CN106872917A - A kind of method and system being distributed in the ferromagnetic resonance line width face for testing magnetic material - Google Patents
A kind of method and system being distributed in the ferromagnetic resonance line width face for testing magnetic material Download PDFInfo
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- CN106872917A CN106872917A CN201710123217.5A CN201710123217A CN106872917A CN 106872917 A CN106872917 A CN 106872917A CN 201710123217 A CN201710123217 A CN 201710123217A CN 106872917 A CN106872917 A CN 106872917A
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- microwave
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- line width
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
Abstract
The invention discloses a kind of method and system tested and be distributed in magnetic material ferromagnetic resonance line width face, it is related to magnetic material parameter testing technical field.The present invention can overcome microwave probe tip in the prior art that the very weak shortcoming of microwave magnetic field is formed in magnetic material is tested, the present invention is by strengthening the microwave magnetic field that the tip of microwave probe is formed in magnetic material, so that vector network analyzer obtains stronger return signal, so the thin magnetic film that can be used in testing thinner ferromagnetic resonance line width;The present invention can further reflect the uniformity of thin magnetic film by the difference of the ferromagnetic resonance line width in each region of analyzing magnetic film sample, have quick, easy advantage compared to traditional optical test method.
Description
Technical field
The present invention relates to magnetic material parameter testing technical field, specially a kind of test magnetic material ferromagnetic resonance line width
The method and system being distributed in face.
Background technology
In recent years, ferromagnetic resonance is developing progressively as research magnetic material macroscopic view is existing as paramagnetic resonance, nuclear magnetic resonance
As a kind of important means with microcosmic mechanism.Magnetic material is in the microwave magnetic field of certain frequency and additional vertical with microwave magnetic field
Under stationary magnetic field, when the frequency that the frequency of microwave magnetic field magnetizes precession with magnetic material under stationary magnetic field is consistent, magnetic material
Material will absorb the energy of maximum from microwave magnetic field, that is, RESONANCE ABSORPTION occurs, and such phenomenon is referred to as ferromagnetic resonance
(Ferromagnetic Resonance, FMR) phenomenon.Ferromagnetic resonance technology can not only provide various static magnetic parameters, such as
Anisotropy, spin-exchange-coupled etc., and, ferromagnetic resonance detection method also have high sensitivity the characteristics of.
At present, the further investigation with people to spintronics, occurs in that many kinds using local ferromagnetic resonance to visit
Survey magnetic material new technology, such as Perzlmaier invention Microfocus X-ray Brillouin scattering spectrum, Neudecker invention when
Between Resolution Scan Ke Er microscopes etc., scientist reflects magnetic material FMR spaces with the real part spatial image of these new technologies
Strong and weak distribution, but these optical detection methods receive the limitation of optical diffraction, that is, receive limitation (0.5 μ of size
m).And the resonance of magnetic material local ferromagnetic is detected by microwave probe and then FMR spatial intensity distributions are studied, because microwave is visited
The characteristics of needle set has detection size only relevant with the radius of probe tip, if the size of i.e. needle point accomplishes sufficiently small, it is possible to
The order of magnitude of nanometer is detected, if however, thin magnetic film sample is excessively thin, it is micro- that the needle point of probe is formed in magnetic material
Ripple magnetic field is very weak, so results in that the return signal for detecting is very weak, and signal to noise ratio is too low, it could even be possible to causing detection less than this
Plant faint signal.
The content of the invention
In view of the deficiencies in the prior art, it is an object of the invention to:A kind of test magnetic material ferromagnetic resonance line width is provided
The method and system being distributed in face.
Technical scheme is as follows:
On the one hand the invention discloses the test system being distributed in a kind of magnetic material ferromagnetic resonance line width face, including:Electricity
Magnet, current source, vector network analyzer, microwave probe, displacement platform and computer;Wherein:Computer and vector network analysis
Instrument is connected carries out data acquisition, and vector network analyzer is connected by radio frequency connector port with microwave probe, and causes microwave
Probe is arranged on displacement platform directly over sample area, and the needle point of microwave probe is connected to be formed by spun gold with microwave probe outer conductor
Terminal short circuit structure, vector network analyzer produces the microwave magnetic field parallel with sample surface, current source Single port and the calculating
Machine connects through programming Control output current, and current source another port is joined to form and the microwave magnetic field phase with electromagnet
Vertical permanent maidenliness magnetic field.
On the other hand the invention discloses a kind of method tested and be distributed in magnetic material ferromagnetic resonance line width face, including with
Lower step:
Step A:Build test platform;
Thin magnetic film sample to be measured is fixed on displacement platform, after being calibrated to vector network analyzer, microwave is visited
Pin is connected to vector network analyzer by radio frequency connector port so that microwave probe is being arranged at magnetic membrane material sample just
Top, the needle point of the microwave probe is connected to form terminal short circuit structure with its outer conductor, by computer respectively with vector network
Analyzer and current source are connected, and current source is connected with electromagnet;
Step B:Sample test;
Thin magnetic film sample to be measured is divided into multiple separate regions, is produced and is treated by vector network analyzer
The parallel microwave magnetic field in thin magnetic film face is surveyed, the output work of microwave magnetic field is selected in vector network analyzer operating dynamic range
Rate, firing current source so that the electromagnet being connected with current source produces the steady magnetostatic field perpendicular with the microwave magnetic field, lead to
Cross programming Control current source and cause that the intensity unique step in the permanent maidenliness magnetic field changes;
By adjusting displacement platform so that microwave probe detects each region of thin magnetic film sample to be measured successively, in thin magnetic film sample
Each region of product collects absorbed power with changes of magnetic field curve respectively, wherein:Ordinate is the microwave magnetic of sample testing area
Field absorbed power, abscissa is steady static magnetic field strength, and the absorbed power is as ferromagnetic with the halfwidth of changes of magnetic field curve
Resonance line width, the ferromagnetic resonance line width in each region of thin magnetic film sample is in the face of magnetic material ferromagnetic resonance line width and is distributed.
Compared to existing technology, the invention has the advantages that:
The present invention detects magnetic material local ferromagnetic resonance line width, energy by the microwave probe using terminal short circuit structure
Enough strengthen microwave magnetic field in magnetic material so that the return signal enhancing that vector network analyzer is detected, and then improve letter
Make an uproar ratio.The present invention can obtain ferromagnetic in sample surface by measuring the ferromagnetic resonance line width of each subregion of thin magnetic film sample successively
The distribution of resonance line width, further, the distribution based on ferromagnetic resonance line width in sample surface can detect magnetic film surface
Uniformity, compared to optical technologies such as uses conventional method X-Ray Diffraction (XRD) to thin magnetic film uniformity
Carrying out detection has simple to operate, fast and accurately advantage.
Brief description of the drawings
Fig. 1 is the structural representation of test system of the present invention;Wherein, 1 is thin magnetic film sample, and 2 is electromagnet, and 3 is electricity
Stream source, 4 is computer, and 5 is vector network analyzer, and 6 is microwave probe, and 601 is outer conductor, and 602 is spun gold, and 7 is displacement platform.
Fig. 2 is the position view and the terminal short circuit structural representation of microwave probe of microwave probe of the present invention and sample;
Fig. 3 is inventive samples and steady magnetostatic field and the position view of microwave magnetic field.
Specific embodiment
Below by way of specific embodiment combination accompanying drawing, the present invention is described in detail, of the invention to be easier to understand
Know-why.
Embodiment:
It is as shown in Figure 1 the system structure diagram being distributed in present invention test magnetic material ferromagnetic resonance line width face, bag
Include:Electromagnet 2, current source 3, computer 4, vector network analysis 5, microwave probe 6 and displacement platform 7;Wherein:Computer 4 and arrow
Amount Network Analyzer 5 is connected and carries out data acquisition, and vector network analyzer 5 passes through radio frequency connector port and the phase of microwave probe 6
Even, and cause that microwave probe 6 is arranged on displacement platform 7 directly over sample area, with reference to Fig. 2 it can be seen that:The needle point of microwave probe 6
It is connected to form terminal short circuit structure with the outer conductor 601 of microwave probe 6 by spun gold 602, vector network analyzer 5 is produced and sample
The parallel microwave magnetic field in product face (magnetic field intensity is expressed as h), the Single port of current source 3 and electromagnet 2 be joined to form with it is described
The perpendicular permanent maidenliness magnetic field (magnetic field intensity is expressed as H) of microwave magnetic field, the another port of current source 2 is connected with the computer 4
By the size of programming Control output current.
Method based on above-mentioned test system present invention also offers being distributed in test magnetic material ferromagnetic resonance line width face,
Specifically include following steps:
Step A:Build test platform;
One output port of thin magnetic film sample 1 to be measured and vector network analysis 5 is fixed on displacement platform 7, then will
Microwave probe 6 is connected to vector network analyzer 5 by SMA interfaces so that microwave probe 6 is being arranged at thin magnetic film sample 1 just
Top, the needle point of the microwave probe 6 is connected to form terminal short circuit structure with its outer conductor 601 by spun gold 602, by computer
4 are connected with vector network analyzer 5 and current source 2 respectively, and current source 3 is connected with electromagnet 2;
Step B:Sample test;
Thin magnetic film sample 1 to be measured is divided into multiple separate regions, the ferromagnetic resonance that the present invention takes is measured
Mode is fixed frequency scanning magnetic field:Vector network analyzer 5 is opened, in frequency range, the power output size of selected calibration
And it is calibrated after number of checkpoints, from the 85052D calibrating devices of Keysight 3.5mm interfaces, respectively through list
After port open, short circuit and broadband load calibration, calibration plane is moved into SMA interfaces, it is ensured that will not be by microwave probe 6 and arrow
Systematic error between amount Network Analyzer 5 caused by mismatch is incorporated into test result;
The microwave magnetic field parallel with thin magnetic film face is produced by vector network analyzer 5, the output of microwave magnetic field is defined
Power is P1, firing current source 3 so that the electromagnet 2 being connected with current source 3 produces the perseverance perpendicular with the microwave magnetic field steady
Magnetostatic field (as shown in Figure 3), CW Time are adjusted to by the scan pattern of vector network analyzer 5, select the output frequency of microwave
F, by the LabVIEW programs arrange parameter in computer 4, unique step changes the output current size of current source 3, due to electromagnetism
Induced magnetic field intensity is directly proportional to input current size in the ferromagnetic coil of iron 2, so that coupled electromagnet 2 etc.
Step-size change puts on the magnitude of field intensity of thin magnetic film sample 1;
Regulation displacement platform 7 causes that microwave probe 6 detects each subregion of thin magnetic film sample 1 successively, in the present system, meter
Calculation machine is mainly used to realize the function of automatic test and programming Control, and the present embodiment computer 4 passes through netting twine and vector network
Analyzer 5 is connected, and test instruction can be sent to vector network analyzer 5, and receive the S of the return of vector network analyzer 5
Parameter testing data are simultaneously stored in computer 4.Each region obtained by gathering vector network analyzer 5 respectively as computer 4
S11Parameter according to following formula, it is necessary to obtain the local absorption to microwave power of thin magnetic film sample, definition microwave magnetic field absorbed power
It is P2, then:
Therefore, being processed through computer 4 can obtain each region of thin magnetic film sample 1 absorbed power in expected magnetic field range
With changes of magnetic field curve (P2- H), according to general knowledge known in this field, the test curve as obtained by each region can be directly obtained respectively
Ferromagnetic resonance line width Δ H (two absolute values of magnetic field intensity difference corresponding to i.e. at the value of absorption maximum power 1/2) in region.It is bent
Ordinate is microwave magnetic field absorbed power P in line chart2, abscissa is steady static magnetic field strength H, and the absorbed power becomes with magnetic field
The halfwidth for changing curve is ferromagnetic resonance line width Δ H, and the ferromagnetic resonance line width Δ H in each region of thin magnetic film sample is magnetic
It is distributed in the face of material ferromagnetic resonance line width.
Additionally, absorbed power of the present invention is with changes of magnetic field curve (P2- H) can also be inhaled by Lorentz function pairs film
Receive power peak to be fitted and then obtain ferromagnetic resonance line width, the Lorentz functions are as follows:
Wherein, xcAt peak value, as Hr;W is the halfwidth of absworption peak, as Δ H.
The present invention can judge to test thin magnetic film sample by the difference between ferromagnetic resonance line width Δ H in each region
Uniformity.In general, it is believed that the difference of ferromagnetic resonance line width Δ H then represents that test magnetic is thin within ± 5% in each region
The uniformity of film is good.
Embodiments of the invention are set forth above in association with accompanying drawing, but the invention is not limited in above-mentioned specific
Implementation method, above-mentioned specific embodiment is only schematical, and rather than restricted, one of ordinary skill in the art exists
Under enlightenment of the invention, in the case of present inventive concept and scope of the claimed protection is not departed from, many shapes can be also made
Formula, these are belonged within protection of the invention.
Claims (2)
1. the test system being distributed in a kind of magnetic material ferromagnetic resonance line width face, it is characterised in that including:Electromagnet, electric current
Source, vector network analyzer, microwave probe, displacement platform and computer;Wherein:Computer is connected with vector network analyzer to be carried out
Data acquisition, vector network analyzer is connected by radio frequency connector port with microwave probe, and causes that microwave probe is arranged on
On displacement platform directly over sample area, the needle point of the microwave probe is connected that to form terminal short by spun gold with microwave probe outer conductor
Line structure, vector network analyzer produces the microwave magnetic field parallel with sample surface, and current source Single port is connected with the computer
By programming Control output current, current source another port is joined to form perpendicular with the microwave magnetic field with electromagnet
Permanent maidenliness magnetic field.
2. it is a kind of to test the method being distributed in magnetic material ferromagnetic resonance line width face, it is characterised in that to comprise the following steps:
Step A:Build test platform;
Thin magnetic film sample to be measured is fixed on displacement platform, after being calibrated to vector network analyzer, microwave probe is led to
Cross radio frequency connector port and be connected to vector network analyzer so that microwave probe is arranged at magnetic membrane material sample and just goes up
Side, the needle point of the microwave probe is connected to form terminal short circuit structure with its outer conductor, and computer is divided with vector network respectively
Analyzer and current source are connected, and current source is connected with electromagnet;
Step B:Sample test;
Thin magnetic film sample to be measured is divided into multiple separate regions, is produced and magnetic to be measured by vector network analyzer
Property the parallel microwave magnetic field of pellicular front, in vector network analyzer operating dynamic range select microwave magnetic field power output,
Firing current source so that the electromagnet being connected with current source produces the steady magnetostatic field perpendicular with the microwave magnetic field, and leads to
Cross programming Control current source and cause that the intensity unique step in the permanent maidenliness magnetic field changes;
It is each in thin magnetic film sample by adjusting displacement platform so that microwave probe detects each region of thin magnetic film sample to be measured successively
Region collects absorbed power with changes of magnetic field curve respectively, wherein:Ordinate is inhaled for the microwave magnetic field of sample testing area
Power is received, abscissa is steady static magnetic field strength, and the absorbed power is ferromagnetic resonance with the halfwidth of changes of magnetic field curve
Line width, the ferromagnetic resonance line width in each region of thin magnetic film sample is in the face of magnetic material ferromagnetic resonance line width and is distributed.
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WO2019143788A1 (en) * | 2018-01-19 | 2019-07-25 | Headway Technologies, Inc. | Ferromagnetic resonance (fmr) electrical testing apparatus for spintronic devices |
CN110426654A (en) * | 2019-03-26 | 2019-11-08 | 北京航空航天大学 | A method of separation magnetic field strength and magnetic field gradient influence high temperature optically pumped magnetometer line width |
CN110687156A (en) * | 2019-10-29 | 2020-01-14 | 华中科技大学 | Variable field nuclear magnetic resonance system and nuclear magnetic resonance signal measuring method |
CN112415447A (en) * | 2020-11-03 | 2021-02-26 | 内蒙古工业大学 | High-frequency magnetic impedance testing device and method |
CN114609562A (en) * | 2022-03-11 | 2022-06-10 | 电子科技大学 | Method for measuring width of ferromagnetic resonance line of yttrium iron garnet material |
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CN109270106B (en) * | 2017-07-18 | 2020-09-22 | 中电海康集团有限公司 | Method for measuring magnetic uniformity of magnetic ultrathin film and application thereof |
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CN110426654A (en) * | 2019-03-26 | 2019-11-08 | 北京航空航天大学 | A method of separation magnetic field strength and magnetic field gradient influence high temperature optically pumped magnetometer line width |
CN110687156A (en) * | 2019-10-29 | 2020-01-14 | 华中科技大学 | Variable field nuclear magnetic resonance system and nuclear magnetic resonance signal measuring method |
CN112415447A (en) * | 2020-11-03 | 2021-02-26 | 内蒙古工业大学 | High-frequency magnetic impedance testing device and method |
CN112415447B (en) * | 2020-11-03 | 2023-08-22 | 内蒙古工业大学 | High-frequency magnetic impedance testing device and method |
CN114609562A (en) * | 2022-03-11 | 2022-06-10 | 电子科技大学 | Method for measuring width of ferromagnetic resonance line of yttrium iron garnet material |
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