CN105806271B - A kind of devices and methods therefor of quick adjustment tool heads and the workpiece depth of parallelism - Google Patents
A kind of devices and methods therefor of quick adjustment tool heads and the workpiece depth of parallelism Download PDFInfo
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- CN105806271B CN105806271B CN201610318445.3A CN201610318445A CN105806271B CN 105806271 B CN105806271 B CN 105806271B CN 201610318445 A CN201610318445 A CN 201610318445A CN 105806271 B CN105806271 B CN 105806271B
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- workbench
- pedestal
- supporting rod
- leveling
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
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- General Physics & Mathematics (AREA)
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Abstract
The present invention relates to a kind of devices and methods therefors of quick adjustment tool heads and the workpiece depth of parallelism.The quick level adjusting device includes a pedestal, and one is located at the workbench above the pedestal, and one makes the table vertical in the pilot unit of the base motions and a fastening unit for fixing the workbench；Equally distributed elastic material is equipped between the pedestal and the workbench；Center between the pedestal and the workbench is equipped with supporting rod, and the workbench can in a certain range be swung using the upper end of the supporting rod as fulcrum.Stationary work-table position first when leveling passes through impact paper experiment and determines spatial relation between tool heads and workbench；Then adjustment tool heads horizontal position, moves down tool ultrasonic vibration tool head, is the position of leveling positioned at the position that inverting occurs in the pointer of the amesdial of work edge of table.The present invention is of low cost, simple operation, efficient, leveling precision is high.
Description
Technical field
The invention belongs to fine Ultrasonic machining technology fields, and in particular to a kind of quickly adjustment tool heads and the workpiece depth of parallelism
Devices and methods therefor.
Background technology
Fine Ultrasonic machining principle is that the abrasive grain in lapping liquid is driven to impact workpiece surface by the ultrasonic vibration of tool heads,
To process required micro-structure.Tool heads are minimum to macroscopical active force of workpiece and heat affecting and workpiece is not by material
Whether conductive limitation, which is widely used in the processing of various hard brittle materials.In order to improve processing efficiency, Ultrasonic machining work
The size of tool head is gradually expanded, and ensures that tool heads problem parallel with workpiece seems more and more prominent before processing.If the depth of parallelism
Difference will seriously affect the machining accuracy of workpiece surface, especially when the gap between tool heads and workpiece is more than grit size
The case where can not processing, will occur in (generally 3-5 μm).
Existing leveling mode be by multiple impact paper pressure testing test, finely tune workbench height come implementation tool head and
The depth of parallelism is gradually reduced between workpiece, and leveling process takes, precision is low, has seriously affected the efficiency of Ultrasonic machining technique.It adopts
With present commercialized sensor (such as line scanning laser and touch sensor), coordinate automatic electric leveling worktable, realizes
For precision in 3 μm of leveling precision below, equipment is extremely complex, and price is very expensive.
At this stage, it is investigated by a large amount of domestic and foreign literature, there are no appearance to solve the levelling problems scheme well, can
Row scheme mainly has following three：
(1) impact paper+precision X/Y angular displacement platforms
Specific implementation process：Workbench is mounted on X/Y angular displacement platforms, is tested by a large amount of impact paper pressure testing, hand
The height of dynamic fine tuning table surface, gradually approaches approximate parallel position；
Advantage：Inexpensively, easy to operate, online leveling may be implemented.
Disadvantage：It takes very much, efficiency is low, low precision.
(2) tangent displacement sensor+electronic self-raising platform
Specific implementation process：Workbench is placed on electronic self-raising platform, multiple displacement sensors is bound into 2 groups, often
Group at least 3 sensors, one group of spatial position for being used for tools for measurement head plane, another group is used for measuring table plane
The data of 2 groups of measurements are fitted two planes, and the instruction of correlation plane displacement leveling are exported by algorithm by spatial position
To following electronic self-raising platform motor, the lifting implementation tool head and work of workbench different location are accurately controlled by motor
Leveling process between part.
Advantage：Leveling process may be implemented automatically.
Disadvantage：Structure is extremely complex, and development difficulty is big, and to realize leveling precision 3 μm of equipment quotations below very
Expensive (quotation of investigation is more than 300,000 yuan)；In addition, during sensor use, it is necessary to tool heads and workbench are removed, with
It generates enough spaces and realizes that sensor measurement, collected two plane spaces position data and two when being moved back to operating position are flat
Space of planes position data cannot achieve online leveling it is difficult to ensure that high-precision consistency.
(3) line surface sweeping laser sensor+electronic self-raising platform
Specific implementation process：Tool heads are moved to the position that will be contacted with workbench first, by along workbench week
To the gap of three line scanning laser sensor measurement tool heads and three different locations of table plane of installation, and in real time will
Collected data input computer, and by algorithm the instruction output of correlation plane displacement leveling to following electronic automatic
Lifting platform motor accurately controls the leveling between the lifting implementation tool head of workbench different location and workpiece by motor
Journey.
Advantage：Leveling process may be implemented automatically, online leveling.
Disadvantage：Structure is extremely complex, and development difficulty is big, and to realize leveling precision on 3 μm of transducer market below
Do not occur temporarily, precision is offered in 10 microns of the whole of sensor up to 500,000 yuan or more.
In order to realize that the industrialization of fine Ultrasonic machining technology, urgent need will find a kind of quick, easy, cheap, high-precision
(<3 μm) levelling device and method.
Invention content
The present invention, can in view of the above-mentioned problems, provide a kind of device of quick adjustment Ultrasonic probe and the workpiece depth of parallelism
Realize quick, easy, cheap, high-precision leveling.
The technical solution adopted by the present invention is as follows：
A kind of device of quick adjustment tool heads and the workpiece depth of parallelism, including a pedestal, one is located above the pedestal
Workbench, one makes the table vertical in the pilot unit of the base motions and one for fixing the workbench
Fastening unit；It is equipped with equally distributed elastic material between the pedestal and the workbench, up and down the two of the elastic material
End is separately connected the pedestal and the workbench；Center between the pedestal and the workbench is equipped with supporting rod,
The lower end of the supporting rod is fixedly connected with the pedestal, and the upper end of the supporting rod is contacted with the workbench, the contact
The workbench is swung in a certain range using the upper end of the supporting rod as fulcrum.
Further, the pilot unit is the guiding axis vertical with the pedestal, and the workbench is equipped with through-hole, institute
The lower end for stating guiding axis is fixedly connected with the pedestal, and the upper end of the guiding axis passes through the through-hole on the workbench；It is described
Fastening unit is set to the through hole.
Further, the pedestal be equipped with through-hole corresponding with the guiding axis and the supporting rod, the guiding axis and
The lower end of the supporting rod is inserted into the respective through hole of the pedestal, and is threadably secured connection.
Further, the quantity of the guiding axis is at least three, between the pedestal and the workbench circumferentially
It is uniformly distributed.
Further, the fastening unit includes clamp lever and clamping auxiliary member；The clamping auxiliary member includes work
Platform coupling part, outer diameter are equal to the internal diameter of workbench through-hole；The clamping auxiliary member also includes through-hole, and internal diameter, which is slightly larger than, leads
To the diameter of axis, so that workbench can be swung in a certain range during leveling；The clamp lever connects the folder
Tight auxiliary member realizes clamping and release function by swing handle.
Further, there is the structure that raises up, the lower surface of the workbench to be equipped with and institute on the top of the supporting rod
State the groove for the structure matching that raises up；Or the lower surface of the workbench has downwardly convex structure, the supporting rod
Top is equipped with the groove with the downwardly convex structure matching.
Further, the supporting rod is mushroom supporting rod.
Further, the elastic material is spring, and the quantity of the spring is at least three.
A method of it quickly adjusting tool heads and the workpiece depth of parallelism using above-mentioned apparatus, includes the following steps：
1) fastening unit is unclamped, the support force of workbench and supporting rod, the Spring balanced of elastic material are made；
2) by fastening unit stationary work-table position, tool heads are moved down, and are tested really by an impact paper pressure testing
Determine the spatial position of workbench and tool heads；
3) according to impact paper as a result, judging whether to need to adjust tool head position, midpoint is located on final realization workbench
The lower section of tool head plane；
4) fastening unit is unclamped, by the mesa edge of the contact workbench of amesdial, ensures that workbench being capable of basis
The stressing conditions automatic adjusting position of elastic material；
5) tool heads are moved down, and observe the pointer of amesdial, when the point for pointer reversion occur is leveling position；
6) by fastening unit stationary work-table position, i.e., fixed leveling position.
Further, in step 3), if according to impact paper result judgement be in cannot achieve self-leveling position,
Tool heads are directly then moved to symmetric position of the position relative to table core point, that is, automatic leveling can be realized by reaching
Position.
With existing " impact paper+precision X/Y angular displacements platform " technology, " tangent displacement sensor+electronic automatic lifting
Platform " technology, " line surface sweeping laser sensor+electronic self-raising platform " technology are compared, and the present invention has cheap, easy to operate, high
Effect, semi-automatic, precision is high, the advantages that online leveling may be implemented.Theoretically, it may be implemented certainly during tool heads push
The region of dynamic leveling includes the region of half workbench, can tool heads be directly moved to original position in actual mechanical process
Near the symmetric position of (can not self-leveling position) relative to table core point (can be with self-leveling position).
Description of the drawings
Fig. 1 is the sectional view of quick level adjusting device.Wherein：1- mushroom supporting rods；2- screws 1；3- springs；4- screws 2；
5- pedestals；6- workbench；7- clamp levers；8- clamps auxiliary member；9- guiding axis.
Fig. 2 is the explosive view of quick level adjusting device.
Fig. 3 be can not self-leveling structural schematic diagram, wherein (a) be initial leveling figure；(b) it is the trace of impact paper；
(c) it is the position in the plane center of circle and mold core bottom surface.
Fig. 4 is can be with self-leveling structural schematic diagram, wherein (a) is initial leveling figure；(b) it is the trace of impact paper；
(c) it is the position in the plane center of circle and mold core bottom surface.
Fig. 5 is theoretically can be with automatic leveling region A+B schematic diagrames, wherein (a) is three-dimensional leveling view；(b) it is adjustable
Flat area schematic.
Fig. 6 is the schematic diagram of the different location of guiding axis.
Fig. 7 is the schematic diagram of the supporting rod way of contact different from workbench.
Specific implementation mode
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below by specific embodiment and
Attached drawing, the present invention will be further described.
The present embodiment provides a kind of device of quick adjustment Ultrasonic probe and the workpiece depth of parallelism, Fig. 1 and Fig. 2 are respectively to be somebody's turn to do
The sectional view and explosive view of device, it includes 5, four guiding axis 9 being fixedly connected vertical with pedestal of pedestal, workbench 6, folders
Tight handle 7 and clamping auxiliary member 8, four springs 3 being placed between workbench 6 and pedestal 5.
1) pedestal described in includes：
Base body；
It is arranged in circumferentially equally distributed 4 through-holes of base body, for connecting guiding axis；
The through-hole of the heart in the base is set for connecting mushroom supporting rod；
Base upper surface axially fixation of equally distributed four boss for spring；
The lower surface of the pedestal is parallel with upper surface；
The inner surface of the through-hole and the lower surface of pedestal are vertical.
2) guiding axis described in includes：
Pedestal coupling part positioned at guiding axis lower end, is inserted directly into the through-hole of pedestal；
Fixing screwed hole and guiding axis positioned at guiding axis lower end be concentric, coaxial arrangement, and by screw by itself and pedestal
It is fixed；
Guiding axis stretches out the diameter of pedestal more than the diameter in inserted base (diameter is equal to the internal diameter of base plate through holes)；
The side of the pedestal interconnecting piece and the plane perpendicular of guiding axis, ensure that the verticality of guiding axis and pedestal；
The quantity of the guiding axis is 4.
3) the clamping auxiliary member described in includes：
Workbench coupling part, the segment outer radius are equal to the internal diameter of workbench through-hole；
It clamps auxiliary member and contains through-hole, and internal diameter is slightly larger than the diameter of guiding axis, to ensure to may be implemented during leveling
The swing of workbench in a certain range；
The cylindrical structure side clamped inside the bottom surface and its insertion workbench that auxiliary member is connect with workbench is vertical；
The upper surface of workbench is in close contact the lower surface for clamping partial cylinder on auxiliary member；
4) clamp lever described in includes：
Clamp lever ontology, handle connection clamp auxiliary member, can be arranged ball in the clamping auxiliary member, swing handle,
Ball can be made to compress guiding axis, realize Quick-clamped and release function.
5) the mushroom supporting rod described in includes：
Pedestal coupling part positioned at supporting rod lower end, is inserted directly into the through-hole of base center；
, coaxial arrangement concentric positioned at the fixing screwed hole of supporting rod lower end and the through-hole of base center, and will by screw
Itself and pedestal are fixed；
The diameter of supporting rod stretching base portion is more than the diameter in inserted base, and (diameter is equal to the interior of base plate through holes
Diameter)；
The plane perpendicular of the side and supporting rod of the supporting rod pedestal interconnecting piece ensure that the vertical of supporting rod and pedestal
Degree；
Groove match on supporting rod at the top of the mushroom of part with workbench ensures that workbench can only during leveling
It is rotated along the center of circle of mushroom pattern.
6) workbench bag described in contains：
Workbench body；
Diameter of a circle keeps one outside 4 through-holes being arranged in workbench body, aperture diameter and clamping auxiliary member lower end
It causes；
Matching at the top of fluted and supporting rod top mushroom at the central lower surface of workbench；
Circumferentially fixation of equally distributed four boss for spring of the lower surface of workbench.
7) number of springs described in is 4.The effect of spring is as follows：
A) it plus after spring, is equivalent to and increases damping to the leveling process of entire workbench, increase the steady of leveling process
It is qualitative, last leveling position can be preferably determined with amesdial；
B) plus after spring, spring contributes in tool heads folding process to realize faster leveling, so that leveling
Journey is more convenient.
The method that explanation carries out leveling using above-mentioned quick level adjusting device below, key step include：
Step 1 unclamps clamp lever, and workbench is made to return to gravity, the elastic force of spring and mushroom they sup-port power
The position of three force balance；
Step 2 tightens clamp lever, and stationary work-table position moves down tool heads, and real by an impact paper pressure testing
Test the spatial position of determining workbench and tool heads；
Step 3, according to impact paper as a result, judge whether to need to adjust tool head position, it is final to realize midpoint on workbench
Positioned at the lower section of tool head plane；
Step 4 unclamps clamp lever, by the mesa edge of the contact workbench of amesdial, ensures that workbench can be with
According to the stressing conditions automatic adjusting position of spring；
Step 5 moves down tool heads, and observes the pointer of amesdial, when the point for pointer reversion occur is leveling position；
Step 6 tightens clamp lever, fixed leveling position, you can start the processing of ultrasonic vibration.
Fig. 3 be can not self-leveling structural schematic diagram, wherein (a) be initial leveling figure；(b) it is the trace of impact paper；
(c) it is the position in the plane center of circle and mold core bottom surface.In this case, table core point is located above tool heads plane, under
Automatic leveling can not be realized during moving tool heads according to the stressing conditions of spring.
Fig. 4 is can be with self-leveling structural schematic diagram, wherein (a) is initial leveling figure；(b) it is the trace of impact paper；
(c) it is the position in the plane center of circle and mold core bottom surface.In this case, table core point is located at below tool heads plane, under
Automatic leveling can be realized during moving tool heads according to the stressing conditions of spring.
Fig. 5 is theoretically can be with automatic leveling region A+B schematic diagrames, wherein (a) is three-dimensional leveling view；(b) it is adjustable
Flat area schematic.In the case of two plane injustice, an intersection is certainly existed between two plane of tool heads and workbench, such as
(a) shown in figure, if judging that the position cannot achieve automatic leveling according to impact paper result, tool heads can be moved and made
The position of intersection bypasses table top center position, and tool heads reach and self-leveling position may be implemented.Theoretically, levelling
Region accounts for the half of work top, such as the regions A+B in (b) figure.In actual mechanical process, directly tool heads can be moved to
It original position (can not self-leveling position) (can self-leveling position near the symmetric position relative to table core point
It sets).
From the above description, it can be seen that the leveling method of " new construction+amesdial " proposed by the present invention, has cheap, operation
Simply, efficiently, semi-automatic, precision is high, the advantages that online leveling may be implemented, and demonstrated by finite element emulation software
The validity of the leveling method.
The preferred embodiment of the present invention is explained above, but the present invention is not limited in the above embodiment, example
Following embodiment can also such as be used：
1) pilot unit：Guiding axis in preferred above-described embodiment of pilot unit of the present invention, can also use it in addition
Its applicable guide frame.When using guiding axis, the quantity of guiding axis can also be other in addition to four in above-described embodiment
Quantity, is evenly arranged between workbench and pedestal by theoretically at least three.The position of guiding axis is also not necessarily limited to above-mentioned
Embodiment, as shown in fig. 6, in wherein (a) figure, that is, Fig. 1, Fig. 2 guiding axis position, be embodiment other, can also be located at
The marginal position etc. of workbench 6 shown in (b) figure in Fig. 6.In addition guiding axis is also not necessarily limited to cylinder, can also be prism etc.
Other shapes.
2) elastic material：The spring in the preferred above-described embodiment of elastic material between workbench and pedestal, also may be used in addition
To be replaced using other elastic materials, as long as can play and effect as spring-like.When using spring, spring can position
, can also be located elsewhere between guiding axis and mushroom supporting rod, for example it is sleeved on the outside of guiding axis.Spring pocket is being led
To axis outside when, then can rely on guiding axis fixed spring, and no longer need shown in FIG. 1 convex for fixed spring both ends
Platform.The quantity of spring can also be other quantity in addition to four in above-described embodiment, theoretically at least three, work
It is evenly arranged between platform and pedestal.
3) supporting rod：Above-described embodiment can also use in other shapes, such as Fig. 7 using mushroom supporting rod
Shown in the way of contact, as long as workbench is enable to be swung in a certain range using the upper end of supporting rod as fulcrum.
4) connection type of guiding axis, supporting rod and pedestal：In addition to using threaded connections such as screw/screw rods, can also be
It is other to be fixedly connected with mode, such as guiding axis, supporting rod and pedestal integrated molding.But this mode needs to make mold, cost
It is higher.
5) amesdial：Cost can be saved using amesdial, in actual use, as long as positional accuracy measurement reaches 1 μm
Measurer can use.
The above embodiments are merely illustrative of the technical solutions of the present invention rather than is limited, the ordinary skill of this field
Personnel can be modified or replaced equivalently technical scheme of the present invention, without departing from the spirit and scope of the present invention, this
The protection domain of invention should be subject to described in claims.
Claims (10)
1. a kind of device of quick adjustment tool heads and the workpiece depth of parallelism, which is characterized in that including a pedestal, one is located at the bottom
The workbench of seat top, one makes the table vertical in the pilot unit of the base motions and one for described in fixation
The fastening unit of workbench；Equally distributed elastic material, the elastic material are equipped between the pedestal and the workbench
Upper and lower ends be separately connected the pedestal and the workbench；Center between the pedestal and the workbench is equipped with
Supporting rod, the lower end of the supporting rod are fixedly connected with the pedestal, and the upper end of the supporting rod is contacted with the workbench, institute
Stating contact enables the workbench to be swung in a certain range using the upper end of the supporting rod as fulcrum.
2. device as described in claim 1, it is characterised in that：The pilot unit is the guiding axis vertical with the pedestal,
The workbench is equipped with through-hole, and the lower end of the guiding axis is fixedly connected with the pedestal, and the upper end of the guiding axis passes through
Through-hole on the workbench；The fastening unit is set to the through hole.
3. device as claimed in claim 2, it is characterised in that：The pedestal is equipped with and the guiding axis and the supporting rod pair
The lower end of the through-hole answered, the guiding axis and the supporting rod is inserted into the respective through hole of the pedestal, and is threadably secured
Connection.
4. device as claimed in claim 2, it is characterised in that：The quantity of the guiding axis is at least three, in the pedestal
It is uniformly distributed circumferentially between the workbench.
5. device as claimed in claim 2, it is characterised in that：The fastening unit includes clamp lever and clamping auxiliary member；
The clamping auxiliary member includes workbench coupling part, and outer diameter is equal to the internal diameter of workbench through-hole；The clamping auxiliary member is also
Including through-hole, internal diameter is slightly larger than the diameter of guiding axis, so that workbench can be swung in a certain range during leveling；
The clamp lever connects the clamping auxiliary member, and clamping and release function are realized by swing handle.
6. device as described in claim 1, it is characterised in that：The top of the supporting rod has the structure that raises up, described
The lower surface of workbench is equipped with the groove with the structure matching that raises up；Or the lower surface of the workbench has downwards
Bulge-structure, the top of the supporting rod are equipped with the groove with the downwardly convex structure matching.
7. device as claimed in claim 6, it is characterised in that：The supporting rod is mushroom supporting rod.
8. device as described in claim 1, it is characterised in that：The elastic material is spring, and the quantity of the spring is at least
It is three.
9. a kind of method quickly adjusting tool heads and the workpiece depth of parallelism using claim 1 described device, which is characterized in that packet
Include following steps：
1) fastening unit is unclamped, the support force of workbench and supporting rod, the Spring balanced of elastic material are made；
2) by fastening unit stationary work-table position, tool heads are moved down, and is tested by impact paper pressure testing and determines workbench
With the spatial position of tool heads；
3) according to impact paper as a result, judging whether to need to adjust tool head position, midpoint is located at tool on final realization workbench
The lower section of head plane；
4) fastening unit is unclamped, an amesdial is taken, by the mesa edge of the contact workbench of amesdial, ensures workbench
It can be according to the stressing conditions automatic adjusting position of elastic material；
5) tool heads are moved down, and observe the pointer of amesdial, when the point for pointer reversion occur is leveling position；
6) by fastening unit stationary work-table position, i.e., fixed leveling position.
10. method as claimed in claim 9, it is characterised in that：In step 3), if according to impact paper result judgement be in
Self-leveling position is cannot achieve, then tool heads are directly moved to symmetrical position of the position relative to table core point
It sets, that is, self-leveling position can be realized by reaching.
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| CN106239275B (en) * | 2016-08-26 | 2018-09-18 | 苏州含光微纳科技有限公司 | A kind of Simple fast automatic levelling device and method for Ultrasonic machining platform |
| CN108162222B (en) * | 2016-12-08 | 2020-01-10 | 有研半导体材料有限公司 | Device for aligning cutting end faces of large-diameter single crystals |
| SG11201907017QA (en) * | 2016-12-30 | 2019-09-27 | Shanghai Dianba New Energy Technology Co Ltd | Movable battery replacing platform and quick replacing system |
| CN107255589A (en) * | 2017-06-16 | 2017-10-17 | 爱佩仪中测（成都）精密仪器有限公司 | The plane adjustment mechanism for being easy to workpiece hardness to detect |
| CN108007408B (en) * | 2017-12-28 | 2023-10-27 | 广西玉柴机器股份有限公司 | Automatic injector height measuring device of adjustment |
| CN108772723A (en) * | 2018-06-07 | 2018-11-09 | 肇庆市高新区晓靖科技有限公司 | Positioning device for oil cylinder eccentric orfice |
| CN111765346A (en) * | 2020-07-29 | 2020-10-13 | 湖北省地震局(中国地震局地震研究所) | Leveling device and GNSS equipment that constitutes thereof |
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| CN103851985A (en) * | 2012-11-28 | 2014-06-11 | 北京南口轨道交通机械有限责任公司 | Leveling tool for measuring wind power gear case flexible pin cone ring |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
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| JP2002116016A (en) * | 2000-10-05 | 2002-04-19 | Ricoh Co Ltd | Apparatus and method for detection of position |
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| CN103851985A (en) * | 2012-11-28 | 2014-06-11 | 北京南口轨道交通机械有限责任公司 | Leveling tool for measuring wind power gear case flexible pin cone ring |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
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