CN203534921U - Calibrating device of tension tester - Google Patents
Calibrating device of tension tester Download PDFInfo
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- CN203534921U CN203534921U CN201320672682.1U CN201320672682U CN203534921U CN 203534921 U CN203534921 U CN 203534921U CN 201320672682 U CN201320672682 U CN 201320672682U CN 203534921 U CN203534921 U CN 203534921U
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- standard model
- clamping plate
- tension tester
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- calibrating installation
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Abstract
The utility model provides a calibrating device of a tension tester. The calibrating device comprises a magnetic standard sample and a clamp used for drawing the standard sample, wherein the clamp is provided two magnetizable clamping boards; the two clamping boards are sucked by two opposite ends of the standard sample respectively. According to the calibrating device of the tensile tester, the clamping boards can be sucked by the standard sample to accurately simulate a tension experiment; glue is not required for pasting, so that the cleaning of the glue is avoided to improve the working efficiency; meanwhile, external factor disturbance can be avoided to improve the accuracy of test data; besides, when calibration is conducted by the calibrating device, tension is applied on the clamping boards, when the tension is greater than the suction force of the standard sample to the clamping boards, the standard sample falls off from the clamping boards, so that experiment data are measured, and the standard sample cannot be damaged, and can be recycled.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of calibrating installation of tension tester.
Background technology
In semiconductor fabrication, need to carry out to semiconductor crystal wafer the measurement of different parameters, to monitor production technology, whether meet standard, whether the semiconductor crystal wafer yield of producing is qualified.For different parameters, measure, need to adopt diverse ways.
Wherein to measure be that chip (Die) is done to tensile failure experiment for a kind of parameter, and whether by observing the metal level (Metal) of Die and the state of peeling off between Metal, to analyze processing procedure (Process) normal.At present, this tests in the industry cycle in the starting stage, and its method of testing, calibrating installation and calibration steps all have to be optimized.In prior art, conventionally adopt tension tester to carry out the tensile failure experiment of Die.Tension tester is as a kind of important testing equipment, be used for to metal and nonmetallic materials stretch, compress, crooked, the machinery that mechanical property test uses such as to shear, peel off afterburning, being widely used in the various physical and mechanical properties tests of material, is the indispensable checkout equipments such as physical property test, teaching research, quality control.Fig. 1 is tension tester of the prior art, and described tension tester 1 has a fixture 11 for the chip 15 to be measured that stretches.As shown in Figure 2, described chip 15 to be measured comprises substrate 151, some metal level 152a, 152b, 152c, 152d and passivation layer 153, and wherein the number of plies of metal level does not limit.Described fixture 11 has two clamping plate 12,13, and described substrate 151 and passivation layer 153 are pasted on two described clamping plate 12,13 by glue respectively.Described tension tester 1 is by applying pulling force to two described clamping plate 12,13, so that described chip 15 is carried out to tensile test.
Because the calibration instrument of tension tester 1 is more valuable, common tension tester 1 is annual entrusts Weights and Measures Bureau to calibrate.In order to guarantee the accuracy of tension tester 1 output pulling force, before being preferably in each experiment, tension tester 1 is calibrated, to guarantee the accuracy of test data.Yet, can not, when doing each experiment, all entrust Weights and Measures Bureau to calibrate tension tester 1.So, conventionally need to calibrate board with the special standard model of preparation, general, select with the chip of described chip 15 same structures to be measured as described standard model.Yet described standard model, in the process of preparation, can run into the accuracy that a lot of disturbing factors can have influence on assay value; In addition, even if described preparation of standard sample is out of question, because pulling experiment is disposable breaking test, after primary calibration experiment, described standard model is just finished have been scrapped, if when tension tester 1 need to be done repetitious test and just can reach the effect of calibration, need to prepare some described standard models, waste time and energy; And described standard model of the prior art need to be pasted on two described clamping plate 12,13, so, the homogeneity that glue 14 is smeared also can affect test data, after tensile test finishes, also need cleaning to stick to the glue 14 on described clamping plate 12,13, inefficiency.
Utility model content
The purpose of this utility model is to provide a kind of calibrating installation of tension tester, can accurately simulate pulling experiment, and can recycle, and raises the efficiency.
To achieve these goals, the utility model proposes a kind of calibrating installation of tension tester, described calibrating installation has standard model and the fixture for the described standard model that stretches of a magnetic, described fixture has two magnetizable clamping plate, described standard model has two opposite ends that mutually deviate from, and two described opposite ends hold respectively two described clamping plate.
Further, described standard model is a variable magnetic force magnet.
Further, described standard model is an electromagnet.
Further, two of described standard model opposite ends are two magnetic poles.
Further, two of described standard model opposite ends are plane.
Further, described clamping plate are bar shaped.
Further, described clamping plate are iron splint.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in;
1, in the calibrating installation of tension tester of the present utility model, described calibrating installation has standard model and the fixture for the described standard model that stretches of a magnetic, described fixture has two magnetizable clamping plate, two opposite ends of described standard model hold respectively two described clamping plate, compared with prior art, the described standard model of magnetic can hold two magnetizable described clamping plate, by described standard model, the suction of described clamping plate is accurately simulated to pulling experiment, do not need glue to paste, avoid clearing up glue, increase work efficiency; Meanwhile, the described standard model of magnetic can be avoided the interference of external factor, improves the accuracy of test data; In addition, when described calibrating installation is calibrated, two described clamping plate are applied to pulling force, when pulling force is greater than described standard model to the suction of described clamping plate, described standard model falls from described clamping plate pop-up, records experimental data, and described standard model can be not destroyed, can recycle, thereby guarantee to do the accuracy that the front tension tester of experiment measures at every turn.
2, in the calibrating installation of tension tester of the present utility model, described standard model is a variable magnetic force magnet, electromagnet for example, can be by regulating the quantity of conductive winding and the electric current of conductive winding of described electromagnet, control the suction of described electromagnet, make described standard model there is different suction to thering are described clamping plate; When needs are tested the chip to be measured of different processing procedures, can be by regulating the electric current of conductive winding so that the power value scope of the power value scope of described standard model and described chip to be measured matches, thus accurately to tension tester measurement calibrate.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of tension tester in prior art;
Fig. 2 is the schematic diagram of the fixture of tension tester in prior art;
Fig. 3 is the schematic diagram of the calibrating installation of tension tester in the utility model one embodiment.
Embodiment
Below in conjunction with schematic diagram, the calibrating installation of tension tester of the present utility model is described in more detail, wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the utility model chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to the restriction of relevant system or relevant business, by an embodiment, change into another embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with reference to accompanying drawing, with way of example, the utility model is more specifically described.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 3, illustrate the calibrating installation that the present embodiment proposes a kind of tension tester, the calibrating installation of described tension tester is for calibrating tension tester.Described calibrating installation has standard model 25 and the fixture 21 for the described standard model 25 that stretches of a magnetic, described fixture 21 has two magnetizable clamping plate 22,23, described standard model 25 has two the opposite end 25a, the 25b that mutually deviate from, and two described opposite end 25a, 25b hold respectively two described clamping plate 22,23.Wherein, the material of described clamping plate 22,23 can be iron, can be also the magnetizable materials such as cobalt, nickel, so long as can be attracted by the magnetic force of the described standard model 25 of magnetic, also within thought range of the present utility model.
Because the described standard model 25 of magnetic can hold two magnetizable described clamping plate 22,23, by the suction of 25 pairs of described clamping plate 22,23 of described standard model, accurately simulate pulling experiment, do not need glue to paste, avoid clearing up glue, increase work efficiency; Meanwhile, the described standard model 25 of magnetic can be avoided the interference of external factor, improves the accuracy of test data; In addition, when described calibrating installation is calibrated, two described clamping plate 22,23 are applied to pulling force, when pulling force is greater than the suction of 25 pairs of described clamping plate 22,23 of described standard model, described standard model 25 falls from described clamping plate 22,23 pop-ups, records experimental data, and described standard model 25 can be not destroyed, can recycle, thereby guarantee to do the accuracy that the front tension tester of experiment measures at every turn.
Preferably, described standard model 25 is a variable magnetic force magnet, can, by regulating the magnetic force of described variable magnetic force magnet, make 25 pairs of described standard models have described clamping plate 22,23 and have different suction.In the present embodiment, described standard model 25 is an electromagnet, and described standard model 25 is comprised of iron core 251 and the conductive winding 252 that is centered around outside described iron core 251.Can control the suction of described electromagnet by regulating the quantity of conductive winding 252 and the electric current of conductive winding 252 of described electromagnet, make 25 pairs of described standard models there are described clamping plate 22,23 and there is different suction; When needs are tested the chip to be measured of different processing procedures, can be by regulating the electric current of conductive winding 252 so that the power value scope of the power value scope of described standard model 25 and described chip to be measured matches, thus accurately to tension tester measurement calibrate.
Preferably, two magnetic poles that two opposite end 25a, 25b of described standard model 25 are magnet, are conducive to improve the magnetic force of described standard model 25, and guarantee the stability of 25 pairs of described clamping plate 22,23 suction of described standard model.In the present embodiment, 25 two opposite end 25a, 25b of described standard model are plane, are conducive to improve the accuracy of test, but two opposite end 25a, 25b are not limited to as plane, can also be for curved surface etc.
In the present embodiment, described clamping plate 22,23 are bar shaped, the described clamping plate 22,23 of bar shaped can well coordinate with described opposite end 25a, the 25b of plane, can guarantee the stability of 25 pairs of described clamping plate 22,23 suction of described standard model, thereby improve the accuracy of test, but described clamping plate 22,23 are not limited to as bar shaped, it can also be the shape such as cylindrical.In addition, the shape of described iron core 251 is not also done concrete restriction, and in the present embodiment, because described clamping plate 22,23 are bar shaped, the shape of described iron core 251 is also bar shaped.
To sum up, a kind of calibrating installation of tension tester is provided to provide in the core concept of the utility model embodiment, described calibrating installation has standard model and the fixture for the described standard model that stretches of a magnetic, described fixture has two magnetizable clamping plate, and two opposite ends of described standard model hold respectively two described clamping plate.Compared with prior art, the beneficial effects of the utility model are mainly reflected in;
1, in the calibrating installation of tension tester of the present utility model, described calibrating installation has standard model and the fixture for the described standard model that stretches of a magnetic, described fixture has two magnetizable clamping plate, two opposite ends of described standard model hold respectively two described clamping plate, compared with prior art, the described standard model of magnetic can hold two magnetizable described clamping plate, by described standard model, the suction of described clamping plate is accurately simulated to pulling experiment, do not need glue to paste, avoid clearing up glue, increase work efficiency; Meanwhile, the described standard model of magnetic can be avoided the interference of external factor, improves the accuracy of test data; In addition, when described calibrating installation is calibrated, two described clamping plate are applied to pulling force, when pulling force is greater than described standard model to the suction of described clamping plate, described standard model falls from described clamping plate pop-up, records experimental data, and described standard model can be not destroyed, can recycle, thereby guarantee to do the accuracy that the front tension tester of experiment measures at every turn.
2, in the calibrating installation of tension tester of the present utility model, described standard model is a variable magnetic force magnet, electromagnet for example, can be by regulating the quantity of conductive winding and the electric current of conductive winding of described electromagnet, control the suction of described electromagnet, make described standard model there is different suction to thering are described clamping plate; When needs are tested the chip to be measured of different processing procedures, can be by regulating the electric current of conductive winding so that the power value scope of the power value scope of described standard model and described chip to be measured matches, thus accurately to tension tester measurement calibrate.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; within not departing from the scope of the technical solution of the utility model; the technical scheme that the utility model is disclosed and technology contents are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not depart from the technical solution of the utility model, within still belonging to protection domain of the present utility model.
Claims (7)
1. the calibrating installation of a tension tester, it is characterized in that, described calibrating installation has standard model and the fixture for the described standard model that stretches of a magnetic, described fixture has two magnetizable clamping plate, described standard model has two opposite ends that mutually deviate from, and two described opposite ends hold respectively two described clamping plate.
2. the calibrating installation of tension tester as claimed in claim 1, is characterized in that, described standard model is a variable magnetic force magnet.
3. the calibrating installation of tension tester as claimed in claim 2, is characterized in that, described standard model is an electromagnet.
4. the calibrating installation of tension tester as claimed in claim 2 or claim 3, is characterized in that, two opposite ends of described standard model are two magnetic poles.
5. the calibrating installation of tension tester as claimed in claim 1, is characterized in that, two opposite ends of described standard model are plane.
6. the calibrating installation of tension tester as claimed in claim 1, is characterized in that, described clamping plate are bar shaped.
7. the calibrating installation of tension tester as claimed in claim 1, is characterized in that, described clamping plate are iron splint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672682.1U CN203534921U (en) | 2013-10-29 | 2013-10-29 | Calibrating device of tension tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672682.1U CN203534921U (en) | 2013-10-29 | 2013-10-29 | Calibrating device of tension tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203534921U true CN203534921U (en) | 2014-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201320672682.1U Expired - Fee Related CN203534921U (en) | 2013-10-29 | 2013-10-29 | Calibrating device of tension tester |
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| CN (1) | CN203534921U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114034540A (en) * | 2021-06-21 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | Chip performance testing method and device |
-
2013
- 2013-10-29 CN CN201320672682.1U patent/CN203534921U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114034540A (en) * | 2021-06-21 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | Chip performance testing method and device |
| CN114034540B (en) * | 2021-06-21 | 2024-05-17 | 重庆康佳光电科技有限公司 | Chip performance testing method and device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140409 Termination date: 20191029 |