CN203587113U - Piezoelectric vibrating beam - Google Patents
Piezoelectric vibrating beam Download PDFInfo
- Publication number
- CN203587113U CN203587113U CN201320757826.3U CN201320757826U CN203587113U CN 203587113 U CN203587113 U CN 203587113U CN 201320757826 U CN201320757826 U CN 201320757826U CN 203587113 U CN203587113 U CN 203587113U
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- CN
- China
- Prior art keywords
- electrode
- piezoelectrics
- piezoelectric
- shakes
- piezoelectric body
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000605 extraction Methods 0.000 claims abstract description 33
- 239000007772 electrode material Substances 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 abstract description 4
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
Images
Abstract
The utility model discloses a piezoelectric vibrating beam which comprises a front piezoelectric body, a rear piezoelectric body, an upper piezoelectric body, a lower piezoelectric body and a cuboid vibrating beam with a square section, wherein the four piezoelectric bodies have same sizes and same surface electrode structures; the front piezoelectric body and the rear piezoelectric body belong to one group, the upper piezoelectric body and the lower piezoelectric body belong to another group, and the four piezoelectric bodies are symmetrically pasted on the four side surfaces of the cuboid vibrating beam. The piezoelectric vibrating beam is characterized in that a first extraction electrode and a second extraction electrode of each piezoelectric body are positioned on the non-pasted surfaces of the piezoelectric body; the second extraction electrode is communicated with the electrodes on the pasted surfaces through side electrodes. The piezoelectric vibrating beam disclosed by the utility model can solve the problem that micro signals cannot be transmitted due to the insulation of the pasting layer between the piezoelectric bodies and the cuboid vibrating beam; the formed piezoelectric vibrating beam element has the characteristics of stable and reliable working process and long service life.
Description
Technical field
The utility model belongs to piezoelectric sensor technical field, particularly a kind of piezoelectricity beam that shakes.
Background technology
Along with the development of electronic technology, utilize direct piezo electric effect or the inverse piezoelectric effect of piezo technology, the piezoelectricity the forming beam that shakes connects and is connected with electricity according to certain structure, thereby obtain the electric signal that the processes such as vibration, rotation produce, the piezolectric gyroscope sensor of designing, as signal controlling and the control of vibration attitude, it is the core control element of Based Intelligent Control.
The rectangular parallelepiped that existing piezoelectricity shakes in beam shakes and adopts adhering with epoxy resin between beam and four piezoelectrics, and four piezoelectrics are divided into two groups, and two bonding piezoelectrics of the plane of symmetry are one group (Fig. 5); The piezoelectrics electrode connection mode of beam of shaking is: the electrode of two symmetrical non-bonding planes connects together, and forms two groups of signal wires, and zero line and the rectangular parallelepiped beam that shakes is connected (Fig. 6); The electrode structure of piezoelectrics only has the extraction electrode (Fig. 7) of bonding plane electrode and non-bonding plane.The adhesive linkage that the rectangular parallelepiped that the piezoelectricity that adopts this technique for sticking to prepare shakes in beam shakes between beam and piezoelectrics belongs to nonconductor, and there is certain thickness, once improper process control, cause thickness of adhibited layer inhomogeneous, the ultra-weak electronic signal (being generally between 0-1V) that causes piezoelectric crystal to produce cannot transmit sometimes, finally cause the piezoelectricity inefficacy of beam of shaking, and then cause the inefficacy of whole piezoelectric sensor.
Summary of the invention
The purpose of this utility model is exactly the deficiency for overcoming above-mentioned background technology, effectively solves the component failure that the adhesive linkage Insulation Problems of shaking in beam because of piezoelectricity causes, and a kind of piezoelectricity the proposing beam that shakes.
The technical solution of the utility model is: a kind of piezoelectricity beam that shakes, comprise front piezoelectrics, rear piezoelectrics, upper piezoelectrics, lower piezoelectric body, cross section is the foursquare rectangular parallelepiped beam that shakes, piezoelectrics are measure-alike and surface electrode structure is identical for described four, front piezoelectrics, rear piezoelectrics are divided into one group, upper piezoelectrics, lower piezoelectric body is divided into another group, the symmetrical rectangular parallelepiped that is bonded in shakes on four sides of beam, it is characterized in that: the first extraction electrode of each piezoelectrics and the second extraction electrode are all positioned at the non-bonding plane of piezoelectrics, wherein the second extraction electrode conducting with bonding plane electrode by the realization of side electrode.
According to a kind of piezoelectricity of the present utility model beam that shakes, the electrode material of described piezoelectrics comprises silver electrode, silver-colored palladium electrode, gold electrode, copper electrode, nickel electrode.
According to a kind of piezoelectricity of the present utility model beam that shakes, the electrode material of the first extraction electrode of described piezoelectrics, the second extraction electrode, bonding plane electrode is identical, and the electrode material of the electrode material of side electrode and the first extraction electrode, the second extraction electrode, bonding plane electrode is identical electrodes material or non-identical electrodes material.
According to a kind of piezoelectricity of the present utility model beam that shakes, the piezoelectric of described described piezoelectrics is piezoelectric single crystal or piezoelectric ceramics.
Adopt a kind of piezoelectricity of the present utility model beam that shakes, can thoroughly solve the shake adhesive linkage insulation between beam and cause that the problem that micro-signal cannot transmit, this beam that shakes have the advantages that the course of work is reliable and stable, the life-span is long of piezoelectrics and rectangular parallelepiped.
Accompanying drawing explanation
Fig. 1 is the shake perspective view of beam of piezoelectricity
Fig. 2 is the vertical view of piezoelectrics
Fig. 3 is the B-B cut-open view in Fig. 2
Fig. 4 is the shake cross-section cutaway view of beam of piezoelectricity
Fig. 5 is the shake perspective view of beam of conventional piezoelectric
Fig. 6 is the shake wire connection diagram of beam of conventional piezoelectric
Fig. 7 is the shake sectional schematic diagram of piezoelectrics in beam of conventional piezoelectric
In above-mentioned figure: 1. front piezoelectrics; 2. rear piezoelectrics; 3. go up piezoelectrics; 4. lower piezoelectric body; 5. the rectangular parallelepiped beam that shakes; 6. the first extraction electrode; 7. the second extraction electrode; 8. bonding plane electrode; 9. side electrode; 10. patch of piezoelectric material; 11. adhesive linkages; 12. first groups of signal wires; 13. second groups of signal wires; 14. zero potential lines.
Embodiment
Below by embodiment, and by reference to the accompanying drawings, the technical solution of the utility model is described in further detail.
The rectangular parallelepiped of the present embodiment beam that shakes adopts constant modulus alloy, and the piezoelectric of piezoelectrics adopts the piezoelectric single crystal of rectangle chip structure, and the measure-alike and surperficial electrode structure of four piezoelectrics is also identical.The electrode material of piezoelectrics all adopts gold electrode, adopts physical evaporation technique to prepare.
Fig. 1 is shown in by the shake structural drawing of beam of piezoelectricity, mainly comprises: front piezoelectrics 1, rear piezoelectrics 2, upper piezoelectrics 3, lower piezoelectric body 4, cross section are the foursquare rectangular parallelepiped beam 5 that shakes.
The shake electrode lead-out mode of beam of piezoelectricity is as follows: the first extraction electrode of front piezoelectrics 1, the first extraction electrode of rear piezoelectrics 2 adopt and connect wire and be interconnected, as first group of signal; The first extraction electrode of upper piezoelectrics 3, the first extraction electrode of lower piezoelectric body 4 adopt connection wire to be interconnected, as second group of signal; The second extraction electrode of the second extraction electrode of front piezoelectrics 1, the second extraction electrode of rear piezoelectrics 2, upper piezoelectrics 3, the second extraction electrode of lower piezoelectric body 4 adopt connection wire to be interconnected, as zero potential.Above-mentioned signal wire is connected with interlock circuit, realizes the transmission of the beam signal that shakes.
In the present embodiment, the rectangular parallelepiped beam that shakes is of a size of length 8mm, wide 8mm, height 20mm; The piezoelectric of piezoelectrics is piezoelectric quartz monocrystalline, and it is of a size of length 8mm, width 4mm, thickness 0.2mm; Gold electrode thickness 2000 dusts.The piezoelectricity beam reliable operation no-failure that shakes of preparation.
The rectangular parallelepiped of the present embodiment beam that shakes adopts constant modulus alloy, and the piezoelectric of piezoelectrics adopts the piezoelectric ceramics of rectangle chip structure, and the measure-alike and surperficial electrode structure of four piezoelectrics is also identical.The first extraction electrode 6 of piezoelectrics, the second extraction electrode 7, bonding plane electrode 8 are silver electrode; Side electrode 9 is gold electrode.
Silver electrode adopts the printing of silver slurry, sintering process preparation, and gold electrode adopts the preparation of physical evaporation technique.
Other side is with embodiment 1.
In the present embodiment, the rectangular parallelepiped beam that shakes is of a size of length 8mm, wide 8mm, height 20mm; The piezoelectric of piezoelectrics is rigid PZT piezoelectric ceramics, and it is of a size of length 8mm, width 4mm, thickness 0.2mm; The silver electrode thickness of bonding plane and non-bonding plane is 20 microns, side gold electrode thickness 2000 dusts.The piezoelectricity beam reliable operation no-failure that shakes of preparation.
Adopt a kind of piezoelectricity of the present utility model beam that shakes, can solve shake adhesive linkage between the beam insulation and cause the problem that micro-signal cannot transmit of piezoelectrics and rectangular parallelepiped, eliminate shake the not technical failure of conducting of zero potential of beam element of piezoelectricity, the piezoelectricity of the formation beam element that shakes has the advantages that the course of work is reliable and stable, the life-span is long.
Claims (4)
1. the piezoelectricity beam that shakes, comprise front piezoelectrics (1), rear piezoelectrics (2), upper piezoelectrics (3), lower piezoelectric body (4), cross section is the foursquare rectangular parallelepiped beam (5) that shakes, piezoelectrics are measure-alike and surface electrode structure is identical for described four, front piezoelectrics (1), rear piezoelectrics (2) are divided into one group, upper piezoelectrics (3), lower piezoelectric body (4) is divided into another group, the symmetrical rectangular parallelepiped that is bonded in shakes on four sides of beam (5), it is characterized in that: first extraction electrode (6) of each piezoelectrics and the second extraction electrode (7) are all positioned at the non-bonding plane of piezoelectrics, wherein the second extraction electrode (7) conducting with bonding plane electrode (8) by side electrode (9) realization.
2. a kind of piezoelectricity as claimed in claim 1 beam that shakes, is characterized in that: the electrode material of described piezoelectrics comprises silver electrode, silver-colored palladium electrode, gold electrode, copper electrode, nickel electrode.
3. a kind of piezoelectricity as claimed in claim 1 beam that shakes, it is characterized in that: the electrode material of first extraction electrode (6) of piezoelectrics, the second extraction electrode (7), bonding plane electrode (8) is identical, and the electrode material of the electrode material of side electrode (9) and the first extraction electrode (6), the second extraction electrode (7), bonding plane electrode (8) is identical electrodes material or non-identical electrodes material.
4. a kind of piezoelectricity as claimed in claim 1 beam that shakes, is characterized in that: the piezoelectric of described piezoelectrics is piezoelectric single crystal or piezoelectric ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320757826.3U CN203587113U (en) | 2013-11-27 | 2013-11-27 | Piezoelectric vibrating beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320757826.3U CN203587113U (en) | 2013-11-27 | 2013-11-27 | Piezoelectric vibrating beam |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203587113U true CN203587113U (en) | 2014-05-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320757826.3U Expired - Lifetime CN203587113U (en) | 2013-11-27 | 2013-11-27 | Piezoelectric vibrating beam |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203587113U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104457964A (en) * | 2014-11-28 | 2015-03-25 | 西安交通大学 | Double-axis vibrating sensor based on flexoelectric principle |
| CN105973216A (en) * | 2016-05-03 | 2016-09-28 | 中国人民解放军国防科学技术大学 | Piezoelectric vibration gyroscope harmonic oscillator, making method thereof, and piezoelectric vibration gyroscope |
-
2013
- 2013-11-27 CN CN201320757826.3U patent/CN203587113U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104457964A (en) * | 2014-11-28 | 2015-03-25 | 西安交通大学 | Double-axis vibrating sensor based on flexoelectric principle |
| CN105973216A (en) * | 2016-05-03 | 2016-09-28 | 中国人民解放军国防科学技术大学 | Piezoelectric vibration gyroscope harmonic oscillator, making method thereof, and piezoelectric vibration gyroscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140507 |
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| CX01 | Expiry of patent term |