CN203855643U - High power heater for metal organic chemical vapor deposition equipment - Google Patents
High power heater for metal organic chemical vapor deposition equipment Download PDFInfo
- Publication number
- CN203855643U CN203855643U CN201420236819.3U CN201420236819U CN203855643U CN 203855643 U CN203855643 U CN 203855643U CN 201420236819 U CN201420236819 U CN 201420236819U CN 203855643 U CN203855643 U CN 203855643U
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- annulus
- heating wire
- heater
- fan
- circular ring
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Abstract
The utility model discloses a high power heater for metal organic chemical vapor deposition equipment. The heater comprises a furnace body and heating wires positioned above the furnace body, wherein the furnace body comprises a disc and a ring positioned around the disc; the ring at least comprises a combined ring formed by combined fan-shaped rings; the heating wires correspondingly comprise disc heating wires above the disc and fan-shaped ring heating wires positioned above the fan-shaped rings. As the furnace body ring consists of the combined fan-shaped rings, the high temperature thermal expansion effect of the furnace body is effectively reduced, and the situation that a large-size heater is easy to damage is effectively solved; as the fan-shaped ring heating wires above the fan-shaped rings adopt a concentric spiral fan-shaped winding method and a concentric arched winding method, the uniformity of the overall temperature can be well ensured.
Description
Technical field
The utility model belongs to well heater, is specifically related to a kind of superpower well heater that can be used for metal organic chemical vapor deposition equipment.
Background technology
In the time preparing semiconductor film material with metal organic chemical vapor deposition equipment (MOCVD), the chemical reaction occurring is all to carry out under specific temperature environment, and temperature homogeneity directly affects the quality of film.Demand equipment cavity diameter constantly being increased in order to adapt to market, the diameter of well heater also can increase relatively, well heater is along with the increase of diameter, at high temperature thermal expansion of well heater also will increase, the common body of heater of existing major diameter well heater is combined by more than two concentric ring, along with the continuous increase of heater diameter, major diameter well heater at high temperature can damage because thermal expansion is excessive self parts, and diameter is shorter larger work-ing life.
Utility model content
The purpose of this utility model is to provide a kind of superpower well heater that can be used for metal organic chemical vapor deposition equipment that does not affect structure and life-span because of enlarged diameter.
The technical scheme that realizes the employing of the utility model object is as follows:
Can be used for the superpower well heater of metal organic chemical vapor deposition equipment, comprise body of heater, be positioned at the heating wire of body of heater top; Described body of heater comprises disk and the annulus that is positioned at disk perimeter, and described annulus at least comprises a combination annulus being combined by eccentric circular ring; The corresponding disk heating wire that is positioned at disk top and the eccentric circular ring heating wire that is positioned at eccentric circular ring top of comprising of described heating wire.
Described combination annulus comprises the inside and outside combination annulus of two or more different radial width.
Described disk heating wire adopts form concentric spirals winding, and the eccentric circular ring heating wire of the eccentric circular ring top of interior combination annulus adopts the fan-shaped winding of form concentric spirals, and the eccentric circular ring heating wire of the eccentric circular ring top of outer combination annulus adopts isocentric circular arc winding.
Described annulus also comprises the overall annulus being located between described disk and interior combination annulus, the corresponding overall annulus heating wire that is located at overall annulus top that comprises of described heating wire, and described overall annulus heating wire adopts form concentric spirals winding.
Beneficial effect:
1, the body of heater annulus of the utility model well heater adopts eccentric circular ring to combine, and can effectively reduce body of heater high temperature thermal expansion effects, can effectively solve large size well heater and hold flimsy present situation, and the overall dimension of body of heater does not have the upper limit in theory.And existing body of heater adopts concentric overall annulus, this well heater overall dimension is limited, if exceed 600mm, and along with temperature rise, can serious deformation especially more than 1000 DEG C time, the life-span shortens greatly.
2, the eccentric circular ring heating wire of eccentric circular ring top adopts the fan-shaped winding of form concentric spirals and isocentric circular arc winding, can well ensure the homogeneity of bulk temperature.And existing body of heater can be along with temperature rise, body of heater presents one direction expansion expansion trend, thereby temperature field less stable.
Further illustrate the technical solution of the utility model below in conjunction with accompanying drawing.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is exploded view of the present utility model.
Embodiment
Embodiment 1
See Fig. 1-2, can be used for the superpower well heater of metal organic chemical vapor deposition equipment, comprise body of heater, be positioned at the heating wire of body of heater top; Described body of heater comprises disk 1 and is positioned at disk 1 annulus around, described annulus comprises interior combination annulus and the outer combination annulus of overall annulus 2, different radial width from the inside to the outside, wherein, combination annulus is combined by four eccentric circular rings 3, and outer combination annulus is combined by four eccentric circular rings 4; Described heating wire is corresponding comprise be positioned at disk 1 top disk heating wire 5, be positioned at overall annulus 2 tops overall annulus heating wire 6, be positioned at combination annulus eccentric circular ring 3 tops eccentric circular ring heating wire 7 and be positioned at the eccentric circular ring heating wire 8 of eccentric circular ring 4 tops of outer combination annulus; Described disk heating wire 5 adopts form concentric spirals winding, the heating of entirety annulus, 6 adopt form concentric spirals winding, and eccentric circular ring 7 heating wires of eccentric circular ring 3 tops of interior combination annulus adopt the fan-shaped winding of form concentric spirals, and the eccentric circular ring heating wire 8 of eccentric circular ring 4 tops of outer combination annulus adopts isocentric circular arc winding.
Embodiment 2
The present embodiment is that the overall annulus 2 in embodiment 1 is cancelled, and all annulus combine by least two eccentric circular rings.
Embodiment 3
The present embodiment is that the interior combination annulus in embodiment 1 is resolved into multiple interior combination annulus again, and all annulus combine by least two eccentric circular rings.
Claims (4)
1. can be used for a superpower well heater for metal organic chemical vapor deposition equipment, comprise body of heater, be positioned at the heating wire of body of heater top; Described body of heater comprises disk and is positioned at the annulus of disk perimeter, it is characterized in that described annulus at least comprises a combination annulus being combined by eccentric circular ring; The corresponding disk heating wire that is positioned at disk top and the eccentric circular ring heating wire that is positioned at eccentric circular ring top of comprising of described heating wire.
2. the superpower well heater that can be used for metal organic chemical vapor deposition equipment according to claim 1, is characterized in that described combination annulus comprises the inside and outside combination annulus of two or more different radial width.
3. the superpower well heater that can be used for metal organic chemical vapor deposition equipment according to claim 2, it is characterized in that described disk heating wire adopts form concentric spirals winding, the eccentric circular ring heating wire of the eccentric circular ring top of interior combination annulus adopts the fan-shaped winding of form concentric spirals, and the eccentric circular ring heating wire of the eccentric circular ring top of outer combination annulus adopts isocentric circular arc winding.
4. the superpower well heater that can be used for metal organic chemical vapor deposition equipment according to claim 3, it is characterized in that described annulus also comprises the overall annulus being located between described disk and interior combination annulus, the corresponding overall annulus heating wire that is located at overall annulus top that comprises of described heating wire, described overall annulus heating wire adopts form concentric spirals winding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420236819.3U CN203855643U (en) | 2014-05-10 | 2014-05-10 | High power heater for metal organic chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420236819.3U CN203855643U (en) | 2014-05-10 | 2014-05-10 | High power heater for metal organic chemical vapor deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203855643U true CN203855643U (en) | 2014-10-01 |
Family
ID=51605510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420236819.3U Expired - Fee Related CN203855643U (en) | 2014-05-10 | 2014-05-10 | High power heater for metal organic chemical vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203855643U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103924221A (en) * | 2014-05-10 | 2014-07-16 | 长沙市博垒德电子科技有限公司 | High-power heater applicable to metal-organic chemical vapor deposition equipment |
-
2014
- 2014-05-10 CN CN201420236819.3U patent/CN203855643U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103924221A (en) * | 2014-05-10 | 2014-07-16 | 长沙市博垒德电子科技有限公司 | High-power heater applicable to metal-organic chemical vapor deposition equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141001 Termination date: 20200510 |