CN110031781A - A kind of detection jig and its detection method - Google Patents
A kind of detection jig and its detection method Download PDFInfo
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- CN110031781A CN110031781A CN201910425102.0A CN201910425102A CN110031781A CN 110031781 A CN110031781 A CN 110031781A CN 201910425102 A CN201910425102 A CN 201910425102A CN 110031781 A CN110031781 A CN 110031781A
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- induction intensity
- magnetic induction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/10—Plotting field distribution ; Measuring field distribution
Abstract
The invention discloses a kind of detection jig and its detection methods, by the way that at least one slide rail that there is the braced frame of the first guide rail extended in a first direction and extend in a second direction is arranged, and make that slide rail is set on the first guide rail and slide rail is located at same level, multiple magnetic force detection probes are set on slide rail in this way, each magnetic force detection probe is set to be located at sustained height, so that the magnetic induction intensity of magnetic partition of each magnetic force detection probe at acquisition sustained height, reduces the error of the different collected magnetic induction intensity of magnetic force detection probe.Each collected magnetic induction intensity of magnetic force detection probe, and the magnetic induction intensity difference between calculated magnetic induction intensity and benchmark magnetic induction intensity are obtained by magnetic force processing unit；When at least one magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, determines that the Distribution of Magnetic Field of magnetic partition is not uniform, the accuracy of the whether equally distributed result in magnetic field of magnetic partition can be improved.
Description
Technical field
The present invention relates to field of display technology, in particular to a kind of detection jig and its detection method.
Background technique
Organic Light Emitting Diode (Organic Light Emitting Diode, OLED) display have low energy consumption, from
The advantages that luminous, wide viewing angle and fast response time, be one of the hot spot in current display research field, it is considered to be the next generation is aobvious
Show technology.Currently, the mode for preparing the film layer in the pixel unit of OLED display using vapor deposition mode is relatively broad.It is using
When vapor deposition mode forms a film, mask plate is adsorbed on substrate to be deposited generally by the magnetic partition in evaporation coating device, will be steamed
Plating mask plate is fixed.
However, the magnetic field of magnetic partition may have non-uniform situation, it is poor to will lead to mask plate effect in this way, thus
The performance for the film layer being prepared into is influenced, and then influences the overall performance of OLED display.Currently, being used for the magnetic field of detection magnetic partition
The detection jig of uniformity is once only capable of reading a data, and height ununified when detecting, miss so as to cause detection
Difference is larger.
Summary of the invention
The embodiment of the present invention provides a kind of detection jig and its detection method, to improve detection precision.
The embodiment of the invention provides a kind of detection jigs, comprising: has for extending in a first direction and being oppositely arranged
The braced frame of one guide rail, at least one slide rail extended in a second direction, magnetic force processing unit and be located at the cunning
Multiple magnetic force detection probes on dynamic guide rail；Wherein, the slide rail is located on first guide rail and for along described the
The sliding of one guide rail；The slide rail is located at same level；
The magnetic force detection probe is used to acquire the magnetic induction intensity of magnetic partition；
The magnetic force processing unit calculates institute for obtaining each collected magnetic induction intensity of magnetic force detection probe
State the magnetic induction intensity difference between magnetic induction intensity and benchmark magnetic induction intensity；In at least one magnetic induction intensity difference
When being unsatisfactory for default magnetic induction intensity difference range, determine that the Distribution of Magnetic Field of the magnetic partition is not uniform.
Optionally, in embodiments of the present invention, the detection jig further include: levelness processing unit and be located at described
Multiple levelness detection probes on slide rail；
The levelness detection probe is used for when contacting with the coldplate, is acquired corresponding with the coldplate contact position
The levelness detection probe probe tip and mask plate supporting table upper surface between detecting distance；
The levelness processing unit is calculated for obtaining each collected detecting distance of levelness detection probe
The distance between the detecting distance and reference distance difference；Pre-determined distance difference is unsatisfactory at least one described distance difference
When range, determine that the coldplate is not in horizontality.
Optionally, in embodiments of the present invention, the detection jig further include: cooling slab adjusting device；
The cooling slab adjusting device is used to determine that the coldplate is not in the levelness processing unit horizontal
After state, according to the distance difference for being unsatisfactory for the pre-determined distance difference range, to being unsatisfactory for the pre-determined distance difference range
Height at where the corresponding coldplate of distance difference is adjusted.
Optionally, in embodiments of the present invention, there are the slide rail two contacted with the braced frame to contact
End, the magnetic force detection probe and the levelness detection probe are alternately and evenly distributed between described two contact jaws.
Optionally, in embodiments of the present invention, the detection jig further include: for showing the magnetic induction intensity and institute
State the display of detecting distance.
Optionally, in embodiments of the present invention, the detection jig further include: magnetic baffle-plate adjuster；
The magnetic baffle-plate adjuster is used to determine that the Distribution of Magnetic Field of the magnetic partition is not equal in the magnetic force processing unit
After even, according to the magnetic induction intensity difference for being unsatisfactory for the default magnetic induction intensity difference range, to being unsatisfactory for the default magnetic
Magnetic induction intensity at where the corresponding magnetic partition of the magnetic induction intensity difference of induction difference range is adjusted.
Optionally, in embodiments of the present invention, the braced frame further include: multiple position-limiting fixture groups；Wherein, each described
Position-limiting fixture group includes: two position-limiting fixtures；
Described two position-limiting fixtures are relatively arranged on first guide rail two sides；And the position-limiting fixture is for fixing institute
State slide rail.
The embodiment of the invention also provides a kind of detection methods of above-mentioned detection jig, comprising:
Magnetic partition face in the braced frame and vapor deposition setting is arranged；
Control the different predeterminated positions that the slide rail is in turn secured to first guide rail；Wherein, in the cunning
When dynamic guide rail is fixed on each predeterminated position of first guide rail, control each magnetic force detection probe acquisition with it is described
Magnetic induction intensity at magnetic partition face, and obtain the collected magnetic induction intensity of magnetic force detection probe；
Calculate the magnetic induction intensity difference between the magnetic induction intensity and benchmark magnetic induction intensity；
When at least one described magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, the magnetic is determined
The Distribution of Magnetic Field of partition is not uniform.
Optionally, in embodiments of the present invention, it after the Distribution of Magnetic Field of the determination magnetic partition is not uniform, also wraps
It includes:
Control the magnetic induction intensity that the magnetic baffle-plate adjuster adjusts the magnetic partition.
Optionally, in embodiments of the present invention, each institute that first guide rail is fixed in the slide rail
When stating predeterminated position, further includes:
It controls the levelness detection probe to contact with the coldplate, and acquires corresponding with the coldplate contact position
Detecting distance between the probe tip and mask plate supporting table upper surface of the levelness detection probe, and obtain each water
The collected detecting distance of Pingdu detection probe；
Calculate the distance between the detecting distance and reference distance difference；
When at least one described distance difference is unsatisfactory for pre-determined distance difference range, determine that the coldplate is not in water
Level state.
Optionally, in embodiments of the present invention, it after the determination coldplate is not in horizontality, also wraps
It includes:
Control the levelness that the cooling slab adjusting device adjusts the coldplate.
The present invention has the beneficial effect that:
Detection jig provided in an embodiment of the present invention and its detection method have the extended in a first direction by being arranged
The braced frame of one guide rail and at least one slide rail extended in a second direction, and slide rail is made to be set to the first guide rail
Upper and slide rail is located at same level, and multiple magnetic force detection probes are set on slide rail in this way, can make each magnetic
Power detection probe is located at sustained height, so as to so that each magnetic force detection probe acquisition sustained height at magnetic partition magnetic strength
Intensity is answered, and then reduces the error of the different collected magnetic induction intensity of magnetic force detection probe.Later, pass through magnetic force processing unit
Obtain each collected magnetic induction intensity of magnetic force detection probe, and the magnetic between calculated magnetic induction intensity and benchmark magnetic induction intensity
Induction difference；And it when at least one magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, determines
The Distribution of Magnetic Field of magnetic partition is not uniform, and the accuracy of the whether equally distributed result in magnetic field of magnetic partition can be improved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the detection jig in the embodiment of the present invention；
Fig. 2 is the concrete structure schematic diagram in the region SS of detection jig shown in FIG. 1；
Fig. 3 is the flow chart of detection method provided in an embodiment of the present invention；
Fig. 4 is the schematic cross-sectional view of detection jig provided in an embodiment of the present invention when detecting；
Fig. 5 is the overlooking structure diagram of detection jig provided in an embodiment of the present invention when detecting.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
Attached drawing, the technical solution of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this hair
Bright a part of the embodiment, instead of all the embodiments.Based on described the embodiment of the present invention, ordinary skill
Personnel's every other embodiment obtained under the premise of being not necessarily to creative work, shall fall within the protection scope of the present invention.
Unless otherwise defined, the technical term or scientific term that the present invention uses should be tool in fields of the present invention
The ordinary meaning for thering is the personage of general technical ability to be understood." first ", " second " used in the present invention and similar word are simultaneously
Any sequence, quantity or importance are not indicated, and are used only to distinguish different component parts." comprising " or "comprising" etc.
Similar word means that the element or object before the word occur covers the element or object for appearing in the word presented hereinafter
And its it is equivalent, and it is not excluded for other elements or object.The similar word such as " connection " or " connected " is not limited to physics
Or mechanical connection, but may include electrical connection, it is either direct or indirectly.
It should be noted that the size and shape of each figure do not reflect actual proportions in attached drawing, purpose is schematically illustrate
The content of present invention.And same or similar label indicates same or similar element or has same or like function from beginning to end
The element of energy.
The embodiment of the present invention provides a kind of detection jig, as shown in Figure 1, may include: to have to extend along first direction F1
And the braced frame 100 for the first guide rail 110 being oppositely arranged, at least one slide rail 200, magnetic that F2 extends in a second direction
Power processing unit 310 and multiple magnetic force detection probes 320 on slide rail 200；Wherein, slide rail 200 is located at
On first guide rail 110 and for being slided along the first guide rail 110；Slide rail 200 is located at same level；
Magnetic force detection probe 320 is used to acquire the magnetic induction intensity of magnetic partition；
Magnetic force processing unit 310 calculates magnetic strength for obtaining the collected magnetic induction intensity of each magnetic force detection probe 320
Answer the magnetic induction intensity difference between intensity and benchmark magnetic induction intensity；It is unsatisfactory for presetting at least one magnetic induction intensity difference
When magnetic induction intensity difference range, determine that the Distribution of Magnetic Field of magnetic partition is not uniform.
Detection jig provided in an embodiment of the present invention has the support of the first guide rail extended in a first direction by being arranged
Frame and at least one slide rail extended in a second direction, and it is set to slide rail on the first guide rail and slide rail
Positioned at same level, multiple magnetic force detection probes are set on slide rail in this way, each magnetic force detection probe position can be made
In sustained height, so as to so that magnetic partition of each magnetic force detection probe at acquisition sustained height magnetic induction intensity, in turn
Reduce the error of the different collected magnetic induction intensity of magnetic force detection probe.Later, each magnetic force is obtained by magnetic force processing unit
The collected magnetic induction intensity of detection probe, and the magnetic induction intensity between calculated magnetic induction intensity and benchmark magnetic induction intensity is poor
Value；And when at least one magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, determine the magnetic of magnetic partition
Field distribution is not uniform, and the accuracy of the whether equally distributed result in magnetic field of magnetic partition can be improved.
In the specific implementation, in embodiments of the present invention, slide rail 200 can be made to be set as one；Alternatively, can also be with
Slide rail 200 is set to be set as 2；Alternatively, slide rail 200 can also be made to be set as the quantity such as 3,4,5.Certainly, in reality
In, the quantity of slide rail 200 can design determination according to actual application environment, be not limited thereto.
In the specific implementation, in embodiments of the present invention, as shown in Figure 1, slide rail 200 has and braced frame 100
Two contact jaws 210,220 of contact, these magnetic force detection probes 320 are evenly distributed between contact jaw 210 and contact jaw 220
Slide rail 200 on.Further, the interval between each adjacent two magnetic force detection probe 320 is identical.Illustratively, magnetic
Power detection probe 320 can be set to magnetometric sensor.The working principle and structure of the magnetometric sensor can be with the prior arts
In it is identical, be it will be apparent to an ordinarily skilled person in the art that, this will not be repeated here, also should not be used as to limit of the invention
System.
The Distribution of Magnetic Field for determining magnetic partition not uniformly after, can by adjust magnetic partition magnetic induction intensity so that
The field homogeneity of magnetic partition is distributed.In the specific implementation, in embodiments of the present invention, detection jig can also include: magnetic partition
Adjust device.After Distribution of Magnetic Field of the magnetic baffle-plate adjuster for determining magnetic partition in magnetic force processing unit is uniform, according to
It is unsatisfactory for the magnetic induction intensity difference of default magnetic induction intensity difference range, to being unsatisfactory for default magnetic induction intensity difference range
Magnetic induction intensity at where the corresponding magnetic partition of magnetic induction intensity difference is adjusted, so that the field homogeneity of magnetic partition point
Cloth.
Generally, when being formed a film using vapor deposition mode, usually the raw material under a high vacuum in evaporation source are heated, and make its original
Son or molecule gasify from surface to be escaped, and by the mask plate of the positioning mechanism in evaporation coating device, is incident on substrate specific position shape
Film forming layer.However, since the heat that evaporation source gives off has thermal expansion effects to mask plate and substrate, to need that cooling is arranged
Plate, to reduce the temperature of substrate by coldplate.Also, coldplate also acts as open and flat substrate effect.It is to detect coldplate
It is no smooth, in the specific implementation, in embodiments of the present invention, as shown in Figure 1, detection jig can also include: levelness processing
Unit 410 and multiple levelness detection probes 420 on slide rail；
Levelness detection probe 420 is used for when contacting with coldplate, acquires levelness corresponding with coldplate contact position
Detecting distance between the probe tip and mask plate supporting table upper surface of detection probe；
Levelness processing unit 410 calculates inspection for obtaining the collected detecting distance of each levelness detection probe 420
Ranging from the distance between reference distance difference；When at least one distance difference is unsatisfactory for pre-determined distance difference range, really
Determine coldplate and is not in horizontality.Each levelness detection probe can be made to be located at sustained height, in this way so as to accurate
Acquisition testing distance improves the accuracy of testing result.Also, can with the detecting distance at the multiple positions of one acquisition, from
And reduce detection time.
In the specific implementation, in embodiments of the present invention, as shown in Figure 1, these levelness detection probes 420 are evenly distributed
On slide rail 200 between contact jaw 210 and contact jaw 220.Further, each adjacent two levelness detection probe
Interval between 420 is identical.Illustratively, levelness detection probe 420 can be set to range sensor.The range sensor
It such as may include elastic sensor.The working principle and structure of the range sensor can with it is in the prior art identical, be
It will be apparent to an ordinarily skilled person in the art that, this will not be repeated here, also should not be taken as limiting the invention.
It, can be by adjusting coldplate, so that coldplate after the levelness for determining coldplate is not in horizontality
Magnetic field be in horizontality.In the specific implementation, in embodiments of the present invention, detection jig can also include: coldplate tune
Engagement positions.The cooling slab adjusting device is used for after levelness processing unit determines that coldplate is not in horizontality, according to not
The distance difference for meeting pre-determined distance difference range, coldplate corresponding to the distance difference for being unsatisfactory for pre-determined distance difference range
Height at place is adjusted, so that coldplate may be at horizontality.
In the specific implementation, in embodiments of the present invention, as shown in Figures 1 and 2, magnetic force detection probe 320 and levelness
Detection probe 420 is alternately and evenly distributed between two contact jaws 210 and 220.Further, it detects and visits per adjacent magnetic force
Interval between first 320 and levelness detection probe 420 is identical.
General magnetic partition with and the size of coldplate be to be designed according to the size of substrate, and the shape of magnetic partition
Shape with coldplate is respectively rectangle, and when being deposited, the long side of magnetic partition and the long side of coldplate are correspondingly arranged.?
When it is implemented, in embodiments of the present invention, braced frame 100 can be made to be shaped to rectangle, and make support frame
The size of frame 100 is greater than or equal to the size of magnetic partition.Magnetic force detection probe 320 and levelness detection probe 420 are fixed respectively
On slide rail 200.Wherein, detect in the Distribution of Magnetic Field to magnetic partition and whether horizontal is being in coldplate
When state is detected, the first guide rail can be made to be correspondingly arranged along the long side of magnetic partition.Also, lead slide rail 200 first
Inswept region overlay magnetic partition and coldplate is slided on rail 110, so as to can detecte magnetic partition more for magnetic force detection probe 320
The magnetic induction intensity at place, and the detecting distance for making levelness detection probe 420 can detecte coldplate many places.
In the detection process, in order to intuitively see collected magnetic induction intensity and detecting distance, in the specific implementation,
In embodiments of the present invention, as shown in Fig. 2, detection jig can also include: for showing magnetic induction intensity and detecting distance
Display 500.
When detecting, in order to avoid slide rail sliding has an impact the precision of testing result, in the specific implementation,
In the embodiment of the present invention, as shown in Figure 1, braced frame 100 can also include: multiple position-limiting fixture groups 120；Wherein, each limit
Jig group 120 includes: two position-limiting fixtures 121,122.Two position-limiting fixtures 121,122 are relatively arranged on 110 liang of the first guide rail
Side；And position-limiting fixture 121,122 is for fixing slide rail 200.Further, the quantity of position-limiting fixture group 120 can be 2
A, 3,4 etc..Certainly, in practical applications, the quantity of position-limiting fixture group 120 can be set according to actual application environment
Meter determines, is not limited thereto.
Based on the same inventive concept, the embodiment of the present invention also provides a kind of detection method for detecting jig, as shown in figure 3,
It may include steps of:
S301, the magnetic partition face in braced frame and vapor deposition setting is arranged；
S302, control slide rail are in turn secured to the different predeterminated positions of the first guide rail；Wherein, solid in slide rail
When each predeterminated position of the first guide rail, each magnetic force detection probe is controlled for acquiring and the magnetic induction at magnetic partition face
Intensity, and obtain the collected magnetic induction intensity of magnetic force detection probe；The predeterminated position of first guide rail can be each limit
Position where jig group.
Magnetic induction intensity difference between S303, calculated magnetic induction intensity and benchmark magnetic induction intensity；
S304, when at least one magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, determine magnetic every
The Distribution of Magnetic Field of plate is not uniform.
It is provided in an embodiment of the present invention detection jig detection method, by by braced frame and vapor deposition setting in magnetic every
The setting of plate face, and control the different predeterminated positions that slide rail is in turn secured to the first guide rail；Wherein, solid in slide rail
When each predeterminated position of the first guide rail, each magnetic force detection probe is controlled for acquiring and the magnetic induction at magnetic partition face
Intensity, and obtain the collected magnetic induction intensity of magnetic force detection probe；Later, pass through calculated magnetic induction intensity and benchmark magnetic induction
Magnetic induction intensity difference between intensity；Default magnetic induction intensity difference range is unsatisfactory at least one magnetic induction intensity difference
When, determine that the Distribution of Magnetic Field of magnetic partition is not uniform.Since multiple magnetic force detection probes are set on slide rail, each magnetic can be made
Power detection probe is located at sustained height, to improve the accuracy of testing result.
In the specific implementation, in embodiments of the present invention, the Distribution of Magnetic Field for determining magnetic partition not uniformly after, can be with
It include: the magnetic induction intensity for controlling magnetic baffle-plate adjuster adjustment magnetic partition.
In the specific implementation, in embodiments of the present invention, each predeterminated position of the first guide rail is fixed in slide rail
When, can also include:
Controlled level degree detection probe is contacted with coldplate, and is acquired levelness detection corresponding with coldplate contact position and visited
Detecting distance between the probe tip and mask plate supporting table upper surface of head, and it is collected to obtain each levelness detection probe
Detecting distance；
Calculate the distance between detecting distance and reference distance difference；
When at least one distance difference is unsatisfactory for pre-determined distance difference range, determine that coldplate is not in horizontality.
In the specific implementation, in embodiments of the present invention, it after determining that coldplate is not in horizontality, can also wrap
It includes: controlling the levelness of cooling slab adjusting device adjustment coldplate.
Below with reference to Fig. 1, Fig. 4 and Fig. 5, the detection method of detection jig is enumerated by embodiment, but reader should be advised that,
Detailed process is not limited to this.Detection method provided in an embodiment of the present invention, includes the following steps:
(1) braced frame 100 is placed into mask plate (Mask) supporting table 10 in vapor deposition setting, so that braced frame
100 are arranged with magnetic partition 20 and 30 face of coldplate respectively.And the long side of braced frame 100 respectively with magnetic partition 20 and coldplate
30 long side is correspondingly arranged.
(2) with the direction of arrow JF meaning, multiple position-limiting fixture groups are defined as first to N position-limiting fixture group；Wherein,
N is the sum of position-limiting fixture group.Slide rail 200 is slided at the first position-limiting fixture group 120, and passes through the first position-limiting fixture
Slide rail 200 is fixed group 120.Control each acquisition of magnetic force detection probe 320 and the magnetic induction at 20 face of magnetic partition
Intensity, and the collected magnetic induction intensity of magnetic force detection probe is obtained, and obtain collected magnetic induction intensity.And control water
Pingdu detection probe 420 is contacted with coldplate 30, and acquires levelness detection probe 320 corresponding with 30 contact position of coldplate
Detecting distance h between 10 upper surface S0 of probe tip and mask plate supporting table.
Slide rail 200 is slided at the second position-limiting fixture group 120, and will sliding by the second position-limiting fixture group 120
Guide rail 200 is fixed.Each acquisition of magnetic force detection probe 320 and the magnetic induction intensity at 20 face of magnetic partition are controlled, and is obtained
The collected magnetic induction intensity of magnetic force detection probe, and obtain collected magnetic induction intensity.And the detection of controlled level degree is visited
First 420 contact with coldplate 30, and acquire corresponding with 30 contact position of coldplate levelness detection probe 320 probe tip and
Detecting distance h between 10 upper surface S0 of mask plate supporting table.
Later, and so on, until slide rail 200 is slided at N position-limiting fixture group 120, and limited by N
Slide rail 200 is fixed jig group 120.Control each acquisition of magnetic force detection probe 320 and the magnetic at 20 face of magnetic partition
Induction, and the collected magnetic induction intensity of magnetic force detection probe is obtained, and obtain collected magnetic induction intensity.And control
Levelness detection probe 420 processed is contacted with coldplate 30, and acquires levelness detection probe corresponding with 30 contact position of coldplate
Detecting distance h between 320 10 upper surface S0 of probe tip and mask plate supporting table.
The magnetic induction intensity at multiple positions in magnetic partition 20 available in this way, and obtain more in coldplate 30
Detecting distance at a position.
(3) the magnetic induction intensity difference between each magnetic induction intensity and benchmark magnetic induction intensity is calculated, and is calculated every
The distance between a detecting distance and reference distance difference.
Wherein it is possible to using collected a certain magnetic induction intensity as benchmark magnetic induction intensity, alternatively, can also pass through through
It tests and benchmark magnetic induction intensity is designed, be not limited thereto.
And it can be using collected a certain detecting distance as reference distance, alternatively, can also be by experience to benchmark
Distance is designed, and is not limited thereto.
(4) when at least one magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, magnetic partition is determined
Distribution of Magnetic Field it is ununiform, and control magnetic baffle-plate adjuster adjustment magnetic partition magnetic induction intensity.
When at least one distance difference is unsatisfactory for pre-determined distance difference range, determine that coldplate is not in horizontality,
And control the levelness of cooling slab adjusting device adjustment coldplate.
Detection jig provided in an embodiment of the present invention and its detection method have the extended in a first direction by being arranged
The braced frame of one guide rail and at least one slide rail extended in a second direction, and slide rail is made to be set to the first guide rail
Upper and slide rail is located at same level, and multiple magnetic force detection probes are set on slide rail in this way, can make each magnetic
Power detection probe is located at sustained height, so as to so that each magnetic force detection probe acquisition sustained height at magnetic partition magnetic strength
Intensity is answered, and then reduces the error of the different collected magnetic induction intensity of magnetic force detection probe.Later, pass through magnetic force processing unit
Obtain each collected magnetic induction intensity of magnetic force detection probe, and the magnetic between calculated magnetic induction intensity and benchmark magnetic induction intensity
Induction difference；And it when at least one magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, determines
The Distribution of Magnetic Field of magnetic partition is not uniform, and the accuracy of the whether equally distributed result in magnetic field of magnetic partition can be improved.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (11)
1. a kind of detection jig characterized by comprising have the branch for the first guide rail for extending in a first direction and being oppositely arranged
Support frame frame, at least one slide rail extended in a second direction, magnetic force processing unit and on the slide rail
Multiple magnetic force detection probes；Wherein, the slide rail is located on first guide rail and for sliding along first guide rail；
The slide rail is located at same level；
The magnetic force detection probe is used to acquire the magnetic induction intensity of magnetic partition；
The magnetic force processing unit calculates the magnetic for obtaining each collected magnetic induction intensity of magnetic force detection probe
Magnetic induction intensity difference between induction and benchmark magnetic induction intensity；It is discontented at least one magnetic induction intensity difference
When foot presets magnetic induction intensity difference range, determine that the Distribution of Magnetic Field of the magnetic partition is not uniform.
2. detection jig as described in claim 1, which is characterized in that the detection jig further include: levelness processing unit
And multiple levelness detection probes on the slide rail；
The levelness detection probe is used for when contacting with the coldplate, acquires institute corresponding with the coldplate contact position
State the detecting distance between the probe tip of levelness detection probe and mask plate supporting table upper surface；
The levelness processing unit is used to obtain each collected detecting distance of levelness detection probe, and described in calculating
The distance between detecting distance and reference distance difference；Pre-determined distance difference range is unsatisfactory at least one described distance difference
When, determine that the coldplate is not in horizontality.
3. detection jig as claimed in claim 2, which is characterized in that the detection jig further include: cooling slab adjusting device；
The cooling slab adjusting device is used for after the levelness processing unit determines that the coldplate is not in horizontality,
According to the distance difference for being unsatisfactory for the pre-determined distance difference range, to the range difference for being unsatisfactory for the pre-determined distance difference range
It is worth the height at corresponding coldplate place to be adjusted.
4. detection jig as claimed in claim 2, which is characterized in that the slide rail has to be contacted with the braced frame
Two contact jaws, the magnetic force detection probe and the levelness detection probe are alternately and evenly distributed in described two contacts
Between end.
5. detection jig as claimed in claim 2, which is characterized in that the detection jig further include: for showing the magnetic
The display of induction and the detecting distance.
6. detection jig as described in any one in claim 1-5, which is characterized in that the detection jig further include: magnetic partition
Adjust device；
After Distribution of Magnetic Field of the magnetic baffle-plate adjuster for determining the magnetic partition in the magnetic force processing unit is uniform,
According to the magnetic induction intensity difference for being unsatisfactory for the default magnetic induction intensity difference range, to being unsatisfactory for, the default magnetic induction is strong
The magnetic induction intensity spent at the corresponding magnetic partition place of magnetic induction intensity difference of difference range is adjusted.
7. detection jig as described in any one in claim 1-5, which is characterized in that the braced frame further include: multiple limits
Position jig group；Wherein, each position-limiting fixture group includes: two position-limiting fixtures；
Described two position-limiting fixtures are relatively arranged on first guide rail two sides；And the position-limiting fixture is for fixing the cunning
Dynamic guide rail.
8. a kind of detection method of the described in any item detection jigs of such as claim 1-7 characterized by comprising
Magnetic partition face in the braced frame and vapor deposition setting is arranged；
Control the different predeterminated positions that the slide rail is in turn secured to first guide rail；Wherein, it is led in the sliding
When rail is fixed on each predeterminated position of first guide rail, control each magnetic force detection probe acquisition and the magnetic every
Magnetic induction intensity at plate face, and obtain the collected magnetic induction intensity of magnetic force detection probe；
Calculate the magnetic induction intensity difference between the magnetic induction intensity and benchmark magnetic induction intensity；
When at least one described magnetic induction intensity difference is unsatisfactory for default magnetic induction intensity difference range, the magnetic partition is determined
Distribution of Magnetic Field it is ununiform.
9. detection method as claimed in claim 8, which is characterized in that unequal in the Distribution of Magnetic Field of the determination magnetic partition
After even, further includes:
Control the magnetic induction intensity that the magnetic baffle-plate adjuster adjusts the magnetic partition.
10. detection method as claimed in claim 8 or 9, which is characterized in that described to be fixed on described in the slide rail
When each predeterminated position of one guide rail, further includes:
It controls the levelness detection probe to contact with the coldplate, and acquires corresponding with the coldplate contact position described
Detecting distance between the probe tip and mask plate supporting table upper surface of levelness detection probe, and obtain each levelness
The collected detecting distance of detection probe；
Calculate the distance between the detecting distance and reference distance difference；
When at least one described distance difference is unsatisfactory for pre-determined distance difference range, it is horizontal to determine that the coldplate is not in
State.
11. detection method as claimed in claim 10, which is characterized in that be not in the determination coldplate horizontal
After state, further includes:
Control the levelness that the cooling slab adjusting device adjusts the coldplate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910425102.0A CN110031781A (en) | 2019-05-21 | 2019-05-21 | A kind of detection jig and its detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910425102.0A CN110031781A (en) | 2019-05-21 | 2019-05-21 | A kind of detection jig and its detection method |
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| CN1525189A (en) * | 2003-02-28 | 2004-09-01 | ���µ�����ҵ��ʽ���� | Electromagnetic wave measuring apparatus and method |
| CN1632609A (en) * | 2004-12-28 | 2005-06-29 | 陕西师范大学 | Testing device for magnetic field and magnetic force in three-dimensional space |
| CN202548307U (en) * | 2012-03-21 | 2012-11-21 | 深圳市创益科技发展有限公司 | Detection device for magnetic field intensity of planar target |
| JP5441429B2 (en) * | 2009-02-18 | 2014-03-12 | 有限会社パワーテック | 3D magnetometer |
| CN203616462U (en) * | 2013-12-24 | 2014-05-28 | 上海子创镀膜技术有限公司 | Magnetic field measurement and analysis device |
| CN107012440A (en) * | 2017-04-27 | 2017-08-04 | 京东方科技集团股份有限公司 | Magnetic field providing apparatus, magnetron sputtering apparatus and the method using the equipment |
| CN207610691U (en) * | 2017-12-05 | 2018-07-13 | 昆山久茂电子科技有限公司 | A kind of slidingtype flatness detecting device |
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| CN1525189A (en) * | 2003-02-28 | 2004-09-01 | ���µ�����ҵ��ʽ���� | Electromagnetic wave measuring apparatus and method |
| CN1632609A (en) * | 2004-12-28 | 2005-06-29 | 陕西师范大学 | Testing device for magnetic field and magnetic force in three-dimensional space |
| JP5441429B2 (en) * | 2009-02-18 | 2014-03-12 | 有限会社パワーテック | 3D magnetometer |
| CN202548307U (en) * | 2012-03-21 | 2012-11-21 | 深圳市创益科技发展有限公司 | Detection device for magnetic field intensity of planar target |
| CN203616462U (en) * | 2013-12-24 | 2014-05-28 | 上海子创镀膜技术有限公司 | Magnetic field measurement and analysis device |
| CN107012440A (en) * | 2017-04-27 | 2017-08-04 | 京东方科技集团股份有限公司 | Magnetic field providing apparatus, magnetron sputtering apparatus and the method using the equipment |
| CN207610691U (en) * | 2017-12-05 | 2018-07-13 | 昆山久茂电子科技有限公司 | A kind of slidingtype flatness detecting device |
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