CN203551179U - Differential pressure sensor chip base with double oil guiding pipes - Google Patents
Differential pressure sensor chip base with double oil guiding pipes Download PDFInfo
- Publication number
- CN203551179U CN203551179U CN201320425914.3U CN201320425914U CN203551179U CN 203551179 U CN203551179 U CN 203551179U CN 201320425914 U CN201320425914 U CN 201320425914U CN 203551179 U CN203551179 U CN 203551179U
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- CN
- China
- Prior art keywords
- differential pressure
- negative
- chamber oil
- oil guide
- positive
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model provides a differential pressure sensor chip base with double oil guiding pipes. A positive-chamber oil guiding pipe and a negative-chamber oil guiding pipe are sintered at the left side of a metal substrate of the differential pressure sensor chip base, A positive-chamber oil guiding channel and a negative-chamber oil guiding channel are formed. A differential pressure measuring chip is packaged at the right side of the negative-chamber oil guiding channel. A negative-chamber oil-guiding side hole which is communicated with the excircle of the metal substrate is vertically communicated with the negative-chamber oil guiding channel, thereby causing the negative-chamber oil guiding channel to communicate with a negative chamber of a differential pressure measuring chip and the excircle of the metal substrate through the negative-chamber oil guiding channel and the negative-chamber oil-guiding side hole. The positive-chamber oil guiding pipe can be communicated with the positive chamber of the differential pressure measuring chip and the end surface of the metal substrate through the positive-chamber oil guiding channel, thereby realizing independent communication of the positive-chamber oil guiding pipe and the negative-chamber oil guiding pipe to the positive chamber and the negative chamber of the differential pressure measuring chip. Additionally, metal pins are sintered at and pass through the outer ring of the metal substrate through insulating filler, and the metal pins which are sintered on and pass through the inner part can transmit electric signals which are measured by the differential pressure measuring chip to the left side of the chip base.
Description
Technical field
The utility model relates to a kind of chip base, especially the differential pressure chip base of the two oil guide pipes of band.
Background technology
At present, known differential pressure pick-up chip base, is divided into single oil guide pipe base and without oil guide pipe base.Single oil guide pipe base Hou road need to increase again and join oil guide pipe parts while encapsulating, to realize the silicon oil infilling in the positive and negative chamber of differential pressure pick-up bellows; And can only depend on the two oil guiding holes of differential pressure pick-up pedestal increase without oil guide pipe base, realize the silicon oil infilling in the positive and negative chamber of differential pressure pick-up bellows.Not only complex structure of these methods, cost is high, and later stage assembling treatment process is comparatively loaded down with trivial details.
Summary of the invention
In order to overcome existing differential pressure pick-up chip base complex structure, cost height and the loaded down with trivial details deficiency of technique, the utility model provides a kind of differential pressure pick-up chip base with two oil guide pipes.The novel differential pressure sensor chip base of the two oil guide pipes of this band is with two oil guide pipes, neither need to increase the oil guide pipe parts outside quota, do not need the two oil guiding holes of differential pressure pick-up pedestal increase yet, just can realize the silicon oil infilling in the positive and negative chamber of differential pressure pick-up bellows, not only reduce cost, also simplified encapsulation operation technique.
The utility model solves the technical scheme that its technical matters adopts: at positive chamber oil guide pipe of left side sintering and a negative chamber oil guide pipe of the metallic matrix of differential pressure pick-up chip base, form positive and negative chamber Oil Guide passage, differential pressure measurement chip package is on the right side of negative chamber Oil Guide passage, the negative chamber Oil Guide side opening being communicated with metallic matrix cylindrical and the Oil Guide channel vertical conducting of negative chamber, thus make negative chamber oil guide pipe by bear chamber Oil Guide passage and negative chamber Oil Guide side opening can with the negative chamber of differential pressure measurement chip and the conducting of metallic matrix cylindrical; Positive chamber oil guide pipe by positive chamber Oil Guide passage can with the positive chamber of differential pressure measurement chip and the conducting of metallic matrix end face, so just realized positive and negative chamber oil guide pipe as oil filler pipe separately to the object of the positive and negative chamber independence conducting of differential pressure measurement chip, in addition, metal stitch is applied in the outer ring of metallic matrix by Insulation stopping sintering, and sintering is applied in electrical signal transfer that inner metal stitch also can record differential pressure measurement chip to chip base left side.
The beneficial effects of the utility model are, the design of the novel differential pressure sensor chip base of the two oil guide pipes of this band can have independently oil-filled passage of two, positive and negative chamber simultaneously, not only simple in structure, cost is lower, but also simplifies Liao Hou road encapsulation operation technique.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is front elevation of the present utility model.
Fig. 2 is that A-A of the present utility model cuts open figure.
Fig. 3 is that B-B of the present utility model cuts open figure.
1. metallic matrixes in figure, 2. sintering feed, 3. positive chamber oil guide pipe, 4. negative chamber guide pipe, 5. metal stitch, 6. Insulation stopping, 7. negative chamber Oil Guide side opening, 8. negative chamber Oil Guide path, 9. differential pressure measurement chip, 10. positive chamber Oil Guide path.
Embodiment
In Fig. 2, there are negative chamber Oil Guide path (8) and positive chamber Oil Guide path (10) in metallic matrix (1) inside, the left side of negative chamber Oil Guide path (8) adopts sintering feed (2) sintering one negative chamber oil guide pipe (4), and the left side of positive chamber Oil Guide path (10) adopts sintering feed (2) sintering one positive chamber oil guide pipe (3).One of the layout that metallic matrix (1) is inner and the negative chamber Oil Guide side opening (7) and negative chamber Oil Guide path (8) vertical connection of cylindrical conducting, differential pressure measurement chip (9) is mounted on the right side of negative chamber Oil Guide path.Metal stitch (5) is applied in the outer ring of metallic matrix (1) by Insulation stopping (6) sintering.Negative chamber oil guide pipe (4), negative chamber Oil Guide side opening (7) and negative chamber Oil Guide path (8) have formed negative chamber path, with the negative chamber conducting of differential pressure measurement chip (9); Positive chamber oil guide pipe (3) and positive chamber Oil Guide path (10) have formed positive chamber path, with the positive chamber of differential pressure measurement chip (9) and the end face conducting of metallic matrix (1).And the electrical signal transfer that metal stitch (5) records differential pressure measurement chip (9) is to the left side of metallic matrix (1).
Claims (3)
1. a two oil guide pipe differential pressure pick-up chip base, at positive chamber oil guide pipe of left side sintering and a negative chamber oil guide pipe of the metallic matrix of differential pressure pick-up chip base, form positive and negative chamber Oil Guide passage, differential pressure measurement chip package is on the right side of negative chamber Oil Guide passage, it is characterized in that: negative chamber oil guide pipe is by the negative chamber conducting of negative chamber Oil Guide passage and differential pressure measurement chip, and positive chamber oil guide pipe is by the positive chamber conducting of positive chamber Oil Guide passage and differential pressure measurement chip.
2. the two oil guide pipe differential pressure pick-up chip bases of one according to claim 1, is characterized in that: the negative chamber Oil Guide side opening being communicated with metallic matrix cylindrical and the Oil Guide passage conducting of negative chamber.
3. the two oil guide pipe differential pressure pick-up chip bases of one according to claim 1, is characterized in that: metal stitch is applied in the outer ring of metallic matrix by Insulation stopping sintering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320425914.3U CN203551179U (en) | 2013-07-16 | 2013-07-16 | Differential pressure sensor chip base with double oil guiding pipes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320425914.3U CN203551179U (en) | 2013-07-16 | 2013-07-16 | Differential pressure sensor chip base with double oil guiding pipes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203551179U true CN203551179U (en) | 2014-04-16 |
Family
ID=50469277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320425914.3U Expired - Lifetime CN203551179U (en) | 2013-07-16 | 2013-07-16 | Differential pressure sensor chip base with double oil guiding pipes |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203551179U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103674411A (en) * | 2013-07-16 | 2014-03-26 | 上海洛丁森工业自动化设备有限公司 | A double-oil conduit differential pressure sensor chip tube base |
| CN109186851A (en) * | 2018-09-27 | 2019-01-11 | 江苏德尔森控股有限公司 | A kind of many reference amounts differential pressure pick-up |
-
2013
- 2013-07-16 CN CN201320425914.3U patent/CN203551179U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103674411A (en) * | 2013-07-16 | 2014-03-26 | 上海洛丁森工业自动化设备有限公司 | A double-oil conduit differential pressure sensor chip tube base |
| CN103674411B (en) * | 2013-07-16 | 2016-04-06 | 上海洛丁森工业自动化设备有限公司 | A kind of two oil guide pipe differential pressure pick-up chip base |
| CN109186851A (en) * | 2018-09-27 | 2019-01-11 | 江苏德尔森控股有限公司 | A kind of many reference amounts differential pressure pick-up |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140416 |
|
| DD01 | Delivery of document by public notice | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhang Shu Document name: Notice of Termination of Patent Rights |