CN203672482U - Ultrasonic amplitude measurement device based on constant force control - Google Patents
Ultrasonic amplitude measurement device based on constant force control Download PDFInfo
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- CN203672482U CN203672482U CN201320708296.3U CN201320708296U CN203672482U CN 203672482 U CN203672482 U CN 203672482U CN 201320708296 U CN201320708296 U CN 201320708296U CN 203672482 U CN203672482 U CN 203672482U
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Abstract
The utility model relates to the measurement of an ultrasonic amplitude in a process of ultrasonic machining, especially an ultrasonic amplitude measurement device based on constant force control. Through the Z-axis motion of a precise miniature three-dimensional platform, the combination of the precise miniature three-dimensional platform with a pressure sensor forms a closed-loop control system. The measurement of the ultrasonic amplitude is achieved through recording the coordinate difference between two Z-axis motions of the precise miniature three-dimensional platform under the conditions that no ultrasound acts on an ultrasonic vibration system or there is ultrasound acting on the ultrasonic vibration system. The requirement for environment noise interference is not high. Moreover, the device improves the precision of the precise miniature three-dimensional platform and the sampling frequency of the pressure sensor, thereby improving the precision of measurement. Theoretically, the precision can reach a nanometer level.
Description
Technical field
The utility model relates to the measurement to amplitude, especially a kind of ultrasonic amplitude measurement mechanism based on constant force control.
Background technology
Ultrasonic machining is to utilize the instrument of ultrasonic vibration, the impact, rubbing down, hydraulic shock and the consequent cavitation effect that in the liquid that has abrasive material or in dry grinding material, produce abrasive material are removed material, or apply in a certain direction ultrasonic vibration to instrument or workpiece and process, or the job operation of utilizing ultrasonic vibration that workpiece is mutually combined.Ultrasonic machining both do not relied on the electric conductivity of material, without macroscopical mechanicals efforts, there is no heat effect, can process high-aspect-ratio 3-D solid structure again, surface quality of workpieces and machining precision are all better, have determined that Ultrasonic machining technique has advantageous advantage aspect metal and hard brittle materia processing.
In Ultrasonic machining, in the situation that other conditions are constant, increase tool amplitude can improve the speed of Ultrasonic machining, but instrument end face amplitude not can infinitely strengthen.Therefore, make instrument end face do peak swing motion and just become a vital problem of boosting productivity.
The size of ultrasonic amplitude, can reflect the size of acoustical power output, and reflect the effect quality of generator, transducer, ultrasonic transformer and instrument each cascade link frequency and electricity coupling, material removing rate, surfaceness, tool wear etc. in process are had to material impact, thereby the measurement of amplitude is a major issue in ultrasonic machining device development and application.
The method that is suitable at present measuring amplitude mainly contains: physical observation method, optical method, electrical measuring method etc.
Physical observation method is mainly to utilize high frequency vibration characteristic, and vision retention effect measures, or measures amplitude by lever principle; Optical method belongs to eyes with non-contact method, utilize optical lever principle, reading microscope, optical interference principle, laser dopplers etc. are measured, contemporary optics measuring system has far exceeded the concept of that simple laser detecting apparatus plus signal treatment circuit in the past, the combination of light, mechanical, electrical and computer technology, the particularly application of the application of graph image technology, signal modulation technique, frequency modulation technology, feedback principle etc., making to measure and controlling has become a complete organism; Electrical measuring method belongs to contact method, converts the vibratory output of measurand to electric weight, and then power consumption testing tool is measured.A kind of method that by subsequent treatment module, the result of measuring is further analyzed and is processed is again one of method of current widespread use.
Physical observation method vibration measuring width, method is simple, but test time can add certain load to workpiece, affects test result, is only applicable to large amplitude rough measure; Optical method, is not subject to the interference of electromagnetic field, and measuring accuracy is high, is suitable for test specimen little to quality and that be difficult for sensor installation and makes non-cpntact measurement.In demarcating, use morely in precision measurement and sensor, vialog, but apparatus expensive is measured cost high; Electrical measuring method highly sensitive, frequency range and dynamically, the range of linearity is wide, is convenient to analyze and remote measurement, measuring accuracy is higher, but is subject to the interference of electromagnetic field, affect measuring accuracy, is the most extensive method of employing at present.
Summary of the invention
The purpose of this utility model is to consider the problems referred to above and a kind of ultrasonic amplitude measurement mechanism based on constant force control is provided.
For achieving the above object, the technical scheme that the utility model is taked is: a kind of ultrasonic amplitude measurement mechanism based on constant force control, comprises ultrasonic vibration processing unit (plant), pressure transducer, accurate micro-three-dimensional motion platform; The micro-three-dimensional motion platform of described precision top arranges pressure transducer, and described pressure transducer faces ultrasonic vibration processing unit (plant); Described pressure transducer is connected with computing machine by data acquisition system (DAS); The micro-three-dimensional motion platform of described precision is connected with computing machine by kinetic control system.
As the preferred implementation of the ultrasonic amplitude measurement mechanism based on constant force control described in the utility model, in the micro-three-dimensional motion platform of described precision, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron.
As the preferred implementation of the ultrasonic amplitude measurement mechanism based on constant force control described in the utility model, described ultrasonic vibration processing unit (plant) comprises vertical slipway, ultrasonic vibration system, ultrasonic-frequency power supply, chuck, tool heads, described tool heads is fixed on ultrasonic vibration system by chuck, ultrasonic vibration system is fixed on main shaft, main shaft is fixed on vertical slipway, described vertical slipway drive shaft moves up and down, and ultrasonic-frequency power supply is connected with ultrasonic vibration system.
As the preferred implementation of the ultrasonic amplitude measurement mechanism based on constant force control described in the utility model, described ultrasonic vibration processing unit (plant) comprises vertical slipway, main shaft, chuck, tool heads, ultrasonic vibration worktable, ultrasonic-frequency power supply, described tool heads is fixed on main shaft by chuck, main shaft is fixed on vertical slipway, described vertical slipway drive shaft moves up and down, described ultrasonic-frequency power supply is connected with ultrasonic vibration worktable, and described ultrasonic vibration worktable faces main shaft and is fixed on described pressure transducer.
As the preferred implementation of the ultrasonic amplitude measurement mechanism based on constant force control described in the utility model, described ultrasonic vibration processing unit (plant) is ultrasonic vibration processing unit (plant) or fine ultrasonic vibration processing unit (plant).
Use said apparatus to implement the method for measuring based on the ultrasonic amplitude of constant force control, comprise the following steps:
(1) desired value of the power value set pressure sensor showing in real time according to data acquisition system (DAS);
(2) drive ultrasonic vibration processing unit (plant) near pressure transducer;
(3) drive accurate micro-three-dimensional motion platform, with set speed in Z-direction convergence ultrasonic vibration system of processing, gather the measured value of pressure transducer end by data acquisition system (DAS), in the time that measured value reaches desired value, the automatic stop motion of Z axis, record Z axis coordinate Z1, then make accurate micro-three-dimensional motion platform move to initial position by kinetic control system;
(4) open ultrasonic-frequency power supply, make ultrasonic vibration processing unit (plant) do dither; Drive accurate micro-three-dimensional motion platform, with set speed in Z-direction convergence ultrasonic vibration system of processing, gather the measured value of pressure transducer end by data acquisition system (DAS), in the time that measured value reaches desired value, the automatic stop motion of Z axis, record Z axis coordinate Z2, then make accurate micro-three-dimensional motion platform and ultrasonic vibration processing unit (plant) move to initial position by kinetic control system;
(5) amplitude of calculating ultrasonic vibration processing unit (plant) is Z1-Z2, repeatedly measures to average and can obtain the amplitude of vibration processing device under certain power effect.
As the preferred implementation of the ultrasonic amplitude measuring method based on constant force control described above, in the micro-three-dimensional motion platform of described precision, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron.
As the preferred implementation of the ultrasonic amplitude measuring method based on constant force control described above, described ultrasonic vibration processing unit (plant) comprises vertical slipway, ultrasonic vibration system, main shaft, ultrasonic-frequency power supply, chuck, tool heads, described tool heads is fixed on ultrasonic vibration system by chuck, ultrasonic vibration system is fixed on main shaft, main shaft is fixed on vertical slipway, described vertical slipway drive shaft moves up and down, and ultrasonic-frequency power supply is connected with ultrasonic vibration system.
As the preferred implementation of the ultrasonic amplitude measuring method based on constant force control described above, described ultrasonic vibration processing unit (plant) comprises vertical slipway, main shaft, chuck, tool heads, ultrasonic vibration worktable, ultrasonic-frequency power supply, described tool heads is fixed on main shaft by chuck, main shaft is fixed on vertical slipway, described vertical slipway drive shaft moves up and down, described ultrasonic-frequency power supply is connected with ultrasonic vibration worktable, and described ultrasonic vibration worktable faces main shaft and is fixed on described pressure transducer.
As the preferred implementation of the ultrasonic amplitude measuring method based on constant force control described above, described ultrasonic vibration processing unit (plant) is ultrasonic vibration processing unit (plant) or fine ultrasonic vibration processing unit (plant).
Ultrasonic amplitude measurement mechanism based on constant force control described in the utility model, utilize accurate micro-three-dimensional motion platform Z axis motion to be combined with pressure transducer and form closed-loop control system, without ultrasonic with have ultrasonication under ultrasonic vibration system condition, realize the measurement to ultrasonic amplitude by the coordinate difference that records twice motion of accurate micro-three-dimensional motion platform Z axis, less demanding to ambient noise interference; And the precision and the pressure transducer sample frequency that improve accurate micro-three-dimensional motion platform can improve measuring accuracy, can be as accurate as in theory nanoscale.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of embodiment of ultrasonic vibration main shaft amplitude measurement described in the utility model.
Fig. 2 is the structural representation of the another kind of embodiment of ultrasonic vibration worktable amplitude measurement described in the utility model.
Fig. 3 is that ultrasonic amplitude described in the utility model is measured control interface.
Fig. 4 is the process flow diagram that ultrasonic amplitude described in the utility model is measured.
In figure, 1 is that accurate micro-three-dimensional motion platform, 2 is that pressure transducer, 3 is that tool heads, 4 is that chuck, 5 is that front match block, 6 is that piezoelectric ceramic piece, 7 is that rear match block, 8 is that pre-stressed bolt, 9 is that ultrasonic-frequency power supply, 10 is kinetic control system.
Embodiment
For the purpose of this utility model, technical scheme and advantage are better described, below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Embodiment 1
As Fig. 1, 3, shown in 4, a kind of ultrasonic vibration main shaft amplitude measuring apparatus based on constant force control, comprise vertical slipway (not shown in FIG.), main shaft, ultrasonic-frequency power supply 9, accurate micro-three-dimensional motion platform 1, pressure transducer 2, tool heads 3, chuck 4, front match block 5, piezoelectric ceramic piece 6, rear match block 7, pre-stressed bolt 8, described tool heads 3 is fixed on ultrasonic vibration system by chuck 4, ultrasonic vibration system is fixed on main shaft, main shaft is fixed on vertical slipway, described vertical slipway drive shaft moves up and down, at amplitude measurement initial period, because the stroke of the micro-three-dimensional motion platform 1 of precision is smaller, will be by vertical slipway drive shaft near pressure transducer 2.
Ultrasonic vibration system comprises that front match block 5, piezoelectric ceramic piece 6 form with rear match block 7.Whole ultrasonic vibration system is half wavelength, and ultrasonic vibration system is fixed on main shaft by the nodal section in front match block 5, and main shaft is fixed on vertical slipway, and tool heads 3 is fastened in front match block 5 by chuck 4.Tool heads 3 does not need on-line machining, does not need it is rotated with main shaft, as long as its end face is positioned at sensor horizontal section and can passes through mobile and pressure transducer plane contact yet.
When described pressure transducer 2 bears certain pressure when surface, can surperficial force value be shown at control interface edge by data acquisition system (DAS).
Ultrasonic-frequency power supply 9 is connected with ultrasonic vibration system, opens ultrasonic-frequency power supply 9, and ultrasonic vibration system can be made dither, thereby drives tool heads dither.
Described pressure transducer 2 faces ultrasonic vibration main shaft, if main shaft departs from pressure transducer 2, and can be by the position of the motor adjustment pressure transducer of the X/Y axle in the micro-three-dimensional motion platform of precision.
Described pressure transducer 2 is connected with computing machine by data acquisition system (DAS), by data acquisition system (DAS), the signal of pressure transducer output terminal is amplified, then by data collecting card, amplifying signal is carried out to high frequency collection, then in the control interface of computing machine, demonstrate measured value.
The micro-three-dimensional motion platform 1 of described precision is connected with computing machine by kinetic control system 10; In the micro-three-dimensional motion platform of described precision, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron, accurate micro-three-dimensional motion platform and vertical slipway are used in conjunction with at measurement initial period, when main shaft is during near pressure transducer 2, vertical slipway stop motion, accurate micro-three-dimensional motion platform continues motion, further measures.
In addition, as shown in Fig. 1,3,4, implement the ultrasonic amplitude measuring method based on constant force control, first measure equipment according to installing shown in Fig. 1, connect metering circuit, start constant force control system and open software control interface.Then according to desired value of the design of pressure showing in software interface, reset actuating speed and the coordinate of accurate micro-three-dimensional motion platform Z axis; Then drive the motion of accurate micro-three-dimensional motion platform and vertical slipway, make tool heads 3 in Fig. 1 near sensor 2 but do not contact, now completed the thick tool setting of measuring process; Drive accurate micro-three-dimensional motion platform Z axis to move upward by kinetic control system 10, gather the measured value of pressure transducer 2 ends by data acquisition system (DAS), from the control interface of Fig. 3, observe measured value, in the time that measured value is less than desired value, Z axis continues motion; In the time that measured value reaches desired value, the automatic stop motion of Z axis; Record Z axis coordinate Z1, then make accurate micro-three-dimensional motion platform move to initial position by kinetic control system 10; Open ultrasonic-frequency power supply 9 drive shaft vibrations, keep all control parameter constants, again drive accurate micro-three-dimensional platform Z axis to move upward, gather the measured value of pressure transducer 2 ends by data acquisition system (DAS), from the control interface of Fig. 3, observe measured value, in the time that measured value is less than desired value, Z axis continues motion; In the time that measured value reaches desired value, the automatic stop motion of Z axis, records Z axis coordinate Z2, then makes accurate micro-three-dimensional motion platform and motion of main shaft to initial position by kinetic control system 10; The amplitude that calculates ultrasonic vibration processing unit (plant) is A=Z1-Z2, repeatedly measures to average and can obtain the amplitude of ultrasonic vibration main shaft under certain power effect.
Embodiment 2
As shown in Figure 2,3, 4, a kind of ultrasonic vibration worktable amplitude measuring apparatus based on constant force control, comprise ultrasonic vibration system worktable, vertical slipway (not shown in FIG.), main shaft 4, ultrasonic-frequency power supply 9, accurate micro-three-dimensional motion platform 1, pressure transducer 2, tool heads 3, chuck, described tool heads 3 is fixed on main shaft 4 by chuck, main shaft 4 is fixed on vertical slipway, described vertical slipway drive shaft 4 moves up and down, and ultrasonic vibration worktable is fixed on pressure transducer.At amplitude measurement initial period, because the stroke of the micro-three-dimensional motion platform 1 of precision is smaller, be by vertical slipway drive shaft near pressure transducer 2.
Ultrasonic vibration system in ultrasonic vibration worktable comprises that front match block 5, piezoelectric ceramic piece 6 form with rear match block 7.Ultrasonic vibration worktable is arranged on pressure transducer 2.
When described pressure transducer 2 bears certain pressure when surface, can surperficial force value be shown at control interface edge by data acquisition system (DAS).
Ultrasonic-frequency power supply 9 is connected with ultrasonic vibration worktable, opens ultrasonic-frequency power supply 9, and ultrasonic-frequency power supply 9 drives ultrasonic vibration system dither, thereby drives worktable can make dither.
The described ultrasonic vibration worktable being positioned on pressure transducer 2 faces main shaft, if main shaft departs from ultrasonic vibration worktable, and can be by the position of the motor adjustment ultrasonic vibration worktable of the X/Y axle in the micro-three-dimensional motion platform of precision.
Described pressure transducer 2 is connected with computing machine by data acquisition system (DAS), by data acquisition system (DAS), the signal of pressure transducer output terminal is amplified, then by data collecting card, amplifying signal is carried out to high frequency collection, then in the control interface of computing machine, demonstrate measured value.
The micro-three-dimensional motion platform 1 of described precision is connected with computing machine by kinetic control system 10; In the micro-three-dimensional motion platform of described precision, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron, accurate micro-three-dimensional motion platform and vertical slipway are used in conjunction with at measurement initial period, when main shaft is during near ultrasonic vibration worktable, vertical slipway stop motion, accurate micro-three-dimensional motion platform continues motion, further measures.
In addition, as shown in Figure 2,3, 4, implement the ultrasonic vibration worktable vibration amplitude measurement method based on constant force control, first measure equipment according to installing shown in Fig. 2, connect metering circuit, start constant force control system and open software control interface.Then according to desired value of the design of pressure showing in software interface, reset actuating speed and the coordinate of accurate micro-three-dimensional motion platform Z axis; Then drive the motion of accurate micro-three-dimensional motion platform and vertical slipway, make tool heads 3 in Fig. 2 near worktable but do not contact, now completed the thick tool setting of measuring process; Drive accurate micro-three-dimensional motion platform Z axis to move upward by kinetic control system 10, gather the measured value of pressure transducer 2 ends by data acquisition system (DAS), from the control interface of Fig. 3, observe measured value, in the time that measured value is less than desired value, Z axis continues motion; In the time that measured value reaches desired value, the automatic stop motion of Z axis; Record Z axis coordinate Z1, then make accurate micro-three-dimensional motion platform move to initial position by kinetic control system 10; Open ultrasonic-frequency power supply 9 and drive worktable vibration, keep all control parameter constants, again drive accurate micro-three-dimensional platform Z axis to move upward, gather the measured value of pressure transducer 2 ends by data acquisition system (DAS), from the control interface of Fig. 3, observe measured value, in the time that measured value is less than desired value, Z axis continues motion; In the time that measured value reaches desired value, the automatic stop motion of Z axis, records Z axis coordinate Z2, then makes accurate micro-three-dimensional motion platform and working table movement to initial position by kinetic control system 10; The amplitude that calculates ultrasonic vibration processing unit (plant) is A=Z1-Z2, repeatedly measures to average and can obtain the amplitude of ultrasonic vibration worktable under certain power effect.
The utility model utilizes accurate micro-three-dimensional motion platform Z axis motion to be combined with pressure transducer and forms closed-loop control system, without ultrasonic with have ultrasonication under ultrasonic vibration system condition, realize the measurement to ultrasonic amplitude by the coordinate difference that records twice motion of accurate micro-three-dimensional motion platform Z axis, less demanding to ambient noise interference; And the precision and the pressure transducer sample frequency that improve accurate micro-three-dimensional motion platform can improve measuring accuracy, can be as accurate as in theory nanoscale; Can measure the amplitude of ultrasonic machining device, also can measure micro-ultrasonic amplitude.
Last institute should be noted that; above embodiment is the restriction in order to the technical solution of the utility model to be described but not to the utility model protection domain only; although the utility model is explained in detail with reference to preferred embodiment; those of ordinary skill in the art is to be understood that; can modify or be equal to replacement the technical solution of the utility model, and not depart from essence and the scope of technical solutions of the utility model.
Claims (5)
1. the ultrasonic amplitude measurement mechanism based on constant force control, comprises ultrasonic vibration processing unit (plant), it is characterized in that, also comprises pressure transducer, accurate micro-three-dimensional motion platform;
The micro-three-dimensional motion platform of described precision top arranges pressure transducer, and described pressure transducer faces ultrasonic vibration processing unit (plant);
Described pressure transducer is connected with computing machine by data acquisition system (DAS);
The micro-three-dimensional motion platform of described precision is connected with computing machine by kinetic control system.
2. the ultrasonic amplitude measurement mechanism based on constant force control as claimed in claim 1, is characterized in that, in the micro-three-dimensional motion platform of described precision, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron.
3. the ultrasonic amplitude measurement mechanism based on constant force control as claimed in claim 1, it is characterized in that, described ultrasonic vibration processing unit (plant) comprises vertical slipway, ultrasonic vibration system, main shaft, ultrasonic-frequency power supply, chuck, tool heads, described tool heads is fixed on ultrasonic vibration system by chuck, ultrasonic vibration system is fixed on main shaft, main shaft is fixed on vertical slipway, and described vertical slipway drive shaft moves up and down, and ultrasonic-frequency power supply is connected with ultrasonic vibration system.
4. the ultrasonic amplitude measurement mechanism based on constant force control as claimed in claim 1, it is characterized in that, described ultrasonic vibration processing unit (plant) comprises vertical slipway, main shaft, chuck, tool heads, ultrasonic vibration worktable, ultrasonic-frequency power supply, described tool heads is fixed on main shaft by chuck, main shaft is fixed on vertical slipway, described vertical slipway drive shaft moves up and down, described ultrasonic-frequency power supply is connected with ultrasonic vibration worktable, and described ultrasonic vibration worktable faces main shaft and is fixed on described pressure transducer.
5. the ultrasonic amplitude measurement mechanism based on constant force control as claimed in claim 1, is characterized in that, described ultrasonic vibration processing unit (plant) is ultrasonic vibration processing unit (plant) or fine ultrasonic vibration processing unit (plant).
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| CN201320708296.3U CN203672482U (en) | 2013-11-11 | 2013-11-11 | Ultrasonic amplitude measurement device based on constant force control |
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| CN201320708296.3U CN203672482U (en) | 2013-11-11 | 2013-11-11 | Ultrasonic amplitude measurement device based on constant force control |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557931A (en) * | 2013-11-11 | 2014-02-05 | 广东工业大学 | Ultrasound amplitude measuring device and method based on constant force control |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103557931A (en) * | 2013-11-11 | 2014-02-05 | 广东工业大学 | Ultrasound amplitude measuring device and method based on constant force control |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140625 Termination date: 20171111 |
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| CF01 | Termination of patent right due to non-payment of annual fee |