CN202770910U - Sheet resistance testing device - Google Patents
Sheet resistance testing device Download PDFInfo
- Publication number
- CN202770910U CN202770910U CN201220483161.7U CN201220483161U CN202770910U CN 202770910 U CN202770910 U CN 202770910U CN 201220483161 U CN201220483161 U CN 201220483161U CN 202770910 U CN202770910 U CN 202770910U
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- crossbeam
- surface resistance
- test
- proving installation
- platen
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Abstract
The utility model provides a sheet resistance testing device which is simple and rapid in testing, is accurate and reliable in testing result, and can not damage and pollute a tested workpiece. The sheet resistance testing device includes multiple sheet resistance testing probes which are arranged on a crossbeam along the axial direction of the crossbeam, and the output terminals of the sheet resistance testing probes are electrically connected with a data processing and displaying device. The crossbeam is connected with an up and down movement driving device which can drive the crossbeam to move up and down. A plate which can hold the tested workpiece is arranged below the crossbeam. The plate is connected with a back and forth movement driving device which drives the plate to move back and forth along the direction which is perpendicular to the crossbeam.
Description
Technical field
The utility model relates to a kind of surface resistance proving installation, especially ITO FILM is carried out test surfaces resistance and the surface resistance proving installation that uses.
Background technology
Tin-doped indium oxide (Indium Tin Oxide is called for short ITO) is a kind of heavy doping, high degeneracy N-shaped semiconductor.Since studying successfully from the 70's of 20th century, this material is widely used in solar cell, display (LCD﹠amp with its high conductance, high visible light transmissivity (〉=90%), high mechanical hardness and advantages such as chemical stability and characteristic of semiconductor thereof; PDP), window of touch-screen (Touch Panel), gas sensor, antistatic coating and semiconductor/insulator/semiconductor (SIS) heterojunction, modern opportunity of combat and cruise missile etc.In recent years, because the excellent photoelectric characteristic that the ito thin film material has, its application is developed rapidly, particularly, film transistor (TFT) manufacturing thin at touch-screen (Touch Panel), workpiece liquid crystal display (LCD), solar cell transparency electrode and infrared radiation mirror coating, train aircraft are with aspects such as glass defrosting, constructure screen wall glass, and its application is promoted rapidly.
ITO FILM material is as the material with high conductivity, the measurement of surface resistance and homogeneity thereof are very important indexs, the method of traditional measurement surface resistance is on a slice ITO FILM, at first define the position of test point according to scantling, normal operation 9 dot matrixs (3*3) or 25 dot matrixs (5*5), then hand-held surface resistance tester is measured every bit respectively.Have on the resistance meter with data and process the surface resistance test probe that is electrically connected with display device; The data that test is good are carried out statistical computation again, judge according to standard at last.
Yet there are following several shortcomings at least in existing method of testing:
1. testing efficiency is low.With the conventional test methodologies test, can only measure a point at every turn, do again the record of data, relatively lose time, and with the work efficiency that the manual testing is subject to operating personnel, cause integrated testability efficient lower.Be of a size of 360*400 ITO FILM take a slice and test 25 dot matrixs as example, the time of test and result of calculation is about 10 minutes.
2. poor repeatability.With conventional test methodologies test, owing to be manually-operated, even same one piece material, each measurement point duplicate measurements all can be variant, and this measurement belongs to destructive measurement, so one-time success rate is very important.
3. poor accuracy.Based on the caused destruction of improper operation to the ITO conductive layer that may occur in bad measurement repeatability and the manually-operated process, as scratching, pollute etc., cause measurement result generation deviation.
4. personnel demand is high.Because surface resistance formula product turnout is to survey project, when large-scale production, manpower requirement may become multiple to increase, and directly increases testing cost.
The utility model content
The utility model purpose provide a kind of test simple and efficient, not can to tested workpiece injury, pollution, test result accurately, reliable surface resistance proving installation.
This surface resistance proving installation, it comprises a plurality of surface resistance test probes on the crossbeam of being axially disposed within along crossbeam, the output of surface resistance test probe is processed with data and is electrically connected with display device; Crossbeam links to each other with the drive unit that moves up and down that the drive crossbeam moves up and down; Be useful on the platen of placing tested workpiece in the crossbeam bottom, platen with drive platen before and after on perpendicular to the direction of crossbeam the mobile drive unit that moves forward and backward link to each other.
The beneficial effects of the utility model: during use, move down by moving up and down drive unit drive crossbeam, so that the surface resistance test probe is pressed on the surface of workpiece, once can finish the test of a plurality of points, then move up by moving up and down drive unit drive crossbeam, the surface resistance test probe leaves the surface of workpiece.And then after moving forward and backward drive unit drive workpiece movable certain distance, stop, move down by moving up and down drive unit drive crossbeam again, so that the surface resistance test probe is pressed on the surface of workpiece, again finish the test of a plurality of points.Repeatedly pass through this process, can finish the test of the surface resistance of whole workpiece.When crossbeam moves up and down, can accurately control its displacement by moving up and down drive unit, guarantee that each surface resistance test probe is basically identical to the pressure of workpiece.Ensured the accuracy of test result, good reproducibility.And test data is processed with demonstration through data and is automatically processed, and test is quick, can be described as a kind of robotization surface resistance proving installation.
Above-mentioned surface resistance proving installation is provided for the locating device that tested workpiece is positioned at platen.Can accurately locate workpiece by locating device, prevent workpiece in test process with respect to bedplate moving.Described locating device is a bracket of right angle type.General workpiece is rectangular slab, contacts and can locate it with two sides of rectangular slab by this bracket of right angle type, and is simple and reliable.
Above-mentioned surface resistance proving installation, the surface resistance test probe is arranged on the crossbeam by the axially movable structure along crossbeam.Like this, can change easily distance between the surface resistance test probe.After the distance of adjusting between the surface resistance test probe, the surface resistance test probe can be fixed on the crossbeam again.
Above-mentioned surface resistance proving installation arranges five surface resistance test probes on the crossbeam.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
The utility model is described in further detail describes below in conjunction with accompanying drawing.
Referring to shown in Figure 1, platen 1 is installed on guide rail 2 tops, and the controlled unit that seesaws is equipped with in test platen 1 inside, controls by computer, can control platen 1 along the accurate movement locus in guide rail 2 front and back.The platen both sides are equipped with two with the column 4 of guide rail 3, and the controlled unit that moves up and down that computer controls that passes through of guide rail 3 and column 4 inside links to each other, and crossbeam 5 two ends link to each other with guide rail 3, control by computer, and crossbeam 5 and guide rail 3 can accurately move up and down.5 surface resistance test probes 6 are fixed on the crossbeam, and spacing each other can be adjusted as required.
During the impedance of test I TO FILM face, at first ITO FILM 7 is placed on the platen, position by locating device (bracket of right angle type) 8, then set spacing and the position of test probe according to the size of material.Motion spacing and the times of exercise of setting in advance platen in computer just can begin later to measure.
During each test, the data of surface resistance test probe at first are sent to test translator 9, are sent to computer 10 by data line after processing, and are stored and computing by computer, directly draw required test result at last.
The utility model is the rapid automatized test I TO FILM of a kind of energy surface resistance proving installation.Present embodiment is with 5 test probes, form with row is fixed in a row, the spacing of test probe is adjustable, like this once can test 5 points, use gear train on the direction of row, the ITO FILM that needs test can be stated from the platen also can move according to the move distance of setting, 5 point measurements are once done in every movement, until mobile 4 times at most, collect the maximum 25 millet cake resistance data of selecting.The data that gather directly are sent to computer and calculate, and finally draw required numerical value.
The utility model characteristics:
1. testing efficiency improves.Because the utility model has adopted mechanical control to add the mode of automatic calculating, has reduced time personnel operation and that calculate, so that testing efficiency promotes greatly.The ITO FILM that same a slice is of a size of 360*400 tests 25 dot matrixs, and the time shorten of test and result of calculation is 30 seconds.
2. repeatability improves.Use pure physical construction test, finish in case set, each test can not produce position deviation substantially, so greatly improves on the repeatability.
3. accuracy improves.Reduced because manual operation to the destruction that the improper operation of measured object causes, comprises scuffings, rolls over wound, pollution etc.
4. reliability is high.Adopt computer to carry out the calculating of data, can effectively avoid artificial miscount.
5. manpower requirement reduces.All test only needs one man operation's equipment, can finish test process, and personnel's demand can reduce.
Claims (5)
1. surface resistance proving installation is characterized in that: it comprises a plurality of surface resistance test probes on the crossbeam of being axially disposed within along crossbeam, and the output of surface resistance test probe is processed with data and is electrically connected with display device; Crossbeam links to each other with the drive unit that moves up and down that the drive crossbeam moves up and down; Be useful on the platen of placing tested workpiece in the crossbeam bottom, platen with drive platen before and after on perpendicular to the direction of crossbeam the mobile drive unit that moves forward and backward link to each other.
2. surface resistance proving installation as claimed in claim 1 is characterized in that: be provided for locating device that tested workpiece is positioned at platen.
3. surface resistance proving installation as claimed in claim 2, it is characterized in that: described locating device is a bracket of right angle type.
4. surface resistance proving installation as claimed in claim 1, it is characterized in that: the surface resistance test probe is arranged on the crossbeam by the axially movable structure along crossbeam.
5. surface resistance proving installation as claimed in claim 1 is characterized in that: five surface resistance test probes are set on the crossbeam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220483161.7U CN202770910U (en) | 2012-09-21 | 2012-09-21 | Sheet resistance testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220483161.7U CN202770910U (en) | 2012-09-21 | 2012-09-21 | Sheet resistance testing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202770910U true CN202770910U (en) | 2013-03-06 |
Family
ID=47777474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220483161.7U Expired - Lifetime CN202770910U (en) | 2012-09-21 | 2012-09-21 | Sheet resistance testing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202770910U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104991103A (en) * | 2015-07-03 | 2015-10-21 | 柳州利元光电技术有限公司 | Precise glass fixed gate testing machine |
| CN105259417A (en) * | 2014-07-14 | 2016-01-20 | 新特能源股份有限公司 | Detection apparatus of silicon core resistivity |
| CN106526327A (en) * | 2016-12-26 | 2017-03-22 | 昆山丘钛微电子科技有限公司 | DCR micro resistor automatic measuring machine |
| CN110927454A (en) * | 2018-09-20 | 2020-03-27 | 天津众晶半导体材料有限公司 | Intelligent monocrystalline silicon resistance detector |
| CN111948457A (en) * | 2020-08-07 | 2020-11-17 | 四川泛华航空仪表电器有限公司 | Resistance card output resistance continuity detection device |
-
2012
- 2012-09-21 CN CN201220483161.7U patent/CN202770910U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105259417A (en) * | 2014-07-14 | 2016-01-20 | 新特能源股份有限公司 | Detection apparatus of silicon core resistivity |
| CN105259417B (en) * | 2014-07-14 | 2018-04-24 | 新特能源股份有限公司 | A kind of detection device of silicon core resistivity |
| CN104991103A (en) * | 2015-07-03 | 2015-10-21 | 柳州利元光电技术有限公司 | Precise glass fixed gate testing machine |
| CN104991103B (en) * | 2015-07-03 | 2019-02-26 | 柳州利元光电技术有限公司 | A kind of precision glass fixed grid test machine |
| CN106526327A (en) * | 2016-12-26 | 2017-03-22 | 昆山丘钛微电子科技有限公司 | DCR micro resistor automatic measuring machine |
| CN106526327B (en) * | 2016-12-26 | 2023-08-29 | 昆山丘钛微电子科技有限公司 | DCR micro-resistance automatic measuring machine |
| CN110927454A (en) * | 2018-09-20 | 2020-03-27 | 天津众晶半导体材料有限公司 | Intelligent monocrystalline silicon resistance detector |
| CN111948457A (en) * | 2020-08-07 | 2020-11-17 | 四川泛华航空仪表电器有限公司 | Resistance card output resistance continuity detection device |
| CN111948457B (en) * | 2020-08-07 | 2023-02-03 | 四川泛华航空仪表电器有限公司 | Resistance card output resistance continuity detection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130306 |
|
| CX01 | Expiry of patent term |