CN203616462U - Magnetic field measurement and analysis device - Google Patents
Magnetic field measurement and analysis device Download PDFInfo
- Publication number
- CN203616462U CN203616462U CN201320857596.8U CN201320857596U CN203616462U CN 203616462 U CN203616462 U CN 203616462U CN 201320857596 U CN201320857596 U CN 201320857596U CN 203616462 U CN203616462 U CN 203616462U
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- Prior art keywords
- hall probe
- magnetic
- line slideway
- field measurement
- magnetic field
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- 238000005259 measurement Methods 0.000 title claims abstract description 29
- 239000000523 sample Substances 0.000 claims abstract description 47
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 abstract description 9
- 239000010959 steel Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 8
- 230000005355 Hall effect Effects 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000001595 contractor effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000005344 low-emissivity glass Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000001455 metallic ions Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Abstract
The utility model relates to a magnetic field measurement and analysis device by utilizing a Hall probe. The magnetic field measurement and analysis device comprises a rack device, a lateral movement device installed at the top end of the rack device, a longitudinal movement device installed on the upper end of the rack device, and the Hall probe moving left and right with the lateral movement device and moving up and down with the longitudinal movement device; and the longitudinal movement device and the lateral movement device are crossly connected, the lateral movement device is provided with a lateral scale ruler, and the longitudinal movement device is provided with a horizontal scale ruler. Magnetic measurement by utilizing a fixed-point method is performed on a magnet surface according to different needs through a Hall effect of the Hall probe on a Guass instrument, magnetic field intensity of different points is acquired, a curve chart of a magnetic field is drawn through corresponding software, magnetic field uniformity of a magnetic steel layout obtained according to measurement can be used in installation and adjustments of a magnetic steel, uniformity of a magnetic field layout is improved, and the magnetic field measurement and analysis device has the advantages of the convenient and fast measuring process, accurate measuring results, high stability, high reliability and the like.
Description
Technical field
The present invention relates to a kind of magnetic-field measurement analytical equipment, refer more particularly to a kind of by the magnetic-field measurement analytical equipment of hall probe.
Background technology
The magnetron sputtering technique that coated glass adopts at present, magnetron sputtering has developed into one of technology in industrial plated film production, the problem of the aspect such as special concern target utilization, membrane uniformity, rate of sedimentation and sputter procedure stability in batch plated film is produced, in magnetic-controlled sputtering coating equipment, magnet steel can only independent measurement, after magnet steel installs, cannot effectively measure the homogeneity in magnetic field, therefore can make plasma generation local contraction effect.
The film thickness uniformity of coated glass is very important performance index of coated glass, and it can directly have influence on presentation quality and the result of use of product.It is 1.5% that national standard requires low emissivity glass optical property to allow maximum deviation, and in the time that homogeneity exceedes certain limit, naked eyes can be felt aberration from glass surface.Current building curtain wall glass is all to adopt large-area coating film glass, in this control sputter, the homogeneity in constraint metallic ion sputter area magnetic field directly affects the homogeneity of institute's film plating layer, therefore guarantees that magnetic field homogeneity problem is problem very important and troubling in process debugging always; The producer of domestic a lot of production equipments can only utilize the magnetic field intensity of the single magnet of gage measuring at present, after assembling, can not well measure the homogeneity in magnetic field, adjusts and optimizes.
Summary of the invention
Inhomogeneous in order to solve in prior art magnetic field distribution, be difficult to the defect measured, the invention provides a kind of magnetic-field measurement analytical equipment.
For above-mentioned technical matters, reach above-mentioned technical purpose, the invention provides a kind of magnetic-field measurement analytical equipment, its technical scheme adopting is a kind of magnetic-field measurement analytical equipment, it comprises stand arrangement, is arranged on the horizontal mobile device of stand arrangement upper end, the longitudinal moving device that is arranged on stand arrangement upper end and intersects with horizontal mobile device " ten " word, can move left and right the hall probe moving up and down with longitudinal moving device with horizontal mobile device, on horizontal mobile device, be provided with horizontal rule, on longitudinal moving device, be provided with longitudinal rule.
Preferential embodiment of the present invention is, under the upper end of stand arrangement, hall probe, orientation is provided with unit under test, and described unit under test is fixed by positioning device.
Preferential embodiment of the present invention is, described horizontal mobile device comprises the first handwheel, the first rack-and-pinion, laterally line slideway, described hall probe can carry out left and right movement by guide rail in horizontal line slideway, described the first hand wheel rotating, drive the first rack-and-pinion motion, further drive hall probe left and right movement in horizontal line slideway.
Preferential embodiment of the present invention is that described horizontal rule is arranged on the upper of horizontal line slideway, observes the displacement of hall probe at horizontal line slideway by horizontal rule.
Preferential embodiment of the present invention is, described longitudinal moving device comprises the second handwheel, the second rack-and-pinion, longitudinally line slideway, described hall probe measuring mechanism is arranged in longitudinal line slideway by the slide block on it, described the second hand wheel rotating, drive the second rack-and-pinion motion, further drive hall probe measuring mechanism to move up and down in longitudinal line slideway.
Preferential embodiment of the present invention is that described hall probe measuring mechanism comprises the first handwheel, the first rack-and-pinion, horizontal line slideway, hall probe, horizontal rule.
Preferential embodiment of the present invention is, Gauss's instrument is installed on the top of stand arrangement, and affiliated Gauss's instrument is connected in hall probe measurement mechanism, by the numeral reality screen of Gauss's instrument, shows the magnetic field intensity that gathers each point.
Preferential embodiment of the present invention is, the bottom Moving caster of affiliated stand arrangement, and the lower end of affiliated Moving caster is also provided with back up pad.
The preferential embodiment of one of the present invention is, is also provided with and moves up and down device, by moving up and down the fine-tuning hall probe of device and the unit under test distance between upper and lower in the upper end of hall probe.
Technique effect of the present invention is, need to carry out fix point method by the Hall effect of the hall probe on Gauss's instrument to magnet surface point difference and carry out magnetic-field measurement, gather the magnetic field intensity of difference, and go out the curve map in magnetic field by corresponding Software on Drawing, the magnetic field homogeneity of arranging according to the magnet steel of measuring acquisition, can be used for the Installation and adjustment of magnet steel, improved the homogeneity of arranging in magnetic field.The present invention has the features such as measuring process aspect is quick, measurement result is accurate, reliable and stable.
Accompanying drawing explanation
Accompanying drawing 1 is structural representation of the present invention.
1-stand arrangement; 2-horizontal mobile device; 3-longitudinal moving device; The horizontal rule of 4-; The longitudinal rule of 5-; 6-locating device; 7-Moving caster; 8-back up pad; 9-moves up and down device; 10-unit under test; 11-the second handwheel; 12-the first handwheel; 13-hall probe; 14-hall probe measuring mechanism; 15-the first gear; 16-the second gear; 17-Gauss instrument; The horizontal line slideway of 19-; The longitudinal line slideway of 20-; 21-displacement sensor; 100-hall probe measurement mechanism.
Embodiment
For clearer narration technical scheme of the present invention, below in conjunction with accompanying drawing, the present invention is described further.
Shown in Fig. 1, a kind of magnetic-field measurement analytical equipment comprises stand arrangement 1, is arranged on longitudinal moving device 3 and the horizontal mobile device 2 of stand arrangement 1 upper end, wherein, and longitudinal moving device 3 and 2 one-tenth of horizontal mobile devices " ten " word chiasma type.
Horizontal mobile device 2 comprises the first handwheel 12, the first rack-and-pinion 15, horizontal line slideway 19, be erected at the hall probe 13 on cross slide way 19, toothed gearing in hall probe 13 is connected with horizontal line slideway 19 spirals, in the time that horizontal line slideway 19 rotates, can drive the left and right movement of hall probe 13.
Learn from above, in the time rotating the first handwheel 12, drive the first rack-and-pinion 15 to rotate, further drive horizontal line slideway 19 to move, thereby drive hall probe 13 to do left and right transverse shifting.
Laterally on line slideway 19, be also provided with horizontal rule 4, when hall probe 13 is in the time that laterally line slideway 19 does transverse movement, the distance that can observe hall probe 13 move by horizontal rule 4, be provided with displacement sensor 21 in horizontal rule 4 inside, can obtain by displacement sensor 21 distance that hall probe 13 moves.
Longitudinal moving device 3 comprises the second handwheel 11, the second gear 16, longitudinal line slideway 20, wherein, hall probe measuring mechanism 14 is movably arranged on longitudinal line slideway 20, in the time rotating the second handwheel 11, the second handwheel 11 drives the second gear 16 to rotate, and drives the hall probe measuring mechanism 14 being arranged in longitudinal line slideway 20 to do upper and lower motion by the second gear 16.
Hall probe measuring mechanism 14 comprises the first handwheel 12, the first rack-and-pinion 15, horizontal line slideway 19, hall probe 13, horizontal rule 14, is arranged on the displacement transducer 21 of hall probe 13 inside.
Being longitudinally provided with longitudinal rule 5 in line slideway 20, by the displacement of longitudinal rule 5 Observable hall probe measuring mechanisms 14.
As shown in Figure 1, unit under test 10 is arranged on stand arrangement 1 centre position, top place, and it is fixing by locating device 6.The steel magnet device that described unit under test 10 is used for plated film, uses equally distributed magnetic field in order to obtain plated film, and at plated film in earlier stage, coating operation personnel need to judge that whether the Distribution of Magnetic Field of magnet steel is even by magnetic-field measurement analytical equipment, thereby judge the effect of plated film.
The steel magnet device distributing in order to obtain uniform magnetic field, also arranges one in the upper end of hall probe 13 and moves up and down device 9, described in move up and down device 9 and can be used for hall probe 13 fine setting of distance between the upper and lower.
The above embodiment has only expressed embodiments of the present invention, and its description is comparatively detailed, as long as those skilled in the art is viewing after embodiments of the invention, does not depart under the prerequisite of the present invention's design, and the change of making all belongs to protection scope of the present invention.But embodiment as herein described can not be interpreted as protection scope of the present invention is limited.
Claims (9)
1. a magnetic-field measurement analytical equipment, it is characterized in that, comprise stand arrangement (1), be arranged on the horizontal mobile device (2) on stand arrangement (1) top, be arranged on stand arrangement (2) upper end and become the longitudinal moving device (3) of " ten " word X-bracing with horizontal mobile device (2), the hall probe (13) that moves left and right and move up and down with longitudinal moving device (3) with horizontal mobile device (2), on described horizontal mobile device (2), be provided with horizontal rule (4), on described longitudinal moving device (3), be provided with longitudinal rule (5).
2. magnetic-field measurement analytical equipment according to claim 1, it is characterized in that, the lower orientation of upper end, hall probe (13) in described stand arrangement (1) is provided with unit under test (10), and described unit under test (10) is fixing by locating device (6).
3. magnetic-field measurement analytical equipment according to claim 1, it is characterized in that, described horizontal mobile device (2) comprises the first handwheel (12), the first rack-and-pinion (15), laterally line slideway (19), described hall probe (13) can carry out left and right movement by the guide rail in described horizontal line slideway (19), in the time that described the first handwheel (12) rotates, drive described the first rack-and-pinion (15) to rotate, further drive described hall probe (13) (19) left and right movement in horizontal line slideway.
4. magnetic-field measurement analytical equipment according to claim 3, it is characterized in that, it is upper that described horizontal rule (4) is arranged on described horizontal line slideway (19), can observe the displacement of hall probe (13) on described horizontal line slideway (19) by described horizontal rule (4).
5. magnetic-field measurement analytical equipment according to claim 3, described the first handwheel (12), the first rack-and-pinion (15), horizontal line slideway (19), hall probe (13), horizontal rule (4) are in conjunction with composition hall probe measuring mechanism (14).
6. magnetic-field measurement analytical equipment according to claim 5, it is characterized in that, described longitudinal moving device (5) comprises the second handwheel (11), the second rack-and-pinion (16), longitudinally line slideway (20), described hall probe measuring mechanism (14) is arranged in longitudinal line slideway (20) by the slide block on it, described the second handwheel (11) rotates, drive the second rack-and-pinion motion (16), further drive hall probe measuring mechanism (14) to move up and down in longitudinal line slideway (20).
7. magnetic-field measurement analytical equipment according to claim 1, it is characterized in that, on the top of stand arrangement (1), Gauss's instrument (17) is installed, affiliated Gauss's instrument (17) is connected with hall probe measurement mechanism (15), by the digital display screen of Gauss's instrument (17), show the magnetic field intensity that gathers each point.
8. magnetic-field measurement analytical equipment according to claim 1, is characterized in that, the bottom of described stand arrangement (1) is provided with Moving caster (7), and the lower end of described Moving caster (7) is also provided with back up pad (8).
9. magnetic-field measurement analytical equipment according to claim 1, it is characterized in that, be provided with and move up and down device (9) in the upper end of described hall probe (17), by the described fine-tuning hall probe of device (9) (13) and unit under test (10) distance between upper and lower that moves up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320857596.8U CN203616462U (en) | 2013-12-24 | 2013-12-24 | Magnetic field measurement and analysis device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320857596.8U CN203616462U (en) | 2013-12-24 | 2013-12-24 | Magnetic field measurement and analysis device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203616462U true CN203616462U (en) | 2014-05-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320857596.8U Expired - Lifetime CN203616462U (en) | 2013-12-24 | 2013-12-24 | Magnetic field measurement and analysis device |
Country Status (1)
| Country | Link |
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| CN (1) | CN203616462U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675723A (en) * | 2013-12-24 | 2014-03-26 | 上海子创镀膜技术有限公司 | Magnetic field measurement analysis system |
| CN104035057A (en) * | 2014-06-10 | 2014-09-10 | 何华琼 | Central magnetic field automatic tester |
| CN108896937A (en) * | 2018-05-11 | 2018-11-27 | 天津工业大学 | A kind of magnet steel magnetic field automatic detection device |
| CN110031781A (en) * | 2019-05-21 | 2019-07-19 | 京东方科技集团股份有限公司 | A kind of detection jig and its detection method |
-
2013
- 2013-12-24 CN CN201320857596.8U patent/CN203616462U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675723A (en) * | 2013-12-24 | 2014-03-26 | 上海子创镀膜技术有限公司 | Magnetic field measurement analysis system |
| CN103675723B (en) * | 2013-12-24 | 2017-11-21 | 上海子创镀膜技术有限公司 | A kind of magnetic-field measurement analysis system |
| CN104035057A (en) * | 2014-06-10 | 2014-09-10 | 何华琼 | Central magnetic field automatic tester |
| CN108896937A (en) * | 2018-05-11 | 2018-11-27 | 天津工业大学 | A kind of magnet steel magnetic field automatic detection device |
| CN110031781A (en) * | 2019-05-21 | 2019-07-19 | 京东方科技集团股份有限公司 | A kind of detection jig and its detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140528 |