CN205175359U - Off -line glass substrate warpage detection device - Google Patents

Abstract

An off-line glass substrate warpage detection device belongs to the field of precision measurement equipment for glass substrates. The structure includes a detection platform and a detection mechanism arranged above the detection platform by means of a displacement mechanism. The key lies in: the material of the detection platform is marble, The upper end surface is provided with a placement groove for the glass substrate to be inspected, and bosses with a height equal to the depth of the placement groove are evenly arranged in the placement groove. By improving the placement surface of the detection platform, the problem of air clamping between the lower end surface of the glass substrate to be inspected and the upper end surface of the detection platform is solved, and the measurement accuracy of the device is improved.

Description

An off-line glass substrate warpage detection device

technical field

The utility model belongs to the field of precision measuring equipment for glass substrates, in particular to an off-line glass substrate warpage detection device.

Background technique

During the down-draw forming process of liquid crystal glass substrates, there are special rollers to pull the glass substrates to the required thickness. During the drawing process, the surface of the glass substrates will produce uneven and warped phenomena. Based on the quality specifications of the glass substrate products, it is necessary to The warpage data of the glass substrate is detected by warpage measurement equipment. The measurement principle is to measure the relative height of each point to be measured on the glass substrate, and then calculate the difference between the highest point and the lowest point, which reflects the warpage of the entire board.

The existing glass substrate warpage detection device has a structure including a granite detection platform, a laser probe, and an XYZ displacement mechanism. Since the surface of the produced glass substrate is not absolutely flat, when it is placed on the granite inspection platform, a certain amount of air will be clamped between the lower end surface of the glass substrate and the upper end surface of the inspection platform. measurement error due to curvature.

Contents of the invention

The technical problem to be solved by the utility model is to provide an off-line glass substrate warpage detection device. By improving the placement surface of the detection platform, the problem of clamping air between the lower end surface of the glass substrate to be inspected and the upper end surface of the detection platform is solved. , improving the measurement accuracy of the device.

The technical scheme adopted by the utility model: an off-line glass substrate warpage detection device, the structure includes a detection platform and a detection mechanism arranged above the detection platform by means of a displacement mechanism, the key lies in: the material of the detection platform is marble, The upper end surface is provided with a placement groove for the glass substrate to be inspected, and bosses with a height equal to the depth of the placement groove are evenly arranged in the placement groove.

Both the length and the width of the placement groove are larger than the glass substrate to be inspected.

The shape of the horizontal section of the boss is square, or circular, or triangular.

The surface roughness grade of the upper end face of the boss is 00 grade.

The displacement mechanism includes a bracket, an X-direction displacement guide rail arranged on the bracket, a Z-direction displacement guide rail arranged on the X-direction displacement guide rail, and a Y-direction displacement guide rail arranged on the Z-direction displacement guide rail. The detection mechanism is arranged on the Y-direction displacement guide rail. rails.

The detection mechanism is a laser probe, and the output end of the laser probe is connected with the output end of the display device of the control system.

Beneficial effects produced by adopting the utility model: the utility model solves the problems between the lower end surface of the glass substrate to be inspected and the upper end surface of the detection platform by setting a placement groove on the detection platform and evenly arranging bosses in the placement groove. The problem of clamping air between them improves the measurement accuracy of the device.

Description of drawings

Fig. 1 is a structural representation of the utility model;

Fig. 2 is a schematic cross-sectional view of placing a glass substrate to be inspected on a detection platform;

In the attached drawings: 1 is the detection platform, 1-1 is the placement slot, 1-2 is the boss, 2 is the glass substrate to be inspected, 3-1 is the bracket, 3-2 is the X-direction displacement guide rail, 3-3 is the Z to the displacement guide rail, 3-4 is the Y direction displacement guide rail, and 4 is the detection mechanism.

detailed description

Referring to accompanying drawings 1-2, an off-line glass substrate warpage detection device, the structure includes a detection platform 1 and a detection mechanism 4 arranged above the detection platform 1 by means of a displacement mechanism. The key lies in: the material of the detection platform 1 It is marble, and its upper end surface is provided with a placement groove 1-1 for the glass substrate 2 to be inspected. In the placement groove 1-1, there are evenly arranged bosses 1-2 with the same height as the placement groove 1-1. The length and width of the placement groove 1-1 are larger than the glass substrate 2 to be inspected; the shape of the horizontal section of the boss 1-2 is square, or circular, or triangular; the surface roughness grade of the upper end surface of the boss 1-2 is 00 class. When the glass substrate 2 to be inspected is placed in the placement groove 1-1 on the detection platform 1, the lower end surface of the glass substrate 2 to be inspected is in contact with the upper end surface of the boss 1-2. The air between the lower end surface of the glass substrate 2 and the upper end surface of the boss 1-2 is discharged from the gap between the bosses 1-2, so that the upper end surface of the boss 1-2 is completely attached to the lower end surface of the glass substrate 2 to be tested. combined to ensure the accuracy of the detection mechanism 4 in detecting the warpage of the glass substrate 2 to be inspected, and to measure relatively true and accurate parameter values; The coefficient of friction between the platforms 1 prevents the phenomenon of adsorption between the glass substrate 2 to be inspected and the detection platform 1, which affects the true warpage of the glass substrate 2 to be inspected.

The displacement mechanism 3 comprises a support 3-1, an X direction displacement guide rail 3-2 arranged on the support 3-1, a Z direction displacement guide rail 3-3 arranged on the X direction displacement guide rail 3-2, and a Z direction displacement guide rail arranged on the Z direction displacement guide rail. 3-3 on the Y-direction displacement guide rail 3-4, and the detection mechanism 4 is arranged on the Y-direction displacement guide rail 3-4. The bracket 3-1 is arranged around the detection platform 1, the X-direction displacement guide rail 3-2 is arranged on the support 3-1, and is located on both sides of the detection platform 1; the X-direction displacement guide rail 3-2, the Z-direction displacement guide rail 3- 3 and Y direction displacement guide rail 3-4 are guide rails or ball screws formed by slide rails and sliders.

The detection mechanism 4 is a laser probe, and the output end of the laser probe is connected with the output end of the display device of the control system.

In specific implementation, during the warpage detection process of the glass substrate 2 to be inspected, when the glass substrate 2 to be inspected is placed in the placement groove 1-1 on the inspection platform 1, the lower end surface of the glass substrate to be inspected 2 and the boss 1 The upper end surface of -2 is completely in contact with; by means of the X-direction displacement guide rail 3-2, the Z-direction displacement guide rail 3-3 and the Y-direction displacement guide rail 3-4, the detection mechanism 4 detects the objects placed on the detection platform 1 at equal distances. The warpage of each part of the glass substrate 2 to be inspected can then be used to control the produced glass substrate according to relatively accurate parameter values measured.

Claims (6)

1. an off-line glass substrate wrapping pick-up unit, structure comprises detection platform (1) and is arranged on the testing agency (4) of detection platform (1) top by means of displacement mechanism, it is characterized in that: the standing groove (1-1) that the material of described detection platform (1) is marble, its upper surface is provided with glass substrate to be checked (2), evenly distributed in standing groove (1-1) have the boss (1-2) contour with standing groove (1-1) degree of depth.

2. off-line glass substrate wrapping pick-up unit according to claim 1, is characterized in that: the length of described standing groove (1-1) and width are all greater than glass substrate to be checked (2).

3. off-line glass substrate wrapping pick-up unit according to claim 1, is characterized in that: the shape of described boss (1-2) horizontal section is square, or circular, or triangle.

4. the off-line glass substrate wrapping pick-up unit according to claim 1 or 3, is characterized in that: the roughness grade of described boss (1-2) upper surface is 00 grade.

5. off-line glass substrate wrapping pick-up unit according to claim 1, it is characterized in that: institute's displacement mechanism comprises support (3-1), be arranged on X on support (3-1) to displacement guide rail (3-2), be arranged on X to the Z-direction displacement guide rail (3-3) on displacement guide rail (3-2) and the Y-direction displacement guide rail (3-4) that is arranged on Z-direction displacement guide rail (3-3), described testing agency (4) is arranged on Y-direction displacement guide rail (3-4).

6. off-line glass substrate wrapping pick-up unit according to claim 1 or 5, is characterized in that: described testing agency (4) is laser probe, and the output terminal of laser probe is connected with the output terminal of the display device of control system.