CN203688807U - Low-cost multi-wire proportional counter electrode array - Google Patents

Low-cost multi-wire proportional counter electrode array Download PDF

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Publication number
CN203688807U
CN203688807U CN201320800261.2U CN201320800261U CN203688807U CN 203688807 U CN203688807 U CN 203688807U CN 201320800261 U CN201320800261 U CN 201320800261U CN 203688807 U CN203688807 U CN 203688807U
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insulating substrate
wire electrode
conductive strips
electrode
wire
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李四华
李维
杨忠钰
施林伟
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Sheng Xi Road Shenzhen Science And Technology Ltd
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Sheng Xi Road Shenzhen Science And Technology Ltd
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Abstract

The utility model relates to a low-cost multi-wire proportional counter electrode array which comprises a plurality of electrode layers that are parallelly arranged from top to bottom. Each electrode layer is bear and fixed on an insulating substrate correspondingly. Each insulating substrate comprises a first insulating film sheet and a second insulating film sheet. The first film sheet and the second film sheet are respectively provided with an electrode wire conductive belt. From bottom to top, a plurality of insulating substrates are sequentially divided into odd-number layers of insulating substrates and even-number layers of insulating substrates. Electrode wires on electrode layers which correspond with the odd-number layers of insulating substrates have same electrode polarity, and the electrode wires on electrode layers which correspond with the even-number layers of insulating substrates have same electrode polarity. The low-cost multi-wire proportional counter electrode array provided by the utility model has advantages of: simple structure, low production cost and large detection area.

Description

A kind of low cost multiwire proportional counter electrod-array
Technical field
The utility model relates to a kind of low cost multiwire proportional counter electrod-array.
Background technology
Study the reaction between elementary particle, the knowledge of particle properties and interparticle force can be provided.These reactions are conventionally very complicated.Sometimes in a reaction, can produce a hundreds of particle.In order to explain these reactions, scientist often needs to record the track of each particle.It is various photographic processes that this class records conventional method, and the course of work is slow and tired.
Afterwards utility model proportional counter tube to solve the problems of the technologies described above.Proportional counter tube is made up of an anodic wire and a pipe that forms negative electrode.Silk is placed in pipe center, is operated in proportional region.Its principle is: obtain larger electric field intensity by adding high voltage, the electronics that particle produces in pipe internal ionization will be subject to electric field acceleration to obtain enough energy between secondary collision, thereby ionize again other gas molecules, the ionization number (output pulse) of finally collecting will be large more many than initial ionization, but be proportional to initial ionization.Classical proportional counter is as Geiger-Miao Le pipe, is to be contained in by a filament pipe central authorities that diameter is about 1cm to form.Between filament and tube wall, add the high pressure of several kilovolts.Charged particle, through the pipe of inflation, can make gas ionization.In this process, the neutral atom of gas can discharge electronegative electronics, and becomes the ion of positively charged.Under the effect of electric field, electronics is to filament (the being anode) motion of die.The local electric field that approaches filament is very strong, and electronics accelerates greatly, so just have enough energy to make gas ionization, thereby have more electronics to be released, these electronics are accelerated again, so just formed the snowslide of electronics and positive ion.Just because of the motion of electronics and ion, cause that anodic wire produces an electric signal, provides the information that charged particle passes through.Proportional counter tube determines that the precision of particle position is approximately 1cm, i.e. the size of counter tube itself.But this proportional counter precision is not high, is difficult to meet actual needs.
Georges Charpak has been done major reform to it afterwards again.Multiwire proportional counter (the claiming again multiwire proportional chamber) technique functions of Georges Charpak utility model comes from proportional counter tube, its principle of work is: form a unit by accompanying the parallel wire plane of making positive electrode in the middle of two parallel metal nets of making negative electrode, in chamber, fill with inert mixed gas.Between electrode, add high direct voltage, voltage is in proportional region.When high energy charged particles is through multiwire proportional chamber, make the gas atom ionization on path, the electronics that ionization produces forms the ionization propagation of avalanche type nearby in a certain electric field wiry, total electric weight of its electric discharge is proportional to the number of electrons in initial ionization, and the negative pulse that electric discharge forms is proportional to the ionization loss of this particle.Utilize special electronic circuit can determine that incident particle passes the position of chamber, is further made the track of particle by multiple unit.Under electric field and certain gas condition, incident particle causes by ionizing that near anodic wire gas amplifies, the ionization propagation of " snowslide " formula of generation, on this silk, set up a negative pulse, and adjacent anodic wire and cathode filament plane induce the positive pulse of opposite polarity, conventionally be less than 1/10 as for capacity coupled same polarity pulse, and can change electric capacity and make it less.Therefore, use a sensitive amplifier of anticathode pulse, just can make every anodic wire independently incident particle be counted and location as a proportional counter, its locating area taking two anodic wires distance partly as boundary, be on certain silk, to have pulse output, just show to have a particle to be incident in this 1/2 flight lead region.
Only tens square millimeters of the little areas of multiwire proportional chamber, large reaches tens square metres.Anodic wire is commonly used the gold-plated tungsten wire of 20 μ m, 40 μ m diameters, and cathode filament is used beryllium copper silk, gold-plated tungsten wire or the stainless steel wire of 100 μ m left and right conventionally.Gas is commonly used flow type, and the ratio of the most famous is volume is " the magic different gas " that 75.0% argon+24.5% isobutane+0.5% fluorine Lyons 13B1 forms.Each is all connected to amplifier, and connects computing machine and carry out accurate location survey and on-line analysis.
Multiwire proportional chamber has been widely used in particle physics experiment at present, becomes one of main detector of high-energy physics experiment, and many experiments have reached the even scale of several ten thousand anodic wires of use several thousand.In addition, it is also widely used in nuclear physics, uranology and cosmic ray physics, and is progressively being applied to the field such as medical science, biology.
As can be seen here, multiwire proportional chamber has wide application, but it also has weak point: multiwire proportional counter (multiwire proportional chamber) electrod-array is the core component of multifibres radiation detector.For reaching the gain of some strength, the both intensity of electron avalanche, needs to add very high voltage between anode and negative electrode.For increasing the probability that detects high-energy radiation, need to increase area or the volume of detector.
In prior art, the MEMS technology that adopts microelectronics to be combined on silicon chip with micromechanics can go out silicon post array as electrode by deep etching on silicon chip.The large I of each silicon post electrode is less than 20 microns, and spacing can point-devicely be controlled.But due to the restriction of the deep etching degree of depth, the height of electrode is generally less than 500 microns.This need to use expensive micro-process equipment to adopt MEMS technology, and the cost of manufacture of device is higher, has limited it and has promoted the use of.Adopt the detector of MEMS technology simultaneously, as increased the volume of detector, also need to superpose piecewise silicon chip, further improved production cost.And actual use during to the lower field of accuracy requirement, as being integrated into the radiation detector in mobile phone or other handheld device, adopts the detector cost of MEMS technology high at some, can not meet the actual requirement of the field radiation detector lower to accuracy requirement.For this reason, how to reduce proportional counter cost of manufacture, for continuing the technical matters solving in this area.
Utility model content
The utility model object is to provide a kind of simple in structure, production cost is low, detection area is large a kind of multiwire proportional counter electrod-array.
In order to solve the problem of above-mentioned existence, the utility model has adopted following technical proposal:
Scheme one: a kind of low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers that are arranged in parallel, each electrode layer is arranged in parallel and is formed by many wire electrodes, each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate and the second insulating substrate, the first insulating substrate and the second insulating substrate lay respectively at electrode layer both sides, and each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; On the first insulating substrate and the second insulating substrate, be also respectively equipped with wire electrode conductive strips, the first insulating substrate and the second insulating substrate polar filament conductive strips that power on are one of following two kinds of structures:
(1) from the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on odd-level insulating substrate, on each the first insulating substrate upper surface, even level insulating substrate, each the first insulating substrate lower surface is equipped with wire electrode conductive strips; On odd-level insulating substrate, on each the second insulating substrate lower surface, even level insulating substrate, each the second insulating substrate upper surface is equipped with wire electrode conductive strips simultaneously; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode;
(2) from the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on odd-level insulating substrate, on each the first insulating substrate lower surface, even level insulating substrate, each the first insulating substrate upper surface is equipped with wire electrode conductive strips; On odd-level insulating substrate, on each the second insulating substrate upper surface, even level insulating substrate, each the second insulating substrate lower surface is equipped with wire electrode conductive strips simultaneously; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode of each even level insulating substrate institute counter electrode there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode of each odd-level insulating substrate institute counter electrode there is identical polarity of electrode.
Wherein, the first insulating substrate, the second insulating substrate are in substrate one side the insulating substrate that insulating thin layer forms are set, and insulating thin layer is polyimide film layer or film layer or polyvinyl chloride film layer or layer of polypropylene foil or plasticon layer.Wire electrode conductive strips are the conductive layer that is arranged on insulating thin layer outside.The first insulating substrate, the second insulating substrate polar filament conductive strips that power on are respectively equipped with overhanging connection terminal, wire electrode conductive strips upper connecting terminal on each the first insulating substrate is connected and is realized wire electrode conductive strips parallel connection or from beginning to end in sequential series by wire, and each the second insulating substrate upper connecting terminal is connected and realized each wire electrode conductive strips parallel connection or from beginning to end in sequential series by wire.
Substrate can be glass, quartz glass, and silicon chip, the monocrystalline such as metal, polycrystalline, non-crystalline material etc., wire electrode material can be gold, titanium, stainless steel etc.Preferably equate with wire electrode thermal expansivity or close substrate.
Scheme one batch manufacturing method: a kind of low cost multiwire proportional counter electrode array producing method, comprises the steps:
(1) lay an insulating substrate array: select multiple one sides to have the insulating substrate of wire electrode conductive strips, by multiple insulating substrate circle distribution on a rotatable rotor outer circle, insulating substrate is fixed with respect to rotor, along rotor circumference direction, the wire electrode conductive strips on adjacent two insulating substrates are positioned at two insulating substrate opposition sides;
(2) lay electrode layer: by rotor, a wire electrode group being arranged in parallel is along the circumferential direction wrapped on insulating substrate array, every winding one is enclosed and formed an electrode layer;
(3) again lay insulating substrate array: on the electrode layer forming in step (2), re-laying one group of one side has the insulating substrate of wire electrode conductive strips, again lays in insulating substrate process, and insulating substrate also needs to meet following two conditions:
(3.1) the each insulating substrate on each insulating substrate and last insulating substrate array is upper and lower stacked, and the wire electrode conductive strips on upper and lower adjacent two insulating substrates are positioned at opposition side;
(3.2), along rotor circumference direction, the wire electrode conductive strips on adjacent two insulating substrates are positioned at two insulating substrate opposition sides;
(4) repeat 2,3 steps, until reach the electrode number of plies setting, stop laying;
(5), taking upper and lower stacked each insulating substrate as an electrod-array unit, taking adjacent two electrod-array unit as a counter electrode array group, wire electrode is cut off in grouping, takes off insulating substrate from rotor, completes.
Wherein, in step (2), step (3), can adopt bonding agent adhesion mode or local laser to heat insulating thin layer melting fixed electorde silk and insulating substrate on tinsel, insulating substrate.
Further improve: in step (2), upper and lower two electrode layers power between polar filament horizontal spacing by regulating wire electrode and rotor axial relative position to realize before winding.
Further improve: in step (2) winding process, the wire electrode that can stretch, makes wire electrode have tension stress, to ensure that step (5) cuts off wire electrode, each electrode layer is without obvious bending when rotor takes off insulating substrate.
Further improve: rotor is cylindrical or regular polygon rotor;
Scheme two: a kind of low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers that are arranged in parallel, each electrode layer is arranged in parallel and is formed by many wire electrodes, each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate and the second insulating substrate, the first insulating substrate and the second insulating substrate lay respectively at electrode layer both sides, and each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; Have wire electrode conductive strips to be arranged on the first insulating substrate, the second insulating substrate, wire electrode conductive strips are distributed in the first insulating substrate and the second insulating substrate is one of following two kinds of structures:
(1) from the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on odd-level insulating substrate, each the first insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, simultaneously on even level insulating substrate, each the second insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, and the first insulating substrate polar filament conductive strips and the second insulating substrate polar filament conductive strips that power on that power on are positioned at homonymy; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode;
(2) from the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on even level insulating substrate, each the first insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, simultaneously on odd-level insulating substrate, each the second insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, and the first insulating substrate polar filament conductive strips and the second insulating substrate polar filament conductive strips that power on that power on are positioned at homonymy; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode.
Wherein, the first insulating substrate, the second insulating substrate are in substrate one side the insulating substrate that insulating thin layer forms are set, and insulating thin layer is polyimide film layer or film layer or polyvinyl chloride film layer or layer of polypropylene foil or plasticon layer.Wire electrode conductive strips are the conductive layer that is arranged on insulating thin layer outside.The first insulating substrate, the second insulating substrate polar filament conductive strips that power on are respectively equipped with overhanging connection terminal.
Substrate can be glass, quartz glass, and silicon chip, the monocrystalline such as metal, polycrystalline, non-crystalline material etc., wire electrode material can be gold, titanium, stainless steel etc.Preferably equate with wire electrode thermal expansivity or close substrate.
Scheme two batch manufacturing methods: a kind of low cost multiwire proportional counter electrode array producing method, comprises the steps:
(1) lay an insulating substrate array: choose the multiple insulating substrate of wire electrode conductive strips and insulating substrates of establishing wire electrode conductive strips do not established; By insulating substrate circle distribution, on a rotatable rotor outer circle, insulating substrate is fixed with respect to rotor; Along rotor circumference direction, do not establish the insulating substrate of wire electrode conductive strips spaced apart with the insulating substrate of establishing wire electrode conductive strips;
(2) lay electrode layer: by rotor, a wire electrode group being arranged in parallel is along the circumferential direction wrapped on insulating substrate array, every winding one is enclosed and formed an electrode layer;
(3) again lay insulating substrate array: on the electrode layer forming, re-lay an insulating substrate array in step (2), again lay in insulating substrate array process, insulating substrate also needs to meet following two conditions:
(3.1) the each insulating substrate on each insulating substrate and last insulating substrate array is upper and lower stacked, and has established the insulating substrate of wire electrode conductive strips and upper and lower being staggered of insulating substrate of not establishing wire electrode conductive strips;
(3.2), along rotor circumference direction, the insulating substrate of having established wire electrode conductive strips is staggered with the insulating substrate of not establishing wire electrode conductive strips;
(4) repeat 2,3 steps, until reach the electrode number of plies setting, stop laying;
(5), taking upper and lower stacked each insulating substrate as an electrod-array unit, taking adjacent two electrod-array unit as a counter electrode array group, wire electrode is cut off in grouping, takes off insulating substrate from rotor, completes.
Wherein, in step (2), step (3), can adopt bonding agent adhesion mode or local laser to heat tinsel, insulating substrate melting fixed electorde silk and insulating substrate.
Further improve: in step (2), upper and lower two electrode layers power between polar filament horizontal spacing by regulating wire electrode and rotor axial relative position to realize before winding.
Further improve: in step (2) winding process, the wire electrode that can stretch, makes wire electrode have tension stress, to ensure that step (5) cuts off wire electrode, each electrode layer is without obvious bending when rotor takes off insulating substrate.
Further improve: rotor is cylindrical or regular polygon rotor;
When in the art of this patent, product is applied, odd-level insulating substrate on multiwire proportional counter and the even level insulating substrate polar filament conductive strips that power on are connected to two poles, make odd-level insulating substrate and the even level insulating substrate counter electrode layer polar filament that powers on there is contrary polarity of electrode.
Product in the art of this patent, because varying with temperature, wire electrode stress there is relative position change, and wire electrode and insulating substrate entirety are fixing, selection substrate equates with wire electrode material thermal expansion coefficient or is close, can avoid wire electrode because temperature change deforms, cause wire electrode spacing generation relative changes to cause impact no longer parallel to each other.The most directly select is that substrate material has with wire electrode material the thermal expansivity of equating.
In scheme one, two production methods, in step (2) winding process separately, upper and lower two electrode layers power between polar filament horizontal spacing can be by changing wire electrode and rotor axial relative position regulates before winding, for example, often around a circle, wire electrode moves 100 microns along the axis direction of rotor, and can make the upper and lower two electrode layers horizontal spacing between polar filament that powers on is 100 microns; In the process being wound around, can suitably use bonding agent that wire electrode is fixed on insulating substrate; In step (2) winding process, the wire electrode that can stretch, makes wire electrode have tension stress, and to ensure to cut off wire electrode, after rotor takes off substrate, each electrode layer is without obvious bending.
The beneficial effects of the utility model are:
1, cost is low: because (1) does not need expensive microfabrication equipments, (2) wire electrode starting material are on market, very easily to obtain tinsel, (3) one times flow process can be made multiple devices, and therefore low cost of manufacture, is conducive to promoting the use of of this patent product.
2, the number of plies and the width that are wound around are unrestricted, can expand arbitrarily volume or the area of electrod-array.
3, insulating substrate equates with the thermal expansivity of wire electrode or is close, the Heat stability is good of device.Avoid wire electrode to vary with temperature and be out of shape the not parallel impact that the change of the wire electrode spacing of initiation causes.
4, insulating substrate, wire electrode conductive strips and wire electrode are array setting, therefore insulating substrate, wire electrode conductive strips and wire electrode size, size specification are all identical, convenient batch production insulating substrate, wire electrode conductive strips and wire electrode, the Single Electron element production cost that makes to process this patent product is low, is conducive to promoting the use of of this patent product.
Brief description of the drawings
Fig. 1 is multiple electrode layers polar filament arrangement architecture schematic diagram that power on.
Fig. 2 is insulating substrate mounting structure schematic diagram on rotatable rotor outer circle.
Fig. 3 is that wire electrode is wound around insulating substrate structural representation on rotor.
Fig. 4 A is electrode layer one side insulating substrate cross section structure schematic diagram in embodiment mono-.
Fig. 4 B is electrode layer opposite side insulating substrate cross section structure schematic diagram in embodiment mono-.
Fig. 5 A is electrode layer one side insulating substrate cross section structure schematic diagram in embodiment bis-.
Fig. 5 B is electrode layer opposite side insulating substrate cross section structure schematic diagram in embodiment bis-.
Embodiment
As Fig. 4 A, Fig. 4 B illustrated embodiment one, a kind of low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers 1 that are arranged in parallel, each electrode layer 1 is arranged in parallel and is formed by many wire electrodes 11, each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate 21 and the second insulating substrate 22, the first insulating substrate and the second insulating substrate lay respectively at electrode layer both sides, each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; On the first insulating substrate and the second insulating substrate, being also respectively equipped with wire electrode conductive strips 3, the first insulating substrates and the second insulating substrate polar filament conductive strips that power on is following structure:
From the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate 5 and even level insulating substrate 6, on odd-level insulating substrate, on each the first insulating substrate upper surface, even level insulating substrate, each the first insulating substrate lower surface is equipped with wire electrode conductive strips; On odd-level insulating substrate, on each the second insulating substrate lower surface, even level insulating substrate, each the second insulating substrate upper surface is equipped with wire electrode conductive strips simultaneously; By the wire electrode conductive strips series connection on each the first insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips series connection on each the second insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode.
For convenience of connecting, the first insulating substrate, the second insulating substrate polar filament conductive strips that power on are respectively equipped with overhanging connection terminal, wire electrode conductive strips upper connecting terminal on each the first insulating substrate connects by wire that to realize wire electrode conductive strips head and the tail in sequential series, and each the second insulating substrate upper connecting terminal connects by wire that to realize each wire electrode conductive strips from beginning to end in sequential series.When use, wire electrode conductive strips on the first insulating substrate are connected two poles with the wire electrode conductive strips on the second insulating substrate, make odd-level insulating substrate and the even level insulating substrate counter electrode layer polar filament that powers on there is contrary polarity of electrode (see figure 1), thereby form a multiwire proportional counter.
In this patent, the first insulating substrate 21, the second insulating substrate 22 are in substrate 200 1 sides and lay the insulating substrate that forms of insulating thin layers 210, and wire electrode conductive strips 3 are for being laid on the conductive layer outside insulating thin layer.Substrate equates with wire electrode thermal expansivity or is close.Substrate can be glass, quartz glass, and silicon chip, the monocrystalline such as metal, polycrystalline, non-crystalline material etc., wire electrode material can be gold, titanium, stainless steel etc.Preferably equate with wire electrode thermal expansivity or close substrate.Insulating thin layer is polyimide film layer or film layer or polyvinyl chloride film layer or layer of polypropylene foil or plasticon layer.
Embodiment mono-method for making, comprises the steps:
(1) lay one group of insulating substrate array: select multiple one sides to have the insulating substrate of wire electrode conductive strips, by multiple insulating substrate circle distribution (see figure 2) on rotatable rotor 8 cylindricals, insulating substrate is fixed with respect to rotor; In fixed insulation substrate process, the one insulating substrate polar filament conductive strips that power on are positioned at insulating substrate upper surface, the insulating substrate adjacent with the insulating substrate polar filament conductive strips that power on are positioned at adjacent insulating substrate lower surface, make the wire electrode conductive strips on adjacent two insulating substrates be positioned at two insulating substrate opposition sides;
(2) lay electrode layer: by rotor, a wire electrode group being arranged in parallel is along the circumferential direction wrapped on insulating substrate array, wire electrode group power on polar filament support and be fixed on each insulating substrate, every winding one is enclosed and is formed an electrode layer (see figure 3);
(3) again lay insulating substrate array: on the electrode layer forming in step (3), re-laying one group of one side has the insulating substrate of wire electrode conductive strips, again lay in insulating substrate process, insulating substrate horizontal on wire electrode and insulating substrate and wire electrode fix, insulating substrate also needs to meet following two conditions simultaneously:
(3.1) the each insulating substrate on each insulating substrate and last group of insulating substrate array is upper and lower stacked, in upper and lower stacked each insulating substrate, the insulating substrate polar filament conductive strips that power on are positioned on lower surface, the insulating substrate adjacent with this insulating substrate polar filament conductive strips that power on are positioned on adjacent insulating substrate upper surface, make the wire electrode conductive strips on upper and lower adjacent two insulating substrates be positioned at opposition side;
(3.2), along rotor circumference direction, the wire electrode conductive strips on the insulating substrate array of again laying on adjacent two insulating substrates are positioned at two insulating substrate opposition sides;
(4) repeat 2,3 steps, until reach the electrode number of plies setting, stop laying;
(5), taking upper and lower stacked each insulating substrate as an electrod-array unit, taking adjacent two electrod-array unit as a counter electrode array group, wire electrode is cut off in grouping, takes off insulating substrate from rotor, completes.
Wherein, rotor is cylindrical or regular polygon rotor.In step (2) process of deployment, in step (3), can adopt bonding agent adhesion mode or local laser to heat tinsel, insulating substrate melting fixed electorde silk and insulating substrate.Upper and lower two electrode layers power between polar filament horizontal spacing by regulating wire electrode and rotor axial relative position to realize before winding.In step (2) winding process, wire electrode also can stretch.Make wire electrode have tension stress, to ensure that step (5) cuts off wire electrode, each electrode layer is without obvious bending when rotor takes off insulating substrate.
As Fig. 5 A, Fig. 5 B illustrated embodiment two, a kind of low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers 1 that are arranged in parallel, each electrode layer 1 is arranged in parallel and is formed by many wire electrodes 11, each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate 23 and the second insulating substrate 24, the first insulating substrate 23 and the second insulating substrate 24 lay respectively at electrode layer both sides, each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; Have wire electrode conductive strips to be arranged on the first insulating substrate, the second insulating substrate, wire electrode conductive strips are distributed in the first insulating substrate and the second insulating substrate is following structure:
From the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on odd-level insulating substrate, each the first insulating substrate upper surface is equipped with wire electrode conductive strips 7, and on even level insulating substrate, each the first insulating substrate upper surface is not provided with wire electrode conductive strips; On even level insulating substrate, each the second insulating substrate upper surface is equipped with wire electrode conductive strips 7 simultaneously, and on odd-level insulating substrate, each the second insulating substrate upper surface is not provided with wire electrode conductive strips; By the wire electrode conductive strips series connection on each the first insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips series connection on each the second insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode.
Wherein, the first insulating substrate 23, the second insulating substrate 24 are in substrate 200 1 sides and lay the insulating substrate that insulating thin layer 210 forms, and having the first insulating substrate 23, second insulating substrate 24 of wire electrode conductive strips 7 is that wire electrode conductive strips 7 are for being laid on the conductive layer in insulating thin layer outside on corresponding the first insulating substrate 23, the second insulating substrate 24.Substrate 200 equates with wire electrode thermal expansivity or is close.Substrate can be glass, quartz glass, and silicon chip, the monocrystalline such as metal, polycrystalline, non-crystalline material etc., wire electrode material can be gold, titanium, stainless steel etc.Preferably equate with wire electrode thermal expansivity or close substrate.Insulating thin layer is polyimide film layer or film layer or polyvinyl chloride film layer or layer of polypropylene foil or plasticon layer.
Embodiment bis-method for makings, comprise the steps:
(1) lay one group of insulating substrate array: multiple insulating substrates are half-and-half divided into two parts, and choosing wherein a part of insulating substrate is the insulating substrate of establishing wire electrode conductive strips; By multiple insulating substrate circle distribution, on a rotatable rotor outer circle, insulating substrate is fixed with respect to rotor; In fixed insulation substrate process, do not establish the insulating substrate of wire electrode conductive strips spaced apart with the insulating substrate of establishing wire electrode conductive strips;
(2) lay electrode layer: by rotor, a wire electrode group being arranged in parallel is along the circumferential direction wrapped on insulating substrate array, wire electrode group power on polar filament support and be fixed on each insulating substrate, every winding one is enclosed and is formed an electrode layer;
(3) again lay insulating substrate array: on the electrode layer forming, re-lay one group of insulating substrate array in step (3), again lay in insulating substrate array process, insulating substrate horizontal on wire electrode and insulating substrate and wire electrode fix, insulating substrate also needs to meet following two conditions simultaneously:
(3.1) the each insulating substrate on each insulating substrate and last group of insulating substrate array is upper and lower stacked, in upper and lower stacked each insulating substrate, on an insulating substrate, establish wire electrode conductive strips, the insulating substrate adjacent with establishing wire electrode conductive strips insulating substrate do not established wire electrode conductive strips, makes to establish the insulating substrate of wire electrode conductive strips and upper and lower being staggered of insulating substrate of not establishing wire electrode conductive strips;
(3.2), along rotor circumference direction, the insulating substrate of having established wire electrode conductive strips is staggered with the insulating substrate of not establishing wire electrode conductive strips;
(4) repeat 2,3 steps, until reach the electrode number of plies setting, stop laying;
(5), taking upper and lower stacked each insulating substrate as an electrod-array unit, taking adjacent two electrod-array unit as a counter electrode array group, wire electrode is cut off in grouping, takes off insulating substrate from rotor, completes.
In this patent, rotor is cylindrical rotor, once can make six multiwire proportional counters on rotor.Plane in the rotor (not shown) of positive Polygonal column shape is convenient to the installation of insulating substrate.
In above-mentioned various method steps (1), insulating substrate sticks on rotor by bonding agent.In this patent examples of implementation, the insulating thin layer on insulating substrate is Kapton sheet, and its thickness range is 10 microns to 500 microns, in step (2), step (3), can adopt bonding agent adhesion mode fixed electorde silk and insulating substrate.Except adopting glue bonding agent, can also adopt local laser to heat insulating thin layer melting fixed electorde silk and insulating substrate on tinsel, insulating substrate.Because varying with temperature, wire electrode stress there is relative position change, wire electrode and insulating substrate entirety are fixed on substrate, selection substrate equates with wire electrode material thermal expansion coefficient or is close, can avoid wire electrode because temperature change deforms, cause wire electrode spacing generation relative changes to cause impact no longer parallel to each other.The most directly select is to use substrate material to have with wire electrode material the thermal expansivity of equating.
In the utility model, because the radius of rotor 8 is generally all larger, between several centimetres to several meters, and insulating substrate thickness and width, wire electrode diameter generally only have tens to hundreds of micron, the every layer of wire electrode length error causing when being wound around the rotor of relatively large radius is very little, can ignore; Add in various method steps (2), the wire electrode that can stretch, makes wire electrode have suitable tension stress, ensures that when open and flat opening, each electrode layer powers on polar filament without obvious bending after rotor takes off substrate.In above-mentioned various method steps (2) winding process, can suitably use bonding agent that wire electrode is fixed on insulating substrate, upper and lower two electrode layers power between polar filament horizontal spacing can be by changing wire electrode and rotor axial relative position regulates before winding, for example, often around a circle, wire electrode moves 100 microns along the axis direction of rotor, and can make the upper and lower two electrode layers horizontal spacing between polar filament that powers on is 100 microns.
In the art of this patent, adopt spin-coating method that insulating film material is coated on substrate and after solidifying and forms insulating thin layer, complete the making of insulating substrate; Also can adopt membrane deposition method that insulation film is grown in and on substrate, forms insulating thin layer.Adopt mask structure and utilize metal sputtering technique deposition of conductive metals to be formed on insulating thin layer to the wire electrode conductive strips of wire electrode conduction.

Claims (6)

1. a low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers that are arranged in parallel, each electrode layer is arranged in parallel and is formed by many wire electrodes, it is characterized in that: each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate and the second insulating substrate, the first insulating substrate and the second insulating substrate lay respectively at electrode layer both sides, and each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; On the first insulating substrate and the second insulating substrate, be also respectively equipped with wire electrode conductive strips, the first insulating substrate and the second insulating substrate polar filament conductive strips that power on are following structure:
From the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on odd-level insulating substrate, on each the first insulating substrate upper surface, even level insulating substrate, each the first insulating substrate lower surface is equipped with wire electrode conductive strips, and on odd-level insulating substrate, on each the second insulating substrate lower surface, even level insulating substrate, each the second insulating substrate upper surface is equipped with wire electrode conductive strips simultaneously; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode.
2. a kind of low cost multiwire proportional counter electrod-array is characterized in that according to claim 1: described the first insulating substrate, the second insulating substrate are in substrate one side the insulating substrate that insulating thin layer forms is set, and described wire electrode conductive strips are the conductive layer that is arranged on insulating thin layer outside; The first insulating substrate, the second insulating substrate polar filament conductive strips that power on are respectively equipped with overhanging connection terminal, wire electrode conductive strips upper connecting terminal on each the first insulating substrate is connected and is realized wire electrode conductive strips parallel connection or from beginning to end in sequential series by wire, and each the second insulating substrate upper connecting terminal is connected and realized each wire electrode conductive strips parallel connection or from beginning to end in sequential series by wire.
3. a kind of low cost multiwire proportional counter electrod-array is characterized in that according to claim 2: described substrate equates with wire electrode thermal expansivity or be close; Described insulating thin layer is polyimide film layer or film layer or polyvinyl chloride film layer or layer of polypropylene foil or plasticon layer.
4. a low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers that are arranged in parallel, each electrode layer is arranged in parallel and is formed by many wire electrodes, it is characterized in that: each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate and the second insulating substrate, the first insulating substrate and the second insulating substrate lay respectively at electrode layer both sides, and each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; On the first insulating substrate and the second insulating substrate, be also respectively equipped with wire electrode conductive strips, the first insulating substrate and the second insulating substrate polar filament conductive strips that power on are following structure:
From the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on odd-level insulating substrate, on each the first insulating substrate lower surface, even level insulating substrate, each the first insulating substrate upper surface is equipped with wire electrode conductive strips, and on odd-level insulating substrate, on each the second insulating substrate upper surface, even level insulating substrate, each the second insulating substrate lower surface is equipped with wire electrode conductive strips simultaneously; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode of each even level insulating substrate institute counter electrode there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode of each odd-level insulating substrate institute counter electrode there is identical polarity of electrode.
5. a low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers that are arranged in parallel, each electrode layer is arranged in parallel and is formed by many wire electrodes, it is characterized in that: each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate and the second insulating substrate, the first insulating substrate and the second insulating substrate lay respectively at electrode layer both sides, and each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; Have wire electrode conductive strips to be arranged on the first insulating substrate, the second insulating substrate, it is following structure that wire electrode conductive strips are distributed on the first insulating substrate and the second insulating substrate:
From the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on odd-level insulating substrate, each the first insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, simultaneously on even level insulating substrate, each the second insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, and the first insulating substrate polar filament conductive strips and the second insulating substrate polar filament conductive strips that power on that power on are positioned at homonymy; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode.
6. a low cost multiwire proportional counter electrod-array, comprise the upper and lower multiple electrode layers that are arranged in parallel, each electrode layer is arranged in parallel and is formed by many wire electrodes, it is characterized in that: each electrode layer carries accordingly and is fixed on a pair of insulating substrate, every a pair of insulating substrate is divided into the first insulating substrate and the second insulating substrate, the first insulating substrate and the second insulating substrate lay respectively at electrode layer both sides, and each the first insulating substrate is upper and lower stacked, and each the second insulating substrate is upper and lower stacked; Between the first insulating substrate and the second insulating substrate, interval is counter works district, with arbitrary, each wire electrode two ends on insulating substrate counter electrode layer is carried respectively and is fixed on the first insulating substrate, the second insulating substrate; Have wire electrode conductive strips to be arranged on the first insulating substrate, the second insulating substrate, it is following structure that wire electrode conductive strips are distributed on the first insulating substrate and the second insulating substrate:
From the bottom up multipair insulating substrate is divided in order to odd-level insulating substrate and even level insulating substrate, on even level insulating substrate, each the first insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, simultaneously on odd-level insulating substrate, each the second insulating substrate upper surface or lower surface are equipped with wire electrode conductive strips, and the first insulating substrate polar filament conductive strips and the second insulating substrate polar filament conductive strips that power on that power on are positioned at homonymy; By the wire electrode conductive strips serial or parallel connection on each the first insulating substrate, make each wire electrode on each even level insulating substrate institute counter electrode layer there is identical polarity of electrode; By the wire electrode conductive strips serial or parallel connection on each the second insulating substrate, make each wire electrode on each odd-level insulating substrate institute counter electrode layer there is identical polarity of electrode.
CN201320800261.2U 2013-12-06 2013-12-06 Low-cost multi-wire proportional counter electrode array Withdrawn - After Issue CN203688807U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103645492A (en) * 2013-12-06 2014-03-19 深圳市盛喜路科技有限公司 Low-cost multi-wire proportional counter electrode array and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103645492A (en) * 2013-12-06 2014-03-19 深圳市盛喜路科技有限公司 Low-cost multi-wire proportional counter electrode array and manufacturing method thereof
CN103645492B (en) * 2013-12-06 2015-11-18 深圳市盛喜路科技有限公司 A kind of Low-cost multi-wire proportional counter electrode array and preparation method thereof

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