelines which are connected in parallel; a standby water pump is arranged on one pipeline; an internal recycling water pump is arranged on the other pipeline; the standby water pump is connected with a storage battery; a controller is arranged in the storage battery, and is connected with a commercial power supply circuit through a power cut detection circuit and the internal recycling water pump; a water flow sensor is arranged on any pipeline which is connected with the internal recycling water pump in series, and is connected with the controller. Compared with the prior art, the water cooling system is reasonable in structural design, high in security and good in cooling effect, can ensure required cooling water for production of polycrystalline silicon ingoting, and can supply cooling water in emergency when power is cut in emergency or other breakdown occurs.

Description

A kind of water-cooling system of producing for polycrystalline silicon ingot casting
Technical field
The utility model relates to water-cooled field, particularly a kind of water-cooling system of producing for polycrystalline silicon ingot casting.
Background technology
Polycrystalline silicon ingot or purifying furnace is the major equipment of producing for polycrystalline silicon ingot casting now, because it has the advantage that output is high, cost is low, has replaced at present single crystal furnace equipment, is the major equipment that photovoltaic industry upstream product is manufactured.
Adopt the production technique of polycrystalline silicon ingot or purifying furnace production polysilicon as follows:
First polycrystalline silicon raw material is packed in the quartz ceramic crucible of having processed through silicon nitride spray finishing, then together send into polycrystalline silicon ingot or purifying furnace, take out after air in polycrystalline silicon ingot or purifying furnace furnace chamber makes to become vacuum in furnace chamber and heat again, polycrystalline silicon raw material is heated to 1550 and spends time fusing under the protection of rare gas element argon gas, when its fusing finishes and is down to certain temperature, slowly promote heat-insulation cage, by the heat radiation of furnace chamber interior orientation coagulated mass, make the liquid polysilicon in crucible form vertical temperature gradient, liquid polysilicon starts bottom-up crystallization and freezing from quartz ceramic crucible bottom, until annealed again after the whole crystallization and freezings of liquid polysilicon, the process such as cooling, completing polycrystalline silicon ingot casting produces.
The graphite heater with heating function adopting in polycrystalline silicon ingot casting production process is by consuming electric energy release of heat, when polycrystalline silicon raw material heats up fusing, the heat part that graphite heater discharges is absorbed in order to the fusing that heats up by polycrystalline silicon raw material, a part is radiated polycrystalline silicon ingot or purifying furnace furnace wall, and the heat of the furnace wall that is radiated is taken away by the water coolant in the interlayer of ingot furnace furnace wall through heat exchange; At polycrystalline silicon raw material, solidify growth, annealing, cooling stages, the heat that oriented solidified blocks discharges is also all taken away by the water coolant in the interlayer of polycrystalline silicon ingot or purifying furnace furnace wall.
Water coolant as mentioned above plays vital effect in polycrystalline silicon ingot casting production process, and it is not only the important component part in polycrystalline silicon casting ingot process system, also bears the mission of polycrystalline silicon ingot or purifying furnace device security.In polycrystalline silicon ingot casting production process, top temperature in ingot furnace can reach 1550 degree, burst end electricity or other faults in polycrystalline silicon ingot casting production process, cause in the interlayer of polycrystalline silicon ingot or purifying furnace furnace wall and cut off the water supply, now, the ingot casting furnace body of stainless steel can heat up rapidly, causes ingot casting furnace body to be heated and deformed damaged, even polycrystalline silicon liquid flows out and burns ingot furnace furnace wall, and the water coolant in furnace wall gasifies and security incident occurs.Although the emergency cooling water of polycrystalline silicon ingot casting adopts tap water more in the market, adopt tap water as emergency cooling water, to exist the defects such as hydraulic pressure is low, flow is few, poor stability, in the situation that casting unit is many, can not reach emergent object.
Utility model content
The utility model has overcome above-mentioned the deficiencies in the prior art, a kind of reasonable in design has been proposed, safe, good cooling results, can either guarantee that polycrystalline silicon ingot casting produces required water coolant, again can be in burst power-off or the water-cooling system of producing for polycrystalline silicon ingot casting that can Contingency supply water coolant while there are other faults.
The technical solution of the utility model is achieved in that
A kind of water-cooling system of producing for polycrystalline silicon ingot casting, comprise internal circulation system, described internal circulation system comprises by pipeline successively end to end cooling basin, polycrystalline silicon ingot or purifying furnace, closed cooling tower and refrigerator, described cooling basin is the pipeline connection polycrystalline silicon ingot or purifying furnace being arranged in parallel by two, wherein on a pipeline, be provided with reserve pump, on another pipeline, be provided with internal recycle water pump; Described reserve pump is connected with store battery, and built-in storage battery has controller, and controller is connected with the mains-supplied circuit of internal recycle water pump by power failure detection circuit; The water flow sensor of streamflow regime be provided with to detect internal circulation system on arbitrary pipeline of connecting with internal recycle water pump in; Water flow sensor connects controller.
The principle of work of described internal circulation system is, connect mains-supplied circuit and make internal recycle water pump operation, internal recycle water pump operation enters polycrystalline silicon ingot or purifying furnace from extracting water coolant in cooling basin, water coolant has absorbed heat through polycrystalline silicon ingot or purifying furnace, then pass through again closed cooling tower cooling, through refrigerator cooling, get back to cooling basin again, visible, internal circulation system is the required water coolant of supply polycrystalline silicon ingot or purifying furnace, in process of production, in polycrystalline silicon ingot or purifying furnace stove, temperature is higher, reach as high as 1550 degree, in order to guarantee that device security and production safety need water coolant uninterruptedly to supply, therefore on a pipeline, reserve pump is set therein, reserve pump can continue as polycrystalline silicon ingot or purifying furnace water coolant is provided, when burst power-off, controller detects by power failure detection circuit after the signal of power-off, triggers store battery and makes it power to start reserve pump, or there is no power-off but internal recycle water pump while breaking down, now water flow sensor detects the abnormal signal of current, signal is delivered to controller, controller is controlled and is started reserve pump, now reserve pump connects mains-supplied circuit, can continue as polycrystalline silicon ingot or purifying furnace cooling water supply, guarantee the normally operation safely of whole equipment, and can not affect production efficiency.When water flow sensor, detect in internal circulation system in the situations such as the few or cutout of current, hummer has alarm song, reminds hand inspection or manually opens reserve pump simultaneously; Meanwhile, the charging circuit that connects mains-supplied circuit connects store battery with thinking that store battery constantly charges always, guarantees that accumulator electric-quantity is sufficient.
As preferably, this water-cooling system also comprises open cooling tower, and open cooling tower connects refrigerators by two pipelines, and a pipeline is provided with outer circulation water pump therein, and open cooling tower, outer circulation water pump and refrigerator form external circulating system.Outer circulation water pump in external circulating system extracts water coolant in open cooling tower, and water coolant, is got back to and in open cooling tower, carried out cooling by inlet type pipeline again after the heat in water coolant absorption refrigerating machine to refrigerator by water-outlet type pipeline; The setting of external circulating system can be lowered the temperature to the water coolant in internal circulation system better, prevents that water coolant is overheated, guarantees equipment safety operation; External circulating system adopts open cooling tower, has reduced production cost, and open cooling tower and refrigerator cooperation, equally also can reach the effect of closed cooling tower water coolant.
As preferably, described reserve pump, internal recycle water pump and outer circulation water pump are all connected with the frequency-variable controller in order to hydraulic pressure and discharge in automatic adjusting pipeline.At reserve pump, internal recycle water pump and outer circulation water pump, be all connected with frequency-variable controller, realized the automatic adjusting of the interior hydraulic pressure of pipeline and discharge, thereby to polysilicon foundry furnace, carried out cooling better.
As preferably, at the place, water side of described reserve pump, internal recycle water pump and outer circulation water pump, be equipped with check valve.Place, water side at reserve pump, internal recycle water pump and outer circulation water pump is equipped with check valve, in order to prevent that water coolant from refluxing.
As preferably, described polycrystalline silicon ingot or purifying furnace is one or more.A plurality of polycrystalline silicon ingot or purifying furnaces to be communicated with, are used same set of chilled(cooling) water supply (CWS) system by pipeline.
As preferably, controller is connected with the hummer in order to report to the police.When burst power-off or when water flow sensor, detect in internal circulation system in the situations such as the few or cutout of current, hummer has alarm song, reminds hand inspection or intervention.
As preferably, store battery connects mains-supplied circuit by charging circuit.Known charging circuit can carry out step-down rectifier to civil power, and the direct current obtaining after step-down rectifier is stored in store battery standby.
Adopted the beneficial effects of the utility model of technique scheme to be:
The utility model is a kind of reasonable in design, safe, can either guarantee that polycrystalline silicon ingot casting produces required water coolant, again can be in burst power-off or the water-cooling system of producing for polycrystalline silicon ingot casting of good cooling results that can Contingency supply water coolant while there are other faults.
This water-cooling system comprises internal circulation system and external circulating system, the required water coolant of internal circulation system supply polycrystalline silicon ingot or purifying furnace, but in process of production, in polycrystalline silicon ingot or purifying furnace stove, temperature is higher, in order to guarantee that device security and production safety need water coolant uninterruptedly to supply, on a pipeline, reserve pump is set therein, whether by controller, detect power on/off situation or pipeline streamflow regime controls reserve pump and opens, thereby can be when burst power-off or internal recycle water pump fault, can continue as polycrystalline silicon ingot or purifying furnace cooling water supply, assurance equipment is operation safely normally.
The setting of external circulating system can be lowered the temperature to the water coolant in internal circulation system better, prevents that water coolant is overheated, guarantees equipment safety operation.At reserve pump, internal recycle water pump and outer circulation water pump, be all connected with frequency-variable controller, realized the automatic adjusting of the interior hydraulic pressure of pipeline and discharge, thereby to polycrystalline foundry furnace, carried out cooling better.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the circuit connecting relation schematic diagram of the utility model internal circulation system water pump part.
Embodiment
Embodiment of the present utility model is as follows:
Embodiment: a kind of water-cooling system of producing for polycrystalline silicon ingot casting, as shown in Figure 1-2, comprising:
Internal circulation system, described internal circulation system comprises by pipeline successively end to end cooling basin 1, polycrystalline silicon ingot or purifying furnace 2, closed cooling tower 3 and refrigerator 4, described cooling basin 1 is the pipeline connection polycrystalline silicon ingot or purifying furnace 2 being arranged in parallel by two, wherein on a pipeline, be connected with reserve pump 5, on another pipeline, be connected with internal recycle water pump 6; As shown in Figure 2, described reserve pump 5 is connected with store battery 7, and store battery 7 is built-in with controller, and controller is connected with the mains-supplied circuit of internal recycle water pump 6 by power failure detection circuit; The water flow sensor 8 of streamflow regime be provided with to detect internal circulation system on arbitrary pipeline of connecting with internal recycle water pump 6 in; Water flow sensor 8 connects controller, and controller is connected with the hummer (not shown) in order to report to the police.
Again furtherly, this water-cooling system also comprises open cooling tower 9, and open cooling tower 9 connects refrigerator 4 by two pipelines, and a pipeline is provided with outer circulation water pump 10 therein, and open cooling tower 9, outer circulation water pump 10 and refrigerator 4 form external circulating system; Described reserve pump 5, internal recycle water pump 6 and outer circulation water pump 10 are all connected with the frequency-variable controller in order to hydraulic pressure and discharge in automatic adjusting pipeline; Place, water side at described reserve pump 5, internal recycle water pump 6 and outer circulation water pump 10 is equipped with check valve 11; Polycrystalline silicon ingot or purifying furnace 2 is one or more.
Concrete operating process is, power-on switch makes mains-supplied impel 6 operations of internal recycle water pump, from cooling basin, 1 interior extraction water coolant enters polycrystalline silicon ingot or purifying furnace 2 to 6 operations of internal recycle water pump, water coolant has absorbed heat through polycrystalline silicon ingot or purifying furnace 2, then pass through again closed cooling tower 3 coolings, then get back to cooling basin 1 through refrigerator 4 coolings; Meanwhile, outer circulation water pump 10 in external circulating system is from the interior extraction water coolant of open cooling tower 9, water coolant, is got back to and in open cooling tower 9, is carried out cooling (arrow in Fig. 1 represents water (flow) direction) by inlet type pipeline again after the heat in water coolant absorption refrigerating machine 4 to refrigerator 4 by water-outlet type pipeline; External circulating system adopts open cooling tower 9, has reduced production cost, and open cooling tower 9 and refrigerator 4 cooperations, equally also can reach the cooling effect of closed cooling tower 3.
When burst power-off, controller detects by power failure detection circuit after the signal of power-off, and controller starts reserve pump 5, when reserve pump 5 is electric energy water pump, and can be by store battery 7 continued powers; When reserve pump 5 is diesel oil fuel water pump, store battery 7 supply of electrical energy to start reserve pump 5, can adopt diesel oil fuel to maintain the running of reserve pump 5 to the ignition system of reserve pump 5 after startup; Or there is no power-off but internal recycle water pump 6 while breaking down, now water flow sensor 8 detects the abnormal signal of current, signal is delivered to controller, controller reference mark ignition system is automatically to start reserve pump 5, now reserve pump 5 connects mains-supplied circuit, can continue as polycrystalline silicon ingot or purifying furnace 2 cooling water supplies, guarantee the normally operation safely of whole equipment, and can not affect production efficiency.
Certainly, internal recycle water pump 6 and reserve pump 5 can normally operate simultaneously provides water coolant for polycrystalline silicon ingot or purifying furnace 2.
Meanwhile, the charging circuit that connects mains-supplied circuit connects store battery 7 use always and thinks that store battery 7 constantly charges, and guarantees that store battery 7 electric weight are sufficient.
The frequency-variable controller of hydraulic pressure and discharge in reserve pump 5, internal recycle water pump 6 and outer circulation water pump 10 are all connected with in order to automatic adjusting pipeline, can carry out cooling to polysilicon foundry furnace 2 better.
When reserve pump 5 occurs in the situation of insufficient waters such as cutting off the water supply, start water service water coolant.
In addition, it should be noted that, the specific embodiment described in this specification sheets, the shape of its component, institute's title of being named etc. can be different, and the above content described in this specification sheets is only to the utility model structure and the explanation of accompanying drawing example.All equivalence variation or simple change of doing according to described structure, feature and the principle of the utility model patent design, are included in the protection domain of the utility model patent.The utility model person of ordinary skill in the field can make various modifications or supplements or adopt similar mode to substitute described specific embodiment; only otherwise depart from structure of the present utility model or surmount this scope as defined in the claims, all should belong to protection domain of the present utility model.

Claims (7)

1. a water-cooling system of producing for polycrystalline silicon ingot casting, comprise internal circulation system, described internal circulation system comprises by pipeline successively end to end cooling basin, polycrystalline silicon ingot or purifying furnace, closed cooling tower and refrigerator, it is characterized in that: described cooling basin is the pipeline connection polycrystalline silicon ingot or purifying furnace being arranged in parallel by two, wherein on a pipeline, be provided with reserve pump, on another pipeline, be provided with internal recycle water pump; Described reserve pump is connected with store battery, and built-in storage battery has controller, and controller is connected with the mains-supplied circuit of internal recycle water pump by power failure detection circuit; The water flow sensor of streamflow regime be provided with to detect internal circulation system on arbitrary pipeline of connecting with internal recycle water pump in; Water flow sensor connects controller.
2. a kind of water-cooling system of producing for polycrystalline silicon ingot casting according to claim 1, it is characterized in that: this water-cooling system also comprises open cooling tower, open cooling tower connects refrigerator by two pipelines, a pipeline is provided with outer circulation water pump therein, and open cooling tower, outer circulation water pump and refrigerator form external circulating system.
3. a kind of water-cooling system of producing for polycrystalline silicon ingot casting according to claim 2, is characterized in that: described reserve pump, internal recycle water pump and outer circulation water pump are all connected with the frequency-variable controller in order to hydraulic pressure and discharge in automatic adjusting pipeline.
4. a kind of water-cooling system of producing for polycrystalline silicon ingot casting according to claim 3, is characterized in that: the place, water side at described reserve pump, internal recycle water pump and outer circulation water pump is equipped with check valve.
5. a kind of water-cooling system of producing for polycrystalline silicon ingot casting according to claim 1, is characterized in that: described polycrystalline silicon ingot or purifying furnace is one or more.
6. a kind of water-cooling system of producing for polycrystalline silicon ingot casting according to claim 1, is characterized in that: controller is connected with the hummer in order to report to the police.
7. a kind of water-cooling system of producing for polycrystalline silicon ingot casting according to claim 1, is characterized in that: store battery connects mains-supplied circuit by charging circuit.
CN201420235313.0U 2014-05-08 2014-05-08 Water cooling system for production of polycrystalline silicon ingoting Expired - Fee Related CN203866404U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104593869A (en) * 2015-01-06 2015-05-06 江苏东方四通科技股份有限公司 Water circulating device for crystal growing furnace power supply
CN108441947A (en) * 2018-06-21 2018-08-24 江苏迩高新能源科技有限公司 The cooling water recirculation system of silicon material ingot casting boiler
CN108796608A (en) * 2018-07-10 2018-11-13 山西中聚晶科半导体有限公司 A kind of sapphire single-crystal furnace cooling device
CN112828269A (en) * 2019-11-22 2021-05-25 昆山市天和焊锡制造有限公司 Molten material feeding device
CN114111353A (en) * 2021-11-29 2022-03-01 江苏鸿凌达科技有限公司 Internal circulation cooling water system capable of dynamically adjusting and reducing energy consumption

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104593869A (en) * 2015-01-06 2015-05-06 江苏东方四通科技股份有限公司 Water circulating device for crystal growing furnace power supply
CN108441947A (en) * 2018-06-21 2018-08-24 江苏迩高新能源科技有限公司 The cooling water recirculation system of silicon material ingot casting boiler
CN108441947B (en) * 2018-06-21 2024-01-02 江苏迩高新能源科技有限公司 Cooling water circulation system of silicon ingot casting boiler
CN108796608A (en) * 2018-07-10 2018-11-13 山西中聚晶科半导体有限公司 A kind of sapphire single-crystal furnace cooling device
CN112828269A (en) * 2019-11-22 2021-05-25 昆山市天和焊锡制造有限公司 Molten material feeding device
CN114111353A (en) * 2021-11-29 2022-03-01 江苏鸿凌达科技有限公司 Internal circulation cooling water system capable of dynamically adjusting and reducing energy consumption

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Granted publication date: 20141008

Termination date: 20210508