CN202925090U - Magnetic steel detection device for magnetron sputtering film plating - Google Patents
Magnetic steel detection device for magnetron sputtering film plating Download PDFInfo
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- CN202925090U CN202925090U CN 201220506303 CN201220506303U CN202925090U CN 202925090 U CN202925090 U CN 202925090U CN 201220506303 CN201220506303 CN 201220506303 CN 201220506303 U CN201220506303 U CN 201220506303U CN 202925090 U CN202925090 U CN 202925090U
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Abstract
The utility model relates to a magnetic steel detection device for magnetron sputtering film plating and belongs to the field of a magnetron sputtering film plating technology. The magnetic steel detection device comprises a non-magnetic sectional material framework, a magnetic steel tray A, a magnetic steel tray B, an instrument measuring platform and a magnetic field tester, wherein the magnetic steel tray A and the magnetic steel tray B are respectively fixed on the two sides of the non-magnetic sectional material framework, and are provided with magnetic steel; the instrument measuring platform comprises a slide block and a connecting plate; a slide channel is arranged on one side of the non-magnetic sectional material framework and is internally provided with a slide block; scales B are arranged on one side or two sides of the slide channel; the connecting plate is provided with a horizontal part and a vertical part; the horizontal part of the connecting plate is fixed on the upper surface of the slide block and is provided with an indicator-shaped indication sheet; and the vertical part is provided with a supporting plate and the supporting plate is provided with the magnetic field tester. The magnetic steel detection device disclosed by the utility model has the advantages that one person can independently detect the magnetic steel; the measurement is accurate, the efficiency is high and the manufacturing cost is low; and the magnetic steel detection device is suitable for large-range popularization and application.
Description
Technical field
The utility model belongs to the magnetron sputtering technology field, particularly relates to a kind of magnetic steel detection device.
Background technology
Vacuum plating comprises two kinds of optical coating and magnetron sputtering platings, wherein magnetron sputtering plating refers under vacuum condition, adopt the arc-discharge technique of low voltage, large electric current, utilize geseous discharge that target is evaporated and make and be evaporated material and gas all ionizes, utilize the booster action of electric field, make to be evaporated material and reaction product is deposited on workpiece.it is at optical thin film, microelectronics, be widely used in the suitability for industrialized production such as material surface processing or field of scientific study, especially be applied in the large-area flat-plate glass surface and be coated with the metal single layer plasma membrane, in alloy film or metallic compound membrane process, the homogeneity of the film thickness that wherein is plated to is the important indicator that quality of forming film detects, and what film thickness was played a decisive role is the distribution in magnetic field, because can there be certain mechanical shock in filming equipment when working, for a long time mechanical shock can make the small magnet position in magnet steel be subjected to displacement, thereby affect Distribution of Magnetic Field, so just need regular magnet steel is detected.Present detection method is: at first magnet steel is taken out from the target pipe, then with rope, sling in two of magnet steel, then carry out yi word pattern with magnetometer and measure below magnet steel, there is following drawback in such metering system:
1 due to magnet steel by artificial slinging with rope, so can double swerve, thereby cause measure inaccurate;
2 because magnetometer is also artificial hand-held the measurement, so take off data also has deviation;
The probe of 3 survey meters and the distance of magnet steel are because artificial factor can not be consistent fully;
4 due to magnet steel itself there is no scale, so can not accurately find out magnetic force underproof position;
5 detections need multi agent cooperation just can complete, and affect detection efficiency.
Summary of the invention
The utility model provides a kind of measurement accurate for solving the technical problem that exists in known technology, the use in magnetron sputtering coating magnetic steel detection device that efficient is high.
The technical scheme that the utility model is taked for the technical problem that exists in the solution known technology is:
a kind of use in magnetron sputtering coating magnetic steel detection device, it is characterized in that: comprise without the magnetic section material framework, magnet steel carriage A, magnet steel carriage B, the apparatus measures platform, the measurement of magnetic field device, described magnet steel carriage A, magnet steel carriage B is separately fixed at the both sides without the magnetic section material framework, be fitted with magnet steel on it, described apparatus measures platform includes slide block, web plate, be provided with slideway in the side without the magnetic section material framework, dispose described slide block in it, be provided with scale B in the one or both sides of slideway, be provided with a horizontal part and a vertical component effect on described web plate, horizontal part on web plate is fixed on the upper surface of described slide block, be fitted with an indicating piece that is the pointer shape on it, be provided with supporting plate on described vertical component effect, described measurement of magnetic field device is housed on it.
The utility model can also adopt following technical scheme:
Described measurement of magnetic field device includes connecting rod, support bar, tstr shell, described support bar one end and described rod hinge connection, the other end is fixed on the outside surface of described tstr shell, described connecting rod one end is provided with test probe, the other end and is fixed on the inside upper surface of tstr shell by spring, and the inside of described tstr shell is provided with the display panel with scale A.
The advantage that the utlity model has and positively effect are: 1, by magnet steel being placed on the magnet steel carriage, not only can realize that a people independently detects magnet steel, manpower have been saved, can also improve the accuracy of measurement, the error of having avoided manual measurement to bring, cooperation by slide block and slideway, can realize each part of magnet steel is accurately measured, because the one or both sides of slideway are provided with scale, can accurately find out the position that needs debugging, thereby realize the debugging while measuring.2, the utility model low cost of manufacture is beneficial in production practice and applies on a large scale.
Description of drawings
Fig. 1 is plan structure schematic diagram of the present utility model;
Fig. 2 is the utility model apparatus measures platform and without the assembly structure schematic diagram of magnetic section material framework;
Fig. 3 is the structural representation of the utility model measurement of magnetic field device.
In figure: 1, slide block; 2, web plate; 3, magnet steel; 4, slideway; 5, without the magnetic section material framework; 6, magnet steel carriage B; 7, indicating piece; 8, magnet steel carriage A; 9, test probe; 10, connecting rod; 11, measurement of magnetic field device; 12, tstr shell; 13, supporting plate; 14, apparatus measures platform; 15, spring; 16, display panel; 17, scale A; 18, support bar; 19, horizontal part; 20, vertical component effect; 21, scale B.
Embodiment
For further understanding summary of the invention of the present utility model, Characteristic, exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
as Figure 1-3, a kind of use in magnetron sputtering coating magnetic steel detection device, comprise without magnetic section material framework 5, magnet steel carriage A8, magnet steel carriage B6, apparatus measures platform 14, measurement of magnetic field device 11, described magnet steel carriage A8, magnet steel carriage B6 is separately fixed at the both sides without magnetic section material framework 5, be fitted with magnet steel 3 on it, described apparatus measures platform 14 includes slide block 1, web plate 2, be provided with slideway 4 in the side without magnetic section material framework 5, dispose described slide block 1 in it, be provided with scale B21 in the one or both sides of slideway 4, be provided with a horizontal part 19 and a vertical component effect 20 on described web plate 2, horizontal part 19 on web plate 2 is fixed on the upper surface of slide block 1, be fitted with an indicating piece 7 that is the pointer shape on it, be provided with supporting plate 13 on described vertical component effect 20, described measurement of magnetic field device 11 is arranged on described supporting plate 13.Described measurement of magnetic field device 11 includes connecting rod 10, support bar 18, tstr shell 12, one end and the described connecting rod 10 of described support bar 18 are hinged, the other end is fixed on the outside surface of described tstr shell 12, one end of described connecting rod 10 is provided with test probe 9, the other end and is fixed on the inside upper surface of tstr shell 12 by spring 15, the inside of described tstr shell 12 is provided with display panel 16, is provided with scale A17 on display panel 16.
principle of work of the present utility model is: at first magnet steel 3 is taken out in the target pipe, cleaning surfaces is clean, then the two ends with magnet steel 3 are placed on magnet steel carriage A8 and magnet steel carriage B6, and the part of magnetic is arranged down, then measurement of magnetic field device 11 is placed on the supporting plate 13 of apparatus measures platform 14, then along slideway 4 sliding sliders 1, make measurement of magnetic field device 11 demonstrate the magnetism intensity of magnet steel 3 each part, then draw out the coordinate diagram of displacement and magnetism intensity by recording data, if the situation of magnetism intensity mistake appears in magnet steel, the operator can adjust according to the position of indicating piece 7 indications, can proceed after adjustment to measure.
Above an embodiment of the present utility model is had been described in detail, but described content is only preferred embodiment of the present utility model, can not be considered to be used to limiting practical range of the present utility model.All equalizations of doing according to the utility model application range change and improve etc., within all should still belonging to patent covering scope of the present utility model.
Claims (2)
1. use in magnetron sputtering coating magnetic steel detection device, it is characterized in that: comprise without magnetic section material framework (5), magnet steel carriage A(8), magnet steel carriage B(6), apparatus measures platform (14), measurement of magnetic field device (11), described magnet steel carriage A(8), magnet steel carriage B(6) be separately fixed at the both sides without magnetic section material framework (5), be fitted with magnet steel (3) on it, described apparatus measures platform (14) includes slide block (1), web plate (2), be provided with slideway (4) in the side without magnetic section material framework (5), dispose described slide block 1 in it, one or both sides at slideway (4) are provided with scale B(21), be provided with a horizontal part (19) and a vertical component effect (20) on described web plate (2), horizontal part (19) on web plate (2) is fixed on the upper surface of slide block (1), be fitted with an indicating piece (7) that is the pointer shape on it, be provided with supporting plate (13) on described vertical component effect (20), measurement of magnetic field device (11) is housed on it.
2. a kind of use in magnetron sputtering coating magnetic steel detection device according to claim 1, it is characterized in that: described measurement of magnetic field device (11) includes connecting rod (10), support bar (18), tstr shell (12), described support bar (18) one ends and described connecting rod (10) are hinged, the other end is fixed on the outside surface of described tstr shell (12), described connecting rod (10) one ends are provided with test probe (9), the other end is fixed on the inside upper surface of tstr shell (12) by spring (15), the inside of described tstr shell (12) is provided with band scale A(17) display panel (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220506303 CN202925090U (en) | 2012-09-29 | 2012-09-29 | Magnetic steel detection device for magnetron sputtering film plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220506303 CN202925090U (en) | 2012-09-29 | 2012-09-29 | Magnetic steel detection device for magnetron sputtering film plating |
Publications (1)
| Publication Number | Publication Date |
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| CN202925090U true CN202925090U (en) | 2013-05-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220506303 Expired - Fee Related CN202925090U (en) | 2012-09-29 | 2012-09-29 | Magnetic steel detection device for magnetron sputtering film plating |
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| CN (1) | CN202925090U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103710671A (en) * | 2012-09-29 | 2014-04-09 | 中国南玻集团股份有限公司 | Magnetic steel detection apparatus for magnetron sputtering coating |
| CN103817662A (en) * | 2014-02-14 | 2014-05-28 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Metal-substrate mounting and clamping workbench |
| CN104035057A (en) * | 2014-06-10 | 2014-09-10 | 何华琼 | Central magnetic field automatic tester |
| CN111562287A (en) * | 2020-06-28 | 2020-08-21 | 福清市诚冠科技有限公司 | Can detect verifying attachment that plastic alloy panel contains metal volume qualification degree |
-
2012
- 2012-09-29 CN CN 201220506303 patent/CN202925090U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103710671A (en) * | 2012-09-29 | 2014-04-09 | 中国南玻集团股份有限公司 | Magnetic steel detection apparatus for magnetron sputtering coating |
| CN103817662A (en) * | 2014-02-14 | 2014-05-28 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Metal-substrate mounting and clamping workbench |
| CN104035057A (en) * | 2014-06-10 | 2014-09-10 | 何华琼 | Central magnetic field automatic tester |
| CN111562287A (en) * | 2020-06-28 | 2020-08-21 | 福清市诚冠科技有限公司 | Can detect verifying attachment that plastic alloy panel contains metal volume qualification degree |
| CN111562287B (en) * | 2020-06-28 | 2020-11-20 | 福清市诚冠科技有限公司 | Can detect verifying attachment that plastic alloy panel contains metal volume qualification degree |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160214 Address after: Six industrial intersection, Shekou Industrial Zone, Guangdong, Shenzhen, 518067 Patentee after: CSG Holding Co., Ltd. Patentee after: Tianjin Nanbo Energy-saving Glass Co., Ltd. Address before: Six industrial intersection, Shekou Industrial Zone, Guangdong, Shenzhen, 518067 Patentee before: CSG Holding Co., Ltd. Patentee before: Tianjin Nanbo Engineering Glass Co., Ltd. Patentee before: Tianjin Nanbo Energy-saving Glass Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130508 Termination date: 20180929 |