CN203572576U - Spectrum measuring device - Google Patents

Spectrum measuring device Download PDF

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Publication number
CN203572576U
CN203572576U CN201320742699.XU CN201320742699U CN203572576U CN 203572576 U CN203572576 U CN 203572576U CN 201320742699 U CN201320742699 U CN 201320742699U CN 203572576 U CN203572576 U CN 203572576U
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spectrum
guiding device
light
input end
array spectrometer
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CN201320742699.XU
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潘建根
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Hangzhou Everfine Photo E Info Co Ltd
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Hangzhou Everfine Photo E Info Co Ltd
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Abstract

The utility model discloses a spectrum measuring device. The spectrum measuring device comprises a preposed light-splitting device, a light guiding device and more than one array spectrometer, the preposed light-splitting device performs dispersive light splitting for incident light radiation, target spectrums in need of measurement are imaged to an output terminal of the light guiding device by the preposed light-splitting device, the light guiding device inputs the target spectrums to corresponding array spectrometers in a segment or integral manner and measures the target spectrums in segments or in sequence, outband stray lights of various measured spectrums can be effectively prevented, and each array spectrometer can realize higher resolution in narrow bands. Besides, according to the spectrum measuring device, the optical fiber type light guiding device is employed, and input terminals and output terminals of optical fibers are reasonably arranged so that the receiving efficiency of the target spectrums and the stray lights and the imaging quality of the spectrum measuring device can be further improved, and the spectrum measuring device is advantaged by ingenious design, low stray light, flexible application, high measuring accuracy and the like.

Description

A kind of spectral measurement device
[technical field]
The utility model relates to a kind of spectroradiometric measurement and spectral analysis device, is specifically related to a kind of spectral measurement device.
[background technology]
In recent years, development along with instrument manufacturing technology, the properties of array spectrometer has all been obtained breakthrough, the far super mechanical scanning type spectrometer of its measuring speed, and accuracy of measurement also has significantly and to improve, thereby it is increasingly extensive to measure application, especially in the occasion that measuring speed and sampling rate are had higher requirements, as the spatial color homogeneity of LED light source, the photochromic performance characterization that waits of great power LED is measured.
But the parasitic light level of control of array spectrometer is generally not high, there is larger restriction the application scenario of having relatively high expectations at parasitic light, prior art also has by the mode of color filter is set in array spectrometer and reduces the parasitic light (also claiming band stray light) beyond required spectral band, if publication number is " low stray light rapid spectrometer and the measuring method thereof " patent of " CN101324468A ", by being provided with the band of one group of band-pass filter, lead to the colour wheel spectrum of accurate measurement different-waveband piecemeal, reduce interference of stray light.But at some, measure wave band, such as the spectral measurement of (200 ~ 250) nm etc., it is logical that color filter is difficult to realize effective band.Although mechanical scanning type spectrometer can be realized Measurement accuracy at these wave bands, but its measuring speed is too slow, measure efficiency not high, the heavy-power LED product being exceedingly fast for temperature variation, even cannot Measurement accuracy optical color parameter at each temperature, therefore, existing spectrometer is difficult to meet quick and high-precision measurement demand simultaneously.
[utility model content]
For overcoming the deficiencies in the prior art, the utility model provides a kind of can significantly reduce band stray light, spectral measurement a kind of spectral measurement device more accurately.
For solving the problems of the technologies described above, the utility model has adopted following technical scheme:
A kind of spectral measurement device, it is characterized in that, comprise preposition light-dividing device, guiding device and the array spectrometer being coupled with guiding device, preposition light-dividing device carries out dispersion light splitting to incident light radiation, and by target optical spectrum imaging the input end to guiding device, the output terminal of guiding device is by target optical spectrum segmentation or array spectrometer corresponding to whole input.
In the utility model, target optical spectrum is required measure spectrum, can be the spectrum of incident light radiation, or the spectrum of a certain wave band of incident light radiation.For example, the wavelength coverage of incident light radiation is (200-800) nm, and target optical spectrum can be the spectrum of incident light radiation (200-800) nm wavelength coverage, can be also the spectrum of incident light radiation (200-300) nm wave band.Preposition light-dividing device carries out dispersion light splitting to incident light radiation, and the monochromatic diffraction light after light splitting is with different direction outgoing, and by wavelength, is arranged in the image planes of preposition light-dividing device.The input end of guiding device is arranged in the image planes of preposition light-dividing device or near image planes, its setting position makes it only connect target optical spectrum, and by its output terminal, the whole input array spectrometer of target optical spectrum is measured, now target optical spectrum is the spectrum of a certain designated band of incident light radiation; The output terminal of guiding device also can be inputted same array spectrometer by certain sequential segmentation by target optical spectrum, or target optical spectrum is divided into multistage, and each section of spectrum is inputted respectively to different array spectrometers, by each array spectrometer, each section of spectrum is measured respectively, target optical spectrum is carried out to areal survey, effectively avoid the band stray light of each section of spectrum, improve spectral measurement accuracy.
Than prior art, the utility model utilizes preposition light-dividing device to carry out dispersion light splitting to incident light radiation, and in conjunction with guiding device, by target optical spectrum input array spectrometer, or by target optical spectrum segmentation input array spectrometer, carry out the measurement respectively of each section of spectrum, effectively avoided the band stray light of target optical spectrum.In actual measurement application, the utility model can also carry out more careful segmentation to target optical spectrum by guiding device, further reduce band stray light, meet more high-precision measurement demand, have that parasitic light is low, applying flexible and an accuracy of measurement high.
The utility model can further be improved and be optimized by following technical characterictic:
As a kind of technical scheme, described target optical spectrum is distributed on the diverse location of preposition light-dividing device image planes, and the input end of described guiding device is distributed in receiving target spectrum on the correspondence position of image planes.After preposition light-dividing device dispersion light splitting, target optical spectrum is arranged in the image planes of preposition light-dividing device by wavelength, the input end of described guiding device is also distributed in the correspondence position of image planes, be that the input end of guiding device is by wavelength receiving target spectrum, its setting position is the imaging region of coverage goal spectrum just, receives whole section of target optical spectrum; Or guiding device comprises a plurality of input ends, each input end is arranged along the imaging direction of target optical spectrum, receives respectively the spectrum of different-waveband, the wavelength coverage of coverage goal spectrum after the end to end and stack of spectrum that each input end receives.
As a kind of technical scheme, described guiding device be can complete receiving target spectrum independent optical devices; Or comprise a plurality of discrete subelements, the input end that each subelement can layout obtains complete receiving target spectrum and matches with preposition light-dividing device image planes, the output terminal of guiding device connects with corresponding array spectrometer.Guiding device can be for having the independent optical devices of input end and output terminal and arbitrary structures, its input end is positioned in preposition light-dividing device image planes or near image planes, can complete receiving target spectrum, and by its output terminal by target optical spectrum input array spectrometer.Described independent optical devices can have an above input end and an above output terminal, and the output spectrum of each output terminal is corresponding with the receiving spectrum of input end.For example, these independent optical devices can be for having the light mixing device of a plurality of discrete input ends and a plurality of output terminals, each input end is arranged along the imaging direction of target optical spectrum, be connected, and each output terminal is exported respectively the target optical spectrum that each input end receives with output terminal by cavity independently.
Above-mentioned guiding device also can comprise a plurality of discrete subelements, and each subelement of layout can obtain can complete receiving target spectrum and the input end that matches with the image planes of preposition light-dividing device, for example, subelement can be optical fiber, guiding device is comprised of multifiber, the input end of optical fiber can carry out layout according to the imaging features of preposition light-dividing device, makes it with high as far as possible efficiency receiving target spectrum.For example, when the image planes of preposition light-dividing device are a plane, the input end of guiding device can become receiving plane along image planes layout; When the image planes of preposition light-dividing device are a curved surface, the input end of guiding device can be arranged into similar curved surface according to the imaging features of each section of spectrum in image planes, and it is parallel that the receive direction of every optic fibre input end and the incident direction of its received light spectrum are approached, with the complete spectrum of receiving target efficiently.As preferably, the spectrum the realized segment transmissions that guiding device is comprised of multifiber or the fibre bundle of whole section of transmission.Each subelement can be also imaging device, lens for example, guiding device is the lens arra of arranging along the imaging direction of target optical spectrum, its object plane is the input end of guiding device, be arranged in the image planes of preposition light-dividing device or near image planes the output terminal that its image planes are guiding device, the input end of array spectrometer.Each lens are the input end to each array spectrometer by each section of difference imaging of target optical spectrum, by each array spectrometer, each section of spectrum is measured respectively.
As preferably, described guiding device is for connecting slit or optical fiber or light cone or the imaging device of preposition light-dividing device and array spectrometer.If guiding device is slit, slit is positioned near the image planes or image planes of preposition light-dividing device, receiving target spectrum only, and will in its whole input array spectrometer, measure; If guiding device is imaging device, imaging device comprises object plane, image device and image planes, the object plane of imaging device is just positioned near the image space of target optical spectrum in preposition light-dividing device image planes or its, its image planes are positioned at the input end of array spectrometer, target optical spectrum is the input end to array spectrometer by image device imaging, for example imaging device can be lens, and target optical spectrum is the input end to array spectrometer through lens imaging; If guiding device is an above optical fiber, the input end of optical fiber is arranged in the image planes of preposition light-dividing device or near image planes, its output terminal is positioned on the input light path of array spectrometer, and the target optical spectrum input array spectrometer that its input end is received is measured, not only can avoid band stray light, and be convenient to the optical design of optical system.
Above-mentioned guiding device can be also light cone, i.e. the light-mixing machine of taper, and its opening surface is input end, is arranged in the image planes of preposition light-dividing device, for receiving target spectrum, its top perforate, is positioned on the input light path of array spectrometer.The perforate cross section on light cone top can, for circle, rectangle or square, can be directly the input slit of array spectrometer, by its receiving target spectrum importing array spectrometer.Above-mentioned target optical spectrum enters after light cone, and through mixed light, from its output terminal output, its inwall is generally provided with reflection or diffuse-reflective material.
As a kind of technical scheme, the guiding device of output terminals more than comprising two above array spectrometers and being provided with two, described guiding device is optical fiber; Each output terminal of guiding device connects an array spectrometer, each output terminal is arranged according to the output wave band of optical fiber, the target optical spectrum that input end is received is divided into two sections of above end to end or from beginning to end overlapping spectrum, and each section of spectrum is inputted respectively in corresponding array spectrometer.Guiding device is comprised of multifiber layout, and the input end of each optical fiber is arranged in the image planes of preposition light-dividing device, the spectrum of different-waveband in receiving target spectral range, and from its output terminal output.Each output terminal of guiding device is formed by the output terminal layout of more than one optical fiber, therefore, according to the output wave band of each optical fiber, the output terminal of guiding device can layout make arbitrary designated band spectrum in its export target spectral range, thereby can utilize the guiding device that is provided with a plurality of output terminals that target optical spectrum is divided into the spectrum that multistage is end to end or head and the tail are overlapping, and the output wave band coverage goal spectral range of each output terminal of stack guiding device.Each output terminal of guiding device connects respectively an array spectrometer, and each section of spectrum is inputted respectively to corresponding array spectrometer, realizes the measurement respectively of each band spectrum, i.e. the areal survey of target optical spectrum.
For the wider spectrum of wavelength coverage, be divided into the narrow spectrum of multistage, and utilize a plurality of array spectrometers to measure respectively, not only can avoid band stray light, and it is narrower respectively to measure wave band, array spectrometer easily obtains more high resolving power.As preferably, short-wave band spectrum is with small wavelength space segmentation more, to realize higher spectral resolution.For example, when being (200-250) nm by the spectral range of photometry, guiding device arranges 5 output terminals, the output waveband width of each output terminal is 10nm, and it is end to end respectively to export wave band, respectively by (200-210) nm, (210-220) nm, (220-230) nm, (230-240) nm and (240-250) 5 sections of spectrum of nm input respectively 5 array spectrometers, each array spectrometer is measured inputted spectrum simultaneously, not only effectively avoid the band stray light of each section of spectrum, improved measurement efficiency, and the measurement wave band of each array spectrometer only has 10nm, than being easier to obtain more high resolving power.In addition, the technical program can also, by reducing section gap, increase array spectrometer and meet the more requirement of high measurement accuracy.
Above-mentioned array spectrometer can be to have identical measurement wave band, but measures the spectral band that wave band need cover the output of guiding device output terminal, i.e. identical the and coverage goal spectrum of the measurement wave band of described array spectrometer; Or the measurement wave band of described array spectrometer is corresponding with the spectral band of guiding device output terminal output.For example, guiding device arranges 5 output terminals, the output wave band of each output terminal is respectively: (200-210) nm, (210-220) nm, (220-230) nm, (230-240) nm and (240-250) nm, the measurement wave band of each array spectrometer is identical, be at least (200-250) nm, can avoid respectively measuring the band stray light of wave band, or the measurement wave band of each array spectrometer is respectively: (200-210) nm, (210-220) nm, (220-230) nm, (230-240) nm and (240-250) nm, not only can avoid respectively measuring the band stray light of wave band, and each spectrometer can be realized better resolution at 10nm wave band.
As a kind of technical scheme, described guiding device is two above optical fiber, and the output terminal of guiding device is arranged into optical slits, and described optical slits is the entrance slit of corresponding array spectrometer.Guiding device is comprised of multifiber, and the output terminal of optical fiber can be arranged into optical slits, and directly as the entrance slit of connected array spectrometer, can reduce the loss that light signal energy produces in the process of input spectrum instrument, improves receiving efficiency; Or the output terminal of optical fiber also can be arranged into crooked optical slits, not only can improve receiving efficiency, reduce parasitic light, can also proofread and correct the aberration of array spectrometer, further obtain better image quality.
Two above discrete fibre bundles that above-mentioned guiding device can be comprised of optical fiber arrangement, the input end of each fibre bundle is arranged in the image planes of preposition light-dividing device along the imaging direction of target optical spectrum, the spectrum of designated band in receiving target spectral range successively, and each section of spectrum that the input end of each fibre bundle receives is end to end.The output terminal of every fibre bundle is connected with an array spectrometer, and each section of spectrum is inputted respectively to different array spectrometers and measure respectively.
Above-mentioned guiding device also can be comprised of optical fiber arrangement, have the forking fiber beam of two above output terminals.The input end of each forking fiber beam is arranged in the imaging region of target optical spectrum in the image planes of preposition light-dividing device, its geometric position is different, the spectral band receiving is different, each optical fiber is selected to arrange according to its receiving wave range, can layout become to have two output terminals above, output wave band is end to end or head and the tail are overlapping, be that guiding device is forking fiber beam, each output terminal of forking fiber beam is connected with an array spectrometer, and each output terminal is inputted respectively different array spectrometers by each section of spectrum and measured respectively.
As a kind of technical scheme, the input end of described guiding device moves along the imaging direction of target optical spectrum, chronologically receiving target spectrum piecemeal; Or guiding device comprises an input end being positioned in preposition light-dividing device image planes, described input end once, whole receiving target spectrum; Or guiding device comprises the input end that a plurality of imaging directions along target optical spectrum are arranged, and the spectrum that each input end receives is transfused to guiding device chronologically.The input end of guiding device moves along the imaging direction of target optical spectrum, or directly in the image planes of preposition light-dividing device, move, at diverse location place, receive the spectrum of different-waveband, and move by position, receiving target spectrum piecemeal chronologically, now, guiding device can be the optical devices such as slit or optical fiber.When guiding device comprises more than two input end, each input end can be arranged in order according to the imaging direction of target optical spectrum, receives respectively the spectrum of different-waveband, and each input end arranges switchgear, shutter for example, by each section of spectrum of switch controlling device control inputs guiding device.When guiding device only comprises an input end being positioned in preposition light-dividing device image planes, this input end can be once, whole receiving target spectrum, and the output terminal by guiding device is by target optical spectrum integral body or segmentation input array spectrometer.
As a kind of technical scheme, described preposition light-dividing device is the monochromator that comprises the first rotation dispersion system, by the rotation of the first rotation dispersion system, monochromator by target optical spectrum chronologically piecemeal imaging to the input end of guiding device.Described monochromator comprises the first rotation dispersion system, rotates the rotation of dispersion system by monochromator first, by target optical spectrum by certain sequential piecemeal imaging to the input end of guiding device.Monochromator can be realize incident light radiation dispersion light splitting and by target optical spectrum chronologically piecemeal imaging to the arbitrary structures of guiding device input end.For example, monochromator comprises entrance slit, rotating shutter and focal imaging device, incident light radiation is through entrance slit incident rotating shutter, and section spectrum line focus imaging device imaging of each after light splitting is to the input end of guiding device, then through guiding device input array spectrometer.One section of narrow spectrum of the each output of monochromator, and along with the rotation of its rotating shutter, at each constantly, export respectively each section narrow spectrum of different wavelength range.When monochromator is exported the wave band that wave band is less than target optical spectrum, can target optical spectrum be divided into the narrow spectrum of multistage by wavelength, and the dispersion system by rotating monochromator by each section of spectrum piecemeal imaging to the input end of guiding device, the scope of each section of spectrum stack coverage goal spectrum.
As a kind of technical scheme, described preposition light-dividing device is polychromator, described polychromator comprises entrance slit, dispersion system and focal imaging device, incident light radiation incident dispersion system, focal imaging device receives the diffraction light after dispersion system light splitting, and by target optical spectrum imaging the input end to guiding device.Polychromator carries out after dispersion light splitting incident light radiation, and target optical spectrum is Polaroid to the image planes of preposition light-dividing device.As preferably, also comprise collimator apparatus or can acquisition means, incident light radiation is through entrance slit incident collimator apparatus, parallel incident dispersion system after collimator apparatus, focal imaging device receives the diffraction light after dispersion system light splitting, and by light spectrum image-forming to image planes; Or incident light radiation, through entrance slit incident meeting acquisition means, through meeting acquisition means post-concentration incident grating, is carried out dispersion light splitting by grating, and by focal imaging device by the light spectrum image-forming of incident light radiation to image planes.Described dispersion system can be plane grating or prism.Now the input end of guiding device can be arranged in the image planes of polychromator according to the imaging geometry position of target optical spectrum, with receiving target spectrum.
Above-mentioned polychromator also can be comprised of entrance slit and the concave grating that integrates light splitting and light gathering, and concave grating is on high reflecting metal concave surface, to delineate the reflective diffraction gratings that series of parallel line forms, and has light splitting and light gathering simultaneously.Incident light radiation is through entrance slit incident concave grating, concave grating is to its dispersion light splitting, and by target optical spectrum focal imaging the input end to guiding device, not only can realize the dispersion light splitting function of preposition light-dividing device, can also dwindle the overall dimensions of spectral measurement device.
As a kind of technical scheme, described array spectrometer comprises the second rotation dispersion system, and second rotates dispersion system rotates by the input timing of each section of spectrum, and each section of inputted spectrum is carried out to spectroscopic measurements.The rotation that array spectrometer second rotates dispersion system is synchronizeed with the switching of guiding device input spectrum, for example, when the input spectrum of guiding device switches by the movement of its input end, input end moves at every turn, second rotates dispersion system rotates an angle, and this section of spectrum of this moment guiding device input array spectrometer is carried out to secondary light splitting.When the input spectrum of guiding device switches by switchgear, the rotational synchronization of dispersion system is rotated in the switching of switchgear and second, by array spectrometer, this section of spectrum of this moment guiding device input spectrum instrument is carried out to secondary spectroscopic measurements.Now, preposition light-dividing device can be polychromator, and target optical spectrum is Polaroid, and each input end moves, or arranges along target optical spectrum imaging direction, by wavelength, receives each section of spectrum.
When preposition light-dividing device is while comprising the monochromator of the first rotation dispersion system, second rotates dispersion system and first rotates the rotation of dispersion system synchronization, chronologically each section of spectrum of input array spectrometer is carried out to secondary light splitting, can obtain higher resolution and better image quality.
In sum, the utility model arranged preposition light-dividing device and guiding device before the input end of array spectrometer, utilize preposition light-dividing device to carry out dispersion light splitting to incident light radiation, and utilize guiding device that target optical spectrum is separated from the spectrum of incident light radiation, by its integral body or segmentation input array spectrometer, and target optical spectrum is carried out to segmentation or time-ordered measurement, effectively avoided the band stray light of each measure spectrum.Simultaneously, the utility model can also be used the guiding device of optical fiber type to extract easily and effectively target optical spectrum, and by optic fibre input end and output terminal are rationally arranged, further improve the receiving efficiency of target optical spectrum and the parasitic light of spectral measurement device and image quality, have that design is ingenious, parasitic light is low, applying flexible and accuracy of measurement high.
[accompanying drawing explanation]
The structural representation of Fig. 1 the utility model embodiment 1
The structural representation of the preposition light-dividing device of Fig. 2 the utility model
Optical slits schematic diagram in Fig. 3 the utility model embodiment 1
The structural representation of Fig. 4 the utility model embodiment 2
The preposition light-dividing device of 1-; 2-guiding device; 21-input end; 22-output terminal; 3-array spectrometer; 4-entrance slit; 5-collimator apparatus; 6-grating; 7-focal imaging device; The radiation of 8-incident light; 9-target optical spectrum; The image planes of the preposition light-dividing device of 10-; 11-optical slits; 12-first rotates dispersion system; 13-second rotates dispersion system.
[embodiment]
Embodiment 1
A kind of spectral measurement device as shown in Figure 1, comprises preposition light-dividing device 1, guiding device 2 and 5 array spectrometers 3 (being designated as respectively 31,32,33,34 and 35).
As shown in Figure 2, preposition light-dividing device 1 is comprised of entrance slit 4, collimator apparatus 5, grating 6 and focal imaging device 7.The spectral range of incident light radiation 8 is (200-800) nm, and the wavelength band of the target optical spectrum 9 of required measurement is (200-250) nm.Incident light radiation 8 is by entrance slit 4 incident collimator apparatuses 5, parallel incident grating 6 after collimator apparatus 5, grating 6 is incident light radiation 8 light splitting, focal imaging device 7 by the light spectrum image-forming of incident light radiation 8 to the image planes 10 of preposition light-dividing device 1.
Guiding device 2 is comprised of multifiber, and its input end 21 is arranged in the image planes 10 of preposition light-dividing device 1, receives the target optical spectrum 9 within the scope of (200-250) nm.Guiding device 2 has 5 output terminal 22(and is designated as respectively 221, 222, 223, 224 and 225), the target optical spectrum 9 that input end 21 is received is divided into 5 sections and (is designated as respectively 91, 92, 93, 94 and 95), and each section of spectrum is inputted respectively to 5 array spectrometers 3, each output terminal 22 is according to the output wave band layout of optical fiber, segmentation with realize target spectrum 9: the first output terminal 221 of guiding device 2 is by the spectrum of (200-210) nm 91 input the first array spectrometers 31, the second output terminal 222 of guiding device 2 is by the spectrum of (210-220) nm 92 input the second spectrometers 32, the 3rd output terminal 223 of guiding device 2 is by the spectrum of (220-230) nm 93 input the 3rd spectrometers 33, the 4th output terminal 224 of guiding device 2 is by the spectrum of (230-240) nm 94 input the 3rd spectrometers 34, the 5th output terminal 225 of guiding device 2 is by the spectrum of (240-250) nm 95 input the 3rd spectrometers 35, 5 array spectrometers 3 are measured the spectrum of each wave band simultaneously, not only effectively avoided respectively measuring the band stray light of wave band, significantly improve accuracy of measurement, and 5 sections of spectrum are measured simultaneously, can further improve measurement efficiency.
Each output terminal 22 of above-mentioned guiding device 2 is all aligned to optical slits 11, and is respectively the entrance slit of an array spectrometer 3, can further proofread and correct the aberration of array spectrometer 3, improves its image quality, and then promotes the overall performance of spectral measurement device.
Embodiment 2
The present embodiment and embodiment 1 difference are, only comprise an array spectrometer 3, described guiding device 2 is slit, and described preposition light-dividing device 1 is the monochromator that comprises the first rotation dispersion system 12, and described array spectrometer 3 comprises the second rotation dispersion system 13.
Incident light radiation 8 is through entrance slit 4 incident collimator apparatuses 5, after collimator apparatus 5, dispersion system 12 is rotated in parallel incident first, first rotates 12 pairs of incident light radiation of dispersion system 8 carries out dispersion light splitting, focal imaging device 7 by spectrum 91 imagings of (200-210) nm to slit, by slit input array spectrometer 3, through 13 pairs of spectrum of the second rotation dispersion system 91, carry out secondary light splitting, and measure by array spectrometer 3 signal that obtains spectrum 91.After spectrum 91 is measured, first rotates dispersion system 12 turns to the next position, incident light radiation 8 is through its dispersion light splitting, focal imaging device 7 by spectrum 92 imagings of (210-220) nm to slit, by slit input array spectrometer 3, through 13 pairs of spectrum of the second rotation dispersion system 92, carry out secondary light splitting, and measure by array spectrometer 3 signal that obtains spectrum 92.The rest may be inferred, completes the measurement piecemeal of required measurement wave band (200-250) nm target optical spectrum 9, effectively avoids non-measurement wave band parasitic light in addition.

Claims (11)

1. a spectral measurement device, it is characterized in that, comprise preposition light-dividing device (1), guiding device (2) and the array spectrometer (3) being coupled with guiding device (2), preposition light-dividing device (1) carries out dispersion light splitting to incident light radiation (8), and by target optical spectrum (9) imaging the input end (21) to guiding device (2), the output terminal (22) of guiding device (2) is by target optical spectrum (9) segmentation or array spectrometer (3) corresponding to whole input.
2. a kind of spectral measurement device as claimed in claim 1, it is characterized in that, described target optical spectrum (9) is distributed on the diverse location of preposition light-dividing device (1) image planes (10), and the input end (21) of described guiding device (2) is distributed in receiving target spectrum (9) on the correspondence position of image planes (10).
3. a kind of spectral measurement device as claimed in claim 1, is characterized in that, described guiding device (2) be can complete receiving target spectrum (9) independent optical devices; Or comprise a plurality of discrete subelements, the input end (21) that each subelement can layout obtains complete receiving target spectrum (9) and matches with preposition light-dividing device (1) image planes (10), the output terminal (22) of guiding device (2) connects with corresponding array spectrometer (3).
4. a kind of spectral measurement device as claimed in claim 3, is characterized in that, described guiding device (2) is for connecting slit or optical fiber or light cone or the imaging device of preposition light-dividing device (1) and array spectrometer (3).
5. a kind of spectral measurement device as claimed in claim 4, is characterized in that, the guiding device (2) of output terminals (22) more than comprising two above array spectrometers (3) and being provided with two, and described guiding device (2) is optical fiber; Each output terminal (22) of guiding device (2) connects an array spectrometer (3), each output terminal (22) is arranged according to the output wave band of optical fiber, the target optical spectrum (9) that input end (21) is received is divided into two sections of above end to end or from beginning to end overlapping spectrum, and each section of spectrum is inputted respectively in corresponding array spectrometer (3).
6. a kind of spectral measurement device as claimed in claim 5, it is characterized in that, identical and the coverage goal spectrum (9) of the measurement wave band of described array spectrometer (3), or the measurement wave band of described array spectrometer (3) is corresponding with the spectral band of guiding device (2) output terminal (22) output.
7. a kind of spectral measurement device as described in claim 3 or 4, it is characterized in that, described guiding device (2) is two above optical fiber, the output terminal (22) of guiding device (2) is arranged into optical slits (11), and described optical slits (11) is the entrance slit of corresponding array spectrometer (3).
8. a kind of spectral measurement device as claimed in claim 1, is characterized in that, the input end (21) of described guiding device (2) moves along the imaging direction of target optical spectrum (9), chronologically receiving target spectrum (9) piecemeal; Or guiding device (2) comprises an input end (21) being positioned in preposition light-dividing device (1) image planes (10), described input end (21) once, whole receiving target spectrum (9); Or guiding device (2) comprises the input end (21) that a plurality of imaging directions along target optical spectrum (9) are arranged, and the spectrum that each input end (21) receives is transfused to guiding device (2) chronologically.
9. a kind of spectral measurement device as claimed in claim 8, it is characterized in that, described preposition light-dividing device (1) is the monochromator that comprises the first rotation dispersion system (12), by the rotation of the first rotation dispersion system (12), monochromator by target optical spectrum (9) chronologically piecemeal imaging to the input end (21) of guiding device (2).
10. a kind of spectral measurement device as claimed in claim 8, it is characterized in that, described preposition light-dividing device (1) is polychromator, described polychromator comprises entrance slit (4), dispersion system (6) and focal imaging device (7), incident light radiation (8) incident dispersion system (6), focal imaging device (7) receives the diffraction light after dispersion system (6) light splitting, and by target optical spectrum (9) imaging the input end (21) to guiding device (2).
11. a kind of spectral measurement devices as described in claim 9 or 10, it is characterized in that, described array spectrometer (3) comprises the second rotation dispersion system (13), second rotates dispersion system (13) rotates by the input timing of each section of spectrum, and each section of inputted spectrum is carried out to spectroscopic measurements.
CN201320742699.XU 2013-11-22 2013-11-22 Spectrum measuring device Expired - Lifetime CN203572576U (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103575397A (en) * 2013-11-22 2014-02-12 杭州远方光电信息股份有限公司 Spectral measurement device
CN106840399A (en) * 2017-01-19 2017-06-13 中国科学院上海技术物理研究所 A kind of multispectral imaging detector of integrated optical fiber

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103575397A (en) * 2013-11-22 2014-02-12 杭州远方光电信息股份有限公司 Spectral measurement device
CN103575397B (en) * 2013-11-22 2016-11-23 杭州远方光电信息股份有限公司 A kind of spectral measurement device
CN106840399A (en) * 2017-01-19 2017-06-13 中国科学院上海技术物理研究所 A kind of multispectral imaging detector of integrated optical fiber
CN106840399B (en) * 2017-01-19 2018-07-06 中国科学院上海技术物理研究所 A kind of multispectral imaging detector of integrated optical fiber

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