CN105547569A - High-temperature absolute pressure sensor - Google Patents
High-temperature absolute pressure sensor Download PDFInfo
- Publication number
- CN105547569A CN105547569A CN201511005272.1A CN201511005272A CN105547569A CN 105547569 A CN105547569 A CN 105547569A CN 201511005272 A CN201511005272 A CN 201511005272A CN 105547569 A CN105547569 A CN 105547569A
- Authority
- CN
- China
- Prior art keywords
- sensor
- casing
- substrate
- absolute pressure
- high temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 2
- 239000010931 gold Substances 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- 238000007747 plating Methods 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005476 soldering Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0681—Protection against excessive heat
Abstract
The invention discloses a high-temperature absolute pressure sensor. The sensor comprises a chassis and a substrate. A vacuum chamber is formed between the chassis and the substrate. A sensor formed by a sensor shell and a sensor sensitive diaphragm is installed in the vacuum chamber. The substrate is provided with a pressure channel connected to the sensor sensitive diaphragm. The sensor is connected to a conducted connection object which is led out by the chassis. A method of manufacturing the high-temperature absolute pressure sensor is characterized in that a metal-thin-film piezoresistive sensor is selected as a basic component; the sensor is welded on the substrate and the pressure channel on the substrate aligns the sensor sensitive diaphragm on the sensor; the chassis is assembled with a gold plating pin and a glass sealing ring; in a vacuum condition, the gold plating pin is welded to a terminal of the sensor through a metal wire or is connected to the terminal of the sensor through a spring contact sheet and the chassis is welded to the substrate. The sensor has advantages that usage is convenient; the sensor works under the vacuum condition and the sensor is suitable for working in a temperature-sensitive environment, and stability is good.
Description
Technical field
The present invention relates to a kind of sensor, particularly a kind of high temperature absolute pressure sensor and manufacture method thereof.
Background technology
Sensor (English name: transducer/sensor) is a kind of pick-up unit, measured information can be experienced, and the information that can will experience, the information being for conversion into electric signal or other desired forms according to certain rules exports, to meet the requirements such as the transmission of information, process, storage, display, record and control.
Existing sensor is unsuitable in hot conditions work.
Summary of the invention
Technical matters to be solved by this invention is for the deficiencies in the prior art, provides a kind of high temperature absolute pressure sensor and manufacture method thereof.
To achieve these goals, the measure taked of the present invention:
A kind of high temperature absolute pressure sensor, comprise casing and substrate, a vacuum chamber is formed between described casing and substrate, the sensor be made up of sensor shell and sensor sensing diaphragm is installed in vacuum chamber, substrate offers the pressure channel be communicated with sensor sensing diaphragm, sensor is connected with the conduction connector of being drawn by casing;
The back shroud of described casing is provided with metal tube, in metal tube, offers evacuation passageway;
Described conduction connector is the gold-plated lead leg being connected to sensor by spring contact plate or tinsel, and gold-plated lead leg is drawn by casing;
Between described gold-plated lead leg and casing, glass capsulation ring is installed;
Described substrate is threaded base plate, is integral type structure or split-type structural between casing and back shroud;
Described sensor is metallic film piezoresistive transducer.
Manufacture a method for above-mentioned high temperature absolute pressure sensor, the first step: choosing by metallic film piezoresistive transducer is basic components and parts; Second step: sensor is welded on substrate, the sensor sensing diaphragm in the pressure channel alignment sensor on substrate; 3rd step: assemble gold-plated lead leg and glass capsulation ring on casing; 4th step: under vacuum, by gold-plated lead leg by welded wire to the connection terminal of sensor or be connected on the connection terminal of sensor by spring contact plate, is welded to casing on substrate, forms a vacuum chamber in casing; Or under normal conditions, by gold-plated lead leg by welded wire to the connection terminal of sensor or be connected on the connection terminal of sensor by spring contact plate, casing is welded on substrate, the back shroud of casing is provided with metal tube, formation vacuum chamber will be vacuumized in casing by the evacuation passageway in metal tube, in vacuum, by evacuation passageway sealing, can process and obtain high temperature absolute pressure sensor.
Beneficial effect of the present invention: practical, production cost is low, easy to use, and sensor works under vacuum, is suitable for, in the work of temperature-sensitive environment, stablizing.
Accompanying drawing explanation
Fig. 1, Vacuuming structure schematic diagram after threaded base plate of the present invention.
Fig. 2, Vacuuming structure schematic diagram after tinsel soldering and sealing of the present invention.
Fig. 3, Vacuuming structure schematic diagram after spring contact plate of the present invention connects.
Fig. 4, soldering and sealing structural representation under spring contact plate connection vacuum condition of the present invention.
Embodiment
A kind of high temperature absolute pressure sensor, comprise casing 2 and substrate 1, a vacuum chamber 11 is formed between described casing 2 and substrate 1, the sensor be made up of sensor shell 5 and sensor sensing diaphragm 6 is installed in vacuum chamber 11, substrate 1 offers the pressure channel 12 be communicated with sensor sensing diaphragm 6, sensor is connected with the conduction connector of being drawn by casing 2.
The back shroud 8 of described casing 2 is provided with metal tube 9, in metal tube 9, offers evacuation passageway 10.
Described conduction connector is the gold-plated lead leg 4 being connected to sensor by spring contact plate 71 or tinsel 7, and gold-plated lead leg 4 is drawn by casing 2.
Between described gold-plated lead leg 4 and casing 2, glass capsulation ring 3 is installed.Good seal performance.
Described substrate 1 is threaded base plate, is integral type structure or split-type structural between casing 2 and back shroud 8.Integral structure is suitable for manufacturing absolute pressure sensor of the present invention under the environment of vacuum.Split-type structural is convenient to install metal tube 9 on back shroud 8, is vacuumized by the evacuation passageway 10 in metal tube 9.
Described sensor is metallic film piezoresistive transducer.
Whole sensor works under the condition of vacuum, absolute pressure, high temperature resistant, and working temperature can reach 320 degree, and can ensure very high stability.
Manufacture a method for above-mentioned high temperature absolute pressure sensor, the first step: choosing by metallic film piezoresistive transducer is basic components and parts; Second step: by sensor welding on substrate 1, the sensor sensing diaphragm 6 in pressure channel 12 alignment sensor on substrate 1; 3rd step: assemble gold-plated lead leg 4 and glass capsulation ring 3 on casing 2; 4th step: under vacuum, on the connection terminal gold-plated lead leg 4 being welded to sensor by tinsel 7 or be connected on the connection terminal of sensor by spring contact plate 71, is welded to casing 2 on substrate 1, forms a vacuum chamber 11 in casing 2; Or under normal conditions, on the connection terminal gold-plated lead leg 4 being welded to sensor by tinsel 7 or be connected on the connection terminal of sensor by spring contact plate 71, casing 2 is welded on substrate 1, the back shroud 8 of casing 2 is provided with metal tube 9, formation vacuum chamber 11 will be vacuumized in casing 2 by the evacuation passageway 10 in metal tube 9, in vacuum, by evacuation passageway 10 sealing, can process and obtain high temperature absolute pressure sensor.
As shown in Figure 1, Figure 2 and Figure 3: under normal conditions, after assembling the present invention, vacuumized by metal tube 9 and obtain vacuum chamber 11.
As shown in Figure 4: directly connect the casing 2 with gold-plated lead leg 4 in the condition welded and installed of vacuum.
Claims (7)
1. a high temperature absolute pressure sensor, comprise casing (2) and substrate (1), it is characterized in that: between described casing (2) and substrate (1), form a vacuum chamber (11), the sensor be made up of sensor shell (5) and sensor sensing diaphragm (6) is installed in vacuum chamber (11), substrate (1) offers the pressure channel (12) be communicated with sensor sensing diaphragm (6), sensor is connected with the conduction connector of being drawn by casing (2).
2. a kind of high temperature absolute pressure sensor according to claim 1, it is characterized in that: the back shroud (8) of described casing (2) is provided with metal tube (9), in metal tube (9), offers evacuation passageway (10).
3. a kind of high temperature absolute pressure sensor according to claim 1 and 2, it is characterized in that: described conduction connector is the gold-plated lead leg (4) being connected to sensor by spring contact plate (71) or tinsel (7), gold-plated lead leg (4) is drawn by casing (2).
4. a kind of high temperature absolute pressure sensor according to claim 3, is characterized in that: be provided with glass capsulation ring (3) between described gold-plated lead leg (4) and casing (2).
5. a kind of high temperature absolute pressure sensor according to claim 2, is characterized in that: described substrate (1) is threaded base plate, is integral type structure or split-type structural between casing (2) and back shroud (8).
6. a kind of high temperature absolute pressure sensor according to claim 5, is characterized in that: described sensor is metallic film piezoresistive transducer.
7. manufacture a method for above-mentioned high temperature absolute pressure sensor, it is characterized in that: the first step: choosing by metallic film piezoresistive transducer is basic components and parts, second step: sensor is welded on substrate (1), the sensor sensing diaphragm (6) in pressure channel (12) alignment sensor on substrate (1), 3rd step: assemble gold-plated lead leg (4) and glass capsulation ring (3) on casing (2), 4th step: under vacuum, on the connection terminal gold-plated lead leg (4) being welded to sensor by tinsel (7) or be connected on the connection terminal of sensor by spring contact plate (71), casing (2) is welded on substrate (1), in casing (2), forms a vacuum chamber (11), or under normal conditions, on the connection terminal gold-plated lead leg (4) being welded to sensor by tinsel (7) or be connected on the connection terminal of sensor by spring contact plate (71), casing (2) is welded on substrate (1), the back shroud (8) of casing (2) is provided with metal tube (9), formation vacuum chamber (11) will be vacuumized in casing (2) by the evacuation passageway (10) in metal tube (9), in vacuum, by evacuation passageway (10) sealing, can process and obtain high temperature absolute pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511005272.1A CN105547569A (en) | 2015-12-30 | 2015-12-30 | High-temperature absolute pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511005272.1A CN105547569A (en) | 2015-12-30 | 2015-12-30 | High-temperature absolute pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105547569A true CN105547569A (en) | 2016-05-04 |
Family
ID=55826914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511005272.1A Pending CN105547569A (en) | 2015-12-30 | 2015-12-30 | High-temperature absolute pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105547569A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679854A (en) * | 2016-11-29 | 2017-05-17 | 中国电子科技集团公司第四十八研究所 | Absolute-pressure pressure sensor and preparation method thereof |
| CN110044536A (en) * | 2019-05-17 | 2019-07-23 | 大唐半导体科技有限公司 | A kind of gas-detecting device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5665920A (en) * | 1995-01-12 | 1997-09-09 | Endress + Hauser Gmbh + Co. | Device with exchangeable sealing element for measuring pressure or differential pressure |
| JP2002286574A (en) * | 2001-03-27 | 2002-10-03 | Tokyo Electron Ltd | Pressure sensor |
| CN1869599A (en) * | 2005-05-27 | 2006-11-29 | 上海自动化仪表股份有限公司 | Multi-parameter sensor for measuring differential pressure/pressure/temp |
| CN202382900U (en) * | 2011-11-17 | 2012-08-15 | 中国电子科技集团公司第四十八研究所 | Absolute pressure packaging structure for strain pressure transducer and strain pressure transducer |
| CN104568239A (en) * | 2014-12-09 | 2015-04-29 | 太原航空仪表有限公司 | Small-scale vibration cylinder pressure sensor excitated by 9mm piezoelectricity |
-
2015
- 2015-12-30 CN CN201511005272.1A patent/CN105547569A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5665920A (en) * | 1995-01-12 | 1997-09-09 | Endress + Hauser Gmbh + Co. | Device with exchangeable sealing element for measuring pressure or differential pressure |
| JP2002286574A (en) * | 2001-03-27 | 2002-10-03 | Tokyo Electron Ltd | Pressure sensor |
| CN1869599A (en) * | 2005-05-27 | 2006-11-29 | 上海自动化仪表股份有限公司 | Multi-parameter sensor for measuring differential pressure/pressure/temp |
| CN202382900U (en) * | 2011-11-17 | 2012-08-15 | 中国电子科技集团公司第四十八研究所 | Absolute pressure packaging structure for strain pressure transducer and strain pressure transducer |
| CN104568239A (en) * | 2014-12-09 | 2015-04-29 | 太原航空仪表有限公司 | Small-scale vibration cylinder pressure sensor excitated by 9mm piezoelectricity |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679854A (en) * | 2016-11-29 | 2017-05-17 | 中国电子科技集团公司第四十八研究所 | Absolute-pressure pressure sensor and preparation method thereof |
| CN106679854B (en) * | 2016-11-29 | 2020-02-07 | 中国电子科技集团公司第四十八研究所 | Absolute pressure sensor and preparation method thereof |
| CN110044536A (en) * | 2019-05-17 | 2019-07-23 | 大唐半导体科技有限公司 | A kind of gas-detecting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| DD01 | Delivery of document by public notice |
Addressee: Hu Bo Document name: Notification of Passing Preliminary Examination of the Application for Invention |
|
| PB01 | Publication | ||
| DD01 | Delivery of document by public notice |
Addressee: Hu Bo Document name: Notification of Publication of the Application for Invention |
|
| C10 | Entry into substantive examination | ||
| CB02 | Change of applicant information |
Address after: 100036 Haidian District Fuxing Road, No. 49, building 39, No., No. 20 Applicant after: Huang Fuchun Applicant after: Hu Bo Address before: 100036 Fuxing Road, Beijing, Haidian District, No. 26 Applicant before: Huang Fuchun Applicant before: Hu Bo |
|
| COR | Change of bibliographic data | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20170323 Address after: 100036 Haidian District Fuxing Road, No. 49, building 39, No., No. 20 Applicant after: Beijing Hongfu Ruian Technology Development Co., Ltd. Address before: 100036 Haidian District Fuxing Road, No. 49, building 39, No., No. 20 Applicant before: Huang Fuchun Applicant before: Hu Bo |
|
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: No. 3 digital road, Taiyuan hi tech Zone, Shanxi, Shanxi Applicant after: Kotel Aerospace Defense Technology Co., Ltd., Shanxi Address before: No. 39, No. 20, Fuxing Road, Haidian District, Beijing, Beijing Applicant before: Beijing Hongfu Ruian Technology Development Co., Ltd. |
|
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160504 |
|
| WD01 | Invention patent application deemed withdrawn after publication |