CN203607380U - Crystal-boat drawing-sheet transfer tool with fool-proof mechanism - Google Patents
Crystal-boat drawing-sheet transfer tool with fool-proof mechanism Download PDFInfo
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- CN203607380U CN203607380U CN201320624955.5U CN201320624955U CN203607380U CN 203607380 U CN203607380 U CN 203607380U CN 201320624955 U CN201320624955 U CN 201320624955U CN 203607380 U CN203607380 U CN 203607380U
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- 230000006835 compression Effects 0.000 claims description 26
- 238000007906 compression Methods 0.000 claims description 26
- 230000005484 gravity Effects 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 abstract description 2
- 230000035515 penetration Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 29
- 238000010586 diagram Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
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Abstract
The utility model provides a crystal-boat drawing-sheet transfer tool with a fool-proof mechanism, and the tool comprises a bearing platform, a slide bar which is slidingly disposed on the bearing platform, a vertical rod which is fixedly disposed on the slide bar, and a push rod which is fixedly disposed on the vertical rod. The fool-proof mechanism comprises two pressure columns, four stopping blocks, a first connecting rod, and a second connecting rod. The two pressure columns are disposed on the bearing platform in a penetration manner, and comprise the first pressure column and the second pressure column. The four stopping blocks are disposed under the bearing platform, and comprise the first stopping block, the second stopping block, the third stopping block, and the fourth stopping block. The first connecting rod is connected with the second pressure column, the second stopping block, and the third stopping block. The second connecting rod is connected with the first pressure column, the first stopping block, and the fourth stopping block. Accordingly, the tool can avoid the collision or scratch caused by the moving of a wafer when two crystal boats placed on the bearing platform are not accurately positioned.
Description
Technical field
The utility model is to take out sheet transfer tool about the brilliant boat of one, and the brilliant boat that relates to especially a kind of tool fool-proof mechanism is taken out sheet transfer tool.
Background technology
What refer to Fig. 1 and be known brilliant boat (cassette) takes out sheet transfer schematic diagram, generally speaking, multiple wafers (wafer) the 91st, first deposit in together one and have in the first brilliant boat 90 of multiple bearing grooves 901, each wafer 91 is deposited in respectively each bearing groove 901, fetches with the mechanical arm of convenient working personnel or machinery equipment.
As shown in Figure 1, when wafer 91 is checked in follow-up flow process, if be necessary, need from the first brilliant boat 90, take out sheet and be passed to the bearing groove 951 of the second brilliant boat 95, to check wafer 91 whether normal.Its transfer process is first by the first brilliant boat 90 and the second brilliant boat 95 adjacent being placed on Working table sequentially respectively, operating personnel recycles the right hand and holds vacuum pencil and go absorption to fetch the support frame of wafer 91 of the first brilliant boat 90, now operating personnel need avoid vacuum pencil to remove to touch the crystal face of wafer 91, then wafer 91 is positioned on the bearing groove 951 of the second brilliant boat 95.
In transfer process, if the suction of vacuum pencil is inadequate suddenly, or operating personnel touches suddenly the suction release key of vacuum pencil, and wafer 91 can landings, easily cause the situations such as wafer 91 scratches, unfilled corner or fragmentation.Now, if operating personnel just in time crosses over the top of the first brilliant boat 90 and the second brilliant boat 95, will cause multi-disc wafer 91 mutually to collide and cause scratch cracked, not very good.
Refer to Fig. 2 and be that another known brilliant boat takes out sheet transfer tool takes out sheet transfer schematic diagram, it is to utilize a brilliant boat to take out sheet transfer tool the multiple wafers 881 on the first brilliant boat 88 are passed on the second brilliant boat 89, and this tool includes: one has bearing platform 80, a slide bar 81, a vertical rod 82 and a push rod 84 of multiple supporting seats 85.Vertical rod 82 is fixedly arranged on one end of slide bar 81, and vertical rod 82 has always to slotted eye 821.Two ends of push rod 84 are installed with respectively a shoveling 842 and an action bars 83, action bars 83 can be slidedly arranged in the straight groove hole 821 of vertical rod 82, therefore push rod 84 can be adjusted by action bars 83 height of push rod 84, to select the wafer 881 on the first brilliant boat 88 that will transfer, by be passed on the second brilliant boat 89.
Brilliant boat shown in Fig. 2 is taken out sheet transfer tool, there is no the mechanism of fool proof, need operating personnel first to confirm the position of two corresponding brilliant boats, keep accurate position, can carry out the conversion process of wafer, so operating personnel neglect sometimes, do not confirm that whether brilliant boat putting position is correct, carry out the conversion process of wafer, easily cause wafer in the time of conversion, produce wafer scratch, break etc. unexpected, also non-very good, the space being still improved.
Creator's reason is in this, and this urgently thinks a kind of " the brilliant boat of tool fool-proof mechanism is taken out sheet transfer tool " that can address the above problem in the spirit of positive invention creation, and several times research experiment is eventually to completing the utility model.
Utility model content
Main purpose of the present utility model is to take out sheet transfer tool at the brilliant boat that a kind of tool fool-proof mechanism is provided, to can work as two brilliant boats that are placed on bearing platform while really not locating, brilliant boat is taken out sheet and is transferred the left and right slippage that the slide block of tool can stop slide bar, make the push rod cannot left and right slippage, even if also operating personnel cannot utilize the shoveling on push rod to transfer wafer, can avoid really not locating because of brilliant boat time, still mobile wafer may cause bumped wafer or scratch.
For reaching above-mentioned purpose, the brilliant boat of tool fool-proof mechanism of the present utility model is taken out sheet transfer tool, this crystalline substance boat is taken out sheet transfer tool and is included: a bearing platform, is slidedly arranged on the vertical rod and that the slide bar, of this bearing platform is fixedly arranged on this slide bar and is fixedly arranged on the push rod in this vertical rod, it is characterized in that, this fool-proof mechanism includes:
Two compression legs, are arranged in this bearing platform, include one first compression leg and one second compression leg;
Four blocks, are arranged at this bearing platform below, include one first block, one second block, one the 3rd block and one the 4th block;
One first connecting rod, is connected with this second compression leg, this second block and the 3rd block respectively; And
One second connecting rod, is connected with this first compression leg, this first block and the 4th block respectively.
Wherein, this first connecting rod links one first pivotal axis.
Wherein, this second connecting rod links one second pivotal axis.
Wherein, link a slide block on this slide bar, this first compression leg selecting type presses down or does not press down, and correspondence impels the level height of this first block and the 4th block root edge higher or lower than the level height of this slide block apical margin.
Wherein, this second compression leg selecting type presses down or does not press down, and impels accordingly the level height of this second block and the 3rd block root edge higher or lower than the level height of this slide block apical margin.
This fool-proof mechanism also includes a restoring link, a gravity block, a cross bar, one first pole and one second pole, this restoring link, this gravity block and this cross bar are sequentially connected, this cross bar is connected with this first connecting rod, two ends of this first pole are connected with this cross bar and the 4th block respectively, and two ends of this second pole are connected with this cross bar and this first block respectively.
Wherein, this gravity block is wedge shape, and this first pivotal axis is arranged in this gravity block and this first connecting rod, in this restoring link selecting type, push away or not in push away, correspondence impels the level height of this four blocks root edge higher or lower than the level height of this slide block apical margin.
Wherein, this bearing platform bottom surface is provided with multiple supporting seats, and this slide bar wears the plurality of supporting seat.
Wherein, this restoring link, this gravity block and this cross bar are integral type structure.
The beneficial effects of the utility model are that, when it can avoid really not locating because of brilliant boat, still mobile wafer may cause bumped wafer or scratch.
Accompanying drawing explanation
Below, coordinate accompanying drawing to enumerate preferred embodiment, in order to content of the present utility model is described further, wherein:
Fig. 1 is that the sheet of taking out of known brilliant boat is transferred schematic diagram.
Fig. 2 be another known brilliant boat take out sheet transfer tool take out sheet transfer schematic diagram.
Fig. 3 is the stereogram that the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment is taken out sheet transfer tool.
Fig. 4 is another different visual angles stereogram that the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment is taken out sheet transfer tool.
Fig. 5 is the schematic side view that the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment is taken out sheet transfer tool.
Fig. 6 is operating principle () schematic diagram that the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment is taken out sheet transfer tool.
Fig. 7 is operating principle (two) schematic diagram that the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment is taken out sheet transfer tool.
Fig. 8 A is homing action principle () schematic diagram that the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment is taken out sheet transfer tool.
Fig. 8 B is homing action principle (two) schematic diagram that the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment is taken out sheet transfer tool.
Embodiment
Refer to Fig. 3 and Fig. 4, its brilliant boat that is respectively the utility model one preferred embodiment tool fool-proof mechanism is taken out sheet transfer tool two different visual angles stereograms.The brilliant boat of the present embodiment is taken out sheet transfer tool and is included: slide bar 11,12, four-supporting 15,16,17,18, the slide block 33, that a bearing platform 10, two is slidedly arranged on bearing platform 10 is fixedly arranged on vertical rod 14 and on slide bar 19 and is fixedly arranged on the push rod 13 of vertical rod 14, on push rod, be installed with a shoveling 131, can be in order to transfer the wafer (not shown) on brilliant boat (being shown in Fig. 6).
In the present embodiment, slide bar 11,12 and slide bar 19 are the formula structures that are connected via slide block 33.That is two slide bars 11,12, slide bar 19 and slide block 33 are level left and right interlock slippages together.Separately, slide bar 11 is arranged in 15,16 of two supporting seats, and slide bar 12 wears 17,18 of two supporting seats, thus, makes two smoothly level left and right slippages of slide bar 11,12, and then makes also smoothly level left and right slippage of slide bar 19.
As shown in the figure, the fool-proof mechanism that brilliant boat is taken out sheet transfer tool includes: four compression legs 51,52, four blocks 41,42,43,44, two first connecting rods 21,22, two second connecting rods 23,24, a restoring link 28, a cross bar 32, one first pole 25, one second pole 26 and a gravity block 31.Wherein, four compression legs 51,52 are arranged in bearing platform 10, four compression legs and include 2 first compression legs 51 and 2 second compression legs 52.Four blocks are arranged at bearing platform 10 belows, and four blocks 41,42,43,44 include one first block 41, one second block 42, one the 3rd block 43 and one the 4th block 44.In the present embodiment, restoring link 28, gravity block 31 and cross bar 32 are to be integral type structure.
In addition, first connecting rod 21 is connected with the second compression leg 52 and the second block 42 respectively, and another 22 of first connecting rods are connected with the second compression leg 52 and the 3rd block 43 respectively, common one first pivotal axis 211 that links of two first connecting rods 21,22.In addition, second connecting rod 23 is connected with the first compression leg 51 and the first block 41 respectively, and another 24 of second connecting rods are connected with the first compression leg 51 and the 4th block 44 respectively, and second connecting rod 23 links one second pivotal axis 231, and another second connecting rod 24 links one second pivotal axis 241.
Refer to Fig. 5, Fig. 6 and Fig. 7, its respectively the brilliant boat of the tool fool-proof mechanism of the utility model one preferred embodiment take out schematic side view and operating principle () (two) schematic diagram of sheet transfer tool, and see also Fig. 3.As shown in Figure 5, if while not putting any brilliant boat on bearing platform 10, four compression legs the 51, the 52nd, protrude from bearing platform 10, now, and four blocks 41,42,43,44 meeting stop limits slide block 33 slippages left, that is, slide bar 19 slippage left.
As shown in Figure 6, when carrying out wafer conversion process, that is operating personnel are will be upper by the brilliant boat 57 of wafer transfer to the second (being shown in Fig. 7) on the first brilliant boat 56 time, need the first brilliant boat 56 really to locate, can 2 first compression legs 51 be pressed down by the weight of the first brilliant boat 56, the second pivotal axis 241 that the second pivotal axis 231 linking via second connecting rod 23 and second connecting rod 24 link, correspondence impel the first block 41 and the 4th block 44 can on move to the level height of its root edge higher than the level height of slide block 33 apical margins.That is, make the first block 41 and the 4th block 44 can stop limits slide block 33 slippage left, but now the second block 42 and the 3rd block 43 still can stop limits slide block 33 slippages left, slide bar 19 is slippage left still.
As shown in Figure 7, when the second brilliant boat 57 is located really, can 2 second compression legs 52 be pressed down by the weight of the second brilliant boat 57, the first pivotal axis 211 jointly linking via two first connecting rods 21,22, impel accordingly the second block 42 and the 3rd block 43 can on move to the level height of its root edge higher than the level height of these slide block 33 apical margins.That is the second block 42 and the 3rd block 43 can stop limits slide block 33 slippages left, now, four blocks 41,42,43,44 neither can stop limits slide block 33 slippage left, slide bar 19 slippage left.In other words, need the first brilliant boat 56 and the second brilliant boat 57 all really to locate, can carry out the transfer operation of wafer.
Refer to Fig. 8 A and Fig. 8 B, its brilliant boat that is respectively the tool fool-proof mechanism of the utility model one preferred embodiment is taken out homing action principle () and (two) schematic diagram of sheet transfer tool, and sees also Fig. 3.The reset principle of the present embodiment is to be sequentially connected by restoring link 28, gravity block 31 and cross bar 32, cross bar 32 and two first connecting rods 21,22 are connected, two ends of the first pole 25 are connected with cross bar 32 and the 4th block 44 respectively, and two ends of the second pole 26 are connected with cross bar 32 and the first block 41 respectively.
In the present embodiment, gravity block 31 is to be wedge shape, the first pivotal axis 211 is arranged in gravity block 31 and two first connecting rods 21,22, in the time that restoring link 28 pushes away to the right, can corresponding impel on four blocks 41,42,43,44 and move to the level height of its root edge higher than the level height of slide block 33 apical margins, now, four blocks 41,42,43,44 neither can stop limits slide block 33 slippage left, and slide bar 19 can left and right slippage.
Thus, the fool-proof mechanism of the present embodiment, in the time being placed in two brilliant boats 56,57 on bearing platform 10 and really not locating, brilliant boat is taken out sheet and is transferred the slippage left that the slide block 33 of tool can stop slide bar 19, make push rod 13 cannot before and after slippage, even if also operating personnel cannot transfer wafer, can avoid really not locating because of brilliant boat 56,57 time, still mobile wafer may cause bumped wafer or scratch.
In addition, the resetting device of the present embodiment in the time that restoring link 28 pushes away to the right, can make to move to the level height of its root edge higher than the level height of slide block 33 apical margins on four blocks 41,42,43,44 simultaneously, and then impel the slide bar 19 can left and right slippage, can convenient operation personnel fix a breakdown.
Above-described embodiment is only to give an example for convenience of description, and the interest field that the utility model is advocated should be as the criterion certainly described in claim scope, but not only limits to above-described embodiment.
Claims (9)
1. the brilliant boat of a tool fool-proof mechanism is taken out sheet transfer tool, this crystalline substance boat is taken out sheet transfer tool and is included: a bearing platform, is slidedly arranged on the vertical rod and that the slide bar, of this bearing platform is fixedly arranged on this slide bar and is fixedly arranged on the push rod in this vertical rod, it is characterized in that, this fool-proof mechanism includes:
Two compression legs, are arranged in this bearing platform, include one first compression leg and one second compression leg;
Four blocks, are arranged at this bearing platform below, include one first block, one second block, one the 3rd block and one the 4th block;
One first connecting rod, is connected with this second compression leg, this second block and the 3rd block respectively; And
One second connecting rod, is connected with this first compression leg, this first block and the 4th block respectively.
2. the brilliant boat of tool fool-proof mechanism as claimed in claim 1 is taken out sheet transfer tool, it is characterized in that, wherein, this first connecting rod links one first pivotal axis.
3. the brilliant boat of tool fool-proof mechanism as claimed in claim 1 is taken out sheet transfer tool, it is characterized in that, wherein, this second connecting rod links one second pivotal axis.
4. the brilliant boat of tool fool-proof mechanism as claimed in claim 2 is taken out sheet transfer tool, it is characterized in that, wherein, on this slide bar, link a slide block, this the first compression leg selecting type presses down or does not press down, and correspondence impels the level height of this first block and the 4th block root edge higher or lower than the level height of this slide block apical margin.
5. the brilliant boat of tool fool-proof mechanism as claimed in claim 4 is taken out sheet transfer tool, it is characterized in that, wherein, this second compression leg selecting type presses down or does not press down, and impels accordingly the level height of this second block and the 3rd block root edge higher or lower than the level height of this slide block apical margin.
6. the brilliant boat of tool fool-proof mechanism as claimed in claim 4 is taken out sheet transfer tool, it is characterized in that, this fool-proof mechanism also includes a restoring link, a gravity block, a cross bar, one first pole and one second pole, this restoring link, this gravity block and this cross bar are sequentially connected, this cross bar is connected with this first connecting rod, two ends of this first pole are connected with this cross bar and the 4th block respectively, and two ends of this second pole are connected with this cross bar and this first block respectively.
7. the brilliant boat of tool fool-proof mechanism as claimed in claim 6 is taken out sheet transfer tool, it is characterized in that, wherein, this gravity block is wedge shape, this first pivotal axis is arranged in this gravity block and this first connecting rod, in this restoring link selecting type, push away or not in push away, correspondence impels the level height of this four blocks root edge higher or lower than the level height of this slide block apical margin.
8. the brilliant boat of tool fool-proof mechanism as claimed in claim 1 is taken out sheet transfer tool, it is characterized in that, wherein, this bearing platform bottom surface is provided with multiple supporting seats, and this slide bar wears the plurality of supporting seat.
9. the brilliant boat of tool fool-proof mechanism as claimed in claim 6 is taken out sheet transfer tool, it is characterized in that, wherein, this restoring link, this gravity block and this cross bar are integral type structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320624955.5U CN203607380U (en) | 2013-10-10 | 2013-10-10 | Crystal-boat drawing-sheet transfer tool with fool-proof mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320624955.5U CN203607380U (en) | 2013-10-10 | 2013-10-10 | Crystal-boat drawing-sheet transfer tool with fool-proof mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN203607380U true CN203607380U (en) | 2014-05-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320624955.5U Expired - Lifetime CN203607380U (en) | 2013-10-10 | 2013-10-10 | Crystal-boat drawing-sheet transfer tool with fool-proof mechanism |
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| CN (1) | CN203607380U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104485302A (en) * | 2014-12-29 | 2015-04-01 | 颀中科技（苏州）有限公司 | Wafer transfer batching and collecting equipment |
| CN107720271A (en) * | 2017-10-27 | 2018-02-23 | 苏州精濑光电有限公司 | A kind of multiaxial motion platform |
| WO2023116187A1 (en) * | 2021-12-24 | 2023-06-29 | 宁波芯健半导体有限公司 | Wafer sorting device |
-
2013
- 2013-10-10 CN CN201320624955.5U patent/CN203607380U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104485302A (en) * | 2014-12-29 | 2015-04-01 | 颀中科技（苏州）有限公司 | Wafer transfer batching and collecting equipment |
| CN104485302B (en) * | 2014-12-29 | 2017-05-10 | 颀中科技（苏州）有限公司 | Wafer transfer batching and collecting equipment |
| CN107720271A (en) * | 2017-10-27 | 2018-02-23 | 苏州精濑光电有限公司 | A kind of multiaxial motion platform |
| CN107720271B (en) * | 2017-10-27 | 2024-04-05 | 苏州精濑光电有限公司 | Multi-axis motion platform |
| WO2023116187A1 (en) * | 2021-12-24 | 2023-06-29 | 宁波芯健半导体有限公司 | Wafer sorting device |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140521 |
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| CX01 | Expiry of patent term |