CN203639077U - Semi-automatic assembling and disassembling device for vertical oxidation furnace body - Google Patents
Semi-automatic assembling and disassembling device for vertical oxidation furnace body Download PDFInfo
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- CN203639077U CN203639077U CN201320892447.5U CN201320892447U CN203639077U CN 203639077 U CN203639077 U CN 203639077U CN 201320892447 U CN201320892447 U CN 201320892447U CN 203639077 U CN203639077 U CN 203639077U
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- 230000033001 locomotion Effects 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 26
- 230000003028 elevating effect Effects 0.000 claims description 24
- 235000004443 Ricinus communis Nutrition 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims description 8
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- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 6
- 210000002683 foot Anatomy 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 240000000528 Ricinus communis Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Abstract
The utility model discloses an assembling and disassembling device for a vertical oxidation furnace body, and particularly relates to a semi-automatic assembling and disassembling device for the vertical oxidation furnace body. The semi-automatic assembling and disassembling device comprises a body frame, a transporting locating mechanism arranged at the bottom of the body frame, a driving transmission mechanism, two lifting chain wheels, two lifting chains and a bearing mechanism. The two lifting chain wheels are driven by the driving transmission mechanism to rotate, and the two lifting chains are connected to the lifting chain wheels respectively in a wound mode. The body frame comprises two vertically-arranged stand columns. The bearing mechanism comprises a lifting supporting plate and a forked plate, and the two sides of the lifting supporting plate are fixedly connected with one ends of the lifting chains respectively, are in sliding connection with the stand columns, and ascend or descend along the stand columns along with the motion of the lifting chains. The forked plate is provided with a vertical part and a horizontal part, and the horizontal part is used for bearing the vertical oxidation furnace body. The vertical part is buckled on the lifting supporting plate, and is driven by the motion of the lifting supporting plate to ascend or descend. The assembling and disassembling device for the vertical oxidation furnace body integrates the functions of transportation and lifting, and can conveniently complete the motion of assembling and disassembling the furnace body.
Description
Technical field
The utility model relates to silicon chip processing technique field, particularly a kind of vertical oxidation furnace body S. A. handler.
Background technology
Quartz conductor diffusion facilities is the important technological equipment that integrated circuit is manufactured, it is a kind of energy long time continuous working that requires, there is the automatic control device of excellent temperature-controlled precision and good reliability, stability, be applicable to the technique such as various oxidations, annealing and film growth in ic manufacturing process.The reasons such as at present vertical oxidation equipment is installed initial stage or the time of maintenance at equipment, and the installation or removal of body of heater are mostly because installing space is limited, and body of heater weight is large spend more manpower and time.Conventionally equipment vendors are mostly with the corresponding body of heater handling of equipment configuration annex, in order to the installation or removal of auxiliary body of heater.Mostly structure of existing body of heater handling annex, function is relatively simple, realize adjustment action less, on-the-spot peace is adjusted still needs more personnel jointly to assist just can complete the installation or removal of body of heater, and part vendor equipment is conventionally used fork truck or other equipment first body of heater to be placed on handling annex or in the time of dismounting and need to fork truck or other equipment, body of heater be taken off from handling annex again before body of heater is installed, body of heater handling are attached can not complete all installing/dismounting actions by handling annex is disposable, also need be by other equipment, equally still, need to spend the more muscle power of field staff and time.
Therefore, be necessary to propose a kind of body of heater handler that can simplify the action of vertical oxidation furnace body installing/dismounting.
Utility model content
Main purpose of the present utility model aims to provide a kind of vertical oxidation furnace body S. A. handler of structure optimization, simplifies to realize the action of installation or removal body of heater.
For reaching above-mentioned purpose, the utility model provides a kind of handler of vertical oxidation furnace body, comprises main body frame, transportation detent mechanism, drive transmission device, lifting sprocket wheel, elevating chain and load carrier.Main body frame comprises two vertically disposed columns; Transportation detent mechanism is located at described main body frame bottom, so that described main body frame parallel motion or static location; Drive transmission device is arranged at the top of described main body frame; Two lifting sprocket wheels are driven and are rotated by described drive transmission device; Article two, elevating chain is wire-wrapped in respectively described drive sprocket; Load carrier comprises lifting supporting plate and fork plate, described lifting supporting plate both sides be fixedly connected with one end of described two elevating chains respectively and with described column sliding block joint, rise or decline along described column with the motion with described elevating chain; Described fork plate has vertical component and horizontal component, and described horizontal component is used for carrying described vertical oxidation furnace body; Described vertical component is fastened on described lifting supporting plate, is driven and is risen or decline by the motion of described lifting supporting plate.
Preferably, described drive transmission device comprises driver element and driver element, and described driver element comprises drive sprocket, driving chain, driving chain wheel and transmission shaft; Described drive sprocket is installed on the output shaft of described driver element, is connected with described driving chain wheel by described driving chain; Described driving chain wheel and described two lifting sprocket coaxialities are installed on described transmission shaft, drive described two lifting sprocket rotation by described transmission shaft.
Preferably, described driver element comprises motor and speed reducer; The input end of described reductor is connected with described motor, and described drive sprocket is installed on mouth.
Preferably, described column has groove type cross section.
Preferably, described lifting supporting plate both sides have kink, are symmetrically installed with multiple guide rollers on described kink, and described guide roller is embedded at the groove of described column and rises therein or decline.
Preferably, described handler also comprises balance weight mechanism, and it is installed on the other end of described two elevating chains.
Preferably, described balance weight mechanism comprises: waling stripe, and its two ends are fixedly connected with the other end of described two elevating chains by pipe link respectively; Two clump weights, are fixedly connected with the two ends of described waling stripe respectively.
Preferably, two track adjusting wheels are installed on clump weight described in each, described track adjusting wheel fits in the inside and outside wall of described column, and along coating surface vertical motion.
Preferably, the quantity of described fork plate is that to be greater than distance between 1 and described fork plate adjustable.
Preferably, described transportation detent mechanism comprises the castor and the telescopic feet that make described main body frame parallel motion, and described feet limits described main body frame parallel motion while stretching out.
Preferably, described main body frame is L shaped, and it comprises horizontal bottom and two vertically disposed described columns, and described horizontal bottom is positioned at the below of the horizontal component of described fork plate.
Preferably, described castor comprises front truckle and rear truckle, is provided with two described front truckles in the front end of the horizontal bottom of described main body frame, and described two columns below is provided with two described rear truckles near described horizontal bottom rear end.
Preferably, described motor is powered by electric main and is operated according to control signal.
The handler of the vertical oxidation furnace body that the utility model proposes, can realize the horizontal transport of body of heater by transportation detent mechanism, body of heater can be held up and need to not carry out transition by other equipment of fork truck and so on from ground by lifting sprocket wheel, chain and load carrier, thereby realized transporting something containerized defeated with elevating function in one, complete all handling of body of heater action with single device.In addition, it is time saving and energy saving that this device is realized by drive transmission device, and on-the-spot peace mediator person is thoroughly freed from heavy manual labor.
Accompanying drawing explanation
Fig. 1 is the structural representation of the handler of the utility model vertical oxidation furnace body;
Fig. 2 is the drive transmission device of handler and the structural representation of transmission device of the utility model vertical oxidation furnace body;
Fig. 3 is the transport establishment of handler and the structural representation of load carrier of the utility model vertical oxidation furnace body;
Fig. 4 and Fig. 5 are the structural representation of the balance weight mechanism of the handler of the utility model vertical oxidation furnace body;
Fig. 6 is the schematic diagram that the handler of the utility model vertical oxidation furnace body loads transportation body of heater;
Fig. 7 is the schematic diagram of the manual operator of the handler of the utility model vertical oxidation furnace body;
Fig. 8 is the schematic diagram of the fork plate of the utility model vertical oxidation furnace body and the fastening structure of lifting supporting plate.
[primary clustering nomenclature]
1 main body frame; 2 drive transmission devices; 3 lifting sprocket wheels; 4 elevating chains; 5 load carriers;
6 transportation detent mechanisms; 7 guide rollers; 21 motors; 22 reductors; 23 drive sprockets;
24 driving chain wheels; 25 driving chains; 26 transmission shafts; 51 lifting supporting plates; 52 fork plates;
51a the first buckling piece; 52a the second buckling piece; 61 castors; 62 feets; 81 pipe links;
82 clump weights; 83 waling stripes; 84 track adjusting wheels.
The specific embodiment
For making content of the present utility model more clear understandable, below in conjunction with Figure of description, content of the present utility model is described further.Certainly the utility model is not limited to this specific embodiment, and the known general replacement of those skilled in the art is also encompassed in protection domain of the present utility model.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be also electrical connection; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can particular case understand the concrete meaning of above-mentioned term in the utility model.
Incorporated by reference to reference to figure 1, Fig. 2 and Fig. 6, the handler of vertical oxidation furnace body of the present utility model comprises the main body frame 1 with two vertically disposed columns, drive transmission device 2,3, two elevating chains 4 of two lifting sprocket wheels, load carrier 5 and transportation detent mechanism 6.Wherein, transportation detent mechanism 6 is located at the bottom of main body frame 1, so that main body frame 1 can parallel motion or static, thereby main body frame 1 is transported or is located.Drive transmission device 2 is arranged on the top of main body frame, for providing power to drive two lifting sprocket wheels 3 to rotate.Elevating chain 4 respectively solderless wrapped connections on lifting sprocket wheel 3, can be along with the rotation of lifting sprocket wheel 3 up-and-down movement.Load carrier comprises lifting supporting plate 51 and fork plate 52.The both sides of lifting supporting plate 51 are fixedly connected with two elevating chains 4 wherein one end separately respectively, simultaneously with the column sliding block joint of main body frame 1, thereby can rise or decline along column along with the motion of elevating chain 4.Fork plate 52 has vertical component and horizontal component, and its horizontal component is used for carrying vertical oxidation furnace body, and vertical component is fastened on lifting supporting plate 51, is driven and is risen or decline by the motion of lifting supporting plate 51.Thus, in the time that transportation detent mechanism 6 remains static main body frame 1, drive lifting sprocket wheel 3 to rotate by drive transmission device 2, can make elevating chain 4 and lifting supporting plate 51 up-and-down movements, thereby realized the lifting of the vertical oxidation furnace body that fork plate 52 and fork plate 52 carry.
Preferably, in the present embodiment, lifting supporting plate 51 is by guide roller and column sliding block joint.Specifically, the column of main body frame 1 has groove type cross section, and this column is for example channel-section steel.Lifting supporting plate 51 both sides have the kink towards column, and multiple guide rollers 7 are installed on two kinks symmetrically.As shown in the figure, in the present embodiment, the upper and lower of each kink is separately installed with a guide roller 7.Guide roller 7 slides and is embedded in the groove of column, can be in groove up-and-down movement.Guide roller 7 can be arranged on lifting supporting plate by threaded fasteners, and the utility model is not limited.Can guarantee that by guide roller 7 lifting supporting plate 51 carries out upper and lower vertical motion, and guide roller 7 coordinates the holding capacity that has improved the moment that vertical heater body of heater that main body frame carries fork plate 52 produces with stake pocket.In addition, load carrier 5 can comprise multiple fork plates 52.As depicted in figs. 1 and 2, the quantity of fork plate 52 is two, is shaped as L shapedly, and the spacing of fork between plate 52 is adjustable, can adapt to thus different body of heater sizes, thereby all can firm support to the bodies of heater of different sizes.In the present embodiment, fork plate 52 fastens by fastening structure and lifting supporting plate 51, and can not come off from lifting supporting plate 51.Please refer to Fig. 8, it is depicted as the schematic diagram of fastening structure.Fastening structure comprises the second buckling piece 52a that is positioned at the first buckling piece 51a at lifting supporting plate 51 tops and is positioned at the top of the vertical component of fork plate 52.Wherein the first buckling piece 51a is projection, and the second buckling piece 52a holds this protruding respective slot.When fastening, utilize the first buckling piece 51a to match with the second buckling piece 52a lifting supporting plate 51 and fork plate 52 are fastened each other, fork plate 52 vertical components and lifting supporting plate 51 are fitted.
Please continue to refer to Fig. 1 and Fig. 2, transportation detent mechanism 6 comprises castor 61 and feet 62.Castor 61 makes main body frame 1 parallel motion, has played the effect of the transportation of body of heater and the adjustment of relative position.Feet 62 is scalable, plays the effect of supporting whole handler in the time that it stretches out, and limits main body frame parallel motion simultaneously, can realize after handler arrives assigned address and carry out before lifting action, whole device being positioned; In the time that it shrinks, can drive handler to move by castor 61, carry out the transportation of vertical oxidation furnace body.In the present embodiment, main body frame is L shaped, comprises column and horizontal bottom.Horizontal bottom can strengthen the rigidity of main body frame to moment and torsion, the capsizing moment producing to bear better body of heater.This horizontal bottom is positioned at the below of the horizontal component of fork plate 52, in its front end, is provided with front truckle.Column below is provided with rear truckle near horizontal bottom rear end.In order to lock castor at main body frame 1 during in handling labor state, rear truckle can be belt brake castor.
Next, please refer to Fig. 3, in the present embodiment, drive transmission device 2 comprises driver element and driver element.Driver element comprises drive sprocket 23, driving chain 25, driving chain wheel 24 and transmission shaft 26.Drive sprocket 23 is arranged on the output shaft of driver element, be connected with driving chain wheel 24 by driving chain 25, driving chain wheel 24 and two lifting sprocket wheels 3 are coaxially installed on transmission shaft 26, and lifting sprocket wheel 3 is arranged on the two ends of transmission shaft 26 symmetrically with respect to driving chain wheel 24.So, driver element is by drive sprocket 23, and driving chain 25 and driving chain wheel 24 drive transmission shaft 26 to rotate, and then drives the lifting sprocket wheel 3 at transmission shaft 26 two ends to rotate, the elevating chain 4 corresponding lifting of solderless wrapped connection on lifting sprocket wheel 3, thus reach the object of lifting body of heater.In the present embodiment, driver element adopts the combination of the supporting reductor 22 of motor 21, and the power that drives drive sprocket 23 to rotate is provided.Motor 21 and reductor 22 are combined use, can guarantee kinematic accuracy, closed loop position feedback and good acceleration and deceleration performance, reduce the power of motor, improve driving torque simultaneously.Specifically, the input end of reductor 22 is connected with motor 21, and drive sprocket 23 is installed on mouth.Preferably, motor 21 adopts the 220V alternating-current motor/AC motor of being powered by electric main, and it can operate according to control signal.Because motor 21 can directly use the comparatively common single-phase 220V power supply of factory building or equipment, therefore, on-the-spot peace mediator person only need by such as remote control equipment (RCE) (manual operator as shown in Figure 6) to motor 21 send control signal can make to motor start, stop, the manipulation such as forward, reversion, thereby realize the start and stop lifting action of body of heater.
Please continue to refer to Fig. 4 and Fig. 5, the handler of vertical oxidation furnace body also comprises balance weight mechanism.Balance weight mechanism is installed on the other end of elevating chain 4, can in the lifting process of body of heater, offset a part of weight, and the horsepower output of motor is reduced, and has saved the energy, has reduced maintenance cost and cost.In addition, by being set, balance weight mechanism can guarantee that elevating chain is all the time in tensioning state, and along vertical direction up-and-down movement, the accident that better prevention is become flexible, come off and cause because of elevating chain.In the present embodiment, balance weight mechanism comprises pipe link 81, clump weight 82, waling stripe 83.The two ends of waling stripe 83 are fixedly connected with the other end of two elevating chains 4 by pipe link 81 respectively.Two clump weights 82 are fixedly connected with the two ends of waling stripe 83 respectively, and waling stripe 83 can guarantee that two chain lifting actions are synchronous, avoids unexpected generation.Preferably, two track adjusting wheels 84 are installed on each clump weight 82, as shown in Figure 5, these two track adjusting wheels 84 be fitted in respectively the column with groove type cross section inside and outside wall correspondence position and along coating surface vertical motion, so can further strengthen guidance quality, make the up-and-down movement of clump weight 82 more smooth and easy reliable.
In sum, the handler of vertical oxidation furnace body of the present utility model, horizontal transport and the location that can realize body of heater by transportation detent mechanism, can not need to can steadily carry out lifting to body of heater reliably by accessory equipments such as fork trucks by load carrier and lifting sprocket wheel, chain, therefore integrated transportation and elevating function are in one.In addition, the principle that the utility model was realized lifting by roller promotion installation with hydraulic gear is more in the past different, can directly use the comparatively common single-phase 220V source of AC of factory building or equipment, on-the-spot peace mediator person only need send control signal and drive transmission device be manipulated to the start and stop lifting action that can realize body of heater, simple, convenient, effectively reduce labour intensity.
Although the utility model discloses as above with preferred embodiment; so described many embodiment only give an example for convenience of explanation; not in order to limit the utility model; those skilled in the art can do some changes and retouching under the prerequisite that does not depart from the utility model spirit and scope, and the protection domain that the utility model is advocated should be as the criterion with described in claims.
Claims (13)
1. a handler for vertical oxidation furnace body, is characterized in that, comprising:
Main body frame, it comprises two vertically disposed columns;
Transportation detent mechanism, is located at described main body frame bottom, so that described main body frame parallel motion or static location;
Drive transmission device, is arranged at the top of described main body frame;
Two lifting sprocket wheels, are driven and are rotated by described drive transmission device;
Article two, elevating chain, is wire-wrapped in respectively described drive sprocket; And
Load carrier, it comprises:
Lifting supporting plate, its both sides be fixedly connected with one end of described two elevating chains respectively and with described column sliding block joint, rise or decline along described column with the motion with described elevating chain; And
Fork plate, it has vertical component and horizontal component, and described horizontal component is used for carrying described vertical oxidation furnace body; Described vertical component is fastened on described lifting supporting plate, is driven and is risen or decline by the motion of described lifting supporting plate.
2. handler according to claim 1, is characterized in that, described drive transmission device comprises driver element and driver element, and described driver element comprises drive sprocket, driving chain, driving chain wheel and transmission shaft; Described drive sprocket is installed on the output shaft of described driver element, is connected with described driving chain wheel by described driving chain; Described driving chain wheel and described two lifting sprocket coaxialities are installed on described transmission shaft, drive described two lifting sprocket rotation by described transmission shaft.
3. handler according to claim 2, is characterized in that, described driver element comprises motor and speed reducer; The input end of described reductor is connected with described motor, and described drive sprocket is installed on mouth.
4. handler according to claim 1, is characterized in that, described column has groove type cross section.
5. handler according to claim 4, is characterized in that, described lifting supporting plate both sides have kink, are symmetrically installed with multiple guide rollers on described kink, and described guide roller is embedded at the groove of described column and rises therein or decline.
6. handler according to claim 4, is characterized in that, also comprises balance weight mechanism, and it is installed on the other end of described two elevating chains.
7. handler according to claim 6, is characterized in that, described balance weight mechanism comprises: waling stripe, and its two ends are fixedly connected with the other end of described two elevating chains by pipe link respectively; Two clump weights, are fixedly connected with the two ends of described waling stripe respectively.
8. handler according to claim 7, is characterized in that, two track adjusting wheels are installed on clump weight described in each, and described track adjusting wheel fits in the inside and outside wall of described column, and along coating surface vertical motion.
9. handler according to claim 1, is characterized in that, the quantity of described fork plate is that to be greater than distance between 1 and described fork plate adjustable.
10. handler according to claim 1, is characterized in that, described transportation detent mechanism comprises the castor and the telescopic feet that make described main body frame parallel motion, and described feet limits described main body frame parallel motion while stretching out.
11. handlers according to claim 1, is characterized in that, described main body frame is L shaped, and it comprises horizontal bottom and two vertically disposed described columns, and described horizontal bottom is positioned at the below of the horizontal component of described fork plate.
12. handlers according to claim 11, it is characterized in that, described castor comprises front truckle and rear truckle, is provided with two described front truckles in the front end of the horizontal bottom of described main body frame, and described two columns below is provided with two described rear truckles near described horizontal bottom rear end.
13. handlers according to claim 3, is characterized in that, described motor is powered by electric main and operated according to control signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320892447.5U CN203639077U (en) | 2013-12-31 | 2013-12-31 | Semi-automatic assembling and disassembling device for vertical oxidation furnace body |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320892447.5U CN203639077U (en) | 2013-12-31 | 2013-12-31 | Semi-automatic assembling and disassembling device for vertical oxidation furnace body |
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| CN203639077U true CN203639077U (en) | 2014-06-11 |
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| CN201320892447.5U Expired - Lifetime CN203639077U (en) | 2013-12-31 | 2013-12-31 | Semi-automatic assembling and disassembling device for vertical oxidation furnace body |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103723659A (en) * | 2013-12-31 | 2014-04-16 | 北京七星华创电子股份有限公司 | Semi-automatic assembly and disassembly device for vertical oxidizing furnace body |
| CN104030194A (en) * | 2014-06-12 | 2014-09-10 | 中磁科技股份有限公司 | Oil sludge recovery device of unloading forklift |
| CN106003737A (en) * | 2016-08-02 | 2016-10-12 | 吴建平 | Gantry type multifunctional 3D printer |
| CN106099165A (en) * | 2016-08-25 | 2016-11-09 | 浙江天地之光电池制造有限公司 | A kind of conveying arrangement in accumulator chemical conversion pond |
| CN106493532A (en) * | 2016-10-28 | 2017-03-15 | 北京七星华创电子股份有限公司 | A kind of body of heater handler capable of rapid positioning |
| CN106927395A (en) * | 2017-05-12 | 2017-07-07 | 谜米机器人自动化（上海）有限公司 | Automatic guided vehicle and unmanned handling system |
| CN108892078A (en) * | 2018-10-13 | 2018-11-27 | 唐山中陶卫浴制造有限公司 | Blank taking device for the production of ceramic toilet seat |
| CN110155611A (en) * | 2018-01-26 | 2019-08-23 | 宁波贝克韦尔智能科技有限公司 | A kind of automatic transportation elevator |
| CN111232887A (en) * | 2020-03-11 | 2020-06-05 | 袁国华 | Anti-collision forklift |
| CN113581858A (en) * | 2021-09-29 | 2021-11-02 | 湖南兴运物流有限公司 | Stacking device for logistics tray and using method thereof |
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2013
- 2013-12-31 CN CN201320892447.5U patent/CN203639077U/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103723659A (en) * | 2013-12-31 | 2014-04-16 | 北京七星华创电子股份有限公司 | Semi-automatic assembly and disassembly device for vertical oxidizing furnace body |
| CN103723659B (en) * | 2013-12-31 | 2017-03-01 | 北京七星华创电子股份有限公司 | The semi-automatic handler of vertical oxidation furnace body |
| CN104030194A (en) * | 2014-06-12 | 2014-09-10 | 中磁科技股份有限公司 | Oil sludge recovery device of unloading forklift |
| CN106003737A (en) * | 2016-08-02 | 2016-10-12 | 吴建平 | Gantry type multifunctional 3D printer |
| CN106099165A (en) * | 2016-08-25 | 2016-11-09 | 浙江天地之光电池制造有限公司 | A kind of conveying arrangement in accumulator chemical conversion pond |
| CN106099165B (en) * | 2016-08-25 | 2019-02-05 | 浙江天地之光电池制造有限公司 | A kind of transport device in battery chemical conversion pond |
| CN106493532A (en) * | 2016-10-28 | 2017-03-15 | 北京七星华创电子股份有限公司 | A kind of body of heater handler capable of rapid positioning |
| CN106927395A (en) * | 2017-05-12 | 2017-07-07 | 谜米机器人自动化（上海）有限公司 | Automatic guided vehicle and unmanned handling system |
| CN110155611A (en) * | 2018-01-26 | 2019-08-23 | 宁波贝克韦尔智能科技有限公司 | A kind of automatic transportation elevator |
| CN108892078A (en) * | 2018-10-13 | 2018-11-27 | 唐山中陶卫浴制造有限公司 | Blank taking device for the production of ceramic toilet seat |
| CN111232887A (en) * | 2020-03-11 | 2020-06-05 | 袁国华 | Anti-collision forklift |
| CN113581858A (en) * | 2021-09-29 | 2021-11-02 | 湖南兴运物流有限公司 | Stacking device for logistics tray and using method thereof |
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